Ag Silver PVD - SPUTTERING DEPOSITION - PHYSICAL VAPOR DEPOSITION - SPUTTERING THIN FILMS METALS ALLOYS DIELECTRICS DC RF MAGNETRON SPUTTER DEPOSITION AND REACTIVE SPUTTERING Ag PVD, Silver PVD, Ag SPUTTERING DEPOSITION, Silver SPUTTERING DEPOSITION, Ag PHYSICAL VAPOR DEPOSITION, Silver PHYSICAL VAPOR DEPOSITION, Ag SPUTTERING, Silver SPUTTERING, Ag THIN FILM, Silver THIN FILM,Ag METALS ALLOYS, Silver METALS ALLOYS,Ag RF MAGNETRON, Silver RF MAGNETRON,Ag SPUTTER DEPOSITION, Silver SPUTTER DEPOSITION,Ag REACTIVE SPUTTERING" Silver REACTIVE SPUTTERING Ag Silver PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS MAGNETRON SPUTTER DEPOSITION, DC , RF PVD REACTIVE SPUTTERING Ag Silver PVD - SPUTTERING DEPOSITION - PHYSICAL VAPOR DEPOSITION - SPUTTERING THIN FILMS METALS ALLOYS DIELECTRICS DC RF MAGNETRON SPUTTER DEPOSITION AND REACTIVE SPUTTERING Ag PVD, Silver PVD, Ag SPUTTERING DEPOSITION, Silver SPUTTERING DEPOSITION, Ag PHYSICAL VAPOR DEPOSITION, Silver PHYSICAL VAPOR DEPOSITION, Ag SPUTTERING, Silver SPUTTERING, Ag THIN FILM, Silver THIN FILM,Ag METALS ALLOYS, Silver METALS ALLOYS,Ag RF MAGNETRON, Silver RF MAGNETRON,Ag SPUTTER DEPOSITION, Silver SPUTTER DEPOSITION,Ag REACTIVE SPUTTERING" Silver REACTIVE SPUTTERING Ag Silver PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS MAGNETRON SPUTTER DEPOSITION, DC , RF PVD REACTIVE SPUTTERING HTE Labs logo Ag - Silver PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS Ag - Silver MAGNETRON SPUTTER DEPOSITION, DC , RF Ag - Silver PVD REACTIVE SPUTTERING HTE Labs PROPERTIES / FEATURES APPLICATIONS Chemical composition: Ag Purity (%): 99.99 ">Density: ">Electrical conductivity: ">Thermal conductivity: ">Melting point: ">Refractive index: ">Dielectric constant: Deposition rate (@12.5W/in2): 114nm/min Sputtering yield (@600eV): 3.4 Semiconductor integrated circuit (IC) manufacturing Antireflection coatings in optoelectronic devices Hard masks for chemical etching or plasma etching Inter-metal dielectric (IMD) stacks Multilayers interconnections, Dual Damascene, ILD [inter-layer dielectrics planarization] STI [formation of shallow trench isolation (STI) structures] processes SHORT PROCESS DESCRIPTION WAFER FOUNDRY - R&D SEMICONDUCTOR PROCESS DEVELOPMENT HTE LABS is helping customers to solve R&D problems, capacity problems, lower cost as well as develop a back-up process for existing in-house operations. Any company currently involved or contemplating R&D related to semiconductor devices or thin film technologies, is encourraged to consider using HTE LABS expertise and capabilities. To contact HTE LABS and discuss an application in the strictest confidentiality, navigate to CONTACT PAGE. PROCESS ORDERING INFORMATION WAFER TYPE WAFER SIZE [mm] BATCH SIZE [wafers] TEMPERATURE [°C] THICKNESS [nm] GENERATE PROCESS NAME TIME [hours] Process parametter TIME is calculated using a deposition rate of 114nm/min as the worst case scenario. Actual deposition rate may vary. HTE Labs whenever feasible is tailoring each process to customer specification such that the end refractive index, thickness and film uniformity are within specified tolerance. STANDARD PROCESS PRICE LIST # PROCESS CODE [datasheet] WAFER TYPE SIZE [mm] BATCH [wafers] TEMP. [°C] THICKNESS [nm] TIME [h] MIN. ORDER [wafers] U/P [$] ORDER/RFQ 1 [SI][W25][PVD][AG][1000NM] Si 25 24 280 1000 0.146 24 13.261 ORDER 2 [SI][W25][PVD][AG][1500NM] Si 25 24 280 1500 0.219 24 13.642 ORDER 3 [SI][W25][PVD][AG][2000NM] Si 25 24 280 2000 0.292 24 14.023 ORDER 4 [SI][W25][PVD][AG][2500NM] Si 25 24 280 2500 0.365 24 14.404 ORDER 5 [SI][W25][PVD][AG][3000NM] Si 25 24 280 3000 0.439 24 14.784 ORDER 6 [SI][W25][PVD][AG][3500NM] Si 25 24 280 3500 0.512 24 15.165 ORDER 7 [SI][W25][PVD][AG][4000NM] Si 25 24 280 4000 0.585 24 15.546 ORDER 8 [SI][W25][PVD][AG][4500NM] Si 25 24 280 4500 0.658 24 15.927 ORDER 9 [SI][W25][PVD][AG][5000NM] Si 25 24 280 5000 0.731 24 16.307 ORDER 10 [SI][W25][PVD][AG][5500NM] Si 25 24 280 5500 0.804 24 16.688 ORDER 11 [SI][W25][PVD][AG][6000NM] Si 25 24 280 6000 0.877 24 17.069 ORDER 12 [SI][W25][PVD][AG][6500NM] Si 25 24 280 6500 0.950 24 17.449 ORDER 13 [SI][W25][PVD][AG][7000NM] Si 25 24 280 7000 1.023 24 17.830 ORDER 14 [SI][W25][PVD][AG][7500NM] Si 25 24 280 7500 1.096 24 18.211 ORDER 15 [SI][W25][PVD][AG][8000NM] Si 25 24 280 8000 1.170 24 18.592 ORDER 16 [SI][W25][PVD][AG][8500NM] Si 25 24 280 8500 1.243 24 18.972 ORDER 17 [SI][W25][PVD][AG][9000NM] Si 25 24 280 9000 1.316 24 19.353 ORDER 18 [SI][W25][PVD][AG][9500NM] Si 25 24 280 9500 1.389 24 19.734 ORDER 19 [SI][W25][PVD][AG][10000NM] Si 25 24 280 10000 1.462 24 20.115 ORDER 20 [SI][W50][PVD][AG][1000NM] Si 50 12 280 1000 0.146 12 26.523 ORDER 21 [SI][W50][PVD][AG][1500NM] Si 50 12 280 1500 0.219 12 27.284 ORDER 22 [SI][W50][PVD][AG][2000NM] Si 50 12 280 2000 0.292 12 28.046 ORDER 23 [SI][W50][PVD][AG][2500NM] Si 50 12 280 2500 0.365 12 28.807 ORDER 24 [SI][W50][PVD][AG][3000NM] Si 50 12 280 3000 0.439 12 29.569 ORDER 25 [SI][W50][PVD][AG][3500NM] Si 50 12 280 3500 0.512 12 30.330 ORDER 26 [SI][W50][PVD][AG][4000NM] Si 50 12 280 4000 0.585 12 31.092 ORDER 27 [SI][W50][PVD][AG][4500NM] Si 50 12 280 4500 0.658 12 31.853 ORDER 28 [SI][W50][PVD][AG][5000NM] Si 50 12 280 5000 0.731 12 32.615 ORDER 29 [SI][W50][PVD][AG][5500NM] Si 50 12 280 5500 0.804 12 33.376 ORDER 30 [SI][W50][PVD][AG][6000NM] Si 50 12 280 6000 0.877 12 34.137 ORDER 31 [SI][W50][PVD][AG][6500NM] Si 50 12 280 6500 0.950 12 34.899 ORDER 32 [SI][W50][PVD][AG][7000NM] Si 50 12 280 7000 1.023 12 35.660 ORDER 33 [SI][W50][PVD][AG][7500NM] Si 50 12 280 7500 1.096 12 36.422 ORDER 34 [SI][W50][PVD][AG][8000NM] Si 50 12 280 8000 1.170 12 37.183 ORDER 35 [SI][W50][PVD][AG][8500NM] Si 50 12 280 8500 1.243 12 37.945 ORDER 36 [SI][W50][PVD][AG][9000NM] Si 50 12 280 9000 1.316 12 38.706 ORDER 37 [SI][W50][PVD][AG][9500NM] Si 50 12 280 9500 1.389 12 39.468 ORDER 38 [SI][W50][PVD][AG][10000NM] Si 50 12 280 10000 1.462 12 40.229 ORDER 39 [SI][W75][PVD][AG][1000NM] Si 75 10 280 1000 0.146 10 31.827 ORDER 40 [SI][W75][PVD][AG][1500NM] Si 75 10 280 1500 0.219 10 32.741 ORDER 41 [SI][W75][PVD][AG][2000NM] Si 75 10 280 2000 0.292 10 33.655 ORDER 42 [SI][W75][PVD][AG][2500NM] Si 75 10 280 2500 0.365 10 34.569 ORDER 43 [SI][W75][PVD][AG][3000NM] Si 75 10 280 3000 0.439 10 35.482 ORDER 44 [SI][W75][PVD][AG][3500NM] Si 75 10 280 3500 0.512 10 36.396 ORDER 45 [SI][W75][PVD][AG][4000NM] Si 75 10 280 4000 0.585 10 37.310 ORDER 46 [SI][W75][PVD][AG][4500NM] Si 75 10 280 4500 0.658 10 38.224 ORDER 47 [SI][W75][PVD][AG][5000NM] Si 75 10 280 5000 0.731 10 39.137 ORDER 48 [SI][W75][PVD][AG][5500NM] Si 75 10 280 5500 0.804 10 40.051 ORDER 49 [SI][W75][PVD][AG][6000NM] Si 75 10 280 6000 0.877 10 40.965 ORDER 50 [SI][W75][PVD][AG][6500NM] Si 75 10 280 6500 0.950 10 41.879 ORDER 51 [SI][W75][PVD][AG][7000NM] Si 75 10 280 7000 1.023 10 42.792 ORDER 52 [SI][W75][PVD][AG][7500NM] Si 75 10 280 7500 1.096 10 43.706 ORDER 53 [SI][W75][PVD][AG][8000NM] Si 75 10 280 8000 1.170 10 44.620 ORDER 54 [SI][W75][PVD][AG][8500NM] Si 75 10 280 8500 1.243 10 45.534 ORDER 55 [SI][W75][PVD][AG][9000NM] Si 75 10 280 9000 1.316 10 46.447 ORDER 56 [SI][W75][PVD][AG][9500NM] Si 75 10 280 9500 1.389 10 47.361 ORDER 57 [SI][W75][PVD][AG][10000NM] Si 75 10 280 10000 1.462 10 48.275 ORDER 58 [SI][W100][PVD][AG][1000NM] Si 100 8 280 1000 0.146 8 39.784 ORDER 59 [SI][W100][PVD][AG][1500NM] Si 100 8 280 1500 0.219 8 40.927 ORDER 60 [SI][W100][PVD][AG][2000NM] Si 100 8 280 2000 0.292 8 42.069 ORDER 61 [SI][W100][PVD][AG][2500NM] Si 100 8 280 2500 0.365 8 43.211 ORDER 62 [SI][W100][PVD][AG][3000NM] Si 100 8 280 3000 0.439 8 44.353 ORDER 63 [SI][W100][PVD][AG][3500NM] Si 100 8 280 3500 0.512 8 45.495 ORDER 64 [SI][W100][PVD][AG][4000NM] Si 100 8 280 4000 0.585 8 46.637 ORDER 65 [SI][W100][PVD][AG][4500NM] Si 100 8 280 4500 0.658 8 47.780 ORDER 66 [SI][W100][PVD][AG][5000NM] Si 100 8 280 5000 0.731 8 48.922 ORDER 67 [SI][W100][PVD][AG][5500NM] Si 100 8 280 5500 0.804 8 50.064 ORDER 68 [SI][W100][PVD][AG][6000NM] Si 100 8 280 6000 0.877 8 51.206 ORDER 69 [SI][W100][PVD][AG][6500NM] Si 100 8 280 6500 0.950 8 52.348 ORDER 70 [SI][W100][PVD][AG][7000NM] Si 100 8 280 7000 1.023 8 53.490 ORDER 71 [SI][W100][PVD][AG][7500NM] Si 100 8 280 7500 1.096 8 54.633 ORDER 72 [SI][W100][PVD][AG][8000NM] Si 100 8 280 8000 1.170 8 55.775 ORDER 73 [SI][W100][PVD][AG][8500NM] Si 100 8 280 8500 1.243 8 56.917 ORDER 74 [SI][W100][PVD][AG][9000NM] Si 100 8 280 9000 1.316 8 58.059 ORDER 75 [SI][W100][PVD][AG][9500NM] Si 100 8 280 9500 1.389 8 59.201 ORDER 76 [SI][W100][PVD][AG][10000NM] Si 100 8 280 10000 1.462 8 60.344 ORDER 77 [SI][W125][PVD][AG][1000NM] Si 125 7 280 1000 0.146 7 45.468 ORDER 78 [SI][W125][PVD][AG][1500NM] Si 125 7 280 1500 0.219 7 46.773 ORDER 79 [SI][W125][PVD][AG][2000NM] Si 125 7 280 2000 0.292 7 48.079 ORDER 80 [SI][W125][PVD][AG][2500NM] Si 125 7 280 2500 0.365 7 49.384 ORDER 81 [SI][W125][PVD][AG][3000NM] Si 125 7 280 3000 0.439 7 50.689 ORDER 82 [SI][W125][PVD][AG][3500NM] Si 125 7 280 3500 0.512 7 51.995 ORDER 83 [SI][W125][PVD][AG][4000NM] Si 125 7 280 4000 0.585 7 53.300 ORDER 84 [SI][W125][PVD][AG][4500NM] Si 125 7 280 4500 0.658 7 54.605 ORDER 85 [SI][W125][PVD][AG][5000NM] Si 125 7 280 5000 0.731 7 55.911 ORDER 86 [SI][W125][PVD][AG][5500NM] Si 125 7 280 5500 0.804 7 57.216 ORDER 87 [SI][W125][PVD][AG][6000NM] Si 125 7 280 6000 0.877 7 58.521 ORDER 88 [SI][W125][PVD][AG][6500NM] Si 125 7 280 6500 0.950 7 59.827 ORDER 89 [SI][W125][PVD][AG][7000NM] Si 125 7 280 7000 1.023 7 61.132 ORDER 90 [SI][W125][PVD][AG][7500NM] Si 125 7 280 7500 1.096 7 62.437 ORDER 91 [SI][W125][PVD][AG][8000NM] Si 125 7 280 8000 1.170 7 63.743 ORDER 92 [SI][W125][PVD][AG][8500NM] Si 125 7 280 8500 1.243 7 65.048 ORDER 93 [SI][W125][PVD][AG][9000NM] Si 125 7 280 9000 1.316 7 66.353 ORDER 94 [SI][W125][PVD][AG][9500NM] Si 125 7 280 9500 1.389 7 67.659 ORDER 95 [SI][W125][PVD][AG][10000NM] Si 125 7 280 10000 1.462 7 68.964 ORDER 96 [SI][W150][PVD][AG][1000NM] Si 150 6 280 1000 0.146 6 53.046 ORDER 97 [SI][W150][PVD][AG][1500NM] Si 150 6 280 1500 0.219 6 54.569 ORDER 98 [SI][W150][PVD][AG][2000NM] Si 150 6 280 2000 0.292 6 56.092 ORDER 99 [SI][W150][PVD][AG][2500NM] Si 150 6 280 2500 0.365 6 57.615 ORDER 100 [SI][W150][PVD][AG][3000NM] Si 150 6 280 3000 0.439 6 59.137 ORDER 101 [SI][W150][PVD][AG][3500NM] Si 150 6 280 3500 0.512 6 60.660 ORDER 102 [SI][W150][PVD][AG][4000NM] Si 150 6 280 4000 0.585 6 62.183 ORDER 103 [SI][W150][PVD][AG][4500NM] Si 150 6 280 4500 0.658 6 63.706 ORDER 104 [SI][W150][PVD][AG][5000NM] Si 150 6 280 5000 0.731 6 65.229 ORDER 105 [SI][W150][PVD][AG][5500NM] Si 150 6 280 5500 0.804 6 66.752 ORDER 106 [SI][W150][PVD][AG][6000NM] Si 150 6 280 6000 0.877 6 68.275 ORDER 107 [SI][W150][PVD][AG][6500NM] Si 150 6 280 6500 0.950 6 69.798 ORDER 108 [SI][W150][PVD][AG][7000NM] Si 150 6 280 7000 1.023 6 71.321 ORDER 109 [SI][W150][PVD][AG][7500NM] Si 150 6 280 7500 1.096 6 72.844 ORDER 110 [SI][W150][PVD][AG][8000NM] Si 150 6 280 8000 1.170 6 74.366 ORDER 111 [SI][W150][PVD][AG][8500NM] Si 150 6 280 8500 1.243 6 75.889 ORDER 112 [SI][W150][PVD][AG][9000NM] Si 150 6 280 9000 1.316 6 77.412 ORDER 113 [SI][W150][PVD][AG][9500NM] Si 150 6 280 9500 1.389 6 78.935 ORDER 114 [SI][W150][PVD][AG][10000NM] Si 150 6 280 10000 1.462 6 80.458 ORDER 115 [SI][W200][PVD][AG][1000NM] Si 200 3 280 1000 0.146 3 106.092 ORDER 116 [SI][W200][PVD][AG][1500NM] Si 200 3 280 1500 0.219 3 109.137 ORDER 117 [SI][W200][PVD][AG][2000NM] Si 200 3 280 2000 0.292 3 112.183 ORDER 118 [SI][W200][PVD][AG][2500NM] Si 200 3 280 2500 0.365 3 115.229 ORDER 119 [SI][W200][PVD][AG][3000NM] Si 200 3 280 3000 0.439 3 118.275 ORDER 120 [SI][W200][PVD][AG][3500NM] Si 200 3 280 3500 0.512 3 121.321 ORDER 121 [SI][W200][PVD][AG][4000NM] Si 200 3 280 4000 0.585 3 124.366 ORDER 122 [SI][W200][PVD][AG][4500NM] Si 200 3 280 4500 0.658 3 127.412 ORDER 123 [SI][W200][PVD][AG][5000NM] Si 200 3 280 5000 0.731 3 130.458 ORDER 124 [SI][W200][PVD][AG][5500NM] Si 200 3 280 5500 0.804 3 133.504 ORDER 125 [SI][W200][PVD][AG][6000NM] Si 200 3 280 6000 0.877 3 136.550 ORDER 126 [SI][W200][PVD][AG][6500NM] Si 200 3 280 6500 0.950 3 139.596 ORDER 127 [SI][W200][PVD][AG][7000NM] Si 200 3 280 7000 1.023 3 142.641 ORDER 128 [SI][W200][PVD][AG][7500NM] Si 200 3 280 7500 1.096 3 145.687 ORDER 129 [SI][W200][PVD][AG][8000NM] Si 200 3 280 8000 1.170 3 148.733 ORDER 130 [SI][W200][PVD][AG][8500NM] Si 200 3 280 8500 1.243 3 151.779 ORDER 131 [SI][W200][PVD][AG][9000NM] Si 200 3 280 9000 1.316 3 154.825 ORDER 132 [SI][W200][PVD][AG][9500NM] Si 200 3 280 9500 1.389 3 157.870 ORDER 133 [SI][W200][PVD][AG][10000NM] Si 200 3 280 10000 1.462 3 160.916 ORDER 134 [SI][W300][PVD][AG][1000NM] Si 300 280 1000 0.146 RFQ 135 [SI][W300][PVD][AG][1500NM] Si 300 280 1500 0.219 RFQ 136 [SI][W300][PVD][AG][2000NM] Si 300 280 2000 0.292 RFQ 137 [SI][W300][PVD][AG][2500NM] Si 300 280 2500 0.365 RFQ 138 [SI][W300][PVD][AG][3000NM] Si 300 280 3000 0.439 RFQ 139 [SI][W300][PVD][AG][3500NM] Si 300 280 3500 0.512 RFQ 140 [SI][W300][PVD][AG][4000NM] Si 300 280 4000 0.585 RFQ 141 [SI][W300][PVD][AG][4500NM] Si 300 280 4500 0.658 RFQ 142 [SI][W300][PVD][AG][5000NM] Si 300 280 5000 0.731 RFQ 143 [SI][W300][PVD][AG][5500NM] Si 300 280 5500 0.804 RFQ 144 [SI][W300][PVD][AG][6000NM] Si 300 280 6000 0.877 RFQ 145 [SI][W300][PVD][AG][6500NM] Si 300 280 6500 0.950 RFQ 146 [SI][W300][PVD][AG][7000NM] Si 300 280 7000 1.023 RFQ 147 [SI][W300][PVD][AG][7500NM] Si 300 280 7500 1.096 RFQ 148 [SI][W300][PVD][AG][8000NM] Si 300 280 8000 1.170 RFQ 149 [SI][W300][PVD][AG][8500NM] Si 300 280 8500 1.243 RFQ 150 [SI][W300][PVD][AG][9000NM] Si 300 280 9000 1.316 RFQ 151 [SI][W300][PVD][AG][9500NM] Si 300 280 9500 1.389 RFQ 152 [SI][W300][PVD][AG][10000NM] Si 300 280 10000 1.462 RFQ 153 [SI][Wnnn][PVD][AG][1000NM] Si nnn 280 1000 0.146 RFQ 154 [SI][Wnnn][PVD][AG][1500NM] Si nnn 280 1500 0.219 RFQ 155 [SI][Wnnn][PVD][AG][2000NM] Si nnn 280 2000 0.292 RFQ 156 [SI][Wnnn][PVD][AG][2500NM] Si nnn 280 2500 0.365 RFQ 157 [SI][Wnnn][PVD][AG][3000NM] Si nnn 280 3000 0.439 RFQ 158 [SI][Wnnn][PVD][AG][3500NM] Si nnn 280 3500 0.512 RFQ 159 [SI][Wnnn][PVD][AG][4000NM] Si nnn 280 4000 0.585 RFQ 160 [SI][Wnnn][PVD][AG][4500NM] Si nnn 280 4500 0.658 RFQ 161 [SI][Wnnn][PVD][AG][5000NM] Si nnn 280 5000 0.731 RFQ 162 [SI][Wnnn][PVD][AG][5500NM] Si nnn 280 5500 0.804 RFQ 163 [SI][Wnnn][PVD][AG][6000NM] Si nnn 280 6000 0.877 RFQ 164 [SI][Wnnn][PVD][AG][6500NM] Si nnn 280 6500 0.950 RFQ 165 [SI][Wnnn][PVD][AG][7000NM] Si nnn 280 7000 1.023 RFQ 166 [SI][Wnnn][PVD][AG][7500NM] Si nnn 280 7500 1.096 RFQ 167 [SI][Wnnn][PVD][AG][8000NM] Si nnn 280 8000 1.170 RFQ 168 [SI][Wnnn][PVD][AG][8500NM] Si nnn 280 8500 1.243 RFQ 169 [SI][Wnnn][PVD][AG][9000NM] Si nnn 280 9000 1.316 RFQ 170 [SI][Wnnn][PVD][AG][9500NM] Si nnn 280 9500 1.389 RFQ 171 [SI][Wnnn][PVD][AG][10000NM] Si nnn 280 10000 1.462 RFQ 172 [SIC][W25][PVD][AG][1000NM] SiC 25 24 280 1000 0.146 24 13.261 ORDER 173 [SIC][W25][PVD][AG][1500NM] SiC 25 24 280 1500 0.219 24 13.642 ORDER 174 [SIC][W25][PVD][AG][2000NM] SiC 25 24 280 2000 0.292 24 14.023 ORDER 175 [SIC][W25][PVD][AG][2500NM] SiC 25 24 280 2500 0.365 24 14.404 ORDER 176 [SIC][W25][PVD][AG][3000NM] SiC 25 24 280 3000 0.439 24 14.784 ORDER 177 [SIC][W25][PVD][AG][3500NM] SiC 25 24 280 3500 0.512 24 15.165 ORDER 178 [SIC][W25][PVD][AG][4000NM] SiC 25 24 280 4000 0.585 24 15.546 ORDER 179 [SIC][W25][PVD][AG][4500NM] SiC 25 24 280 4500 0.658 24 15.927 ORDER 180 [SIC][W25][PVD][AG][5000NM] SiC 25 24 280 5000 0.731 24 16.307 ORDER 181 [SIC][W25][PVD][AG][5500NM] SiC 25 24 280 5500 0.804 24 16.688 ORDER 182 [SIC][W25][PVD][AG][6000NM] SiC 25 24 280 6000 0.877 24 17.069 ORDER 183 [SIC][W25][PVD][AG][6500NM] SiC 25 24 280 6500 0.950 24 17.449 ORDER 184 [SIC][W25][PVD][AG][7000NM] SiC 25 24 280 7000 1.023 24 17.830 ORDER 185 [SIC][W25][PVD][AG][7500NM] SiC 25 24 280 7500 1.096 24 18.211 ORDER 186 [SIC][W25][PVD][AG][8000NM] SiC 25 24 280 8000 1.170 24 18.592 ORDER 187 [SIC][W25][PVD][AG][8500NM] SiC 25 24 280 8500 1.243 24 18.972 ORDER 188 [SIC][W25][PVD][AG][9000NM] SiC 25 24 280 9000 1.316 24 19.353 ORDER 189 [SIC][W25][PVD][AG][9500NM] SiC 25 24 280 9500 1.389 24 19.734 ORDER 190 [SIC][W25][PVD][AG][10000NM] SiC 25 24 280 10000 1.462 24 20.115 ORDER 191 [SIC][W50][PVD][AG][1000NM] SiC 50 12 280 1000 0.146 12 26.523 ORDER 192 [SIC][W50][PVD][AG][1500NM] SiC 50 12 280 1500 0.219 12 27.284 ORDER 193 [SIC][W50][PVD][AG][2000NM] SiC 50 12 280 2000 0.292 12 28.046 ORDER 194 [SIC][W50][PVD][AG][2500NM] SiC 50 12 280 2500 0.365 12 28.807 ORDER 195 [SIC][W50][PVD][AG][3000NM] SiC 50 12 280 3000 0.439 12 29.569 ORDER 196 [SIC][W50][PVD][AG][3500NM] SiC 50 12 280 3500 0.512 12 30.330 ORDER 197 [SIC][W50][PVD][AG][4000NM] SiC 50 12 280 4000 0.585 12 31.092 ORDER 198 [SIC][W50][PVD][AG][4500NM] SiC 50 12 280 4500 0.658 12 31.853 ORDER 199 [SIC][W50][PVD][AG][5000NM] SiC 50 12 280 5000 0.731 12 32.615 ORDER 200 [SIC][W50][PVD][AG][5500NM] SiC 50 12 280 5500 0.804 12 33.376 ORDER 201 [SIC][W50][PVD][AG][6000NM] SiC 50 12 280 6000 0.877 12 34.137 ORDER 202 [SIC][W50][PVD][AG][6500NM] SiC 50 12 280 6500 0.950 12 34.899 ORDER 203 [SIC][W50][PVD][AG][7000NM] SiC 50 12 280 7000 1.023 12 35.660 ORDER 204 [SIC][W50][PVD][AG][7500NM] SiC 50 12 280 7500 1.096 12 36.422 ORDER 205 [SIC][W50][PVD][AG][8000NM] SiC 50 12 280 8000 1.170 12 37.183 ORDER 206 [SIC][W50][PVD][AG][8500NM] SiC 50 12 280 8500 1.243 12 37.945 ORDER 207 [SIC][W50][PVD][AG][9000NM] SiC 50 12 280 9000 1.316 12 38.706 ORDER 208 [SIC][W50][PVD][AG][9500NM] SiC 50 12 280 9500 1.389 12 39.468 ORDER 209 [SIC][W50][PVD][AG][10000NM] SiC 50 12 280 10000 1.462 12 40.229 ORDER 210 [SIC][W75][PVD][AG][1000NM] SiC 75 10 280 1000 0.146 10 31.827 ORDER 211 [SIC][W75][PVD][AG][1500NM] SiC 75 10 280 1500 0.219 10 32.741 ORDER 212 [SIC][W75][PVD][AG][2000NM] SiC 75 10 280 2000 0.292 10 33.655 ORDER 213 [SIC][W75][PVD][AG][2500NM] SiC 75 10 280 2500 0.365 10 34.569 ORDER 214 [SIC][W75][PVD][AG][3000NM] SiC 75 10 280 3000 0.439 10 35.482 ORDER 215 [SIC][W75][PVD][AG][3500NM] SiC 75 10 280 3500 0.512 10 36.396 ORDER 216 [SIC][W75][PVD][AG][4000NM] SiC 75 10 280 4000 0.585 10 37.310 ORDER 217 [SIC][W75][PVD][AG][4500NM] SiC 75 10 280 4500 0.658 10 38.224 ORDER 218 [SIC][W75][PVD][AG][5000NM] SiC 75 10 280 5000 0.731 10 39.137 ORDER 219 [SIC][W75][PVD][AG][5500NM] SiC 75 10 280 5500 0.804 10 40.051 ORDER 220 [SIC][W75][PVD][AG][6000NM] SiC 75 10 280 6000 0.877 10 40.965 ORDER 221 [SIC][W75][PVD][AG][6500NM] SiC 75 10 280 6500 0.950 10 41.879 ORDER 222 [SIC][W75][PVD][AG][7000NM] SiC 75 10 280 7000 1.023 10 42.792 ORDER 223 [SIC][W75][PVD][AG][7500NM] SiC 75 10 280 7500 1.096 10 43.706 ORDER 224 [SIC][W75][PVD][AG][8000NM] SiC 75 10 280 8000 1.170 10 44.620 ORDER 225 [SIC][W75][PVD][AG][8500NM] SiC 75 10 280 8500 1.243 10 45.534 ORDER 226 [SIC][W75][PVD][AG][9000NM] SiC 75 10 280 9000 1.316 10 46.447 ORDER 227 [SIC][W75][PVD][AG][9500NM] SiC 75 10 280 9500 1.389 10 47.361 ORDER 228 [SIC][W75][PVD][AG][10000NM] SiC 75 10 280 10000 1.462 10 48.275 ORDER 229 [SIC][W100][PVD][AG][1000NM] SiC 100 8 280 1000 0.146 8 39.784 ORDER 230 [SIC][W100][PVD][AG][1500NM] SiC 100 8 280 1500 0.219 8 40.927 ORDER 231 [SIC][W100][PVD][AG][2000NM] SiC 100 8 280 2000 0.292 8 42.069 ORDER 232 [SIC][W100][PVD][AG][2500NM] SiC 100 8 280 2500 0.365 8 43.211 ORDER 233 [SIC][W100][PVD][AG][3000NM] SiC 100 8 280 3000 0.439 8 44.353 ORDER 234 [SIC][W100][PVD][AG][3500NM] SiC 100 8 280 3500 0.512 8 45.495 ORDER 235 [SIC][W100][PVD][AG][4000NM] SiC 100 8 280 4000 0.585 8 46.637 ORDER 236 [SIC][W100][PVD][AG][4500NM] SiC 100 8 280 4500 0.658 8 47.780 ORDER 237 [SIC][W100][PVD][AG][5000NM] SiC 100 8 280 5000 0.731 8 48.922 ORDER 238 [SIC][W100][PVD][AG][5500NM] SiC 100 8 280 5500 0.804 8 50.064 ORDER 239 [SIC][W100][PVD][AG][6000NM] SiC 100 8 280 6000 0.877 8 51.206 ORDER 240 [SIC][W100][PVD][AG][6500NM] SiC 100 8 280 6500 0.950 8 52.348 ORDER 241 [SIC][W100][PVD][AG][7000NM] SiC 100 8 280 7000 1.023 8 53.490 ORDER 242 [SIC][W100][PVD][AG][7500NM] SiC 100 8 280 7500 1.096 8 54.633 ORDER 243 [SIC][W100][PVD][AG][8000NM] SiC 100 8 280 8000 1.170 8 55.775 ORDER 244 [SIC][W100][PVD][AG][8500NM] SiC 100 8 280 8500 1.243 8 56.917 ORDER 245 [SIC][W100][PVD][AG][9000NM] SiC 100 8 280 9000 1.316 8 58.059 ORDER 246 [SIC][W100][PVD][AG][9500NM] SiC 100 8 280 9500 1.389 8 59.201 ORDER 247 [SIC][W100][PVD][AG][10000NM] SiC 100 8 280 10000 1.462 8 60.344 ORDER 248 [SIC][W125][PVD][AG][1000NM] SiC 125 7 280 1000 0.146 7 45.468 ORDER 249 [SIC][W125][PVD][AG][1500NM] SiC 125 7 280 1500 0.219 7 46.773 ORDER 250 [SIC][W125][PVD][AG][2000NM] SiC 125 7 280 2000 0.292 7 48.079 ORDER 251 [SIC][W125][PVD][AG][2500NM] SiC 125 7 280 2500 0.365 7 49.384 ORDER 252 [SIC][W125][PVD][AG][3000NM] SiC 125 7 280 3000 0.439 7 50.689 ORDER 253 [SIC][W125][PVD][AG][3500NM] SiC 125 7 280 3500 0.512 7 51.995 ORDER 254 [SIC][W125][PVD][AG][4000NM] SiC 125 7 280 4000 0.585 7 53.300 ORDER 255 [SIC][W125][PVD][AG][4500NM] SiC 125 7 280 4500 0.658 7 54.605 ORDER 256 [SIC][W125][PVD][AG][5000NM] SiC 125 7 280 5000 0.731 7 55.911 ORDER 257 [SIC][W125][PVD][AG][5500NM] SiC 125 7 280 5500 0.804 7 57.216 ORDER 258 [SIC][W125][PVD][AG][6000NM] SiC 125 7 280 6000 0.877 7 58.521 ORDER 259 [SIC][W125][PVD][AG][6500NM] SiC 125 7 280 6500 0.950 7 59.827 ORDER 260 [SIC][W125][PVD][AG][7000NM] SiC 125 7 280 7000 1.023 7 61.132 ORDER 261 [SIC][W125][PVD][AG][7500NM] SiC 125 7 280 7500 1.096 7 62.437 ORDER 262 [SIC][W125][PVD][AG][8000NM] SiC 125 7 280 8000 1.170 7 63.743 ORDER 263 [SIC][W125][PVD][AG][8500NM] SiC 125 7 280 8500 1.243 7 65.048 ORDER 264 [SIC][W125][PVD][AG][9000NM] SiC 125 7 280 9000 1.316 7 66.353 ORDER 265 [SIC][W125][PVD][AG][9500NM] SiC 125 7 280 9500 1.389 7 67.659 ORDER 266 [SIC][W125][PVD][AG][10000NM] SiC 125 7 280 10000 1.462 7 68.964 ORDER 267 [SIC][W150][PVD][AG][1000NM] SiC 150 6 280 1000 0.146 6 53.046 ORDER 268 [SIC][W150][PVD][AG][1500NM] SiC 150 6 280 1500 0.219 6 54.569 ORDER 269 [SIC][W150][PVD][AG][2000NM] SiC 150 6 280 2000 0.292 6 56.092 ORDER 270 [SIC][W150][PVD][AG][2500NM] SiC 150 6 280 2500 0.365 6 57.615 ORDER 271 [SIC][W150][PVD][AG][3000NM] SiC 150 6 280 3000 0.439 6 59.137 ORDER 272 [SIC][W150][PVD][AG][3500NM] SiC 150 6 280 3500 0.512 6 60.660 ORDER 273 [SIC][W150][PVD][AG][4000NM] SiC 150 6 280 4000 0.585 6 62.183 ORDER 274 [SIC][W150][PVD][AG][4500NM] SiC 150 6 280 4500 0.658 6 63.706 ORDER 275 [SIC][W150][PVD][AG][5000NM] SiC 150 6 280 5000 0.731 6 65.229 ORDER 276 [SIC][W150][PVD][AG][5500NM] SiC 150 6 280 5500 0.804 6 66.752 ORDER 277 [SIC][W150][PVD][AG][6000NM] SiC 150 6 280 6000 0.877 6 68.275 ORDER 278 [SIC][W150][PVD][AG][6500NM] SiC 150 6 280 6500 0.950 6 69.798 ORDER 279 [SIC][W150][PVD][AG][7000NM] SiC 150 6 280 7000 1.023 6 71.321 ORDER 280 [SIC][W150][PVD][AG][7500NM] SiC 150 6 280 7500 1.096 6 72.844 ORDER 281 [SIC][W150][PVD][AG][8000NM] SiC 150 6 280 8000 1.170 6 74.366 ORDER 282 [SIC][W150][PVD][AG][8500NM] SiC 150 6 280 8500 1.243 6 75.889 ORDER 283 [SIC][W150][PVD][AG][9000NM] SiC 150 6 280 9000 1.316 6 77.412 ORDER 284 [SIC][W150][PVD][AG][9500NM] SiC 150 6 280 9500 1.389 6 78.935 ORDER 285 [SIC][W150][PVD][AG][10000NM] SiC 150 6 280 10000 1.462 6 80.458 ORDER 286 [SIC][W200][PVD][AG][1000NM] SiC 200 3 280 1000 0.146 3 106.092 ORDER 287 [SIC][W200][PVD][AG][1500NM] SiC 200 3 280 1500 0.219 3 109.137 ORDER 288 [SIC][W200][PVD][AG][2000NM] SiC 200 3 280 2000 0.292 3 112.183 ORDER 289 [SIC][W200][PVD][AG][2500NM] SiC 200 3 280 2500 0.365 3 115.229 ORDER 290 [SIC][W200][PVD][AG][3000NM] SiC 200 3 280 3000 0.439 3 118.275 ORDER 291 [SIC][W200][PVD][AG][3500NM] SiC 200 3 280 3500 0.512 3 121.321 ORDER 292 [SIC][W200][PVD][AG][4000NM] SiC 200 3 280 4000 0.585 3 124.366 ORDER 293 [SIC][W200][PVD][AG][4500NM] SiC 200 3 280 4500 0.658 3 127.412 ORDER 294 [SIC][W200][PVD][AG][5000NM] SiC 200 3 280 5000 0.731 3 130.458 ORDER 295 [SIC][W200][PVD][AG][5500NM] SiC 200 3 280 5500 0.804 3 133.504 ORDER 296 [SIC][W200][PVD][AG][6000NM] SiC 200 3 280 6000 0.877 3 136.550 ORDER 297 [SIC][W200][PVD][AG][6500NM] SiC 200 3 280 6500 0.950 3 139.596 ORDER 298 [SIC][W200][PVD][AG][7000NM] SiC 200 3 280 7000 1.023 3 142.641 ORDER 299 [SIC][W200][PVD][AG][7500NM] SiC 200 3 280 7500 1.096 3 145.687 ORDER 300 [SIC][W200][PVD][AG][8000NM] SiC 200 3 280 8000 1.170 3 148.733 ORDER 301 [SIC][W200][PVD][AG][8500NM] SiC 200 3 280 8500 1.243 3 151.779 ORDER 302 [SIC][W200][PVD][AG][9000NM] SiC 200 3 280 9000 1.316 3 154.825 ORDER 303 [SIC][W200][PVD][AG][9500NM] SiC 200 3 280 9500 1.389 3 157.870 ORDER 304 [SIC][W200][PVD][AG][10000NM] SiC 200 3 280 10000 1.462 3 160.916 ORDER 305 [SIC][W300][PVD][AG][1000NM] SiC 300 280 1000 0.146 RFQ 306 [SIC][W300][PVD][AG][1500NM] SiC 300 280 1500 0.219 RFQ 307 [SIC][W300][PVD][AG][2000NM] SiC 300 280 2000 0.292 RFQ 308 [SIC][W300][PVD][AG][2500NM] SiC 300 280 2500 0.365 RFQ 309 [SIC][W300][PVD][AG][3000NM] SiC 300 280 3000 0.439 RFQ 310 [SIC][W300][PVD][AG][3500NM] SiC 300 280 3500 0.512 RFQ 311 [SIC][W300][PVD][AG][4000NM] SiC 300 280 4000 0.585 RFQ 312 [SIC][W300][PVD][AG][4500NM] SiC 300 280 4500 0.658 RFQ 313 [SIC][W300][PVD][AG][5000NM] SiC 300 280 5000 0.731 RFQ 314 [SIC][W300][PVD][AG][5500NM] SiC 300 280 5500 0.804 RFQ 315 [SIC][W300][PVD][AG][6000NM] SiC 300 280 6000 0.877 RFQ 316 [SIC][W300][PVD][AG][6500NM] SiC 300 280 6500 0.950 RFQ 317 [SIC][W300][PVD][AG][7000NM] SiC 300 280 7000 1.023 RFQ 318 [SIC][W300][PVD][AG][7500NM] SiC 300 280 7500 1.096 RFQ 319 [SIC][W300][PVD][AG][8000NM] SiC 300 280 8000 1.170 RFQ 320 [SIC][W300][PVD][AG][8500NM] SiC 300 280 8500 1.243 RFQ 321 [SIC][W300][PVD][AG][9000NM] SiC 300 280 9000 1.316 RFQ 322 [SIC][W300][PVD][AG][9500NM] SiC 300 280 9500 1.389 RFQ 323 [SIC][W300][PVD][AG][10000NM] SiC 300 280 10000 1.462 RFQ 324 [SIC][Wnnn][PVD][AG][1000NM] SiC nnn 280 1000 0.146 RFQ 325 [SIC][Wnnn][PVD][AG][1500NM] SiC nnn 280 1500 0.219 RFQ 326 [SIC][Wnnn][PVD][AG][2000NM] SiC nnn 280 2000 0.292 RFQ 327 [SIC][Wnnn][PVD][AG][2500NM] SiC nnn 280 2500 0.365 RFQ 328 [SIC][Wnnn][PVD][AG][3000NM] SiC nnn 280 3000 0.439 RFQ 329 [SIC][Wnnn][PVD][AG][3500NM] SiC nnn 280 3500 0.512 RFQ 330 [SIC][Wnnn][PVD][AG][4000NM] SiC nnn 280 4000 0.585 RFQ 331 [SIC][Wnnn][PVD][AG][4500NM] SiC nnn 280 4500 0.658 RFQ 332 [SIC][Wnnn][PVD][AG][5000NM] SiC nnn 280 5000 0.731 RFQ 333 [SIC][Wnnn][PVD][AG][5500NM] SiC nnn 280 5500 0.804 RFQ 334 [SIC][Wnnn][PVD][AG][6000NM] SiC nnn 280 6000 0.877 RFQ 335 [SIC][Wnnn][PVD][AG][6500NM] SiC nnn 280 6500 0.950 RFQ 336 [SIC][Wnnn][PVD][AG][7000NM] SiC nnn 280 7000 1.023 RFQ 337 [SIC][Wnnn][PVD][AG][7500NM] SiC nnn 280 7500 1.096 RFQ 338 [SIC][Wnnn][PVD][AG][8000NM] SiC nnn 280 8000 1.170 RFQ 339 [SIC][Wnnn][PVD][AG][8500NM] SiC nnn 280 8500 1.243 RFQ 340 [SIC][Wnnn][PVD][AG][9000NM] SiC nnn 280 9000 1.316 RFQ 341 [SIC][Wnnn][PVD][AG][9500NM] SiC nnn 280 9500 1.389 RFQ 342 [SIC][Wnnn][PVD][AG][10000NM] SiC nnn 280 10000 1.462 RFQ 343 [SOI][W25][PVD][AG][1000NM] SOI 25 24 280 1000 0.146 24 13.261 ORDER 344 [SOI][W25][PVD][AG][1500NM] SOI 25 24 280 1500 0.219 24 13.642 ORDER 345 [SOI][W25][PVD][AG][2000NM] SOI 25 24 280 2000 0.292 24 14.023 ORDER 346 [SOI][W25][PVD][AG][2500NM] SOI 25 24 280 2500 0.365 24 14.404 ORDER 347 [SOI][W25][PVD][AG][3000NM] SOI 25 24 280 3000 0.439 24 14.784 ORDER 348 [SOI][W25][PVD][AG][3500NM] SOI 25 24 280 3500 0.512 24 15.165 ORDER 349 [SOI][W25][PVD][AG][4000NM] SOI 25 24 280 4000 0.585 24 15.546 ORDER 350 [SOI][W25][PVD][AG][4500NM] SOI 25 24 280 4500 0.658 24 15.927 ORDER 351 [SOI][W25][PVD][AG][5000NM] SOI 25 24 280 5000 0.731 24 16.307 ORDER 352 [SOI][W25][PVD][AG][5500NM] SOI 25 24 280 5500 0.804 24 16.688 ORDER 353 [SOI][W25][PVD][AG][6000NM] SOI 25 24 280 6000 0.877 24 17.069 ORDER 354 [SOI][W25][PVD][AG][6500NM] SOI 25 24 280 6500 0.950 24 17.449 ORDER 355 [SOI][W25][PVD][AG][7000NM] SOI 25 24 280 7000 1.023 24 17.830 ORDER 356 [SOI][W25][PVD][AG][7500NM] SOI 25 24 280 7500 1.096 24 18.211 ORDER 357 [SOI][W25][PVD][AG][8000NM] SOI 25 24 280 8000 1.170 24 18.592 ORDER 358 [SOI][W25][PVD][AG][8500NM] SOI 25 24 280 8500 1.243 24 18.972 ORDER 359 [SOI][W25][PVD][AG][9000NM] SOI 25 24 280 9000 1.316 24 19.353 ORDER 360 [SOI][W25][PVD][AG][9500NM] SOI 25 24 280 9500 1.389 24 19.734 ORDER 361 [SOI][W25][PVD][AG][10000NM] SOI 25 24 280 10000 1.462 24 20.115 ORDER 362 [SOI][W50][PVD][AG][1000NM] SOI 50 12 280 1000 0.146 12 26.523 ORDER 363 [SOI][W50][PVD][AG][1500NM] SOI 50 12 280 1500 0.219 12 27.284 ORDER 364 [SOI][W50][PVD][AG][2000NM] SOI 50 12 280 2000 0.292 12 28.046 ORDER 365 [SOI][W50][PVD][AG][2500NM] SOI 50 12 280 2500 0.365 12 28.807 ORDER 366 [SOI][W50][PVD][AG][3000NM] SOI 50 12 280 3000 0.439 12 29.569 ORDER 367 [SOI][W50][PVD][AG][3500NM] SOI 50 12 280 3500 0.512 12 30.330 ORDER 368 [SOI][W50][PVD][AG][4000NM] SOI 50 12 280 4000 0.585 12 31.092 ORDER 369 [SOI][W50][PVD][AG][4500NM] SOI 50 12 280 4500 0.658 12 31.853 ORDER 370 [SOI][W50][PVD][AG][5000NM] SOI 50 12 280 5000 0.731 12 32.615 ORDER 371 [SOI][W50][PVD][AG][5500NM] SOI 50 12 280 5500 0.804 12 33.376 ORDER 372 [SOI][W50][PVD][AG][6000NM] SOI 50 12 280 6000 0.877 12 34.137 ORDER 373 [SOI][W50][PVD][AG][6500NM] SOI 50 12 280 6500 0.950 12 34.899 ORDER 374 [SOI][W50][PVD][AG][7000NM] SOI 50 12 280 7000 1.023 12 35.660 ORDER 375 [SOI][W50][PVD][AG][7500NM] SOI 50 12 280 7500 1.096 12 36.422 ORDER 376 [SOI][W50][PVD][AG][8000NM] SOI 50 12 280 8000 1.170 12 37.183 ORDER 377 [SOI][W50][PVD][AG][8500NM] SOI 50 12 280 8500 1.243 12 37.945 ORDER 378 [SOI][W50][PVD][AG][9000NM] SOI 50 12 280 9000 1.316 12 38.706 ORDER 379 [SOI][W50][PVD][AG][9500NM] SOI 50 12 280 9500 1.389 12 39.468 ORDER 380 [SOI][W50][PVD][AG][10000NM] SOI 50 12 280 10000 1.462 12 40.229 ORDER 381 [SOI][W75][PVD][AG][1000NM] SOI 75 10 280 1000 0.146 10 31.827 ORDER 382 [SOI][W75][PVD][AG][1500NM] SOI 75 10 280 1500 0.219 10 32.741 ORDER 383 [SOI][W75][PVD][AG][2000NM] SOI 75 10 280 2000 0.292 10 33.655 ORDER 384 [SOI][W75][PVD][AG][2500NM] SOI 75 10 280 2500 0.365 10 34.569 ORDER 385 [SOI][W75][PVD][AG][3000NM] SOI 75 10 280 3000 0.439 10 35.482 ORDER 386 [SOI][W75][PVD][AG][3500NM] SOI 75 10 280 3500 0.512 10 36.396 ORDER 387 [SOI][W75][PVD][AG][4000NM] SOI 75 10 280 4000 0.585 10 37.310 ORDER 388 [SOI][W75][PVD][AG][4500NM] SOI 75 10 280 4500 0.658 10 38.224 ORDER 389 [SOI][W75][PVD][AG][5000NM] SOI 75 10 280 5000 0.731 10 39.137 ORDER 390 [SOI][W75][PVD][AG][5500NM] SOI 75 10 280 5500 0.804 10 40.051 ORDER 391 [SOI][W75][PVD][AG][6000NM] SOI 75 10 280 6000 0.877 10 40.965 ORDER 392 [SOI][W75][PVD][AG][6500NM] SOI 75 10 280 6500 0.950 10 41.879 ORDER 393 [SOI][W75][PVD][AG][7000NM] SOI 75 10 280 7000 1.023 10 42.792 ORDER 394 [SOI][W75][PVD][AG][7500NM] SOI 75 10 280 7500 1.096 10 43.706 ORDER 395 [SOI][W75][PVD][AG][8000NM] SOI 75 10 280 8000 1.170 10 44.620 ORDER 396 [SOI][W75][PVD][AG][8500NM] SOI 75 10 280 8500 1.243 10 45.534 ORDER 397 [SOI][W75][PVD][AG][9000NM] SOI 75 10 280 9000 1.316 10 46.447 ORDER 398 [SOI][W75][PVD][AG][9500NM] SOI 75 10 280 9500 1.389 10 47.361 ORDER 399 [SOI][W75][PVD][AG][10000NM] SOI 75 10 280 10000 1.462 10 48.275 ORDER 400 [SOI][W100][PVD][AG][1000NM] SOI 100 8 280 1000 0.146 8 39.784 ORDER 401 [SOI][W100][PVD][AG][1500NM] SOI 100 8 280 1500 0.219 8 40.927 ORDER 402 [SOI][W100][PVD][AG][2000NM] SOI 100 8 280 2000 0.292 8 42.069 ORDER 403 [SOI][W100][PVD][AG][2500NM] SOI 100 8 280 2500 0.365 8 43.211 ORDER 404 [SOI][W100][PVD][AG][3000NM] SOI 100 8 280 3000 0.439 8 44.353 ORDER 405 [SOI][W100][PVD][AG][3500NM] SOI 100 8 280 3500 0.512 8 45.495 ORDER 406 [SOI][W100][PVD][AG][4000NM] SOI 100 8 280 4000 0.585 8 46.637 ORDER 407 [SOI][W100][PVD][AG][4500NM] SOI 100 8 280 4500 0.658 8 47.780 ORDER 408 [SOI][W100][PVD][AG][5000NM] SOI 100 8 280 5000 0.731 8 48.922 ORDER 409 [SOI][W100][PVD][AG][5500NM] SOI 100 8 280 5500 0.804 8 50.064 ORDER 410 [SOI][W100][PVD][AG][6000NM] SOI 100 8 280 6000 0.877 8 51.206 ORDER 411 [SOI][W100][PVD][AG][6500NM] SOI 100 8 280 6500 0.950 8 52.348 ORDER 412 [SOI][W100][PVD][AG][7000NM] SOI 100 8 280 7000 1.023 8 53.490 ORDER 413 [SOI][W100][PVD][AG][7500NM] SOI 100 8 280 7500 1.096 8 54.633 ORDER 414 [SOI][W100][PVD][AG][8000NM] SOI 100 8 280 8000 1.170 8 55.775 ORDER 415 [SOI][W100][PVD][AG][8500NM] SOI 100 8 280 8500 1.243 8 56.917 ORDER 416 [SOI][W100][PVD][AG][9000NM] SOI 100 8 280 9000 1.316 8 58.059 ORDER 417 [SOI][W100][PVD][AG][9500NM] SOI 100 8 280 9500 1.389 8 59.201 ORDER 418 [SOI][W100][PVD][AG][10000NM] SOI 100 8 280 10000 1.462 8 60.344 ORDER 419 [SOI][W125][PVD][AG][1000NM] SOI 125 7 280 1000 0.146 7 45.468 ORDER 420 [SOI][W125][PVD][AG][1500NM] SOI 125 7 280 1500 0.219 7 46.773 ORDER 421 [SOI][W125][PVD][AG][2000NM] SOI 125 7 280 2000 0.292 7 48.079 ORDER 422 [SOI][W125][PVD][AG][2500NM] SOI 125 7 280 2500 0.365 7 49.384 ORDER 423 [SOI][W125][PVD][AG][3000NM] SOI 125 7 280 3000 0.439 7 50.689 ORDER 424 [SOI][W125][PVD][AG][3500NM] SOI 125 7 280 3500 0.512 7 51.995 ORDER 425 [SOI][W125][PVD][AG][4000NM] SOI 125 7 280 4000 0.585 7 53.300 ORDER 426 [SOI][W125][PVD][AG][4500NM] SOI 125 7 280 4500 0.658 7 54.605 ORDER 427 [SOI][W125][PVD][AG][5000NM] SOI 125 7 280 5000 0.731 7 55.911 ORDER 428 [SOI][W125][PVD][AG][5500NM] SOI 125 7 280 5500 0.804 7 57.216 ORDER 429 [SOI][W125][PVD][AG][6000NM] SOI 125 7 280 6000 0.877 7 58.521 ORDER 430 [SOI][W125][PVD][AG][6500NM] SOI 125 7 280 6500 0.950 7 59.827 ORDER 431 [SOI][W125][PVD][AG][7000NM] SOI 125 7 280 7000 1.023 7 61.132 ORDER 432 [SOI][W125][PVD][AG][7500NM] SOI 125 7 280 7500 1.096 7 62.437 ORDER 433 [SOI][W125][PVD][AG][8000NM] SOI 125 7 280 8000 1.170 7 63.743 ORDER 434 [SOI][W125][PVD][AG][8500NM] SOI 125 7 280 8500 1.243 7 65.048 ORDER 435 [SOI][W125][PVD][AG][9000NM] SOI 125 7 280 9000 1.316 7 66.353 ORDER 436 [SOI][W125][PVD][AG][9500NM] SOI 125 7 280 9500 1.389 7 67.659 ORDER 437 [SOI][W125][PVD][AG][10000NM] SOI 125 7 280 10000 1.462 7 68.964 ORDER 438 [SOI][W150][PVD][AG][1000NM] SOI 150 6 280 1000 0.146 6 53.046 ORDER 439 [SOI][W150][PVD][AG][1500NM] SOI 150 6 280 1500 0.219 6 54.569 ORDER 440 [SOI][W150][PVD][AG][2000NM] SOI 150 6 280 2000 0.292 6 56.092 ORDER 441 [SOI][W150][PVD][AG][2500NM] SOI 150 6 280 2500 0.365 6 57.615 ORDER 442 [SOI][W150][PVD][AG][3000NM] SOI 150 6 280 3000 0.439 6 59.137 ORDER 443 [SOI][W150][PVD][AG][3500NM] SOI 150 6 280 3500 0.512 6 60.660 ORDER 444 [SOI][W150][PVD][AG][4000NM] SOI 150 6 280 4000 0.585 6 62.183 ORDER 445 [SOI][W150][PVD][AG][4500NM] SOI 150 6 280 4500 0.658 6 63.706 ORDER 446 [SOI][W150][PVD][AG][5000NM] SOI 150 6 280 5000 0.731 6 65.229 ORDER 447 [SOI][W150][PVD][AG][5500NM] SOI 150 6 280 5500 0.804 6 66.752 ORDER 448 [SOI][W150][PVD][AG][6000NM] SOI 150 6 280 6000 0.877 6 68.275 ORDER 449 [SOI][W150][PVD][AG][6500NM] SOI 150 6 280 6500 0.950 6 69.798 ORDER 450 [SOI][W150][PVD][AG][7000NM] SOI 150 6 280 7000 1.023 6 71.321 ORDER 451 [SOI][W150][PVD][AG][7500NM] SOI 150 6 280 7500 1.096 6 72.844 ORDER 452 [SOI][W150][PVD][AG][8000NM] SOI 150 6 280 8000 1.170 6 74.366 ORDER 453 [SOI][W150][PVD][AG][8500NM] SOI 150 6 280 8500 1.243 6 75.889 ORDER 454 [SOI][W150][PVD][AG][9000NM] SOI 150 6 280 9000 1.316 6 77.412 ORDER 455 [SOI][W150][PVD][AG][9500NM] SOI 150 6 280 9500 1.389 6 78.935 ORDER 456 [SOI][W150][PVD][AG][10000NM] SOI 150 6 280 10000 1.462 6 80.458 ORDER 457 [SOI][W200][PVD][AG][1000NM] SOI 200 3 280 1000 0.146 3 106.092 ORDER 458 [SOI][W200][PVD][AG][1500NM] SOI 200 3 280 1500 0.219 3 109.137 ORDER 459 [SOI][W200][PVD][AG][2000NM] SOI 200 3 280 2000 0.292 3 112.183 ORDER 460 [SOI][W200][PVD][AG][2500NM] SOI 200 3 280 2500 0.365 3 115.229 ORDER 461 [SOI][W200][PVD][AG][3000NM] SOI 200 3 280 3000 0.439 3 118.275 ORDER 462 [SOI][W200][PVD][AG][3500NM] SOI 200 3 280 3500 0.512 3 121.321 ORDER 463 [SOI][W200][PVD][AG][4000NM] SOI 200 3 280 4000 0.585 3 124.366 ORDER 464 [SOI][W200][PVD][AG][4500NM] SOI 200 3 280 4500 0.658 3 127.412 ORDER 465 [SOI][W200][PVD][AG][5000NM] SOI 200 3 280 5000 0.731 3 130.458 ORDER 466 [SOI][W200][PVD][AG][5500NM] SOI 200 3 280 5500 0.804 3 133.504 ORDER 467 [SOI][W200][PVD][AG][6000NM] SOI 200 3 280 6000 0.877 3 136.550 ORDER 468 [SOI][W200][PVD][AG][6500NM] SOI 200 3 280 6500 0.950 3 139.596 ORDER 469 [SOI][W200][PVD][AG][7000NM] SOI 200 3 280 7000 1.023 3 142.641 ORDER 470 [SOI][W200][PVD][AG][7500NM] SOI 200 3 280 7500 1.096 3 145.687 ORDER 471 [SOI][W200][PVD][AG][8000NM] SOI 200 3 280 8000 1.170 3 148.733 ORDER 472 [SOI][W200][PVD][AG][8500NM] SOI 200 3 280 8500 1.243 3 151.779 ORDER 473 [SOI][W200][PVD][AG][9000NM] SOI 200 3 280 9000 1.316 3 154.825 ORDER 474 [SOI][W200][PVD][AG][9500NM] SOI 200 3 280 9500 1.389 3 157.870 ORDER 475 [SOI][W200][PVD][AG][10000NM] SOI 200 3 280 10000 1.462 3 160.916 ORDER 476 [SOI][W300][PVD][AG][1000NM] SOI 300 280 1000 0.146 RFQ 477 [SOI][W300][PVD][AG][1500NM] SOI 300 280 1500 0.219 RFQ 478 [SOI][W300][PVD][AG][2000NM] SOI 300 280 2000 0.292 RFQ 479 [SOI][W300][PVD][AG][2500NM] SOI 300 280 2500 0.365 RFQ 480 [SOI][W300][PVD][AG][3000NM] SOI 300 280 3000 0.439 RFQ 481 [SOI][W300][PVD][AG][3500NM] SOI 300 280 3500 0.512 RFQ 482 [SOI][W300][PVD][AG][4000NM] SOI 300 280 4000 0.585 RFQ 483 [SOI][W300][PVD][AG][4500NM] SOI 300 280 4500 0.658 RFQ 484 [SOI][W300][PVD][AG][5000NM] SOI 300 280 5000 0.731 RFQ 485 [SOI][W300][PVD][AG][5500NM] SOI 300 280 5500 0.804 RFQ 486 [SOI][W300][PVD][AG][6000NM] SOI 300 280 6000 0.877 RFQ 487 [SOI][W300][PVD][AG][6500NM] SOI 300 280 6500 0.950 RFQ 488 [SOI][W300][PVD][AG][7000NM] SOI 300 280 7000 1.023 RFQ 489 [SOI][W300][PVD][AG][7500NM] SOI 300 280 7500 1.096 RFQ 490 [SOI][W300][PVD][AG][8000NM] SOI 300 280 8000 1.170 RFQ 491 [SOI][W300][PVD][AG][8500NM] SOI 300 280 8500 1.243 RFQ 492 [SOI][W300][PVD][AG][9000NM] SOI 300 280 9000 1.316 RFQ 493 [SOI][W300][PVD][AG][9500NM] SOI 300 280 9500 1.389 RFQ 494 [SOI][W300][PVD][AG][10000NM] SOI 300 280 10000 1.462 RFQ 495 [SOI][Wnnn][PVD][AG][1000NM] SOI nnn 280 1000 0.146 RFQ 496 [SOI][Wnnn][PVD][AG][1500NM] SOI nnn 280 1500 0.219 RFQ 497 [SOI][Wnnn][PVD][AG][2000NM] SOI nnn 280 2000 0.292 RFQ 498 [SOI][Wnnn][PVD][AG][2500NM] SOI nnn 280 2500 0.365 RFQ 499 [SOI][Wnnn][PVD][AG][3000NM] SOI nnn 280 3000 0.439 RFQ 500 [SOI][Wnnn][PVD][AG][3500NM] SOI nnn 280 3500 0.512 RFQ 501 [SOI][Wnnn][PVD][AG][4000NM] SOI nnn 280 4000 0.585 RFQ 502 [SOI][Wnnn][PVD][AG][4500NM] SOI nnn 280 4500 0.658 RFQ 503 [SOI][Wnnn][PVD][AG][5000NM] SOI nnn 280 5000 0.731 RFQ 504 [SOI][Wnnn][PVD][AG][5500NM] SOI nnn 280 5500 0.804 RFQ 505 [SOI][Wnnn][PVD][AG][6000NM] SOI nnn 280 6000 0.877 RFQ 506 [SOI][Wnnn][PVD][AG][6500NM] SOI nnn 280 6500 0.950 RFQ 507 [SOI][Wnnn][PVD][AG][7000NM] SOI nnn 280 7000 1.023 RFQ 508 [SOI][Wnnn][PVD][AG][7500NM] SOI nnn 280 7500 1.096 RFQ 509 [SOI][Wnnn][PVD][AG][8000NM] SOI nnn 280 8000 1.170 RFQ 510 [SOI][Wnnn][PVD][AG][8500NM] SOI nnn 280 8500 1.243 RFQ 511 [SOI][Wnnn][PVD][AG][9000NM] SOI nnn 280 9000 1.316 RFQ 512 [SOI][Wnnn][PVD][AG][9500NM] SOI nnn 280 9500 1.389 RFQ 513 [SOI][Wnnn][PVD][AG][10000NM] SOI nnn 280 10000 1.462 RFQ 514 [SIGE][W25][PVD][AG][1000NM] SiGe 25 24 280 1000 0.146 24 13.261 ORDER 515 [SIGE][W25][PVD][AG][1500NM] SiGe 25 24 280 1500 0.219 24 13.642 ORDER 516 [SIGE][W25][PVD][AG][2000NM] SiGe 25 24 280 2000 0.292 24 14.023 ORDER 517 [SIGE][W25][PVD][AG][2500NM] SiGe 25 24 280 2500 0.365 24 14.404 ORDER 518 [SIGE][W25][PVD][AG][3000NM] SiGe 25 24 280 3000 0.439 24 14.784 ORDER 519 [SIGE][W25][PVD][AG][3500NM] SiGe 25 24 280 3500 0.512 24 15.165 ORDER 520 [SIGE][W25][PVD][AG][4000NM] SiGe 25 24 280 4000 0.585 24 15.546 ORDER 521 [SIGE][W25][PVD][AG][4500NM] SiGe 25 24 280 4500 0.658 24 15.927 ORDER 522 [SIGE][W25][PVD][AG][5000NM] SiGe 25 24 280 5000 0.731 24 16.307 ORDER 523 [SIGE][W25][PVD][AG][5500NM] SiGe 25 24 280 5500 0.804 24 16.688 ORDER 524 [SIGE][W25][PVD][AG][6000NM] SiGe 25 24 280 6000 0.877 24 17.069 ORDER 525 [SIGE][W25][PVD][AG][6500NM] SiGe 25 24 280 6500 0.950 24 17.449 ORDER 526 [SIGE][W25][PVD][AG][7000NM] SiGe 25 24 280 7000 1.023 24 17.830 ORDER 527 [SIGE][W25][PVD][AG][7500NM] SiGe 25 24 280 7500 1.096 24 18.211 ORDER 528 [SIGE][W25][PVD][AG][8000NM] SiGe 25 24 280 8000 1.170 24 18.592 ORDER 529 [SIGE][W25][PVD][AG][8500NM] SiGe 25 24 280 8500 1.243 24 18.972 ORDER 530 [SIGE][W25][PVD][AG][9000NM] SiGe 25 24 280 9000 1.316 24 19.353 ORDER 531 [SIGE][W25][PVD][AG][9500NM] SiGe 25 24 280 9500 1.389 24 19.734 ORDER 532 [SIGE][W25][PVD][AG][10000NM] SiGe 25 24 280 10000 1.462 24 20.115 ORDER 533 [SIGE][W50][PVD][AG][1000NM] SiGe 50 12 280 1000 0.146 12 26.523 ORDER 534 [SIGE][W50][PVD][AG][1500NM] SiGe 50 12 280 1500 0.219 12 27.284 ORDER 535 [SIGE][W50][PVD][AG][2000NM] SiGe 50 12 280 2000 0.292 12 28.046 ORDER 536 [SIGE][W50][PVD][AG][2500NM] SiGe 50 12 280 2500 0.365 12 28.807 ORDER 537 [SIGE][W50][PVD][AG][3000NM] SiGe 50 12 280 3000 0.439 12 29.569 ORDER 538 [SIGE][W50][PVD][AG][3500NM] SiGe 50 12 280 3500 0.512 12 30.330 ORDER 539 [SIGE][W50][PVD][AG][4000NM] SiGe 50 12 280 4000 0.585 12 31.092 ORDER 540 [SIGE][W50][PVD][AG][4500NM] SiGe 50 12 280 4500 0.658 12 31.853 ORDER 541 [SIGE][W50][PVD][AG][5000NM] SiGe 50 12 280 5000 0.731 12 32.615 ORDER 542 [SIGE][W50][PVD][AG][5500NM] SiGe 50 12 280 5500 0.804 12 33.376 ORDER 543 [SIGE][W50][PVD][AG][6000NM] SiGe 50 12 280 6000 0.877 12 34.137 ORDER 544 [SIGE][W50][PVD][AG][6500NM] SiGe 50 12 280 6500 0.950 12 34.899 ORDER 545 [SIGE][W50][PVD][AG][7000NM] SiGe 50 12 280 7000 1.023 12 35.660 ORDER 546 [SIGE][W50][PVD][AG][7500NM] SiGe 50 12 280 7500 1.096 12 36.422 ORDER 547 [SIGE][W50][PVD][AG][8000NM] SiGe 50 12 280 8000 1.170 12 37.183 ORDER 548 [SIGE][W50][PVD][AG][8500NM] SiGe 50 12 280 8500 1.243 12 37.945 ORDER 549 [SIGE][W50][PVD][AG][9000NM] SiGe 50 12 280 9000 1.316 12 38.706 ORDER 550 [SIGE][W50][PVD][AG][9500NM] SiGe 50 12 280 9500 1.389 12 39.468 ORDER 551 [SIGE][W50][PVD][AG][10000NM] SiGe 50 12 280 10000 1.462 12 40.229 ORDER 552 [SIGE][W75][PVD][AG][1000NM] SiGe 75 10 280 1000 0.146 10 31.827 ORDER 553 [SIGE][W75][PVD][AG][1500NM] SiGe 75 10 280 1500 0.219 10 32.741 ORDER 554 [SIGE][W75][PVD][AG][2000NM] SiGe 75 10 280 2000 0.292 10 33.655 ORDER 555 [SIGE][W75][PVD][AG][2500NM] SiGe 75 10 280 2500 0.365 10 34.569 ORDER 556 [SIGE][W75][PVD][AG][3000NM] SiGe 75 10 280 3000 0.439 10 35.482 ORDER 557 [SIGE][W75][PVD][AG][3500NM] SiGe 75 10 280 3500 0.512 10 36.396 ORDER 558 [SIGE][W75][PVD][AG][4000NM] SiGe 75 10 280 4000 0.585 10 37.310 ORDER 559 [SIGE][W75][PVD][AG][4500NM] SiGe 75 10 280 4500 0.658 10 38.224 ORDER 560 [SIGE][W75][PVD][AG][5000NM] SiGe 75 10 280 5000 0.731 10 39.137 ORDER 561 [SIGE][W75][PVD][AG][5500NM] SiGe 75 10 280 5500 0.804 10 40.051 ORDER 562 [SIGE][W75][PVD][AG][6000NM] SiGe 75 10 280 6000 0.877 10 40.965 ORDER 563 [SIGE][W75][PVD][AG][6500NM] SiGe 75 10 280 6500 0.950 10 41.879 ORDER 564 [SIGE][W75][PVD][AG][7000NM] SiGe 75 10 280 7000 1.023 10 42.792 ORDER 565 [SIGE][W75][PVD][AG][7500NM] SiGe 75 10 280 7500 1.096 10 43.706 ORDER 566 [SIGE][W75][PVD][AG][8000NM] SiGe 75 10 280 8000 1.170 10 44.620 ORDER 567 [SIGE][W75][PVD][AG][8500NM] SiGe 75 10 280 8500 1.243 10 45.534 ORDER 568 [SIGE][W75][PVD][AG][9000NM] SiGe 75 10 280 9000 1.316 10 46.447 ORDER 569 [SIGE][W75][PVD][AG][9500NM] SiGe 75 10 280 9500 1.389 10 47.361 ORDER 570 [SIGE][W75][PVD][AG][10000NM] SiGe 75 10 280 10000 1.462 10 48.275 ORDER 571 [SIGE][W100][PVD][AG][1000NM] SiGe 100 8 280 1000 0.146 8 39.784 ORDER 572 [SIGE][W100][PVD][AG][1500NM] SiGe 100 8 280 1500 0.219 8 40.927 ORDER 573 [SIGE][W100][PVD][AG][2000NM] SiGe 100 8 280 2000 0.292 8 42.069 ORDER 574 [SIGE][W100][PVD][AG][2500NM] SiGe 100 8 280 2500 0.365 8 43.211 ORDER 575 [SIGE][W100][PVD][AG][3000NM] SiGe 100 8 280 3000 0.439 8 44.353 ORDER 576 [SIGE][W100][PVD][AG][3500NM] SiGe 100 8 280 3500 0.512 8 45.495 ORDER 577 [SIGE][W100][PVD][AG][4000NM] SiGe 100 8 280 4000 0.585 8 46.637 ORDER 578 [SIGE][W100][PVD][AG][4500NM] SiGe 100 8 280 4500 0.658 8 47.780 ORDER 579 [SIGE][W100][PVD][AG][5000NM] SiGe 100 8 280 5000 0.731 8 48.922 ORDER 580 [SIGE][W100][PVD][AG][5500NM] SiGe 100 8 280 5500 0.804 8 50.064 ORDER 581 [SIGE][W100][PVD][AG][6000NM] SiGe 100 8 280 6000 0.877 8 51.206 ORDER 582 [SIGE][W100][PVD][AG][6500NM] SiGe 100 8 280 6500 0.950 8 52.348 ORDER 583 [SIGE][W100][PVD][AG][7000NM] SiGe 100 8 280 7000 1.023 8 53.490 ORDER 584 [SIGE][W100][PVD][AG][7500NM] SiGe 100 8 280 7500 1.096 8 54.633 ORDER 585 [SIGE][W100][PVD][AG][8000NM] SiGe 100 8 280 8000 1.170 8 55.775 ORDER 586 [SIGE][W100][PVD][AG][8500NM] SiGe 100 8 280 8500 1.243 8 56.917 ORDER 587 [SIGE][W100][PVD][AG][9000NM] SiGe 100 8 280 9000 1.316 8 58.059 ORDER 588 [SIGE][W100][PVD][AG][9500NM] SiGe 100 8 280 9500 1.389 8 59.201 ORDER 589 [SIGE][W100][PVD][AG][10000NM] SiGe 100 8 280 10000 1.462 8 60.344 ORDER 590 [SIGE][W125][PVD][AG][1000NM] SiGe 125 7 280 1000 0.146 7 45.468 ORDER 591 [SIGE][W125][PVD][AG][1500NM] SiGe 125 7 280 1500 0.219 7 46.773 ORDER 592 [SIGE][W125][PVD][AG][2000NM] SiGe 125 7 280 2000 0.292 7 48.079 ORDER 593 [SIGE][W125][PVD][AG][2500NM] SiGe 125 7 280 2500 0.365 7 49.384 ORDER 594 [SIGE][W125][PVD][AG][3000NM] SiGe 125 7 280 3000 0.439 7 50.689 ORDER 595 [SIGE][W125][PVD][AG][3500NM] SiGe 125 7 280 3500 0.512 7 51.995 ORDER 596 [SIGE][W125][PVD][AG][4000NM] SiGe 125 7 280 4000 0.585 7 53.300 ORDER 597 [SIGE][W125][PVD][AG][4500NM] SiGe 125 7 280 4500 0.658 7 54.605 ORDER 598 [SIGE][W125][PVD][AG][5000NM] SiGe 125 7 280 5000 0.731 7 55.911 ORDER 599 [SIGE][W125][PVD][AG][5500NM] SiGe 125 7 280 5500 0.804 7 57.216 ORDER 600 [SIGE][W125][PVD][AG][6000NM] SiGe 125 7 280 6000 0.877 7 58.521 ORDER 601 [SIGE][W125][PVD][AG][6500NM] SiGe 125 7 280 6500 0.950 7 59.827 ORDER 602 [SIGE][W125][PVD][AG][7000NM] SiGe 125 7 280 7000 1.023 7 61.132 ORDER 603 [SIGE][W125][PVD][AG][7500NM] SiGe 125 7 280 7500 1.096 7 62.437 ORDER 604 [SIGE][W125][PVD][AG][8000NM] SiGe 125 7 280 8000 1.170 7 63.743 ORDER 605 [SIGE][W125][PVD][AG][8500NM] SiGe 125 7 280 8500 1.243 7 65.048 ORDER 606 [SIGE][W125][PVD][AG][9000NM] SiGe 125 7 280 9000 1.316 7 66.353 ORDER 607 [SIGE][W125][PVD][AG][9500NM] SiGe 125 7 280 9500 1.389 7 67.659 ORDER 608 [SIGE][W125][PVD][AG][10000NM] SiGe 125 7 280 10000 1.462 7 68.964 ORDER 609 [SIGE][W150][PVD][AG][1000NM] SiGe 150 6 280 1000 0.146 6 53.046 ORDER 610 [SIGE][W150][PVD][AG][1500NM] SiGe 150 6 280 1500 0.219 6 54.569 ORDER 611 [SIGE][W150][PVD][AG][2000NM] SiGe 150 6 280 2000 0.292 6 56.092 ORDER 612 [SIGE][W150][PVD][AG][2500NM] SiGe 150 6 280 2500 0.365 6 57.615 ORDER 613 [SIGE][W150][PVD][AG][3000NM] SiGe 150 6 280 3000 0.439 6 59.137 ORDER 614 [SIGE][W150][PVD][AG][3500NM] SiGe 150 6 280 3500 0.512 6 60.660 ORDER 615 [SIGE][W150][PVD][AG][4000NM] SiGe 150 6 280 4000 0.585 6 62.183 ORDER 616 [SIGE][W150][PVD][AG][4500NM] SiGe 150 6 280 4500 0.658 6 63.706 ORDER 617 [SIGE][W150][PVD][AG][5000NM] SiGe 150 6 280 5000 0.731 6 65.229 ORDER 618 [SIGE][W150][PVD][AG][5500NM] SiGe 150 6 280 5500 0.804 6 66.752 ORDER 619 [SIGE][W150][PVD][AG][6000NM] SiGe 150 6 280 6000 0.877 6 68.275 ORDER 620 [SIGE][W150][PVD][AG][6500NM] SiGe 150 6 280 6500 0.950 6 69.798 ORDER 621 [SIGE][W150][PVD][AG][7000NM] SiGe 150 6 280 7000 1.023 6 71.321 ORDER 622 [SIGE][W150][PVD][AG][7500NM] SiGe 150 6 280 7500 1.096 6 72.844 ORDER 623 [SIGE][W150][PVD][AG][8000NM] SiGe 150 6 280 8000 1.170 6 74.366 ORDER 624 [SIGE][W150][PVD][AG][8500NM] SiGe 150 6 280 8500 1.243 6 75.889 ORDER 625 [SIGE][W150][PVD][AG][9000NM] SiGe 150 6 280 9000 1.316 6 77.412 ORDER 626 [SIGE][W150][PVD][AG][9500NM] SiGe 150 6 280 9500 1.389 6 78.935 ORDER 627 [SIGE][W150][PVD][AG][10000NM] SiGe 150 6 280 10000 1.462 6 80.458 ORDER 628 [SIGE][W200][PVD][AG][1000NM] SiGe 200 3 280 1000 0.146 3 106.092 ORDER 629 [SIGE][W200][PVD][AG][1500NM] SiGe 200 3 280 1500 0.219 3 109.137 ORDER 630 [SIGE][W200][PVD][AG][2000NM] SiGe 200 3 280 2000 0.292 3 112.183 ORDER 631 [SIGE][W200][PVD][AG][2500NM] SiGe 200 3 280 2500 0.365 3 115.229 ORDER 632 [SIGE][W200][PVD][AG][3000NM] SiGe 200 3 280 3000 0.439 3 118.275 ORDER 633 [SIGE][W200][PVD][AG][3500NM] SiGe 200 3 280 3500 0.512 3 121.321 ORDER 634 [SIGE][W200][PVD][AG][4000NM] SiGe 200 3 280 4000 0.585 3 124.366 ORDER 635 [SIGE][W200][PVD][AG][4500NM] SiGe 200 3 280 4500 0.658 3 127.412 ORDER 636 [SIGE][W200][PVD][AG][5000NM] SiGe 200 3 280 5000 0.731 3 130.458 ORDER 637 [SIGE][W200][PVD][AG][5500NM] SiGe 200 3 280 5500 0.804 3 133.504 ORDER 638 [SIGE][W200][PVD][AG][6000NM] SiGe 200 3 280 6000 0.877 3 136.550 ORDER 639 [SIGE][W200][PVD][AG][6500NM] SiGe 200 3 280 6500 0.950 3 139.596 ORDER 640 [SIGE][W200][PVD][AG][7000NM] SiGe 200 3 280 7000 1.023 3 142.641 ORDER 641 [SIGE][W200][PVD][AG][7500NM] SiGe 200 3 280 7500 1.096 3 145.687 ORDER 642 [SIGE][W200][PVD][AG][8000NM] SiGe 200 3 280 8000 1.170 3 148.733 ORDER 643 [SIGE][W200][PVD][AG][8500NM] SiGe 200 3 280 8500 1.243 3 151.779 ORDER 644 [SIGE][W200][PVD][AG][9000NM] SiGe 200 3 280 9000 1.316 3 154.825 ORDER 645 [SIGE][W200][PVD][AG][9500NM] SiGe 200 3 280 9500 1.389 3 157.870 ORDER 646 [SIGE][W200][PVD][AG][10000NM] SiGe 200 3 280 10000 1.462 3 160.916 ORDER 647 [SIGE][W300][PVD][AG][1000NM] SiGe 300 280 1000 0.146 RFQ 648 [SIGE][W300][PVD][AG][1500NM] SiGe 300 280 1500 0.219 RFQ 649 [SIGE][W300][PVD][AG][2000NM] SiGe 300 280 2000 0.292 RFQ 650 [SIGE][W300][PVD][AG][2500NM] SiGe 300 280 2500 0.365 RFQ 651 [SIGE][W300][PVD][AG][3000NM] SiGe 300 280 3000 0.439 RFQ 652 [SIGE][W300][PVD][AG][3500NM] SiGe 300 280 3500 0.512 RFQ 653 [SIGE][W300][PVD][AG][4000NM] SiGe 300 280 4000 0.585 RFQ 654 [SIGE][W300][PVD][AG][4500NM] SiGe 300 280 4500 0.658 RFQ 655 [SIGE][W300][PVD][AG][5000NM] SiGe 300 280 5000 0.731 RFQ 656 [SIGE][W300][PVD][AG][5500NM] SiGe 300 280 5500 0.804 RFQ 657 [SIGE][W300][PVD][AG][6000NM] SiGe 300 280 6000 0.877 RFQ 658 [SIGE][W300][PVD][AG][6500NM] SiGe 300 280 6500 0.950 RFQ 659 [SIGE][W300][PVD][AG][7000NM] SiGe 300 280 7000 1.023 RFQ 660 [SIGE][W300][PVD][AG][7500NM] SiGe 300 280 7500 1.096 RFQ 661 [SIGE][W300][PVD][AG][8000NM] SiGe 300 280 8000 1.170 RFQ 662 [SIGE][W300][PVD][AG][8500NM] SiGe 300 280 8500 1.243 RFQ 663 [SIGE][W300][PVD][AG][9000NM] SiGe 300 280 9000 1.316 RFQ 664 [SIGE][W300][PVD][AG][9500NM] SiGe 300 280 9500 1.389 RFQ 665 [SIGE][W300][PVD][AG][10000NM] SiGe 300 280 10000 1.462 RFQ 666 [SIGE][Wnnn][PVD][AG][1000NM] SiGe nnn 280 1000 0.146 RFQ 667 [SIGE][Wnnn][PVD][AG][1500NM] SiGe nnn 280 1500 0.219 RFQ 668 [SIGE][Wnnn][PVD][AG][2000NM] SiGe nnn 280 2000 0.292 RFQ 669 [SIGE][Wnnn][PVD][AG][2500NM] SiGe nnn 280 2500 0.365 RFQ 670 [SIGE][Wnnn][PVD][AG][3000NM] SiGe nnn 280 3000 0.439 RFQ 671 [SIGE][Wnnn][PVD][AG][3500NM] SiGe nnn 280 3500 0.512 RFQ 672 [SIGE][Wnnn][PVD][AG][4000NM] SiGe nnn 280 4000 0.585 RFQ 673 [SIGE][Wnnn][PVD][AG][4500NM] SiGe nnn 280 4500 0.658 RFQ 674 [SIGE][Wnnn][PVD][AG][5000NM] SiGe nnn 280 5000 0.731 RFQ 675 [SIGE][Wnnn][PVD][AG][5500NM] SiGe nnn 280 5500 0.804 RFQ 676 [SIGE][Wnnn][PVD][AG][6000NM] SiGe nnn 280 6000 0.877 RFQ 677 [SIGE][Wnnn][PVD][AG][6500NM] SiGe nnn 280 6500 0.950 RFQ 678 [SIGE][Wnnn][PVD][AG][7000NM] SiGe nnn 280 7000 1.023 RFQ 679 [SIGE][Wnnn][PVD][AG][7500NM] SiGe nnn 280 7500 1.096 RFQ 680 [SIGE][Wnnn][PVD][AG][8000NM] SiGe nnn 280 8000 1.170 RFQ 681 [SIGE][Wnnn][PVD][AG][8500NM] SiGe nnn 280 8500 1.243 RFQ 682 [SIGE][Wnnn][PVD][AG][9000NM] SiGe nnn 280 9000 1.316 RFQ 683 [SIGE][Wnnn][PVD][AG][9500NM] SiGe nnn 280 9500 1.389 RFQ 684 [SIGE][Wnnn][PVD][AG][10000NM] SiGe nnn 280 10000 1.462 RFQ 685 [QZ][W25][PVD][AG][1000NM] QZ 25 24 280 1000 0.146 24 13.261 ORDER 686 [QZ][W25][PVD][AG][1500NM] QZ 25 24 280 1500 0.219 24 13.642 ORDER 687 [QZ][W25][PVD][AG][2000NM] QZ 25 24 280 2000 0.292 24 14.023 ORDER 688 [QZ][W25][PVD][AG][2500NM] QZ 25 24 280 2500 0.365 24 14.404 ORDER 689 [QZ][W25][PVD][AG][3000NM] QZ 25 24 280 3000 0.439 24 14.784 ORDER 690 [QZ][W25][PVD][AG][3500NM] QZ 25 24 280 3500 0.512 24 15.165 ORDER 691 [QZ][W25][PVD][AG][4000NM] QZ 25 24 280 4000 0.585 24 15.546 ORDER 692 [QZ][W25][PVD][AG][4500NM] QZ 25 24 280 4500 0.658 24 15.927 ORDER 693 [QZ][W25][PVD][AG][5000NM] QZ 25 24 280 5000 0.731 24 16.307 ORDER 694 [QZ][W25][PVD][AG][5500NM] QZ 25 24 280 5500 0.804 24 16.688 ORDER 695 [QZ][W25][PVD][AG][6000NM] QZ 25 24 280 6000 0.877 24 17.069 ORDER 696 [QZ][W25][PVD][AG][6500NM] QZ 25 24 280 6500 0.950 24 17.449 ORDER 697 [QZ][W25][PVD][AG][7000NM] QZ 25 24 280 7000 1.023 24 17.830 ORDER 698 [QZ][W25][PVD][AG][7500NM] QZ 25 24 280 7500 1.096 24 18.211 ORDER 699 [QZ][W25][PVD][AG][8000NM] QZ 25 24 280 8000 1.170 24 18.592 ORDER 700 [QZ][W25][PVD][AG][8500NM] QZ 25 24 280 8500 1.243 24 18.972 ORDER 701 [QZ][W25][PVD][AG][9000NM] QZ 25 24 280 9000 1.316 24 19.353 ORDER 702 [QZ][W25][PVD][AG][9500NM] QZ 25 24 280 9500 1.389 24 19.734 ORDER 703 [QZ][W25][PVD][AG][10000NM] QZ 25 24 280 10000 1.462 24 20.115 ORDER 704 [QZ][W50][PVD][AG][1000NM] QZ 50 12 280 1000 0.146 12 26.523 ORDER 705 [QZ][W50][PVD][AG][1500NM] QZ 50 12 280 1500 0.219 12 27.284 ORDER 706 [QZ][W50][PVD][AG][2000NM] QZ 50 12 280 2000 0.292 12 28.046 ORDER 707 [QZ][W50][PVD][AG][2500NM] QZ 50 12 280 2500 0.365 12 28.807 ORDER 708 [QZ][W50][PVD][AG][3000NM] QZ 50 12 280 3000 0.439 12 29.569 ORDER 709 [QZ][W50][PVD][AG][3500NM] QZ 50 12 280 3500 0.512 12 30.330 ORDER 710 [QZ][W50][PVD][AG][4000NM] QZ 50 12 280 4000 0.585 12 31.092 ORDER 711 [QZ][W50][PVD][AG][4500NM] QZ 50 12 280 4500 0.658 12 31.853 ORDER 712 [QZ][W50][PVD][AG][5000NM] QZ 50 12 280 5000 0.731 12 32.615 ORDER 713 [QZ][W50][PVD][AG][5500NM] QZ 50 12 280 5500 0.804 12 33.376 ORDER 714 [QZ][W50][PVD][AG][6000NM] QZ 50 12 280 6000 0.877 12 34.137 ORDER 715 [QZ][W50][PVD][AG][6500NM] QZ 50 12 280 6500 0.950 12 34.899 ORDER 716 [QZ][W50][PVD][AG][7000NM] QZ 50 12 280 7000 1.023 12 35.660 ORDER 717 [QZ][W50][PVD][AG][7500NM] QZ 50 12 280 7500 1.096 12 36.422 ORDER 718 [QZ][W50][PVD][AG][8000NM] QZ 50 12 280 8000 1.170 12 37.183 ORDER 719 [QZ][W50][PVD][AG][8500NM] QZ 50 12 280 8500 1.243 12 37.945 ORDER 720 [QZ][W50][PVD][AG][9000NM] QZ 50 12 280 9000 1.316 12 38.706 ORDER 721 [QZ][W50][PVD][AG][9500NM] QZ 50 12 280 9500 1.389 12 39.468 ORDER 722 [QZ][W50][PVD][AG][10000NM] QZ 50 12 280 10000 1.462 12 40.229 ORDER 723 [QZ][W75][PVD][AG][1000NM] QZ 75 10 280 1000 0.146 10 31.827 ORDER 724 [QZ][W75][PVD][AG][1500NM] QZ 75 10 280 1500 0.219 10 32.741 ORDER 725 [QZ][W75][PVD][AG][2000NM] QZ 75 10 280 2000 0.292 10 33.655 ORDER 726 [QZ][W75][PVD][AG][2500NM] QZ 75 10 280 2500 0.365 10 34.569 ORDER 727 [QZ][W75][PVD][AG][3000NM] QZ 75 10 280 3000 0.439 10 35.482 ORDER 728 [QZ][W75][PVD][AG][3500NM] QZ 75 10 280 3500 0.512 10 36.396 ORDER 729 [QZ][W75][PVD][AG][4000NM] QZ 75 10 280 4000 0.585 10 37.310 ORDER 730 [QZ][W75][PVD][AG][4500NM] QZ 75 10 280 4500 0.658 10 38.224 ORDER 731 [QZ][W75][PVD][AG][5000NM] QZ 75 10 280 5000 0.731 10 39.137 ORDER 732 [QZ][W75][PVD][AG][5500NM] QZ 75 10 280 5500 0.804 10 40.051 ORDER 733 [QZ][W75][PVD][AG][6000NM] QZ 75 10 280 6000 0.877 10 40.965 ORDER 734 [QZ][W75][PVD][AG][6500NM] QZ 75 10 280 6500 0.950 10 41.879 ORDER 735 [QZ][W75][PVD][AG][7000NM] QZ 75 10 280 7000 1.023 10 42.792 ORDER 736 [QZ][W75][PVD][AG][7500NM] QZ 75 10 280 7500 1.096 10 43.706 ORDER 737 [QZ][W75][PVD][AG][8000NM] QZ 75 10 280 8000 1.170 10 44.620 ORDER 738 [QZ][W75][PVD][AG][8500NM] QZ 75 10 280 8500 1.243 10 45.534 ORDER 739 [QZ][W75][PVD][AG][9000NM] QZ 75 10 280 9000 1.316 10 46.447 ORDER 740 [QZ][W75][PVD][AG][9500NM] QZ 75 10 280 9500 1.389 10 47.361 ORDER 741 [QZ][W75][PVD][AG][10000NM] QZ 75 10 280 10000 1.462 10 48.275 ORDER 742 [QZ][W100][PVD][AG][1000NM] QZ 100 8 280 1000 0.146 8 39.784 ORDER 743 [QZ][W100][PVD][AG][1500NM] QZ 100 8 280 1500 0.219 8 40.927 ORDER 744 [QZ][W100][PVD][AG][2000NM] QZ 100 8 280 2000 0.292 8 42.069 ORDER 745 [QZ][W100][PVD][AG][2500NM] QZ 100 8 280 2500 0.365 8 43.211 ORDER 746 [QZ][W100][PVD][AG][3000NM] QZ 100 8 280 3000 0.439 8 44.353 ORDER 747 [QZ][W100][PVD][AG][3500NM] QZ 100 8 280 3500 0.512 8 45.495 ORDER 748 [QZ][W100][PVD][AG][4000NM] QZ 100 8 280 4000 0.585 8 46.637 ORDER 749 [QZ][W100][PVD][AG][4500NM] QZ 100 8 280 4500 0.658 8 47.780 ORDER 750 [QZ][W100][PVD][AG][5000NM] QZ 100 8 280 5000 0.731 8 48.922 ORDER 751 [QZ][W100][PVD][AG][5500NM] QZ 100 8 280 5500 0.804 8 50.064 ORDER 752 [QZ][W100][PVD][AG][6000NM] QZ 100 8 280 6000 0.877 8 51.206 ORDER 753 [QZ][W100][PVD][AG][6500NM] QZ 100 8 280 6500 0.950 8 52.348 ORDER 754 [QZ][W100][PVD][AG][7000NM] QZ 100 8 280 7000 1.023 8 53.490 ORDER 755 [QZ][W100][PVD][AG][7500NM] QZ 100 8 280 7500 1.096 8 54.633 ORDER 756 [QZ][W100][PVD][AG][8000NM] QZ 100 8 280 8000 1.170 8 55.775 ORDER 757 [QZ][W100][PVD][AG][8500NM] QZ 100 8 280 8500 1.243 8 56.917 ORDER 758 [QZ][W100][PVD][AG][9000NM] QZ 100 8 280 9000 1.316 8 58.059 ORDER 759 [QZ][W100][PVD][AG][9500NM] QZ 100 8 280 9500 1.389 8 59.201 ORDER 760 [QZ][W100][PVD][AG][10000NM] QZ 100 8 280 10000 1.462 8 60.344 ORDER 761 [QZ][W125][PVD][AG][1000NM] QZ 125 7 280 1000 0.146 7 45.468 ORDER 762 [QZ][W125][PVD][AG][1500NM] QZ 125 7 280 1500 0.219 7 46.773 ORDER 763 [QZ][W125][PVD][AG][2000NM] QZ 125 7 280 2000 0.292 7 48.079 ORDER 764 [QZ][W125][PVD][AG][2500NM] QZ 125 7 280 2500 0.365 7 49.384 ORDER 765 [QZ][W125][PVD][AG][3000NM] QZ 125 7 280 3000 0.439 7 50.689 ORDER 766 [QZ][W125][PVD][AG][3500NM] QZ 125 7 280 3500 0.512 7 51.995 ORDER 767 [QZ][W125][PVD][AG][4000NM] QZ 125 7 280 4000 0.585 7 53.300 ORDER 768 [QZ][W125][PVD][AG][4500NM] QZ 125 7 280 4500 0.658 7 54.605 ORDER 769 [QZ][W125][PVD][AG][5000NM] QZ 125 7 280 5000 0.731 7 55.911 ORDER 770 [QZ][W125][PVD][AG][5500NM] QZ 125 7 280 5500 0.804 7 57.216 ORDER 771 [QZ][W125][PVD][AG][6000NM] QZ 125 7 280 6000 0.877 7 58.521 ORDER 772 [QZ][W125][PVD][AG][6500NM] QZ 125 7 280 6500 0.950 7 59.827 ORDER 773 [QZ][W125][PVD][AG][7000NM] QZ 125 7 280 7000 1.023 7 61.132 ORDER 774 [QZ][W125][PVD][AG][7500NM] QZ 125 7 280 7500 1.096 7 62.437 ORDER 775 [QZ][W125][PVD][AG][8000NM] QZ 125 7 280 8000 1.170 7 63.743 ORDER 776 [QZ][W125][PVD][AG][8500NM] QZ 125 7 280 8500 1.243 7 65.048 ORDER 777 [QZ][W125][PVD][AG][9000NM] QZ 125 7 280 9000 1.316 7 66.353 ORDER 778 [QZ][W125][PVD][AG][9500NM] QZ 125 7 280 9500 1.389 7 67.659 ORDER 779 [QZ][W125][PVD][AG][10000NM] QZ 125 7 280 10000 1.462 7 68.964 ORDER 780 [QZ][W150][PVD][AG][1000NM] QZ 150 6 280 1000 0.146 6 53.046 ORDER 781 [QZ][W150][PVD][AG][1500NM] QZ 150 6 280 1500 0.219 6 54.569 ORDER 782 [QZ][W150][PVD][AG][2000NM] QZ 150 6 280 2000 0.292 6 56.092 ORDER 783 [QZ][W150][PVD][AG][2500NM] QZ 150 6 280 2500 0.365 6 57.615 ORDER 784 [QZ][W150][PVD][AG][3000NM] QZ 150 6 280 3000 0.439 6 59.137 ORDER 785 [QZ][W150][PVD][AG][3500NM] QZ 150 6 280 3500 0.512 6 60.660 ORDER 786 [QZ][W150][PVD][AG][4000NM] QZ 150 6 280 4000 0.585 6 62.183 ORDER 787 [QZ][W150][PVD][AG][4500NM] QZ 150 6 280 4500 0.658 6 63.706 ORDER 788 [QZ][W150][PVD][AG][5000NM] QZ 150 6 280 5000 0.731 6 65.229 ORDER 789 [QZ][W150][PVD][AG][5500NM] QZ 150 6 280 5500 0.804 6 66.752 ORDER 790 [QZ][W150][PVD][AG][6000NM] QZ 150 6 280 6000 0.877 6 68.275 ORDER 791 [QZ][W150][PVD][AG][6500NM] QZ 150 6 280 6500 0.950 6 69.798 ORDER 792 [QZ][W150][PVD][AG][7000NM] QZ 150 6 280 7000 1.023 6 71.321 ORDER 793 [QZ][W150][PVD][AG][7500NM] QZ 150 6 280 7500 1.096 6 72.844 ORDER 794 [QZ][W150][PVD][AG][8000NM] QZ 150 6 280 8000 1.170 6 74.366 ORDER 795 [QZ][W150][PVD][AG][8500NM] QZ 150 6 280 8500 1.243 6 75.889 ORDER 796 [QZ][W150][PVD][AG][9000NM] QZ 150 6 280 9000 1.316 6 77.412 ORDER 797 [QZ][W150][PVD][AG][9500NM] QZ 150 6 280 9500 1.389 6 78.935 ORDER 798 [QZ][W150][PVD][AG][10000NM] QZ 150 6 280 10000 1.462 6 80.458 ORDER 799 [QZ][W200][PVD][AG][1000NM] QZ 200 3 280 1000 0.146 3 106.092 ORDER 800 [QZ][W200][PVD][AG][1500NM] QZ 200 3 280 1500 0.219 3 109.137 ORDER 801 [QZ][W200][PVD][AG][2000NM] QZ 200 3 280 2000 0.292 3 112.183 ORDER 802 [QZ][W200][PVD][AG][2500NM] QZ 200 3 280 2500 0.365 3 115.229 ORDER 803 [QZ][W200][PVD][AG][3000NM] QZ 200 3 280 3000 0.439 3 118.275 ORDER 804 [QZ][W200][PVD][AG][3500NM] QZ 200 3 280 3500 0.512 3 121.321 ORDER 805 [QZ][W200][PVD][AG][4000NM] QZ 200 3 280 4000 0.585 3 124.366 ORDER 806 [QZ][W200][PVD][AG][4500NM] QZ 200 3 280 4500 0.658 3 127.412 ORDER 807 [QZ][W200][PVD][AG][5000NM] QZ 200 3 280 5000 0.731 3 130.458 ORDER 808 [QZ][W200][PVD][AG][5500NM] QZ 200 3 280 5500 0.804 3 133.504 ORDER 809 [QZ][W200][PVD][AG][6000NM] QZ 200 3 280 6000 0.877 3 136.550 ORDER 810 [QZ][W200][PVD][AG][6500NM] QZ 200 3 280 6500 0.950 3 139.596 ORDER 811 [QZ][W200][PVD][AG][7000NM] QZ 200 3 280 7000 1.023 3 142.641 ORDER 812 [QZ][W200][PVD][AG][7500NM] QZ 200 3 280 7500 1.096 3 145.687 ORDER 813 [QZ][W200][PVD][AG][8000NM] QZ 200 3 280 8000 1.170 3 148.733 ORDER 814 [QZ][W200][PVD][AG][8500NM] QZ 200 3 280 8500 1.243 3 151.779 ORDER 815 [QZ][W200][PVD][AG][9000NM] QZ 200 3 280 9000 1.316 3 154.825 ORDER 816 [QZ][W200][PVD][AG][9500NM] QZ 200 3 280 9500 1.389 3 157.870 ORDER 817 [QZ][W200][PVD][AG][10000NM] QZ 200 3 280 10000 1.462 3 160.916 ORDER 818 [QZ][W300][PVD][AG][1000NM] QZ 300 280 1000 0.146 RFQ 819 [QZ][W300][PVD][AG][1500NM] QZ 300 280 1500 0.219 RFQ 820 [QZ][W300][PVD][AG][2000NM] QZ 300 280 2000 0.292 RFQ 821 [QZ][W300][PVD][AG][2500NM] QZ 300 280 2500 0.365 RFQ 822 [QZ][W300][PVD][AG][3000NM] QZ 300 280 3000 0.439 RFQ 823 [QZ][W300][PVD][AG][3500NM] QZ 300 280 3500 0.512 RFQ 824 [QZ][W300][PVD][AG][4000NM] QZ 300 280 4000 0.585 RFQ 825 [QZ][W300][PVD][AG][4500NM] QZ 300 280 4500 0.658 RFQ 826 [QZ][W300][PVD][AG][5000NM] QZ 300 280 5000 0.731 RFQ 827 [QZ][W300][PVD][AG][5500NM] QZ 300 280 5500 0.804 RFQ 828 [QZ][W300][PVD][AG][6000NM] QZ 300 280 6000 0.877 RFQ 829 [QZ][W300][PVD][AG][6500NM] QZ 300 280 6500 0.950 RFQ 830 [QZ][W300][PVD][AG][7000NM] QZ 300 280 7000 1.023 RFQ 831 [QZ][W300][PVD][AG][7500NM] QZ 300 280 7500 1.096 RFQ 832 [QZ][W300][PVD][AG][8000NM] QZ 300 280 8000 1.170 RFQ 833 [QZ][W300][PVD][AG][8500NM] QZ 300 280 8500 1.243 RFQ 834 [QZ][W300][PVD][AG][9000NM] QZ 300 280 9000 1.316 RFQ 835 [QZ][W300][PVD][AG][9500NM] QZ 300 280 9500 1.389 RFQ 836 [QZ][W300][PVD][AG][10000NM] QZ 300 280 10000 1.462 RFQ 837 [QZ][Wnnn][PVD][AG][1000NM] QZ nnn 280 1000 0.146 RFQ 838 [QZ][Wnnn][PVD][AG][1500NM] QZ nnn 280 1500 0.219 RFQ 839 [QZ][Wnnn][PVD][AG][2000NM] QZ nnn 280 2000 0.292 RFQ 840 [QZ][Wnnn][PVD][AG][2500NM] QZ nnn 280 2500 0.365 RFQ 841 [QZ][Wnnn][PVD][AG][3000NM] QZ nnn 280 3000 0.439 RFQ 842 [QZ][Wnnn][PVD][AG][3500NM] QZ nnn 280 3500 0.512 RFQ 843 [QZ][Wnnn][PVD][AG][4000NM] QZ nnn 280 4000 0.585 RFQ 844 [QZ][Wnnn][PVD][AG][4500NM] QZ nnn 280 4500 0.658 RFQ 845 [QZ][Wnnn][PVD][AG][5000NM] QZ nnn 280 5000 0.731 RFQ 846 [QZ][Wnnn][PVD][AG][5500NM] QZ nnn 280 5500 0.804 RFQ 847 [QZ][Wnnn][PVD][AG][6000NM] QZ nnn 280 6000 0.877 RFQ 848 [QZ][Wnnn][PVD][AG][6500NM] QZ nnn 280 6500 0.950 RFQ 849 [QZ][Wnnn][PVD][AG][7000NM] QZ nnn 280 7000 1.023 RFQ 850 [QZ][Wnnn][PVD][AG][7500NM] QZ nnn 280 7500 1.096 RFQ 851 [QZ][Wnnn][PVD][AG][8000NM] QZ nnn 280 8000 1.170 RFQ 852 [QZ][Wnnn][PVD][AG][8500NM] QZ nnn 280 8500 1.243 RFQ 853 [QZ][Wnnn][PVD][AG][9000NM] QZ nnn 280 9000 1.316 RFQ 854 [QZ][Wnnn][PVD][AG][9500NM] QZ nnn 280 9500 1.389 RFQ 855 [QZ][Wnnn][PVD][AG][10000NM] QZ nnn 280 10000 1.462 RFQ 856 [SAP][W25][PVD][AG][1000NM] SAP 25 24 280 1000 0.146 24 13.261 ORDER 857 [SAP][W25][PVD][AG][1500NM] SAP 25 24 280 1500 0.219 24 13.642 ORDER 858 [SAP][W25][PVD][AG][2000NM] SAP 25 24 280 2000 0.292 24 14.023 ORDER 859 [SAP][W25][PVD][AG][2500NM] SAP 25 24 280 2500 0.365 24 14.404 ORDER 860 [SAP][W25][PVD][AG][3000NM] SAP 25 24 280 3000 0.439 24 14.784 ORDER 861 [SAP][W25][PVD][AG][3500NM] SAP 25 24 280 3500 0.512 24 15.165 ORDER 862 [SAP][W25][PVD][AG][4000NM] SAP 25 24 280 4000 0.585 24 15.546 ORDER 863 [SAP][W25][PVD][AG][4500NM] SAP 25 24 280 4500 0.658 24 15.927 ORDER 864 [SAP][W25][PVD][AG][5000NM] SAP 25 24 280 5000 0.731 24 16.307 ORDER 865 [SAP][W25][PVD][AG][5500NM] SAP 25 24 280 5500 0.804 24 16.688 ORDER 866 [SAP][W25][PVD][AG][6000NM] SAP 25 24 280 6000 0.877 24 17.069 ORDER 867 [SAP][W25][PVD][AG][6500NM] SAP 25 24 280 6500 0.950 24 17.449 ORDER 868 [SAP][W25][PVD][AG][7000NM] SAP 25 24 280 7000 1.023 24 17.830 ORDER 869 [SAP][W25][PVD][AG][7500NM] SAP 25 24 280 7500 1.096 24 18.211 ORDER 870 [SAP][W25][PVD][AG][8000NM] SAP 25 24 280 8000 1.170 24 18.592 ORDER 871 [SAP][W25][PVD][AG][8500NM] SAP 25 24 280 8500 1.243 24 18.972 ORDER 872 [SAP][W25][PVD][AG][9000NM] SAP 25 24 280 9000 1.316 24 19.353 ORDER 873 [SAP][W25][PVD][AG][9500NM] SAP 25 24 280 9500 1.389 24 19.734 ORDER 874 [SAP][W25][PVD][AG][10000NM] SAP 25 24 280 10000 1.462 24 20.115 ORDER 875 [SAP][W50][PVD][AG][1000NM] SAP 50 12 280 1000 0.146 12 26.523 ORDER 876 [SAP][W50][PVD][AG][1500NM] SAP 50 12 280 1500 0.219 12 27.284 ORDER 877 [SAP][W50][PVD][AG][2000NM] SAP 50 12 280 2000 0.292 12 28.046 ORDER 878 [SAP][W50][PVD][AG][2500NM] SAP 50 12 280 2500 0.365 12 28.807 ORDER 879 [SAP][W50][PVD][AG][3000NM] SAP 50 12 280 3000 0.439 12 29.569 ORDER 880 [SAP][W50][PVD][AG][3500NM] SAP 50 12 280 3500 0.512 12 30.330 ORDER 881 [SAP][W50][PVD][AG][4000NM] SAP 50 12 280 4000 0.585 12 31.092 ORDER 882 [SAP][W50][PVD][AG][4500NM] SAP 50 12 280 4500 0.658 12 31.853 ORDER 883 [SAP][W50][PVD][AG][5000NM] SAP 50 12 280 5000 0.731 12 32.615 ORDER 884 [SAP][W50][PVD][AG][5500NM] SAP 50 12 280 5500 0.804 12 33.376 ORDER 885 [SAP][W50][PVD][AG][6000NM] SAP 50 12 280 6000 0.877 12 34.137 ORDER 886 [SAP][W50][PVD][AG][6500NM] SAP 50 12 280 6500 0.950 12 34.899 ORDER 887 [SAP][W50][PVD][AG][7000NM] SAP 50 12 280 7000 1.023 12 35.660 ORDER 888 [SAP][W50][PVD][AG][7500NM] SAP 50 12 280 7500 1.096 12 36.422 ORDER 889 [SAP][W50][PVD][AG][8000NM] SAP 50 12 280 8000 1.170 12 37.183 ORDER 890 [SAP][W50][PVD][AG][8500NM] SAP 50 12 280 8500 1.243 12 37.945 ORDER 891 [SAP][W50][PVD][AG][9000NM] SAP 50 12 280 9000 1.316 12 38.706 ORDER 892 [SAP][W50][PVD][AG][9500NM] SAP 50 12 280 9500 1.389 12 39.468 ORDER 893 [SAP][W50][PVD][AG][10000NM] SAP 50 12 280 10000 1.462 12 40.229 ORDER 894 [SAP][W75][PVD][AG][1000NM] SAP 75 10 280 1000 0.146 10 31.827 ORDER 895 [SAP][W75][PVD][AG][1500NM] SAP 75 10 280 1500 0.219 10 32.741 ORDER 896 [SAP][W75][PVD][AG][2000NM] SAP 75 10 280 2000 0.292 10 33.655 ORDER 897 [SAP][W75][PVD][AG][2500NM] SAP 75 10 280 2500 0.365 10 34.569 ORDER 898 [SAP][W75][PVD][AG][3000NM] SAP 75 10 280 3000 0.439 10 35.482 ORDER 899 [SAP][W75][PVD][AG][3500NM] SAP 75 10 280 3500 0.512 10 36.396 ORDER 900 [SAP][W75][PVD][AG][4000NM] SAP 75 10 280 4000 0.585 10 37.310 ORDER 901 [SAP][W75][PVD][AG][4500NM] SAP 75 10 280 4500 0.658 10 38.224 ORDER 902 [SAP][W75][PVD][AG][5000NM] SAP 75 10 280 5000 0.731 10 39.137 ORDER 903 [SAP][W75][PVD][AG][5500NM] SAP 75 10 280 5500 0.804 10 40.051 ORDER 904 [SAP][W75][PVD][AG][6000NM] SAP 75 10 280 6000 0.877 10 40.965 ORDER 905 [SAP][W75][PVD][AG][6500NM] SAP 75 10 280 6500 0.950 10 41.879 ORDER 906 [SAP][W75][PVD][AG][7000NM] SAP 75 10 280 7000 1.023 10 42.792 ORDER 907 [SAP][W75][PVD][AG][7500NM] SAP 75 10 280 7500 1.096 10 43.706 ORDER 908 [SAP][W75][PVD][AG][8000NM] SAP 75 10 280 8000 1.170 10 44.620 ORDER 909 [SAP][W75][PVD][AG][8500NM] SAP 75 10 280 8500 1.243 10 45.534 ORDER 910 [SAP][W75][PVD][AG][9000NM] SAP 75 10 280 9000 1.316 10 46.447 ORDER 911 [SAP][W75][PVD][AG][9500NM] SAP 75 10 280 9500 1.389 10 47.361 ORDER 912 [SAP][W75][PVD][AG][10000NM] SAP 75 10 280 10000 1.462 10 48.275 ORDER 913 [SAP][W100][PVD][AG][1000NM] SAP 100 8 280 1000 0.146 8 39.784 ORDER 914 [SAP][W100][PVD][AG][1500NM] SAP 100 8 280 1500 0.219 8 40.927 ORDER 915 [SAP][W100][PVD][AG][2000NM] SAP 100 8 280 2000 0.292 8 42.069 ORDER 916 [SAP][W100][PVD][AG][2500NM] SAP 100 8 280 2500 0.365 8 43.211 ORDER 917 [SAP][W100][PVD][AG][3000NM] SAP 100 8 280 3000 0.439 8 44.353 ORDER 918 [SAP][W100][PVD][AG][3500NM] SAP 100 8 280 3500 0.512 8 45.495 ORDER 919 [SAP][W100][PVD][AG][4000NM] SAP 100 8 280 4000 0.585 8 46.637 ORDER 920 [SAP][W100][PVD][AG][4500NM] SAP 100 8 280 4500 0.658 8 47.780 ORDER 921 [SAP][W100][PVD][AG][5000NM] SAP 100 8 280 5000 0.731 8 48.922 ORDER 922 [SAP][W100][PVD][AG][5500NM] SAP 100 8 280 5500 0.804 8 50.064 ORDER 923 [SAP][W100][PVD][AG][6000NM] SAP 100 8 280 6000 0.877 8 51.206 ORDER 924 [SAP][W100][PVD][AG][6500NM] SAP 100 8 280 6500 0.950 8 52.348 ORDER 925 [SAP][W100][PVD][AG][7000NM] SAP 100 8 280 7000 1.023 8 53.490 ORDER 926 [SAP][W100][PVD][AG][7500NM] SAP 100 8 280 7500 1.096 8 54.633 ORDER 927 [SAP][W100][PVD][AG][8000NM] SAP 100 8 280 8000 1.170 8 55.775 ORDER 928 [SAP][W100][PVD][AG][8500NM] SAP 100 8 280 8500 1.243 8 56.917 ORDER 929 [SAP][W100][PVD][AG][9000NM] SAP 100 8 280 9000 1.316 8 58.059 ORDER 930 [SAP][W100][PVD][AG][9500NM] SAP 100 8 280 9500 1.389 8 59.201 ORDER 931 [SAP][W100][PVD][AG][10000NM] SAP 100 8 280 10000 1.462 8 60.344 ORDER 932 [SAP][W125][PVD][AG][1000NM] SAP 125 7 280 1000 0.146 7 45.468 ORDER 933 [SAP][W125][PVD][AG][1500NM] SAP 125 7 280 1500 0.219 7 46.773 ORDER 934 [SAP][W125][PVD][AG][2000NM] SAP 125 7 280 2000 0.292 7 48.079 ORDER 935 [SAP][W125][PVD][AG][2500NM] SAP 125 7 280 2500 0.365 7 49.384 ORDER 936 [SAP][W125][PVD][AG][3000NM] SAP 125 7 280 3000 0.439 7 50.689 ORDER 937 [SAP][W125][PVD][AG][3500NM] SAP 125 7 280 3500 0.512 7 51.995 ORDER 938 [SAP][W125][PVD][AG][4000NM] SAP 125 7 280 4000 0.585 7 53.300 ORDER 939 [SAP][W125][PVD][AG][4500NM] SAP 125 7 280 4500 0.658 7 54.605 ORDER 940 [SAP][W125][PVD][AG][5000NM] SAP 125 7 280 5000 0.731 7 55.911 ORDER 941 [SAP][W125][PVD][AG][5500NM] SAP 125 7 280 5500 0.804 7 57.216 ORDER 942 [SAP][W125][PVD][AG][6000NM] SAP 125 7 280 6000 0.877 7 58.521 ORDER 943 [SAP][W125][PVD][AG][6500NM] SAP 125 7 280 6500 0.950 7 59.827 ORDER 944 [SAP][W125][PVD][AG][7000NM] SAP 125 7 280 7000 1.023 7 61.132 ORDER 945 [SAP][W125][PVD][AG][7500NM] SAP 125 7 280 7500 1.096 7 62.437 ORDER 946 [SAP][W125][PVD][AG][8000NM] SAP 125 7 280 8000 1.170 7 63.743 ORDER 947 [SAP][W125][PVD][AG][8500NM] SAP 125 7 280 8500 1.243 7 65.048 ORDER 948 [SAP][W125][PVD][AG][9000NM] SAP 125 7 280 9000 1.316 7 66.353 ORDER 949 [SAP][W125][PVD][AG][9500NM] SAP 125 7 280 9500 1.389 7 67.659 ORDER 950 [SAP][W125][PVD][AG][10000NM] SAP 125 7 280 10000 1.462 7 68.964 ORDER 951 [SAP][W150][PVD][AG][1000NM] SAP 150 6 280 1000 0.146 6 53.046 ORDER 952 [SAP][W150][PVD][AG][1500NM] SAP 150 6 280 1500 0.219 6 54.569 ORDER 953 [SAP][W150][PVD][AG][2000NM] SAP 150 6 280 2000 0.292 6 56.092 ORDER 954 [SAP][W150][PVD][AG][2500NM] SAP 150 6 280 2500 0.365 6 57.615 ORDER 955 [SAP][W150][PVD][AG][3000NM] SAP 150 6 280 3000 0.439 6 59.137 ORDER 956 [SAP][W150][PVD][AG][3500NM] SAP 150 6 280 3500 0.512 6 60.660 ORDER 957 [SAP][W150][PVD][AG][4000NM] SAP 150 6 280 4000 0.585 6 62.183 ORDER 958 [SAP][W150][PVD][AG][4500NM] SAP 150 6 280 4500 0.658 6 63.706 ORDER 959 [SAP][W150][PVD][AG][5000NM] SAP 150 6 280 5000 0.731 6 65.229 ORDER 960 [SAP][W150][PVD][AG][5500NM] SAP 150 6 280 5500 0.804 6 66.752 ORDER 961 [SAP][W150][PVD][AG][6000NM] SAP 150 6 280 6000 0.877 6 68.275 ORDER 962 [SAP][W150][PVD][AG][6500NM] SAP 150 6 280 6500 0.950 6 69.798 ORDER 963 [SAP][W150][PVD][AG][7000NM] SAP 150 6 280 7000 1.023 6 71.321 ORDER 964 [SAP][W150][PVD][AG][7500NM] SAP 150 6 280 7500 1.096 6 72.844 ORDER 965 [SAP][W150][PVD][AG][8000NM] SAP 150 6 280 8000 1.170 6 74.366 ORDER 966 [SAP][W150][PVD][AG][8500NM] SAP 150 6 280 8500 1.243 6 75.889 ORDER 967 [SAP][W150][PVD][AG][9000NM] SAP 150 6 280 9000 1.316 6 77.412 ORDER 968 [SAP][W150][PVD][AG][9500NM] SAP 150 6 280 9500 1.389 6 78.935 ORDER 969 [SAP][W150][PVD][AG][10000NM] SAP 150 6 280 10000 1.462 6 80.458 ORDER 970 [SAP][W200][PVD][AG][1000NM] SAP 200 3 280 1000 0.146 3 106.092 ORDER 971 [SAP][W200][PVD][AG][1500NM] SAP 200 3 280 1500 0.219 3 109.137 ORDER 972 [SAP][W200][PVD][AG][2000NM] SAP 200 3 280 2000 0.292 3 112.183 ORDER 973 [SAP][W200][PVD][AG][2500NM] SAP 200 3 280 2500 0.365 3 115.229 ORDER 974 [SAP][W200][PVD][AG][3000NM] SAP 200 3 280 3000 0.439 3 118.275 ORDER 975 [SAP][W200][PVD][AG][3500NM] SAP 200 3 280 3500 0.512 3 121.321 ORDER 976 [SAP][W200][PVD][AG][4000NM] SAP 200 3 280 4000 0.585 3 124.366 ORDER 977 [SAP][W200][PVD][AG][4500NM] SAP 200 3 280 4500 0.658 3 127.412 ORDER 978 [SAP][W200][PVD][AG][5000NM] SAP 200 3 280 5000 0.731 3 130.458 ORDER 979 [SAP][W200][PVD][AG][5500NM] SAP 200 3 280 5500 0.804 3 133.504 ORDER 980 [SAP][W200][PVD][AG][6000NM] SAP 200 3 280 6000 0.877 3 136.550 ORDER 981 [SAP][W200][PVD][AG][6500NM] SAP 200 3 280 6500 0.950 3 139.596 ORDER 982 [SAP][W200][PVD][AG][7000NM] SAP 200 3 280 7000 1.023 3 142.641 ORDER 983 [SAP][W200][PVD][AG][7500NM] SAP 200 3 280 7500 1.096 3 145.687 ORDER 984 [SAP][W200][PVD][AG][8000NM] SAP 200 3 280 8000 1.170 3 148.733 ORDER 985 [SAP][W200][PVD][AG][8500NM] SAP 200 3 280 8500 1.243 3 151.779 ORDER 986 [SAP][W200][PVD][AG][9000NM] SAP 200 3 280 9000 1.316 3 154.825 ORDER 987 [SAP][W200][PVD][AG][9500NM] SAP 200 3 280 9500 1.389 3 157.870 ORDER 988 [SAP][W200][PVD][AG][10000NM] SAP 200 3 280 10000 1.462 3 160.916 ORDER 989 [SAP][W300][PVD][AG][1000NM] SAP 300 280 1000 0.146 RFQ 990 [SAP][W300][PVD][AG][1500NM] SAP 300 280 1500 0.219 RFQ 991 [SAP][W300][PVD][AG][2000NM] SAP 300 280 2000 0.292 RFQ 992 [SAP][W300][PVD][AG][2500NM] SAP 300 280 2500 0.365 RFQ 993 [SAP][W300][PVD][AG][3000NM] SAP 300 280 3000 0.439 RFQ 994 [SAP][W300][PVD][AG][3500NM] SAP 300 280 3500 0.512 RFQ 995 [SAP][W300][PVD][AG][4000NM] SAP 300 280 4000 0.585 RFQ 996 [SAP][W300][PVD][AG][4500NM] SAP 300 280 4500 0.658 RFQ 997 [SAP][W300][PVD][AG][5000NM] SAP 300 280 5000 0.731 RFQ 998 [SAP][W300][PVD][AG][5500NM] SAP 300 280 5500 0.804 RFQ 999 [SAP][W300][PVD][AG][6000NM] SAP 300 280 6000 0.877 RFQ 1000 [SAP][W300][PVD][AG][6500NM] SAP 300 280 6500 0.950 RFQ 1001 [SAP][W300][PVD][AG][7000NM] SAP 300 280 7000 1.023 RFQ 1002 [SAP][W300][PVD][AG][7500NM] SAP 300 280 7500 1.096 RFQ 1003 [SAP][W300][PVD][AG][8000NM] SAP 300 280 8000 1.170 RFQ 1004 [SAP][W300][PVD][AG][8500NM] SAP 300 280 8500 1.243 RFQ 1005 [SAP][W300][PVD][AG][9000NM] SAP 300 280 9000 1.316 RFQ 1006 [SAP][W300][PVD][AG][9500NM] SAP 300 280 9500 1.389 RFQ 1007 [SAP][W300][PVD][AG][10000NM] SAP 300 280 10000 1.462 RFQ 1008 [SAP][Wnnn][PVD][AG][1000NM] SAP nnn 280 1000 0.146 RFQ 1009 [SAP][Wnnn][PVD][AG][1500NM] SAP nnn 280 1500 0.219 RFQ 1010 [SAP][Wnnn][PVD][AG][2000NM] SAP nnn 280 2000 0.292 RFQ 1011 [SAP][Wnnn][PVD][AG][2500NM] SAP nnn 280 2500 0.365 RFQ 1012 [SAP][Wnnn][PVD][AG][3000NM] SAP nnn 280 3000 0.439 RFQ 1013 [SAP][Wnnn][PVD][AG][3500NM] SAP nnn 280 3500 0.512 RFQ 1014 [SAP][Wnnn][PVD][AG][4000NM] SAP nnn 280 4000 0.585 RFQ 1015 [SAP][Wnnn][PVD][AG][4500NM] SAP nnn 280 4500 0.658 RFQ 1016 [SAP][Wnnn][PVD][AG][5000NM] SAP nnn 280 5000 0.731 RFQ 1017 [SAP][Wnnn][PVD][AG][5500NM] SAP nnn 280 5500 0.804 RFQ 1018 [SAP][Wnnn][PVD][AG][6000NM] SAP nnn 280 6000 0.877 RFQ 1019 [SAP][Wnnn][PVD][AG][6500NM] SAP nnn 280 6500 0.950 RFQ 1020 [SAP][Wnnn][PVD][AG][7000NM] SAP nnn 280 7000 1.023 RFQ 1021 [SAP][Wnnn][PVD][AG][7500NM] SAP nnn 280 7500 1.096 RFQ 1022 [SAP][Wnnn][PVD][AG][8000NM] SAP nnn 280 8000 1.170 RFQ 1023 [SAP][Wnnn][PVD][AG][8500NM] SAP nnn 280 8500 1.243 RFQ 1024 [SAP][Wnnn][PVD][AG][9000NM] SAP nnn 280 9000 1.316 RFQ 1025 [SAP][Wnnn][PVD][AG][9500NM] SAP nnn 280 9500 1.389 RFQ 1026 [SAP][Wnnn][PVD][AG][10000NM] SAP nnn 280 10000 1.462 RFQ 1027 [XYZ][W25][PVD][AG][1000NM] XYZ 25 24 280 1000 0.146 24 13.261 ORDER 1028 [XYZ][W25][PVD][AG][1500NM] XYZ 25 24 280 1500 0.219 24 13.642 ORDER 1029 [XYZ][W25][PVD][AG][2000NM] XYZ 25 24 280 2000 0.292 24 14.023 ORDER 1030 [XYZ][W25][PVD][AG][2500NM] XYZ 25 24 280 2500 0.365 24 14.404 ORDER 1031 [XYZ][W25][PVD][AG][3000NM] XYZ 25 24 280 3000 0.439 24 14.784 ORDER 1032 [XYZ][W25][PVD][AG][3500NM] XYZ 25 24 280 3500 0.512 24 15.165 ORDER 1033 [XYZ][W25][PVD][AG][4000NM] XYZ 25 24 280 4000 0.585 24 15.546 ORDER 1034 [XYZ][W25][PVD][AG][4500NM] XYZ 25 24 280 4500 0.658 24 15.927 ORDER 1035 [XYZ][W25][PVD][AG][5000NM] XYZ 25 24 280 5000 0.731 24 16.307 ORDER 1036 [XYZ][W25][PVD][AG][5500NM] XYZ 25 24 280 5500 0.804 24 16.688 ORDER 1037 [XYZ][W25][PVD][AG][6000NM] XYZ 25 24 280 6000 0.877 24 17.069 ORDER 1038 [XYZ][W25][PVD][AG][6500NM] XYZ 25 24 280 6500 0.950 24 17.449 ORDER 1039 [XYZ][W25][PVD][AG][7000NM] XYZ 25 24 280 7000 1.023 24 17.830 ORDER 1040 [XYZ][W25][PVD][AG][7500NM] XYZ 25 24 280 7500 1.096 24 18.211 ORDER 1041 [XYZ][W25][PVD][AG][8000NM] XYZ 25 24 280 8000 1.170 24 18.592 ORDER 1042 [XYZ][W25][PVD][AG][8500NM] XYZ 25 24 280 8500 1.243 24 18.972 ORDER 1043 [XYZ][W25][PVD][AG][9000NM] XYZ 25 24 280 9000 1.316 24 19.353 ORDER 1044 [XYZ][W25][PVD][AG][9500NM] XYZ 25 24 280 9500 1.389 24 19.734 ORDER 1045 [XYZ][W25][PVD][AG][10000NM] XYZ 25 24 280 10000 1.462 24 20.115 ORDER 1046 [XYZ][W50][PVD][AG][1000NM] XYZ 50 12 280 1000 0.146 12 26.523 ORDER 1047 [XYZ][W50][PVD][AG][1500NM] XYZ 50 12 280 1500 0.219 12 27.284 ORDER 1048 [XYZ][W50][PVD][AG][2000NM] XYZ 50 12 280 2000 0.292 12 28.046 ORDER 1049 [XYZ][W50][PVD][AG][2500NM] XYZ 50 12 280 2500 0.365 12 28.807 ORDER 1050 [XYZ][W50][PVD][AG][3000NM] XYZ 50 12 280 3000 0.439 12 29.569 ORDER 1051 [XYZ][W50][PVD][AG][3500NM] XYZ 50 12 280 3500 0.512 12 30.330 ORDER 1052 [XYZ][W50][PVD][AG][4000NM] XYZ 50 12 280 4000 0.585 12 31.092 ORDER 1053 [XYZ][W50][PVD][AG][4500NM] XYZ 50 12 280 4500 0.658 12 31.853 ORDER 1054 [XYZ][W50][PVD][AG][5000NM] XYZ 50 12 280 5000 0.731 12 32.615 ORDER 1055 [XYZ][W50][PVD][AG][5500NM] XYZ 50 12 280 5500 0.804 12 33.376 ORDER 1056 [XYZ][W50][PVD][AG][6000NM] XYZ 50 12 280 6000 0.877 12 34.137 ORDER 1057 [XYZ][W50][PVD][AG][6500NM] XYZ 50 12 280 6500 0.950 12 34.899 ORDER 1058 [XYZ][W50][PVD][AG][7000NM] XYZ 50 12 280 7000 1.023 12 35.660 ORDER 1059 [XYZ][W50][PVD][AG][7500NM] XYZ 50 12 280 7500 1.096 12 36.422 ORDER 1060 [XYZ][W50][PVD][AG][8000NM] XYZ 50 12 280 8000 1.170 12 37.183 ORDER 1061 [XYZ][W50][PVD][AG][8500NM] XYZ 50 12 280 8500 1.243 12 37.945 ORDER 1062 [XYZ][W50][PVD][AG][9000NM] XYZ 50 12 280 9000 1.316 12 38.706 ORDER 1063 [XYZ][W50][PVD][AG][9500NM] XYZ 50 12 280 9500 1.389 12 39.468 ORDER 1064 [XYZ][W50][PVD][AG][10000NM] XYZ 50 12 280 10000 1.462 12 40.229 ORDER 1065 [XYZ][W75][PVD][AG][1000NM] XYZ 75 10 280 1000 0.146 10 31.827 ORDER 1066 [XYZ][W75][PVD][AG][1500NM] XYZ 75 10 280 1500 0.219 10 32.741 ORDER 1067 [XYZ][W75][PVD][AG][2000NM] XYZ 75 10 280 2000 0.292 10 33.655 ORDER 1068 [XYZ][W75][PVD][AG][2500NM] XYZ 75 10 280 2500 0.365 10 34.569 ORDER 1069 [XYZ][W75][PVD][AG][3000NM] XYZ 75 10 280 3000 0.439 10 35.482 ORDER 1070 [XYZ][W75][PVD][AG][3500NM] XYZ 75 10 280 3500 0.512 10 36.396 ORDER 1071 [XYZ][W75][PVD][AG][4000NM] XYZ 75 10 280 4000 0.585 10 37.310 ORDER 1072 [XYZ][W75][PVD][AG][4500NM] XYZ 75 10 280 4500 0.658 10 38.224 ORDER 1073 [XYZ][W75][PVD][AG][5000NM] XYZ 75 10 280 5000 0.731 10 39.137 ORDER 1074 [XYZ][W75][PVD][AG][5500NM] XYZ 75 10 280 5500 0.804 10 40.051 ORDER 1075 [XYZ][W75][PVD][AG][6000NM] XYZ 75 10 280 6000 0.877 10 40.965 ORDER 1076 [XYZ][W75][PVD][AG][6500NM] XYZ 75 10 280 6500 0.950 10 41.879 ORDER 1077 [XYZ][W75][PVD][AG][7000NM] XYZ 75 10 280 7000 1.023 10 42.792 ORDER 1078 [XYZ][W75][PVD][AG][7500NM] XYZ 75 10 280 7500 1.096 10 43.706 ORDER 1079 [XYZ][W75][PVD][AG][8000NM] XYZ 75 10 280 8000 1.170 10 44.620 ORDER 1080 [XYZ][W75][PVD][AG][8500NM] XYZ 75 10 280 8500 1.243 10 45.534 ORDER 1081 [XYZ][W75][PVD][AG][9000NM] XYZ 75 10 280 9000 1.316 10 46.447 ORDER 1082 [XYZ][W75][PVD][AG][9500NM] XYZ 75 10 280 9500 1.389 10 47.361 ORDER 1083 [XYZ][W75][PVD][AG][10000NM] XYZ 75 10 280 10000 1.462 10 48.275 ORDER 1084 [XYZ][W100][PVD][AG][1000NM] XYZ 100 8 280 1000 0.146 8 39.784 ORDER 1085 [XYZ][W100][PVD][AG][1500NM] XYZ 100 8 280 1500 0.219 8 40.927 ORDER 1086 [XYZ][W100][PVD][AG][2000NM] XYZ 100 8 280 2000 0.292 8 42.069 ORDER 1087 [XYZ][W100][PVD][AG][2500NM] XYZ 100 8 280 2500 0.365 8 43.211 ORDER 1088 [XYZ][W100][PVD][AG][3000NM] XYZ 100 8 280 3000 0.439 8 44.353 ORDER 1089 [XYZ][W100][PVD][AG][3500NM] XYZ 100 8 280 3500 0.512 8 45.495 ORDER 1090 [XYZ][W100][PVD][AG][4000NM] XYZ 100 8 280 4000 0.585 8 46.637 ORDER 1091 [XYZ][W100][PVD][AG][4500NM] XYZ 100 8 280 4500 0.658 8 47.780 ORDER 1092 [XYZ][W100][PVD][AG][5000NM] XYZ 100 8 280 5000 0.731 8 48.922 ORDER 1093 [XYZ][W100][PVD][AG][5500NM] XYZ 100 8 280 5500 0.804 8 50.064 ORDER 1094 [XYZ][W100][PVD][AG][6000NM] XYZ 100 8 280 6000 0.877 8 51.206 ORDER 1095 [XYZ][W100][PVD][AG][6500NM] XYZ 100 8 280 6500 0.950 8 52.348 ORDER 1096 [XYZ][W100][PVD][AG][7000NM] XYZ 100 8 280 7000 1.023 8 53.490 ORDER 1097 [XYZ][W100][PVD][AG][7500NM] XYZ 100 8 280 7500 1.096 8 54.633 ORDER 1098 [XYZ][W100][PVD][AG][8000NM] XYZ 100 8 280 8000 1.170 8 55.775 ORDER 1099 [XYZ][W100][PVD][AG][8500NM] XYZ 100 8 280 8500 1.243 8 56.917 ORDER 1100 [XYZ][W100][PVD][AG][9000NM] XYZ 100 8 280 9000 1.316 8 58.059 ORDER 1101 [XYZ][W100][PVD][AG][9500NM] XYZ 100 8 280 9500 1.389 8 59.201 ORDER 1102 [XYZ][W100][PVD][AG][10000NM] XYZ 100 8 280 10000 1.462 8 60.344 ORDER 1103 [XYZ][W125][PVD][AG][1000NM] XYZ 125 7 280 1000 0.146 7 45.468 ORDER 1104 [XYZ][W125][PVD][AG][1500NM] XYZ 125 7 280 1500 0.219 7 46.773 ORDER 1105 [XYZ][W125][PVD][AG][2000NM] XYZ 125 7 280 2000 0.292 7 48.079 ORDER 1106 [XYZ][W125][PVD][AG][2500NM] XYZ 125 7 280 2500 0.365 7 49.384 ORDER 1107 [XYZ][W125][PVD][AG][3000NM] XYZ 125 7 280 3000 0.439 7 50.689 ORDER 1108 [XYZ][W125][PVD][AG][3500NM] XYZ 125 7 280 3500 0.512 7 51.995 ORDER 1109 [XYZ][W125][PVD][AG][4000NM] XYZ 125 7 280 4000 0.585 7 53.300 ORDER 1110 [XYZ][W125][PVD][AG][4500NM] XYZ 125 7 280 4500 0.658 7 54.605 ORDER 1111 [XYZ][W125][PVD][AG][5000NM] XYZ 125 7 280 5000 0.731 7 55.911 ORDER 1112 [XYZ][W125][PVD][AG][5500NM] XYZ 125 7 280 5500 0.804 7 57.216 ORDER 1113 [XYZ][W125][PVD][AG][6000NM] XYZ 125 7 280 6000 0.877 7 58.521 ORDER 1114 [XYZ][W125][PVD][AG][6500NM] XYZ 125 7 280 6500 0.950 7 59.827 ORDER 1115 [XYZ][W125][PVD][AG][7000NM] XYZ 125 7 280 7000 1.023 7 61.132 ORDER 1116 [XYZ][W125][PVD][AG][7500NM] XYZ 125 7 280 7500 1.096 7 62.437 ORDER 1117 [XYZ][W125][PVD][AG][8000NM] XYZ 125 7 280 8000 1.170 7 63.743 ORDER 1118 [XYZ][W125][PVD][AG][8500NM] XYZ 125 7 280 8500 1.243 7 65.048 ORDER 1119 [XYZ][W125][PVD][AG][9000NM] XYZ 125 7 280 9000 1.316 7 66.353 ORDER 1120 [XYZ][W125][PVD][AG][9500NM] XYZ 125 7 280 9500 1.389 7 67.659 ORDER 1121 [XYZ][W125][PVD][AG][10000NM] XYZ 125 7 280 10000 1.462 7 68.964 ORDER 1122 [XYZ][W150][PVD][AG][1000NM] XYZ 150 6 280 1000 0.146 6 53.046 ORDER 1123 [XYZ][W150][PVD][AG][1500NM] XYZ 150 6 280 1500 0.219 6 54.569 ORDER 1124 [XYZ][W150][PVD][AG][2000NM] XYZ 150 6 280 2000 0.292 6 56.092 ORDER 1125 [XYZ][W150][PVD][AG][2500NM] XYZ 150 6 280 2500 0.365 6 57.615 ORDER 1126 [XYZ][W150][PVD][AG][3000NM] XYZ 150 6 280 3000 0.439 6 59.137 ORDER 1127 [XYZ][W150][PVD][AG][3500NM] XYZ 150 6 280 3500 0.512 6 60.660 ORDER 1128 [XYZ][W150][PVD][AG][4000NM] XYZ 150 6 280 4000 0.585 6 62.183 ORDER 1129 [XYZ][W150][PVD][AG][4500NM] XYZ 150 6 280 4500 0.658 6 63.706 ORDER 1130 [XYZ][W150][PVD][AG][5000NM] XYZ 150 6 280 5000 0.731 6 65.229 ORDER 1131 [XYZ][W150][PVD][AG][5500NM] XYZ 150 6 280 5500 0.804 6 66.752 ORDER 1132 [XYZ][W150][PVD][AG][6000NM] XYZ 150 6 280 6000 0.877 6 68.275 ORDER 1133 [XYZ][W150][PVD][AG][6500NM] XYZ 150 6 280 6500 0.950 6 69.798 ORDER 1134 [XYZ][W150][PVD][AG][7000NM] XYZ 150 6 280 7000 1.023 6 71.321 ORDER 1135 [XYZ][W150][PVD][AG][7500NM] XYZ 150 6 280 7500 1.096 6 72.844 ORDER 1136 [XYZ][W150][PVD][AG][8000NM] XYZ 150 6 280 8000 1.170 6 74.366 ORDER 1137 [XYZ][W150][PVD][AG][8500NM] XYZ 150 6 280 8500 1.243 6 75.889 ORDER 1138 [XYZ][W150][PVD][AG][9000NM] XYZ 150 6 280 9000 1.316 6 77.412 ORDER 1139 [XYZ][W150][PVD][AG][9500NM] XYZ 150 6 280 9500 1.389 6 78.935 ORDER 1140 [XYZ][W150][PVD][AG][10000NM] XYZ 150 6 280 10000 1.462 6 80.458 ORDER 1141 [XYZ][W200][PVD][AG][1000NM] XYZ 200 3 280 1000 0.146 3 106.092 ORDER 1142 [XYZ][W200][PVD][AG][1500NM] XYZ 200 3 280 1500 0.219 3 109.137 ORDER 1143 [XYZ][W200][PVD][AG][2000NM] XYZ 200 3 280 2000 0.292 3 112.183 ORDER 1144 [XYZ][W200][PVD][AG][2500NM] XYZ 200 3 280 2500 0.365 3 115.229 ORDER 1145 [XYZ][W200][PVD][AG][3000NM] XYZ 200 3 280 3000 0.439 3 118.275 ORDER 1146 [XYZ][W200][PVD][AG][3500NM] XYZ 200 3 280 3500 0.512 3 121.321 ORDER 1147 [XYZ][W200][PVD][AG][4000NM] XYZ 200 3 280 4000 0.585 3 124.366 ORDER 1148 [XYZ][W200][PVD][AG][4500NM] XYZ 200 3 280 4500 0.658 3 127.412 ORDER 1149 [XYZ][W200][PVD][AG][5000NM] XYZ 200 3 280 5000 0.731 3 130.458 ORDER 1150 [XYZ][W200][PVD][AG][5500NM] XYZ 200 3 280 5500 0.804 3 133.504 ORDER 1151 [XYZ][W200][PVD][AG][6000NM] XYZ 200 3 280 6000 0.877 3 136.550 ORDER 1152 [XYZ][W200][PVD][AG][6500NM] XYZ 200 3 280 6500 0.950 3 139.596 ORDER 1153 [XYZ][W200][PVD][AG][7000NM] XYZ 200 3 280 7000 1.023 3 142.641 ORDER 1154 [XYZ][W200][PVD][AG][7500NM] XYZ 200 3 280 7500 1.096 3 145.687 ORDER 1155 [XYZ][W200][PVD][AG][8000NM] XYZ 200 3 280 8000 1.170 3 148.733 ORDER 1156 [XYZ][W200][PVD][AG][8500NM] XYZ 200 3 280 8500 1.243 3 151.779 ORDER 1157 [XYZ][W200][PVD][AG][9000NM] XYZ 200 3 280 9000 1.316 3 154.825 ORDER 1158 [XYZ][W200][PVD][AG][9500NM] XYZ 200 3 280 9500 1.389 3 157.870 ORDER 1159 [XYZ][W200][PVD][AG][10000NM] XYZ 200 3 280 10000 1.462 3 160.916 ORDER 1160 [XYZ][W300][PVD][AG][1000NM] XYZ 300 280 1000 0.146 RFQ 1161 [XYZ][W300][PVD][AG][1500NM] XYZ 300 280 1500 0.219 RFQ 1162 [XYZ][W300][PVD][AG][2000NM] XYZ 300 280 2000 0.292 RFQ 1163 [XYZ][W300][PVD][AG][2500NM] XYZ 300 280 2500 0.365 RFQ 1164 [XYZ][W300][PVD][AG][3000NM] XYZ 300 280 3000 0.439 RFQ 1165 [XYZ][W300][PVD][AG][3500NM] XYZ 300 280 3500 0.512 RFQ 1166 [XYZ][W300][PVD][AG][4000NM] XYZ 300 280 4000 0.585 RFQ 1167 [XYZ][W300][PVD][AG][4500NM] XYZ 300 280 4500 0.658 RFQ 1168 [XYZ][W300][PVD][AG][5000NM] XYZ 300 280 5000 0.731 RFQ 1169 [XYZ][W300][PVD][AG][5500NM] XYZ 300 280 5500 0.804 RFQ 1170 [XYZ][W300][PVD][AG][6000NM] XYZ 300 280 6000 0.877 RFQ 1171 [XYZ][W300][PVD][AG][6500NM] XYZ 300 280 6500 0.950 RFQ 1172 [XYZ][W300][PVD][AG][7000NM] XYZ 300 280 7000 1.023 RFQ 1173 [XYZ][W300][PVD][AG][7500NM] XYZ 300 280 7500 1.096 RFQ 1174 [XYZ][W300][PVD][AG][8000NM] XYZ 300 280 8000 1.170 RFQ 1175 [XYZ][W300][PVD][AG][8500NM] XYZ 300 280 8500 1.243 RFQ 1176 [XYZ][W300][PVD][AG][9000NM] XYZ 300 280 9000 1.316 RFQ 1177 [XYZ][W300][PVD][AG][9500NM] XYZ 300 280 9500 1.389 RFQ 1178 [XYZ][W300][PVD][AG][10000NM] XYZ 300 280 10000 1.462 RFQ 1179 [XYZ][Wnnn][PVD][AG][1000NM] XYZ nnn 280 1000 0.146 RFQ 1180 [XYZ][Wnnn][PVD][AG][1500NM] XYZ nnn 280 1500 0.219 RFQ 1181 [XYZ][Wnnn][PVD][AG][2000NM] XYZ nnn 280 2000 0.292 RFQ 1182 [XYZ][Wnnn][PVD][AG][2500NM] XYZ nnn 280 2500 0.365 RFQ 1183 [XYZ][Wnnn][PVD][AG][3000NM] XYZ nnn 280 3000 0.439 RFQ 1184 [XYZ][Wnnn][PVD][AG][3500NM] XYZ nnn 280 3500 0.512 RFQ 1185 [XYZ][Wnnn][PVD][AG][4000NM] XYZ nnn 280 4000 0.585 RFQ 1186 [XYZ][Wnnn][PVD][AG][4500NM] XYZ nnn 280 4500 0.658 RFQ 1187 [XYZ][Wnnn][PVD][AG][5000NM] XYZ nnn 280 5000 0.731 RFQ 1188 [XYZ][Wnnn][PVD][AG][5500NM] XYZ nnn 280 5500 0.804 RFQ 1189 [XYZ][Wnnn][PVD][AG][6000NM] XYZ nnn 280 6000 0.877 RFQ 1190 [XYZ][Wnnn][PVD][AG][6500NM] XYZ nnn 280 6500 0.950 RFQ 1191 [XYZ][Wnnn][PVD][AG][7000NM] XYZ nnn 280 7000 1.023 RFQ 1192 [XYZ][Wnnn][PVD][AG][7500NM] XYZ nnn 280 7500 1.096 RFQ 1193 [XYZ][Wnnn][PVD][AG][8000NM] XYZ nnn 280 8000 1.170 RFQ 1194 [XYZ][Wnnn][PVD][AG][8500NM] XYZ nnn 280 8500 1.243 RFQ 1195 [XYZ][Wnnn][PVD][AG][9000NM] XYZ nnn 280 9000 1.316 RFQ 1196 [XYZ][Wnnn][PVD][AG][9500NM] XYZ nnn 280 9500 1.389 RFQ 1197 [XYZ][Wnnn][PVD][AG][10000NM] XYZ nnn 280 10000 1.462 RFQ Minimum batch for sputtering is 8 wafers for mm diameter. Unit price does not include SET-UP Charges, RUSH charges or cost of wafers. INSTANT QUOTE PROCESS CODE QTY EMAIL ORDERING: Registered customers can order online from within assigned BUSINESS PORTAL. A copy of the order along with an order confirmation receipt is issued instantly for all orders placed on line. On line Orders have to be verified, accepted and acknowledged by HTE LABS sales department in writing before, becoming non cancelable binding contracts. DELIVERY: Typical delivery for Standard processes is 2-4 working days ARO. For Custom processes lead time may vary. HTE Labs may supply on request substrate materials from its own inventory or from third party supplier. SHIPPING & PACKING: For certain processes, customer should ship only prime wafers, delivered in sealed containers [original manufacturer seal must be present]. All wafers shipped to HTE LABS by customers, should be packed in suitable wafer carriers or wafer containers, wrapped in reusable minim 2 layers of air buble packing material [pink anti-static bubble cushioning wrap], or air pillows and heavy wall cardboard boxes. Foam packing peanuts are not acceptable due to the nuisance caused by particles and electrostatic chage generated during shipping. SAMPLES: Due to the nature of this product line, free samples are not available, unless they are against an existing firm order, pending qualification of a process. HTE LABS guarantees continuous supply and availability of any of it's standard or custom developed processes and technologies provided minimum order quantities are met. HTE LABS has made every effort to have this information as accurate as possible. However, no responsibility is assumed by HTE LABS for its use, nor for any infringements of rights of third parties which may result from its use. HTE LABS reserves the right to revise the content or modify its product line without prior notice. HTE LABS processes and technologies are not authorized for and should not be used within support systems which are intended for surgical implants into the body, to support or sustain life, in aircraft, space equipment, submarine, or nuclear facility applications without HTE LABS specific written consent. Home>PVD REACTIVE SPUTTERING> Last updated:

	Ag - Silver PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS Ag - Silver MAGNETRON SPUTTER DEPOSITION, DC , RF Ag - Silver PVD REACTIVE SPUTTERING
HTE Labs

PROPERTIES / FEATURES		APPLICATIONS
Chemical composition: Ag Purity (%): 99.99 Density: 10.49 g/cc Electrical conductivity: 6.30E+5 Thermal conductivity: (300 K) 429 W/mK Melting point: 1234.93 K (961.78 °C, 1763.2 °F) Refractive index: Dielectric constant: Deposition rate (@12.5W/in2): 114nm/min Sputtering yield (@600eV): 3.4		Semiconductor integrated circuit (IC) manufacturing Antireflection coatings in optoelectronic devices Hard masks for chemical etching or plasma etching Inter-metal dielectric (IMD) stacks Multilayers interconnections, Dual Damascene, ILD [inter-layer dielectrics planarization] STI [formation of shallow trench isolation (STI) structures] processes

SHORT PROCESS DESCRIPTION

Physical vapor deposition (PVD) is a widely used technique in semiconductor integrated circuit (IC) manufacturing. Sputter deposition is a physical vapor deposition (PVD) method of depositing thin films by sputtering, that is ejecting, material from a "target," that is source, which then deposits onto a "substrate," such as a silicon wafer. Resputtering is re-emission of the deposited material during the deposition process by ion or atom bombardment. Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV (100,000 K). The sputtered ions (typically only about 1% of the ejected particles is ionized) can ballistically fly from the target in straight lines and impact energetically on the substrates or vacuum chamber causing resputtering. At higher gas pressures, they collide with the gas atoms that act as a moderator and move diffusively, reaching the substrates or vacuum chamber wall and condensing after undergoing a random walk. The entire range from high-energy ballistic impact to low-energy thermalized motion is accessible by changing the background gas pressure. The sputtering gas is often an inert gas such as argon. For efficient momentum transfer, the atomic weight of the sputtering gas should be close to the atomic weight of the target, so for sputtering light elements neon is preferable, while for heavy elements krypton or xenon are used. Reactive gases can also be used to sputter compounds. The compound can be formed on the target surface, in-flight or on the substrate depending on the process parameters. The availability of many parameters that control sputter deposition make it a complex process, but also allow experts a large degree of control over the growth and microstructure of the film. Sputtering is used extensively in the semiconductor industry to deposit thin films of various materials in integrated circuit processing. Thin antireflection coatings on glass for optical applications are also deposited by sputtering. Because of the low substrate temperatures used, sputtering is an ideal method to deposit contact metals for thin-film transistors. Perhaps the most familiar products of sputtering are low-emissivity coatings on glass, used in double-pane window assemblies. The coating is a multilayer containing silver and metal oxides such as zinc oxide, tin oxide, or titanium dioxide. Sputtering is also used to metalize plastics such as potato chip bags. A large industry has developed around tool bit coating using sputtered nitrides, such as titanium nitride, creating the familiar gold colored hard coat.

WAFER FOUNDRY - R&D SEMICONDUCTOR PROCESS DEVELOPMENT

HTE LABS is helping customers to solve R&D problems, capacity problems, lower cost as well as develop a back-up process for existing in-house operations. Any company currently involved or contemplating R&D related to semiconductor devices or thin film technologies, is encourraged to consider using HTE LABS expertise and capabilities. To contact HTE LABS and discuss an application in the strictest confidentiality, navigate to CONTACT PAGE.

PROCESS ORDERING INFORMATION

WAFER TYPE	WAFER SIZE [mm]	BATCH SIZE [wafers]	TEMPERATURE [°C]	THICKNESS [nm]	GENERATE PROCESS NAME	TIME [hours]
Select Si SiC SOI SiGe QZ SAP XYZ	Select 25 [1] 50 [2] 75 [3] 100 [4] 125 [5] 150 [6] 200 [8] 300 [12] nnn [0]			Select 1000 [nm] 1500 [nm] 2000 [nm] 2500 [nm] 3000 [nm] 3500 [nm] 4000 [nm] 4500 [nm] 5000 [nm] 5500 [nm] 6000 [nm] 6500 [nm] 7000 [nm] 7500 [nm] 8000 [nm] 8500 [nm] 9000 [nm] 9500 [nm] 10000 [nm]

Process parametter TIME is calculated using a deposition rate of 114nm/min as the worst case scenario. Actual deposition rate may vary. HTE Labs whenever feasible is tailoring each process to customer specification such that the end refractive index, thickness and film uniformity are within specified tolerance.

STANDARD PROCESS PRICE LIST

#	PROCESS CODE [datasheet]	WAFER TYPE	SIZE [mm]	BATCH [wafers]	TEMP. [°C]	THICKNESS [nm]	TIME [h]	MIN. ORDER [wafers]	U/P [$]	ORDER/RFQ
1	[SI][W25][PVD][AG][1000NM]	Si	25	24	280	1000	0.146	24	13.261	ORDER
2	[SI][W25][PVD][AG][1500NM]	Si	25	24	280	1500	0.219	24	13.642	ORDER
3	[SI][W25][PVD][AG][2000NM]	Si	25	24	280	2000	0.292	24	14.023	ORDER
4	[SI][W25][PVD][AG][2500NM]	Si	25	24	280	2500	0.365	24	14.404	ORDER
5	[SI][W25][PVD][AG][3000NM]	Si	25	24	280	3000	0.439	24	14.784	ORDER
6	[SI][W25][PVD][AG][3500NM]	Si	25	24	280	3500	0.512	24	15.165	ORDER
7	[SI][W25][PVD][AG][4000NM]	Si	25	24	280	4000	0.585	24	15.546	ORDER
8	[SI][W25][PVD][AG][4500NM]	Si	25	24	280	4500	0.658	24	15.927	ORDER
9	[SI][W25][PVD][AG][5000NM]	Si	25	24	280	5000	0.731	24	16.307	ORDER
10	[SI][W25][PVD][AG][5500NM]	Si	25	24	280	5500	0.804	24	16.688	ORDER
11	[SI][W25][PVD][AG][6000NM]	Si	25	24	280	6000	0.877	24	17.069	ORDER
12	[SI][W25][PVD][AG][6500NM]	Si	25	24	280	6500	0.950	24	17.449	ORDER
13	[SI][W25][PVD][AG][7000NM]	Si	25	24	280	7000	1.023	24	17.830	ORDER
14	[SI][W25][PVD][AG][7500NM]	Si	25	24	280	7500	1.096	24	18.211	ORDER
15	[SI][W25][PVD][AG][8000NM]	Si	25	24	280	8000	1.170	24	18.592	ORDER
16	[SI][W25][PVD][AG][8500NM]	Si	25	24	280	8500	1.243	24	18.972	ORDER
17	[SI][W25][PVD][AG][9000NM]	Si	25	24	280	9000	1.316	24	19.353	ORDER
18	[SI][W25][PVD][AG][9500NM]	Si	25	24	280	9500	1.389	24	19.734	ORDER
19	[SI][W25][PVD][AG][10000NM]	Si	25	24	280	10000	1.462	24	20.115	ORDER
20	[SI][W50][PVD][AG][1000NM]	Si	50	12	280	1000	0.146	12	26.523	ORDER
21	[SI][W50][PVD][AG][1500NM]	Si	50	12	280	1500	0.219	12	27.284	ORDER
22	[SI][W50][PVD][AG][2000NM]	Si	50	12	280	2000	0.292	12	28.046	ORDER
23	[SI][W50][PVD][AG][2500NM]	Si	50	12	280	2500	0.365	12	28.807	ORDER
24	[SI][W50][PVD][AG][3000NM]	Si	50	12	280	3000	0.439	12	29.569	ORDER
25	[SI][W50][PVD][AG][3500NM]	Si	50	12	280	3500	0.512	12	30.330	ORDER
26	[SI][W50][PVD][AG][4000NM]	Si	50	12	280	4000	0.585	12	31.092	ORDER
27	[SI][W50][PVD][AG][4500NM]	Si	50	12	280	4500	0.658	12	31.853	ORDER
28	[SI][W50][PVD][AG][5000NM]	Si	50	12	280	5000	0.731	12	32.615	ORDER
29	[SI][W50][PVD][AG][5500NM]	Si	50	12	280	5500	0.804	12	33.376	ORDER
30	[SI][W50][PVD][AG][6000NM]	Si	50	12	280	6000	0.877	12	34.137	ORDER
31	[SI][W50][PVD][AG][6500NM]	Si	50	12	280	6500	0.950	12	34.899	ORDER
32	[SI][W50][PVD][AG][7000NM]	Si	50	12	280	7000	1.023	12	35.660	ORDER
33	[SI][W50][PVD][AG][7500NM]	Si	50	12	280	7500	1.096	12	36.422	ORDER
34	[SI][W50][PVD][AG][8000NM]	Si	50	12	280	8000	1.170	12	37.183	ORDER
35	[SI][W50][PVD][AG][8500NM]	Si	50	12	280	8500	1.243	12	37.945	ORDER
36	[SI][W50][PVD][AG][9000NM]	Si	50	12	280	9000	1.316	12	38.706	ORDER
37	[SI][W50][PVD][AG][9500NM]	Si	50	12	280	9500	1.389	12	39.468	ORDER
38	[SI][W50][PVD][AG][10000NM]	Si	50	12	280	10000	1.462	12	40.229	ORDER
39	[SI][W75][PVD][AG][1000NM]	Si	75	10	280	1000	0.146	10	31.827	ORDER
40	[SI][W75][PVD][AG][1500NM]	Si	75	10	280	1500	0.219	10	32.741	ORDER
41	[SI][W75][PVD][AG][2000NM]	Si	75	10	280	2000	0.292	10	33.655	ORDER
42	[SI][W75][PVD][AG][2500NM]	Si	75	10	280	2500	0.365	10	34.569	ORDER
43	[SI][W75][PVD][AG][3000NM]	Si	75	10	280	3000	0.439	10	35.482	ORDER
44	[SI][W75][PVD][AG][3500NM]	Si	75	10	280	3500	0.512	10	36.396	ORDER
45	[SI][W75][PVD][AG][4000NM]	Si	75	10	280	4000	0.585	10	37.310	ORDER
46	[SI][W75][PVD][AG][4500NM]	Si	75	10	280	4500	0.658	10	38.224	ORDER
47	[SI][W75][PVD][AG][5000NM]	Si	75	10	280	5000	0.731	10	39.137	ORDER
48	[SI][W75][PVD][AG][5500NM]	Si	75	10	280	5500	0.804	10	40.051	ORDER
49	[SI][W75][PVD][AG][6000NM]	Si	75	10	280	6000	0.877	10	40.965	ORDER
50	[SI][W75][PVD][AG][6500NM]	Si	75	10	280	6500	0.950	10	41.879	ORDER
51	[SI][W75][PVD][AG][7000NM]	Si	75	10	280	7000	1.023	10	42.792	ORDER
52	[SI][W75][PVD][AG][7500NM]	Si	75	10	280	7500	1.096	10	43.706	ORDER
53	[SI][W75][PVD][AG][8000NM]	Si	75	10	280	8000	1.170	10	44.620	ORDER
54	[SI][W75][PVD][AG][8500NM]	Si	75	10	280	8500	1.243	10	45.534	ORDER
55	[SI][W75][PVD][AG][9000NM]	Si	75	10	280	9000	1.316	10	46.447	ORDER
56	[SI][W75][PVD][AG][9500NM]	Si	75	10	280	9500	1.389	10	47.361	ORDER
57	[SI][W75][PVD][AG][10000NM]	Si	75	10	280	10000	1.462	10	48.275	ORDER
58	[SI][W100][PVD][AG][1000NM]	Si	100	8	280	1000	0.146	8	39.784	ORDER
59	[SI][W100][PVD][AG][1500NM]	Si	100	8	280	1500	0.219	8	40.927	ORDER
60	[SI][W100][PVD][AG][2000NM]	Si	100	8	280	2000	0.292	8	42.069	ORDER
61	[SI][W100][PVD][AG][2500NM]	Si	100	8	280	2500	0.365	8	43.211	ORDER
62	[SI][W100][PVD][AG][3000NM]	Si	100	8	280	3000	0.439	8	44.353	ORDER
63	[SI][W100][PVD][AG][3500NM]	Si	100	8	280	3500	0.512	8	45.495	ORDER
64	[SI][W100][PVD][AG][4000NM]	Si	100	8	280	4000	0.585	8	46.637	ORDER
65	[SI][W100][PVD][AG][4500NM]	Si	100	8	280	4500	0.658	8	47.780	ORDER
66	[SI][W100][PVD][AG][5000NM]	Si	100	8	280	5000	0.731	8	48.922	ORDER
67	[SI][W100][PVD][AG][5500NM]	Si	100	8	280	5500	0.804	8	50.064	ORDER
68	[SI][W100][PVD][AG][6000NM]	Si	100	8	280	6000	0.877	8	51.206	ORDER
69	[SI][W100][PVD][AG][6500NM]	Si	100	8	280	6500	0.950	8	52.348	ORDER
70	[SI][W100][PVD][AG][7000NM]	Si	100	8	280	7000	1.023	8	53.490	ORDER
71	[SI][W100][PVD][AG][7500NM]	Si	100	8	280	7500	1.096	8	54.633	ORDER
72	[SI][W100][PVD][AG][8000NM]	Si	100	8	280	8000	1.170	8	55.775	ORDER
73	[SI][W100][PVD][AG][8500NM]	Si	100	8	280	8500	1.243	8	56.917	ORDER
74	[SI][W100][PVD][AG][9000NM]	Si	100	8	280	9000	1.316	8	58.059	ORDER
75	[SI][W100][PVD][AG][9500NM]	Si	100	8	280	9500	1.389	8	59.201	ORDER
76	[SI][W100][PVD][AG][10000NM]	Si	100	8	280	10000	1.462	8	60.344	ORDER
77	[SI][W125][PVD][AG][1000NM]	Si	125	7	280	1000	0.146	7	45.468	ORDER
78	[SI][W125][PVD][AG][1500NM]	Si	125	7	280	1500	0.219	7	46.773	ORDER
79	[SI][W125][PVD][AG][2000NM]	Si	125	7	280	2000	0.292	7	48.079	ORDER
80	[SI][W125][PVD][AG][2500NM]	Si	125	7	280	2500	0.365	7	49.384	ORDER
81	[SI][W125][PVD][AG][3000NM]	Si	125	7	280	3000	0.439	7	50.689	ORDER
82	[SI][W125][PVD][AG][3500NM]	Si	125	7	280	3500	0.512	7	51.995	ORDER
83	[SI][W125][PVD][AG][4000NM]	Si	125	7	280	4000	0.585	7	53.300	ORDER
84	[SI][W125][PVD][AG][4500NM]	Si	125	7	280	4500	0.658	7	54.605	ORDER
85	[SI][W125][PVD][AG][5000NM]	Si	125	7	280	5000	0.731	7	55.911	ORDER
86	[SI][W125][PVD][AG][5500NM]	Si	125	7	280	5500	0.804	7	57.216	ORDER
87	[SI][W125][PVD][AG][6000NM]	Si	125	7	280	6000	0.877	7	58.521	ORDER
88	[SI][W125][PVD][AG][6500NM]	Si	125	7	280	6500	0.950	7	59.827	ORDER
89	[SI][W125][PVD][AG][7000NM]	Si	125	7	280	7000	1.023	7	61.132	ORDER
90	[SI][W125][PVD][AG][7500NM]	Si	125	7	280	7500	1.096	7	62.437	ORDER
91	[SI][W125][PVD][AG][8000NM]	Si	125	7	280	8000	1.170	7	63.743	ORDER
92	[SI][W125][PVD][AG][8500NM]	Si	125	7	280	8500	1.243	7	65.048	ORDER
93	[SI][W125][PVD][AG][9000NM]	Si	125	7	280	9000	1.316	7	66.353	ORDER
94	[SI][W125][PVD][AG][9500NM]	Si	125	7	280	9500	1.389	7	67.659	ORDER
95	[SI][W125][PVD][AG][10000NM]	Si	125	7	280	10000	1.462	7	68.964	ORDER
96	[SI][W150][PVD][AG][1000NM]	Si	150	6	280	1000	0.146	6	53.046	ORDER
97	[SI][W150][PVD][AG][1500NM]	Si	150	6	280	1500	0.219	6	54.569	ORDER
98	[SI][W150][PVD][AG][2000NM]	Si	150	6	280	2000	0.292	6	56.092	ORDER
99	[SI][W150][PVD][AG][2500NM]	Si	150	6	280	2500	0.365	6	57.615	ORDER
100	[SI][W150][PVD][AG][3000NM]	Si	150	6	280	3000	0.439	6	59.137	ORDER
101	[SI][W150][PVD][AG][3500NM]	Si	150	6	280	3500	0.512	6	60.660	ORDER
102	[SI][W150][PVD][AG][4000NM]	Si	150	6	280	4000	0.585	6	62.183	ORDER
103	[SI][W150][PVD][AG][4500NM]	Si	150	6	280	4500	0.658	6	63.706	ORDER
104	[SI][W150][PVD][AG][5000NM]	Si	150	6	280	5000	0.731	6	65.229	ORDER
105	[SI][W150][PVD][AG][5500NM]	Si	150	6	280	5500	0.804	6	66.752	ORDER
106	[SI][W150][PVD][AG][6000NM]	Si	150	6	280	6000	0.877	6	68.275	ORDER
107	[SI][W150][PVD][AG][6500NM]	Si	150	6	280	6500	0.950	6	69.798	ORDER
108	[SI][W150][PVD][AG][7000NM]	Si	150	6	280	7000	1.023	6	71.321	ORDER
109	[SI][W150][PVD][AG][7500NM]	Si	150	6	280	7500	1.096	6	72.844	ORDER
110	[SI][W150][PVD][AG][8000NM]	Si	150	6	280	8000	1.170	6	74.366	ORDER
111	[SI][W150][PVD][AG][8500NM]	Si	150	6	280	8500	1.243	6	75.889	ORDER
112	[SI][W150][PVD][AG][9000NM]	Si	150	6	280	9000	1.316	6	77.412	ORDER
113	[SI][W150][PVD][AG][9500NM]	Si	150	6	280	9500	1.389	6	78.935	ORDER
114	[SI][W150][PVD][AG][10000NM]	Si	150	6	280	10000	1.462	6	80.458	ORDER
115	[SI][W200][PVD][AG][1000NM]	Si	200	3	280	1000	0.146	3	106.092	ORDER
116	[SI][W200][PVD][AG][1500NM]	Si	200	3	280	1500	0.219	3	109.137	ORDER
117	[SI][W200][PVD][AG][2000NM]	Si	200	3	280	2000	0.292	3	112.183	ORDER
118	[SI][W200][PVD][AG][2500NM]	Si	200	3	280	2500	0.365	3	115.229	ORDER
119	[SI][W200][PVD][AG][3000NM]	Si	200	3	280	3000	0.439	3	118.275	ORDER
120	[SI][W200][PVD][AG][3500NM]	Si	200	3	280	3500	0.512	3	121.321	ORDER
121	[SI][W200][PVD][AG][4000NM]	Si	200	3	280	4000	0.585	3	124.366	ORDER
122	[SI][W200][PVD][AG][4500NM]	Si	200	3	280	4500	0.658	3	127.412	ORDER
123	[SI][W200][PVD][AG][5000NM]	Si	200	3	280	5000	0.731	3	130.458	ORDER
124	[SI][W200][PVD][AG][5500NM]	Si	200	3	280	5500	0.804	3	133.504	ORDER
125	[SI][W200][PVD][AG][6000NM]	Si	200	3	280	6000	0.877	3	136.550	ORDER
126	[SI][W200][PVD][AG][6500NM]	Si	200	3	280	6500	0.950	3	139.596	ORDER
127	[SI][W200][PVD][AG][7000NM]	Si	200	3	280	7000	1.023	3	142.641	ORDER
128	[SI][W200][PVD][AG][7500NM]	Si	200	3	280	7500	1.096	3	145.687	ORDER
129	[SI][W200][PVD][AG][8000NM]	Si	200	3	280	8000	1.170	3	148.733	ORDER
130	[SI][W200][PVD][AG][8500NM]	Si	200	3	280	8500	1.243	3	151.779	ORDER
131	[SI][W200][PVD][AG][9000NM]	Si	200	3	280	9000	1.316	3	154.825	ORDER
132	[SI][W200][PVD][AG][9500NM]	Si	200	3	280	9500	1.389	3	157.870	ORDER
133	[SI][W200][PVD][AG][10000NM]	Si	200	3	280	10000	1.462	3	160.916	ORDER
134	[SI][W300][PVD][AG][1000NM]	Si	300		280	1000	0.146			RFQ
135	[SI][W300][PVD][AG][1500NM]	Si	300		280	1500	0.219			RFQ
136	[SI][W300][PVD][AG][2000NM]	Si	300		280	2000	0.292			RFQ
137	[SI][W300][PVD][AG][2500NM]	Si	300		280	2500	0.365			RFQ
138	[SI][W300][PVD][AG][3000NM]	Si	300		280	3000	0.439			RFQ
139	[SI][W300][PVD][AG][3500NM]	Si	300		280	3500	0.512			RFQ
140	[SI][W300][PVD][AG][4000NM]	Si	300		280	4000	0.585			RFQ
141	[SI][W300][PVD][AG][4500NM]	Si	300		280	4500	0.658			RFQ
142	[SI][W300][PVD][AG][5000NM]	Si	300		280	5000	0.731			RFQ
143	[SI][W300][PVD][AG][5500NM]	Si	300		280	5500	0.804			RFQ
144	[SI][W300][PVD][AG][6000NM]	Si	300		280	6000	0.877			RFQ
145	[SI][W300][PVD][AG][6500NM]	Si	300		280	6500	0.950			RFQ
146	[SI][W300][PVD][AG][7000NM]	Si	300		280	7000	1.023			RFQ
147	[SI][W300][PVD][AG][7500NM]	Si	300		280	7500	1.096			RFQ
148	[SI][W300][PVD][AG][8000NM]	Si	300		280	8000	1.170			RFQ
149	[SI][W300][PVD][AG][8500NM]	Si	300		280	8500	1.243			RFQ
150	[SI][W300][PVD][AG][9000NM]	Si	300		280	9000	1.316			RFQ
151	[SI][W300][PVD][AG][9500NM]	Si	300		280	9500	1.389			RFQ
152	[SI][W300][PVD][AG][10000NM]	Si	300		280	10000	1.462			RFQ
153	[SI][Wnnn][PVD][AG][1000NM]	Si	nnn		280	1000	0.146			RFQ
154	[SI][Wnnn][PVD][AG][1500NM]	Si	nnn		280	1500	0.219			RFQ
155	[SI][Wnnn][PVD][AG][2000NM]	Si	nnn		280	2000	0.292			RFQ
156	[SI][Wnnn][PVD][AG][2500NM]	Si	nnn		280	2500	0.365			RFQ
157	[SI][Wnnn][PVD][AG][3000NM]	Si	nnn		280	3000	0.439			RFQ
158	[SI][Wnnn][PVD][AG][3500NM]	Si	nnn		280	3500	0.512			RFQ
159	[SI][Wnnn][PVD][AG][4000NM]	Si	nnn		280	4000	0.585			RFQ
160	[SI][Wnnn][PVD][AG][4500NM]	Si	nnn		280	4500	0.658			RFQ
161	[SI][Wnnn][PVD][AG][5000NM]	Si	nnn		280	5000	0.731			RFQ
162	[SI][Wnnn][PVD][AG][5500NM]	Si	nnn		280	5500	0.804			RFQ
163	[SI][Wnnn][PVD][AG][6000NM]	Si	nnn		280	6000	0.877			RFQ
164	[SI][Wnnn][PVD][AG][6500NM]	Si	nnn		280	6500	0.950			RFQ
165	[SI][Wnnn][PVD][AG][7000NM]	Si	nnn		280	7000	1.023			RFQ
166	[SI][Wnnn][PVD][AG][7500NM]	Si	nnn		280	7500	1.096			RFQ
167	[SI][Wnnn][PVD][AG][8000NM]	Si	nnn		280	8000	1.170			RFQ
168	[SI][Wnnn][PVD][AG][8500NM]	Si	nnn		280	8500	1.243			RFQ
169	[SI][Wnnn][PVD][AG][9000NM]	Si	nnn		280	9000	1.316			RFQ
170	[SI][Wnnn][PVD][AG][9500NM]	Si	nnn		280	9500	1.389			RFQ
171	[SI][Wnnn][PVD][AG][10000NM]	Si	nnn		280	10000	1.462			RFQ
172	[SIC][W25][PVD][AG][1000NM]	SiC	25	24	280	1000	0.146	24	13.261	ORDER
173	[SIC][W25][PVD][AG][1500NM]	SiC	25	24	280	1500	0.219	24	13.642	ORDER
174	[SIC][W25][PVD][AG][2000NM]	SiC	25	24	280	2000	0.292	24	14.023	ORDER
175	[SIC][W25][PVD][AG][2500NM]	SiC	25	24	280	2500	0.365	24	14.404	ORDER
176	[SIC][W25][PVD][AG][3000NM]	SiC	25	24	280	3000	0.439	24	14.784	ORDER
177	[SIC][W25][PVD][AG][3500NM]	SiC	25	24	280	3500	0.512	24	15.165	ORDER
178	[SIC][W25][PVD][AG][4000NM]	SiC	25	24	280	4000	0.585	24	15.546	ORDER
179	[SIC][W25][PVD][AG][4500NM]	SiC	25	24	280	4500	0.658	24	15.927	ORDER
180	[SIC][W25][PVD][AG][5000NM]	SiC	25	24	280	5000	0.731	24	16.307	ORDER
181	[SIC][W25][PVD][AG][5500NM]	SiC	25	24	280	5500	0.804	24	16.688	ORDER
182	[SIC][W25][PVD][AG][6000NM]	SiC	25	24	280	6000	0.877	24	17.069	ORDER
183	[SIC][W25][PVD][AG][6500NM]	SiC	25	24	280	6500	0.950	24	17.449	ORDER
184	[SIC][W25][PVD][AG][7000NM]	SiC	25	24	280	7000	1.023	24	17.830	ORDER
185	[SIC][W25][PVD][AG][7500NM]	SiC	25	24	280	7500	1.096	24	18.211	ORDER
186	[SIC][W25][PVD][AG][8000NM]	SiC	25	24	280	8000	1.170	24	18.592	ORDER
187	[SIC][W25][PVD][AG][8500NM]	SiC	25	24	280	8500	1.243	24	18.972	ORDER
188	[SIC][W25][PVD][AG][9000NM]	SiC	25	24	280	9000	1.316	24	19.353	ORDER
189	[SIC][W25][PVD][AG][9500NM]	SiC	25	24	280	9500	1.389	24	19.734	ORDER
190	[SIC][W25][PVD][AG][10000NM]	SiC	25	24	280	10000	1.462	24	20.115	ORDER
191	[SIC][W50][PVD][AG][1000NM]	SiC	50	12	280	1000	0.146	12	26.523	ORDER
192	[SIC][W50][PVD][AG][1500NM]	SiC	50	12	280	1500	0.219	12	27.284	ORDER
193	[SIC][W50][PVD][AG][2000NM]	SiC	50	12	280	2000	0.292	12	28.046	ORDER
194	[SIC][W50][PVD][AG][2500NM]	SiC	50	12	280	2500	0.365	12	28.807	ORDER
195	[SIC][W50][PVD][AG][3000NM]	SiC	50	12	280	3000	0.439	12	29.569	ORDER
196	[SIC][W50][PVD][AG][3500NM]	SiC	50	12	280	3500	0.512	12	30.330	ORDER
197	[SIC][W50][PVD][AG][4000NM]	SiC	50	12	280	4000	0.585	12	31.092	ORDER
198	[SIC][W50][PVD][AG][4500NM]	SiC	50	12	280	4500	0.658	12	31.853	ORDER
199	[SIC][W50][PVD][AG][5000NM]	SiC	50	12	280	5000	0.731	12	32.615	ORDER
200	[SIC][W50][PVD][AG][5500NM]	SiC	50	12	280	5500	0.804	12	33.376	ORDER
201	[SIC][W50][PVD][AG][6000NM]	SiC	50	12	280	6000	0.877	12	34.137	ORDER
202	[SIC][W50][PVD][AG][6500NM]	SiC	50	12	280	6500	0.950	12	34.899	ORDER
203	[SIC][W50][PVD][AG][7000NM]	SiC	50	12	280	7000	1.023	12	35.660	ORDER
204	[SIC][W50][PVD][AG][7500NM]	SiC	50	12	280	7500	1.096	12	36.422	ORDER
205	[SIC][W50][PVD][AG][8000NM]	SiC	50	12	280	8000	1.170	12	37.183	ORDER
206	[SIC][W50][PVD][AG][8500NM]	SiC	50	12	280	8500	1.243	12	37.945	ORDER
207	[SIC][W50][PVD][AG][9000NM]	SiC	50	12	280	9000	1.316	12	38.706	ORDER
208	[SIC][W50][PVD][AG][9500NM]	SiC	50	12	280	9500	1.389	12	39.468	ORDER
209	[SIC][W50][PVD][AG][10000NM]	SiC	50	12	280	10000	1.462	12	40.229	ORDER
210	[SIC][W75][PVD][AG][1000NM]	SiC	75	10	280	1000	0.146	10	31.827	ORDER
211	[SIC][W75][PVD][AG][1500NM]	SiC	75	10	280	1500	0.219	10	32.741	ORDER
212	[SIC][W75][PVD][AG][2000NM]	SiC	75	10	280	2000	0.292	10	33.655	ORDER
213	[SIC][W75][PVD][AG][2500NM]	SiC	75	10	280	2500	0.365	10	34.569	ORDER
214	[SIC][W75][PVD][AG][3000NM]	SiC	75	10	280	3000	0.439	10	35.482	ORDER
215	[SIC][W75][PVD][AG][3500NM]	SiC	75	10	280	3500	0.512	10	36.396	ORDER
216	[SIC][W75][PVD][AG][4000NM]	SiC	75	10	280	4000	0.585	10	37.310	ORDER
217	[SIC][W75][PVD][AG][4500NM]	SiC	75	10	280	4500	0.658	10	38.224	ORDER
218	[SIC][W75][PVD][AG][5000NM]	SiC	75	10	280	5000	0.731	10	39.137	ORDER
219	[SIC][W75][PVD][AG][5500NM]	SiC	75	10	280	5500	0.804	10	40.051	ORDER
220	[SIC][W75][PVD][AG][6000NM]	SiC	75	10	280	6000	0.877	10	40.965	ORDER
221	[SIC][W75][PVD][AG][6500NM]	SiC	75	10	280	6500	0.950	10	41.879	ORDER
222	[SIC][W75][PVD][AG][7000NM]	SiC	75	10	280	7000	1.023	10	42.792	ORDER
223	[SIC][W75][PVD][AG][7500NM]	SiC	75	10	280	7500	1.096	10	43.706	ORDER
224	[SIC][W75][PVD][AG][8000NM]	SiC	75	10	280	8000	1.170	10	44.620	ORDER
225	[SIC][W75][PVD][AG][8500NM]	SiC	75	10	280	8500	1.243	10	45.534	ORDER
226	[SIC][W75][PVD][AG][9000NM]	SiC	75	10	280	9000	1.316	10	46.447	ORDER
227	[SIC][W75][PVD][AG][9500NM]	SiC	75	10	280	9500	1.389	10	47.361	ORDER
228	[SIC][W75][PVD][AG][10000NM]	SiC	75	10	280	10000	1.462	10	48.275	ORDER
229	[SIC][W100][PVD][AG][1000NM]	SiC	100	8	280	1000	0.146	8	39.784	ORDER
230	[SIC][W100][PVD][AG][1500NM]	SiC	100	8	280	1500	0.219	8	40.927	ORDER
231	[SIC][W100][PVD][AG][2000NM]	SiC	100	8	280	2000	0.292	8	42.069	ORDER
232	[SIC][W100][PVD][AG][2500NM]	SiC	100	8	280	2500	0.365	8	43.211	ORDER
233	[SIC][W100][PVD][AG][3000NM]	SiC	100	8	280	3000	0.439	8	44.353	ORDER
234	[SIC][W100][PVD][AG][3500NM]	SiC	100	8	280	3500	0.512	8	45.495	ORDER
235	[SIC][W100][PVD][AG][4000NM]	SiC	100	8	280	4000	0.585	8	46.637	ORDER
236	[SIC][W100][PVD][AG][4500NM]	SiC	100	8	280	4500	0.658	8	47.780	ORDER
237	[SIC][W100][PVD][AG][5000NM]	SiC	100	8	280	5000	0.731	8	48.922	ORDER
238	[SIC][W100][PVD][AG][5500NM]	SiC	100	8	280	5500	0.804	8	50.064	ORDER
239	[SIC][W100][PVD][AG][6000NM]	SiC	100	8	280	6000	0.877	8	51.206	ORDER
240	[SIC][W100][PVD][AG][6500NM]	SiC	100	8	280	6500	0.950	8	52.348	ORDER
241	[SIC][W100][PVD][AG][7000NM]	SiC	100	8	280	7000	1.023	8	53.490	ORDER
242	[SIC][W100][PVD][AG][7500NM]	SiC	100	8	280	7500	1.096	8	54.633	ORDER
243	[SIC][W100][PVD][AG][8000NM]	SiC	100	8	280	8000	1.170	8	55.775	ORDER
244	[SIC][W100][PVD][AG][8500NM]	SiC	100	8	280	8500	1.243	8	56.917	ORDER
245	[SIC][W100][PVD][AG][9000NM]	SiC	100	8	280	9000	1.316	8	58.059	ORDER
246	[SIC][W100][PVD][AG][9500NM]	SiC	100	8	280	9500	1.389	8	59.201	ORDER
247	[SIC][W100][PVD][AG][10000NM]	SiC	100	8	280	10000	1.462	8	60.344	ORDER
248	[SIC][W125][PVD][AG][1000NM]	SiC	125	7	280	1000	0.146	7	45.468	ORDER
249	[SIC][W125][PVD][AG][1500NM]	SiC	125	7	280	1500	0.219	7	46.773	ORDER
250	[SIC][W125][PVD][AG][2000NM]	SiC	125	7	280	2000	0.292	7	48.079	ORDER
251	[SIC][W125][PVD][AG][2500NM]	SiC	125	7	280	2500	0.365	7	49.384	ORDER
252	[SIC][W125][PVD][AG][3000NM]	SiC	125	7	280	3000	0.439	7	50.689	ORDER
253	[SIC][W125][PVD][AG][3500NM]	SiC	125	7	280	3500	0.512	7	51.995	ORDER
254	[SIC][W125][PVD][AG][4000NM]	SiC	125	7	280	4000	0.585	7	53.300	ORDER
255	[SIC][W125][PVD][AG][4500NM]	SiC	125	7	280	4500	0.658	7	54.605	ORDER
256	[SIC][W125][PVD][AG][5000NM]	SiC	125	7	280	5000	0.731	7	55.911	ORDER
257	[SIC][W125][PVD][AG][5500NM]	SiC	125	7	280	5500	0.804	7	57.216	ORDER
258	[SIC][W125][PVD][AG][6000NM]	SiC	125	7	280	6000	0.877	7	58.521	ORDER
259	[SIC][W125][PVD][AG][6500NM]	SiC	125	7	280	6500	0.950	7	59.827	ORDER
260	[SIC][W125][PVD][AG][7000NM]	SiC	125	7	280	7000	1.023	7	61.132	ORDER
261	[SIC][W125][PVD][AG][7500NM]	SiC	125	7	280	7500	1.096	7	62.437	ORDER
262	[SIC][W125][PVD][AG][8000NM]	SiC	125	7	280	8000	1.170	7	63.743	ORDER
263	[SIC][W125][PVD][AG][8500NM]	SiC	125	7	280	8500	1.243	7	65.048	ORDER
264	[SIC][W125][PVD][AG][9000NM]	SiC	125	7	280	9000	1.316	7	66.353	ORDER
265	[SIC][W125][PVD][AG][9500NM]	SiC	125	7	280	9500	1.389	7	67.659	ORDER
266	[SIC][W125][PVD][AG][10000NM]	SiC	125	7	280	10000	1.462	7	68.964	ORDER
267	[SIC][W150][PVD][AG][1000NM]	SiC	150	6	280	1000	0.146	6	53.046	ORDER
268	[SIC][W150][PVD][AG][1500NM]	SiC	150	6	280	1500	0.219	6	54.569	ORDER
269	[SIC][W150][PVD][AG][2000NM]	SiC	150	6	280	2000	0.292	6	56.092	ORDER
270	[SIC][W150][PVD][AG][2500NM]	SiC	150	6	280	2500	0.365	6	57.615	ORDER
271	[SIC][W150][PVD][AG][3000NM]	SiC	150	6	280	3000	0.439	6	59.137	ORDER
272	[SIC][W150][PVD][AG][3500NM]	SiC	150	6	280	3500	0.512	6	60.660	ORDER
273	[SIC][W150][PVD][AG][4000NM]	SiC	150	6	280	4000	0.585	6	62.183	ORDER
274	[SIC][W150][PVD][AG][4500NM]	SiC	150	6	280	4500	0.658	6	63.706	ORDER
275	[SIC][W150][PVD][AG][5000NM]	SiC	150	6	280	5000	0.731	6	65.229	ORDER
276	[SIC][W150][PVD][AG][5500NM]	SiC	150	6	280	5500	0.804	6	66.752	ORDER
277	[SIC][W150][PVD][AG][6000NM]	SiC	150	6	280	6000	0.877	6	68.275	ORDER
278	[SIC][W150][PVD][AG][6500NM]	SiC	150	6	280	6500	0.950	6	69.798	ORDER
279	[SIC][W150][PVD][AG][7000NM]	SiC	150	6	280	7000	1.023	6	71.321	ORDER
280	[SIC][W150][PVD][AG][7500NM]	SiC	150	6	280	7500	1.096	6	72.844	ORDER
281	[SIC][W150][PVD][AG][8000NM]	SiC	150	6	280	8000	1.170	6	74.366	ORDER
282	[SIC][W150][PVD][AG][8500NM]	SiC	150	6	280	8500	1.243	6	75.889	ORDER
283	[SIC][W150][PVD][AG][9000NM]	SiC	150	6	280	9000	1.316	6	77.412	ORDER
284	[SIC][W150][PVD][AG][9500NM]	SiC	150	6	280	9500	1.389	6	78.935	ORDER
285	[SIC][W150][PVD][AG][10000NM]	SiC	150	6	280	10000	1.462	6	80.458	ORDER
286	[SIC][W200][PVD][AG][1000NM]	SiC	200	3	280	1000	0.146	3	106.092	ORDER
287	[SIC][W200][PVD][AG][1500NM]	SiC	200	3	280	1500	0.219	3	109.137	ORDER
288	[SIC][W200][PVD][AG][2000NM]	SiC	200	3	280	2000	0.292	3	112.183	ORDER
289	[SIC][W200][PVD][AG][2500NM]	SiC	200	3	280	2500	0.365	3	115.229	ORDER
290	[SIC][W200][PVD][AG][3000NM]	SiC	200	3	280	3000	0.439	3	118.275	ORDER
291	[SIC][W200][PVD][AG][3500NM]	SiC	200	3	280	3500	0.512	3	121.321	ORDER
292	[SIC][W200][PVD][AG][4000NM]	SiC	200	3	280	4000	0.585	3	124.366	ORDER
293	[SIC][W200][PVD][AG][4500NM]	SiC	200	3	280	4500	0.658	3	127.412	ORDER
294	[SIC][W200][PVD][AG][5000NM]	SiC	200	3	280	5000	0.731	3	130.458	ORDER
295	[SIC][W200][PVD][AG][5500NM]	SiC	200	3	280	5500	0.804	3	133.504	ORDER
296	[SIC][W200][PVD][AG][6000NM]	SiC	200	3	280	6000	0.877	3	136.550	ORDER
297	[SIC][W200][PVD][AG][6500NM]	SiC	200	3	280	6500	0.950	3	139.596	ORDER
298	[SIC][W200][PVD][AG][7000NM]	SiC	200	3	280	7000	1.023	3	142.641	ORDER
299	[SIC][W200][PVD][AG][7500NM]	SiC	200	3	280	7500	1.096	3	145.687	ORDER
300	[SIC][W200][PVD][AG][8000NM]	SiC	200	3	280	8000	1.170	3	148.733	ORDER
301	[SIC][W200][PVD][AG][8500NM]	SiC	200	3	280	8500	1.243	3	151.779	ORDER
302	[SIC][W200][PVD][AG][9000NM]	SiC	200	3	280	9000	1.316	3	154.825	ORDER
303	[SIC][W200][PVD][AG][9500NM]	SiC	200	3	280	9500	1.389	3	157.870	ORDER
304	[SIC][W200][PVD][AG][10000NM]	SiC	200	3	280	10000	1.462	3	160.916	ORDER
305	[SIC][W300][PVD][AG][1000NM]	SiC	300		280	1000	0.146			RFQ
306	[SIC][W300][PVD][AG][1500NM]	SiC	300		280	1500	0.219			RFQ
307	[SIC][W300][PVD][AG][2000NM]	SiC	300		280	2000	0.292			RFQ
308	[SIC][W300][PVD][AG][2500NM]	SiC	300		280	2500	0.365			RFQ
309	[SIC][W300][PVD][AG][3000NM]	SiC	300		280	3000	0.439			RFQ
310	[SIC][W300][PVD][AG][3500NM]	SiC	300		280	3500	0.512			RFQ
311	[SIC][W300][PVD][AG][4000NM]	SiC	300		280	4000	0.585			RFQ
312	[SIC][W300][PVD][AG][4500NM]	SiC	300		280	4500	0.658			RFQ
313	[SIC][W300][PVD][AG][5000NM]	SiC	300		280	5000	0.731			RFQ
314	[SIC][W300][PVD][AG][5500NM]	SiC	300		280	5500	0.804			RFQ
315	[SIC][W300][PVD][AG][6000NM]	SiC	300		280	6000	0.877			RFQ
316	[SIC][W300][PVD][AG][6500NM]	SiC	300		280	6500	0.950			RFQ
317	[SIC][W300][PVD][AG][7000NM]	SiC	300		280	7000	1.023			RFQ
318	[SIC][W300][PVD][AG][7500NM]	SiC	300		280	7500	1.096			RFQ
319	[SIC][W300][PVD][AG][8000NM]	SiC	300		280	8000	1.170			RFQ
320	[SIC][W300][PVD][AG][8500NM]	SiC	300		280	8500	1.243			RFQ
321	[SIC][W300][PVD][AG][9000NM]	SiC	300		280	9000	1.316			RFQ
322	[SIC][W300][PVD][AG][9500NM]	SiC	300		280	9500	1.389			RFQ
323	[SIC][W300][PVD][AG][10000NM]	SiC	300		280	10000	1.462			RFQ
324	[SIC][Wnnn][PVD][AG][1000NM]	SiC	nnn		280	1000	0.146			RFQ
325	[SIC][Wnnn][PVD][AG][1500NM]	SiC	nnn		280	1500	0.219			RFQ
326	[SIC][Wnnn][PVD][AG][2000NM]	SiC	nnn		280	2000	0.292			RFQ
327	[SIC][Wnnn][PVD][AG][2500NM]	SiC	nnn		280	2500	0.365			RFQ
328	[SIC][Wnnn][PVD][AG][3000NM]	SiC	nnn		280	3000	0.439			RFQ
329	[SIC][Wnnn][PVD][AG][3500NM]	SiC	nnn		280	3500	0.512			RFQ
330	[SIC][Wnnn][PVD][AG][4000NM]	SiC	nnn		280	4000	0.585			RFQ
331	[SIC][Wnnn][PVD][AG][4500NM]	SiC	nnn		280	4500	0.658			RFQ
332	[SIC][Wnnn][PVD][AG][5000NM]	SiC	nnn		280	5000	0.731			RFQ
333	[SIC][Wnnn][PVD][AG][5500NM]	SiC	nnn		280	5500	0.804			RFQ
334	[SIC][Wnnn][PVD][AG][6000NM]	SiC	nnn		280	6000	0.877			RFQ
335	[SIC][Wnnn][PVD][AG][6500NM]	SiC	nnn		280	6500	0.950			RFQ
336	[SIC][Wnnn][PVD][AG][7000NM]	SiC	nnn		280	7000	1.023			RFQ
337	[SIC][Wnnn][PVD][AG][7500NM]	SiC	nnn		280	7500	1.096			RFQ
338	[SIC][Wnnn][PVD][AG][8000NM]	SiC	nnn		280	8000	1.170			RFQ
339	[SIC][Wnnn][PVD][AG][8500NM]	SiC	nnn		280	8500	1.243			RFQ
340	[SIC][Wnnn][PVD][AG][9000NM]	SiC	nnn		280	9000	1.316			RFQ
341	[SIC][Wnnn][PVD][AG][9500NM]	SiC	nnn		280	9500	1.389			RFQ
342	[SIC][Wnnn][PVD][AG][10000NM]	SiC	nnn		280	10000	1.462			RFQ
343	[SOI][W25][PVD][AG][1000NM]	SOI	25	24	280	1000	0.146	24	13.261	ORDER
344	[SOI][W25][PVD][AG][1500NM]	SOI	25	24	280	1500	0.219	24	13.642	ORDER
345	[SOI][W25][PVD][AG][2000NM]	SOI	25	24	280	2000	0.292	24	14.023	ORDER
346	[SOI][W25][PVD][AG][2500NM]	SOI	25	24	280	2500	0.365	24	14.404	ORDER
347	[SOI][W25][PVD][AG][3000NM]	SOI	25	24	280	3000	0.439	24	14.784	ORDER
348	[SOI][W25][PVD][AG][3500NM]	SOI	25	24	280	3500	0.512	24	15.165	ORDER
349	[SOI][W25][PVD][AG][4000NM]	SOI	25	24	280	4000	0.585	24	15.546	ORDER
350	[SOI][W25][PVD][AG][4500NM]	SOI	25	24	280	4500	0.658	24	15.927	ORDER
351	[SOI][W25][PVD][AG][5000NM]	SOI	25	24	280	5000	0.731	24	16.307	ORDER
352	[SOI][W25][PVD][AG][5500NM]	SOI	25	24	280	5500	0.804	24	16.688	ORDER
353	[SOI][W25][PVD][AG][6000NM]	SOI	25	24	280	6000	0.877	24	17.069	ORDER
354	[SOI][W25][PVD][AG][6500NM]	SOI	25	24	280	6500	0.950	24	17.449	ORDER
355	[SOI][W25][PVD][AG][7000NM]	SOI	25	24	280	7000	1.023	24	17.830	ORDER
356	[SOI][W25][PVD][AG][7500NM]	SOI	25	24	280	7500	1.096	24	18.211	ORDER
357	[SOI][W25][PVD][AG][8000NM]	SOI	25	24	280	8000	1.170	24	18.592	ORDER
358	[SOI][W25][PVD][AG][8500NM]	SOI	25	24	280	8500	1.243	24	18.972	ORDER
359	[SOI][W25][PVD][AG][9000NM]	SOI	25	24	280	9000	1.316	24	19.353	ORDER
360	[SOI][W25][PVD][AG][9500NM]	SOI	25	24	280	9500	1.389	24	19.734	ORDER
361	[SOI][W25][PVD][AG][10000NM]	SOI	25	24	280	10000	1.462	24	20.115	ORDER
362	[SOI][W50][PVD][AG][1000NM]	SOI	50	12	280	1000	0.146	12	26.523	ORDER
363	[SOI][W50][PVD][AG][1500NM]	SOI	50	12	280	1500	0.219	12	27.284	ORDER
364	[SOI][W50][PVD][AG][2000NM]	SOI	50	12	280	2000	0.292	12	28.046	ORDER
365	[SOI][W50][PVD][AG][2500NM]	SOI	50	12	280	2500	0.365	12	28.807	ORDER
366	[SOI][W50][PVD][AG][3000NM]	SOI	50	12	280	3000	0.439	12	29.569	ORDER
367	[SOI][W50][PVD][AG][3500NM]	SOI	50	12	280	3500	0.512	12	30.330	ORDER
368	[SOI][W50][PVD][AG][4000NM]	SOI	50	12	280	4000	0.585	12	31.092	ORDER
369	[SOI][W50][PVD][AG][4500NM]	SOI	50	12	280	4500	0.658	12	31.853	ORDER
370	[SOI][W50][PVD][AG][5000NM]	SOI	50	12	280	5000	0.731	12	32.615	ORDER
371	[SOI][W50][PVD][AG][5500NM]	SOI	50	12	280	5500	0.804	12	33.376	ORDER
372	[SOI][W50][PVD][AG][6000NM]	SOI	50	12	280	6000	0.877	12	34.137	ORDER
373	[SOI][W50][PVD][AG][6500NM]	SOI	50	12	280	6500	0.950	12	34.899	ORDER
374	[SOI][W50][PVD][AG][7000NM]	SOI	50	12	280	7000	1.023	12	35.660	ORDER
375	[SOI][W50][PVD][AG][7500NM]	SOI	50	12	280	7500	1.096	12	36.422	ORDER
376	[SOI][W50][PVD][AG][8000NM]	SOI	50	12	280	8000	1.170	12	37.183	ORDER
377	[SOI][W50][PVD][AG][8500NM]	SOI	50	12	280	8500	1.243	12	37.945	ORDER
378	[SOI][W50][PVD][AG][9000NM]	SOI	50	12	280	9000	1.316	12	38.706	ORDER
379	[SOI][W50][PVD][AG][9500NM]	SOI	50	12	280	9500	1.389	12	39.468	ORDER
380	[SOI][W50][PVD][AG][10000NM]	SOI	50	12	280	10000	1.462	12	40.229	ORDER
381	[SOI][W75][PVD][AG][1000NM]	SOI	75	10	280	1000	0.146	10	31.827	ORDER
382	[SOI][W75][PVD][AG][1500NM]	SOI	75	10	280	1500	0.219	10	32.741	ORDER
383	[SOI][W75][PVD][AG][2000NM]	SOI	75	10	280	2000	0.292	10	33.655	ORDER
384	[SOI][W75][PVD][AG][2500NM]	SOI	75	10	280	2500	0.365	10	34.569	ORDER
385	[SOI][W75][PVD][AG][3000NM]	SOI	75	10	280	3000	0.439	10	35.482	ORDER
386	[SOI][W75][PVD][AG][3500NM]	SOI	75	10	280	3500	0.512	10	36.396	ORDER
387	[SOI][W75][PVD][AG][4000NM]	SOI	75	10	280	4000	0.585	10	37.310	ORDER
388	[SOI][W75][PVD][AG][4500NM]	SOI	75	10	280	4500	0.658	10	38.224	ORDER
389	[SOI][W75][PVD][AG][5000NM]	SOI	75	10	280	5000	0.731	10	39.137	ORDER
390	[SOI][W75][PVD][AG][5500NM]	SOI	75	10	280	5500	0.804	10	40.051	ORDER
391	[SOI][W75][PVD][AG][6000NM]	SOI	75	10	280	6000	0.877	10	40.965	ORDER
392	[SOI][W75][PVD][AG][6500NM]	SOI	75	10	280	6500	0.950	10	41.879	ORDER
393	[SOI][W75][PVD][AG][7000NM]	SOI	75	10	280	7000	1.023	10	42.792	ORDER
394	[SOI][W75][PVD][AG][7500NM]	SOI	75	10	280	7500	1.096	10	43.706	ORDER
395	[SOI][W75][PVD][AG][8000NM]	SOI	75	10	280	8000	1.170	10	44.620	ORDER
396	[SOI][W75][PVD][AG][8500NM]	SOI	75	10	280	8500	1.243	10	45.534	ORDER
397	[SOI][W75][PVD][AG][9000NM]	SOI	75	10	280	9000	1.316	10	46.447	ORDER
398	[SOI][W75][PVD][AG][9500NM]	SOI	75	10	280	9500	1.389	10	47.361	ORDER
399	[SOI][W75][PVD][AG][10000NM]	SOI	75	10	280	10000	1.462	10	48.275	ORDER
400	[SOI][W100][PVD][AG][1000NM]	SOI	100	8	280	1000	0.146	8	39.784	ORDER
401	[SOI][W100][PVD][AG][1500NM]	SOI	100	8	280	1500	0.219	8	40.927	ORDER
402	[SOI][W100][PVD][AG][2000NM]	SOI	100	8	280	2000	0.292	8	42.069	ORDER
403	[SOI][W100][PVD][AG][2500NM]	SOI	100	8	280	2500	0.365	8	43.211	ORDER
404	[SOI][W100][PVD][AG][3000NM]	SOI	100	8	280	3000	0.439	8	44.353	ORDER
405	[SOI][W100][PVD][AG][3500NM]	SOI	100	8	280	3500	0.512	8	45.495	ORDER
406	[SOI][W100][PVD][AG][4000NM]	SOI	100	8	280	4000	0.585	8	46.637	ORDER
407	[SOI][W100][PVD][AG][4500NM]	SOI	100	8	280	4500	0.658	8	47.780	ORDER
408	[SOI][W100][PVD][AG][5000NM]	SOI	100	8	280	5000	0.731	8	48.922	ORDER
409	[SOI][W100][PVD][AG][5500NM]	SOI	100	8	280	5500	0.804	8	50.064	ORDER
410	[SOI][W100][PVD][AG][6000NM]	SOI	100	8	280	6000	0.877	8	51.206	ORDER
411	[SOI][W100][PVD][AG][6500NM]	SOI	100	8	280	6500	0.950	8	52.348	ORDER
412	[SOI][W100][PVD][AG][7000NM]	SOI	100	8	280	7000	1.023	8	53.490	ORDER
413	[SOI][W100][PVD][AG][7500NM]	SOI	100	8	280	7500	1.096	8	54.633	ORDER
414	[SOI][W100][PVD][AG][8000NM]	SOI	100	8	280	8000	1.170	8	55.775	ORDER
415	[SOI][W100][PVD][AG][8500NM]	SOI	100	8	280	8500	1.243	8	56.917	ORDER
416	[SOI][W100][PVD][AG][9000NM]	SOI	100	8	280	9000	1.316	8	58.059	ORDER
417	[SOI][W100][PVD][AG][9500NM]	SOI	100	8	280	9500	1.389	8	59.201	ORDER
418	[SOI][W100][PVD][AG][10000NM]	SOI	100	8	280	10000	1.462	8	60.344	ORDER
419	[SOI][W125][PVD][AG][1000NM]	SOI	125	7	280	1000	0.146	7	45.468	ORDER
420	[SOI][W125][PVD][AG][1500NM]	SOI	125	7	280	1500	0.219	7	46.773	ORDER
421	[SOI][W125][PVD][AG][2000NM]	SOI	125	7	280	2000	0.292	7	48.079	ORDER
422	[SOI][W125][PVD][AG][2500NM]	SOI	125	7	280	2500	0.365	7	49.384	ORDER
423	[SOI][W125][PVD][AG][3000NM]	SOI	125	7	280	3000	0.439	7	50.689	ORDER
424	[SOI][W125][PVD][AG][3500NM]	SOI	125	7	280	3500	0.512	7	51.995	ORDER
425	[SOI][W125][PVD][AG][4000NM]	SOI	125	7	280	4000	0.585	7	53.300	ORDER
426	[SOI][W125][PVD][AG][4500NM]	SOI	125	7	280	4500	0.658	7	54.605	ORDER
427	[SOI][W125][PVD][AG][5000NM]	SOI	125	7	280	5000	0.731	7	55.911	ORDER
428	[SOI][W125][PVD][AG][5500NM]	SOI	125	7	280	5500	0.804	7	57.216	ORDER
429	[SOI][W125][PVD][AG][6000NM]	SOI	125	7	280	6000	0.877	7	58.521	ORDER
430	[SOI][W125][PVD][AG][6500NM]	SOI	125	7	280	6500	0.950	7	59.827	ORDER
431	[SOI][W125][PVD][AG][7000NM]	SOI	125	7	280	7000	1.023	7	61.132	ORDER
432	[SOI][W125][PVD][AG][7500NM]	SOI	125	7	280	7500	1.096	7	62.437	ORDER
433	[SOI][W125][PVD][AG][8000NM]	SOI	125	7	280	8000	1.170	7	63.743	ORDER
434	[SOI][W125][PVD][AG][8500NM]	SOI	125	7	280	8500	1.243	7	65.048	ORDER
435	[SOI][W125][PVD][AG][9000NM]	SOI	125	7	280	9000	1.316	7	66.353	ORDER
436	[SOI][W125][PVD][AG][9500NM]	SOI	125	7	280	9500	1.389	7	67.659	ORDER
437	[SOI][W125][PVD][AG][10000NM]	SOI	125	7	280	10000	1.462	7	68.964	ORDER
438	[SOI][W150][PVD][AG][1000NM]	SOI	150	6	280	1000	0.146	6	53.046	ORDER
439	[SOI][W150][PVD][AG][1500NM]	SOI	150	6	280	1500	0.219	6	54.569	ORDER
440	[SOI][W150][PVD][AG][2000NM]	SOI	150	6	280	2000	0.292	6	56.092	ORDER
441	[SOI][W150][PVD][AG][2500NM]	SOI	150	6	280	2500	0.365	6	57.615	ORDER
442	[SOI][W150][PVD][AG][3000NM]	SOI	150	6	280	3000	0.439	6	59.137	ORDER
443	[SOI][W150][PVD][AG][3500NM]	SOI	150	6	280	3500	0.512	6	60.660	ORDER
444	[SOI][W150][PVD][AG][4000NM]	SOI	150	6	280	4000	0.585	6	62.183	ORDER
445	[SOI][W150][PVD][AG][4500NM]	SOI	150	6	280	4500	0.658	6	63.706	ORDER
446	[SOI][W150][PVD][AG][5000NM]	SOI	150	6	280	5000	0.731	6	65.229	ORDER
447	[SOI][W150][PVD][AG][5500NM]	SOI	150	6	280	5500	0.804	6	66.752	ORDER
448	[SOI][W150][PVD][AG][6000NM]	SOI	150	6	280	6000	0.877	6	68.275	ORDER
449	[SOI][W150][PVD][AG][6500NM]	SOI	150	6	280	6500	0.950	6	69.798	ORDER
450	[SOI][W150][PVD][AG][7000NM]	SOI	150	6	280	7000	1.023	6	71.321	ORDER
451	[SOI][W150][PVD][AG][7500NM]	SOI	150	6	280	7500	1.096	6	72.844	ORDER
452	[SOI][W150][PVD][AG][8000NM]	SOI	150	6	280	8000	1.170	6	74.366	ORDER
453	[SOI][W150][PVD][AG][8500NM]	SOI	150	6	280	8500	1.243	6	75.889	ORDER
454	[SOI][W150][PVD][AG][9000NM]	SOI	150	6	280	9000	1.316	6	77.412	ORDER
455	[SOI][W150][PVD][AG][9500NM]	SOI	150	6	280	9500	1.389	6	78.935	ORDER
456	[SOI][W150][PVD][AG][10000NM]	SOI	150	6	280	10000	1.462	6	80.458	ORDER
457	[SOI][W200][PVD][AG][1000NM]	SOI	200	3	280	1000	0.146	3	106.092	ORDER
458	[SOI][W200][PVD][AG][1500NM]	SOI	200	3	280	1500	0.219	3	109.137	ORDER
459	[SOI][W200][PVD][AG][2000NM]	SOI	200	3	280	2000	0.292	3	112.183	ORDER
460	[SOI][W200][PVD][AG][2500NM]	SOI	200	3	280	2500	0.365	3	115.229	ORDER
461	[SOI][W200][PVD][AG][3000NM]	SOI	200	3	280	3000	0.439	3	118.275	ORDER
462	[SOI][W200][PVD][AG][3500NM]	SOI	200	3	280	3500	0.512	3	121.321	ORDER
463	[SOI][W200][PVD][AG][4000NM]	SOI	200	3	280	4000	0.585	3	124.366	ORDER
464	[SOI][W200][PVD][AG][4500NM]	SOI	200	3	280	4500	0.658	3	127.412	ORDER
465	[SOI][W200][PVD][AG][5000NM]	SOI	200	3	280	5000	0.731	3	130.458	ORDER
466	[SOI][W200][PVD][AG][5500NM]	SOI	200	3	280	5500	0.804	3	133.504	ORDER
467	[SOI][W200][PVD][AG][6000NM]	SOI	200	3	280	6000	0.877	3	136.550	ORDER
468	[SOI][W200][PVD][AG][6500NM]	SOI	200	3	280	6500	0.950	3	139.596	ORDER
469	[SOI][W200][PVD][AG][7000NM]	SOI	200	3	280	7000	1.023	3	142.641	ORDER
470	[SOI][W200][PVD][AG][7500NM]	SOI	200	3	280	7500	1.096	3	145.687	ORDER
471	[SOI][W200][PVD][AG][8000NM]	SOI	200	3	280	8000	1.170	3	148.733	ORDER
472	[SOI][W200][PVD][AG][8500NM]	SOI	200	3	280	8500	1.243	3	151.779	ORDER
473	[SOI][W200][PVD][AG][9000NM]	SOI	200	3	280	9000	1.316	3	154.825	ORDER
474	[SOI][W200][PVD][AG][9500NM]	SOI	200	3	280	9500	1.389	3	157.870	ORDER
475	[SOI][W200][PVD][AG][10000NM]	SOI	200	3	280	10000	1.462	3	160.916	ORDER
476	[SOI][W300][PVD][AG][1000NM]	SOI	300		280	1000	0.146			RFQ
477	[SOI][W300][PVD][AG][1500NM]	SOI	300		280	1500	0.219			RFQ
478	[SOI][W300][PVD][AG][2000NM]	SOI	300		280	2000	0.292			RFQ
479	[SOI][W300][PVD][AG][2500NM]	SOI	300		280	2500	0.365			RFQ
480	[SOI][W300][PVD][AG][3000NM]	SOI	300		280	3000	0.439			RFQ
481	[SOI][W300][PVD][AG][3500NM]	SOI	300		280	3500	0.512			RFQ
482	[SOI][W300][PVD][AG][4000NM]	SOI	300		280	4000	0.585			RFQ
483	[SOI][W300][PVD][AG][4500NM]	SOI	300		280	4500	0.658			RFQ
484	[SOI][W300][PVD][AG][5000NM]	SOI	300		280	5000	0.731			RFQ
485	[SOI][W300][PVD][AG][5500NM]	SOI	300		280	5500	0.804			RFQ
486	[SOI][W300][PVD][AG][6000NM]	SOI	300		280	6000	0.877			RFQ
487	[SOI][W300][PVD][AG][6500NM]	SOI	300		280	6500	0.950			RFQ
488	[SOI][W300][PVD][AG][7000NM]	SOI	300		280	7000	1.023			RFQ
489	[SOI][W300][PVD][AG][7500NM]	SOI	300		280	7500	1.096			RFQ
490	[SOI][W300][PVD][AG][8000NM]	SOI	300		280	8000	1.170			RFQ
491	[SOI][W300][PVD][AG][8500NM]	SOI	300		280	8500	1.243			RFQ
492	[SOI][W300][PVD][AG][9000NM]	SOI	300		280	9000	1.316			RFQ
493	[SOI][W300][PVD][AG][9500NM]	SOI	300		280	9500	1.389			RFQ
494	[SOI][W300][PVD][AG][10000NM]	SOI	300		280	10000	1.462			RFQ
495	[SOI][Wnnn][PVD][AG][1000NM]	SOI	nnn		280	1000	0.146			RFQ
496	[SOI][Wnnn][PVD][AG][1500NM]	SOI	nnn		280	1500	0.219			RFQ
497	[SOI][Wnnn][PVD][AG][2000NM]	SOI	nnn		280	2000	0.292			RFQ
498	[SOI][Wnnn][PVD][AG][2500NM]	SOI	nnn		280	2500	0.365			RFQ
499	[SOI][Wnnn][PVD][AG][3000NM]	SOI	nnn		280	3000	0.439			RFQ
500	[SOI][Wnnn][PVD][AG][3500NM]	SOI	nnn		280	3500	0.512			RFQ
501	[SOI][Wnnn][PVD][AG][4000NM]	SOI	nnn		280	4000	0.585			RFQ
502	[SOI][Wnnn][PVD][AG][4500NM]	SOI	nnn		280	4500	0.658			RFQ
503	[SOI][Wnnn][PVD][AG][5000NM]	SOI	nnn		280	5000	0.731			RFQ
504	[SOI][Wnnn][PVD][AG][5500NM]	SOI	nnn		280	5500	0.804			RFQ
505	[SOI][Wnnn][PVD][AG][6000NM]	SOI	nnn		280	6000	0.877			RFQ
506	[SOI][Wnnn][PVD][AG][6500NM]	SOI	nnn		280	6500	0.950			RFQ
507	[SOI][Wnnn][PVD][AG][7000NM]	SOI	nnn		280	7000	1.023			RFQ
508	[SOI][Wnnn][PVD][AG][7500NM]	SOI	nnn		280	7500	1.096			RFQ
509	[SOI][Wnnn][PVD][AG][8000NM]	SOI	nnn		280	8000	1.170			RFQ
510	[SOI][Wnnn][PVD][AG][8500NM]	SOI	nnn		280	8500	1.243			RFQ
511	[SOI][Wnnn][PVD][AG][9000NM]	SOI	nnn		280	9000	1.316			RFQ
512	[SOI][Wnnn][PVD][AG][9500NM]	SOI	nnn		280	9500	1.389			RFQ
513	[SOI][Wnnn][PVD][AG][10000NM]	SOI	nnn		280	10000	1.462			RFQ
514	[SIGE][W25][PVD][AG][1000NM]	SiGe	25	24	280	1000	0.146	24	13.261	ORDER
515	[SIGE][W25][PVD][AG][1500NM]	SiGe	25	24	280	1500	0.219	24	13.642	ORDER
516	[SIGE][W25][PVD][AG][2000NM]	SiGe	25	24	280	2000	0.292	24	14.023	ORDER
517	[SIGE][W25][PVD][AG][2500NM]	SiGe	25	24	280	2500	0.365	24	14.404	ORDER
518	[SIGE][W25][PVD][AG][3000NM]	SiGe	25	24	280	3000	0.439	24	14.784	ORDER
519	[SIGE][W25][PVD][AG][3500NM]	SiGe	25	24	280	3500	0.512	24	15.165	ORDER
520	[SIGE][W25][PVD][AG][4000NM]	SiGe	25	24	280	4000	0.585	24	15.546	ORDER
521	[SIGE][W25][PVD][AG][4500NM]	SiGe	25	24	280	4500	0.658	24	15.927	ORDER
522	[SIGE][W25][PVD][AG][5000NM]	SiGe	25	24	280	5000	0.731	24	16.307	ORDER
523	[SIGE][W25][PVD][AG][5500NM]	SiGe	25	24	280	5500	0.804	24	16.688	ORDER
524	[SIGE][W25][PVD][AG][6000NM]	SiGe	25	24	280	6000	0.877	24	17.069	ORDER
525	[SIGE][W25][PVD][AG][6500NM]	SiGe	25	24	280	6500	0.950	24	17.449	ORDER
526	[SIGE][W25][PVD][AG][7000NM]	SiGe	25	24	280	7000	1.023	24	17.830	ORDER
527	[SIGE][W25][PVD][AG][7500NM]	SiGe	25	24	280	7500	1.096	24	18.211	ORDER
528	[SIGE][W25][PVD][AG][8000NM]	SiGe	25	24	280	8000	1.170	24	18.592	ORDER
529	[SIGE][W25][PVD][AG][8500NM]	SiGe	25	24	280	8500	1.243	24	18.972	ORDER
530	[SIGE][W25][PVD][AG][9000NM]	SiGe	25	24	280	9000	1.316	24	19.353	ORDER
531	[SIGE][W25][PVD][AG][9500NM]	SiGe	25	24	280	9500	1.389	24	19.734	ORDER
532	[SIGE][W25][PVD][AG][10000NM]	SiGe	25	24	280	10000	1.462	24	20.115	ORDER
533	[SIGE][W50][PVD][AG][1000NM]	SiGe	50	12	280	1000	0.146	12	26.523	ORDER
534	[SIGE][W50][PVD][AG][1500NM]	SiGe	50	12	280	1500	0.219	12	27.284	ORDER
535	[SIGE][W50][PVD][AG][2000NM]	SiGe	50	12	280	2000	0.292	12	28.046	ORDER
536	[SIGE][W50][PVD][AG][2500NM]	SiGe	50	12	280	2500	0.365	12	28.807	ORDER
537	[SIGE][W50][PVD][AG][3000NM]	SiGe	50	12	280	3000	0.439	12	29.569	ORDER
538	[SIGE][W50][PVD][AG][3500NM]	SiGe	50	12	280	3500	0.512	12	30.330	ORDER
539	[SIGE][W50][PVD][AG][4000NM]	SiGe	50	12	280	4000	0.585	12	31.092	ORDER
540	[SIGE][W50][PVD][AG][4500NM]	SiGe	50	12	280	4500	0.658	12	31.853	ORDER
541	[SIGE][W50][PVD][AG][5000NM]	SiGe	50	12	280	5000	0.731	12	32.615	ORDER
542	[SIGE][W50][PVD][AG][5500NM]	SiGe	50	12	280	5500	0.804	12	33.376	ORDER
543	[SIGE][W50][PVD][AG][6000NM]	SiGe	50	12	280	6000	0.877	12	34.137	ORDER
544	[SIGE][W50][PVD][AG][6500NM]	SiGe	50	12	280	6500	0.950	12	34.899	ORDER
545	[SIGE][W50][PVD][AG][7000NM]	SiGe	50	12	280	7000	1.023	12	35.660	ORDER
546	[SIGE][W50][PVD][AG][7500NM]	SiGe	50	12	280	7500	1.096	12	36.422	ORDER
547	[SIGE][W50][PVD][AG][8000NM]	SiGe	50	12	280	8000	1.170	12	37.183	ORDER
548	[SIGE][W50][PVD][AG][8500NM]	SiGe	50	12	280	8500	1.243	12	37.945	ORDER
549	[SIGE][W50][PVD][AG][9000NM]	SiGe	50	12	280	9000	1.316	12	38.706	ORDER
550	[SIGE][W50][PVD][AG][9500NM]	SiGe	50	12	280	9500	1.389	12	39.468	ORDER
551	[SIGE][W50][PVD][AG][10000NM]	SiGe	50	12	280	10000	1.462	12	40.229	ORDER
552	[SIGE][W75][PVD][AG][1000NM]	SiGe	75	10	280	1000	0.146	10	31.827	ORDER
553	[SIGE][W75][PVD][AG][1500NM]	SiGe	75	10	280	1500	0.219	10	32.741	ORDER
554	[SIGE][W75][PVD][AG][2000NM]	SiGe	75	10	280	2000	0.292	10	33.655	ORDER
555	[SIGE][W75][PVD][AG][2500NM]	SiGe	75	10	280	2500	0.365	10	34.569	ORDER
556	[SIGE][W75][PVD][AG][3000NM]	SiGe	75	10	280	3000	0.439	10	35.482	ORDER
557	[SIGE][W75][PVD][AG][3500NM]	SiGe	75	10	280	3500	0.512	10	36.396	ORDER
558	[SIGE][W75][PVD][AG][4000NM]	SiGe	75	10	280	4000	0.585	10	37.310	ORDER
559	[SIGE][W75][PVD][AG][4500NM]	SiGe	75	10	280	4500	0.658	10	38.224	ORDER
560	[SIGE][W75][PVD][AG][5000NM]	SiGe	75	10	280	5000	0.731	10	39.137	ORDER
561	[SIGE][W75][PVD][AG][5500NM]	SiGe	75	10	280	5500	0.804	10	40.051	ORDER
562	[SIGE][W75][PVD][AG][6000NM]	SiGe	75	10	280	6000	0.877	10	40.965	ORDER
563	[SIGE][W75][PVD][AG][6500NM]	SiGe	75	10	280	6500	0.950	10	41.879	ORDER
564	[SIGE][W75][PVD][AG][7000NM]	SiGe	75	10	280	7000	1.023	10	42.792	ORDER
565	[SIGE][W75][PVD][AG][7500NM]	SiGe	75	10	280	7500	1.096	10	43.706	ORDER
566	[SIGE][W75][PVD][AG][8000NM]	SiGe	75	10	280	8000	1.170	10	44.620	ORDER
567	[SIGE][W75][PVD][AG][8500NM]	SiGe	75	10	280	8500	1.243	10	45.534	ORDER
568	[SIGE][W75][PVD][AG][9000NM]	SiGe	75	10	280	9000	1.316	10	46.447	ORDER
569	[SIGE][W75][PVD][AG][9500NM]	SiGe	75	10	280	9500	1.389	10	47.361	ORDER
570	[SIGE][W75][PVD][AG][10000NM]	SiGe	75	10	280	10000	1.462	10	48.275	ORDER
571	[SIGE][W100][PVD][AG][1000NM]	SiGe	100	8	280	1000	0.146	8	39.784	ORDER
572	[SIGE][W100][PVD][AG][1500NM]	SiGe	100	8	280	1500	0.219	8	40.927	ORDER
573	[SIGE][W100][PVD][AG][2000NM]	SiGe	100	8	280	2000	0.292	8	42.069	ORDER
574	[SIGE][W100][PVD][AG][2500NM]	SiGe	100	8	280	2500	0.365	8	43.211	ORDER
575	[SIGE][W100][PVD][AG][3000NM]	SiGe	100	8	280	3000	0.439	8	44.353	ORDER
576	[SIGE][W100][PVD][AG][3500NM]	SiGe	100	8	280	3500	0.512	8	45.495	ORDER
577	[SIGE][W100][PVD][AG][4000NM]	SiGe	100	8	280	4000	0.585	8	46.637	ORDER
578	[SIGE][W100][PVD][AG][4500NM]	SiGe	100	8	280	4500	0.658	8	47.780	ORDER
579	[SIGE][W100][PVD][AG][5000NM]	SiGe	100	8	280	5000	0.731	8	48.922	ORDER
580	[SIGE][W100][PVD][AG][5500NM]	SiGe	100	8	280	5500	0.804	8	50.064	ORDER
581	[SIGE][W100][PVD][AG][6000NM]	SiGe	100	8	280	6000	0.877	8	51.206	ORDER
582	[SIGE][W100][PVD][AG][6500NM]	SiGe	100	8	280	6500	0.950	8	52.348	ORDER
583	[SIGE][W100][PVD][AG][7000NM]	SiGe	100	8	280	7000	1.023	8	53.490	ORDER
584	[SIGE][W100][PVD][AG][7500NM]	SiGe	100	8	280	7500	1.096	8	54.633	ORDER
585	[SIGE][W100][PVD][AG][8000NM]	SiGe	100	8	280	8000	1.170	8	55.775	ORDER
586	[SIGE][W100][PVD][AG][8500NM]	SiGe	100	8	280	8500	1.243	8	56.917	ORDER
587	[SIGE][W100][PVD][AG][9000NM]	SiGe	100	8	280	9000	1.316	8	58.059	ORDER
588	[SIGE][W100][PVD][AG][9500NM]	SiGe	100	8	280	9500	1.389	8	59.201	ORDER
589	[SIGE][W100][PVD][AG][10000NM]	SiGe	100	8	280	10000	1.462	8	60.344	ORDER
590	[SIGE][W125][PVD][AG][1000NM]	SiGe	125	7	280	1000	0.146	7	45.468	ORDER
591	[SIGE][W125][PVD][AG][1500NM]	SiGe	125	7	280	1500	0.219	7	46.773	ORDER
592	[SIGE][W125][PVD][AG][2000NM]	SiGe	125	7	280	2000	0.292	7	48.079	ORDER
593	[SIGE][W125][PVD][AG][2500NM]	SiGe	125	7	280	2500	0.365	7	49.384	ORDER
594	[SIGE][W125][PVD][AG][3000NM]	SiGe	125	7	280	3000	0.439	7	50.689	ORDER
595	[SIGE][W125][PVD][AG][3500NM]	SiGe	125	7	280	3500	0.512	7	51.995	ORDER
596	[SIGE][W125][PVD][AG][4000NM]	SiGe	125	7	280	4000	0.585	7	53.300	ORDER
597	[SIGE][W125][PVD][AG][4500NM]	SiGe	125	7	280	4500	0.658	7	54.605	ORDER
598	[SIGE][W125][PVD][AG][5000NM]	SiGe	125	7	280	5000	0.731	7	55.911	ORDER
599	[SIGE][W125][PVD][AG][5500NM]	SiGe	125	7	280	5500	0.804	7	57.216	ORDER
600	[SIGE][W125][PVD][AG][6000NM]	SiGe	125	7	280	6000	0.877	7	58.521	ORDER
601	[SIGE][W125][PVD][AG][6500NM]	SiGe	125	7	280	6500	0.950	7	59.827	ORDER
602	[SIGE][W125][PVD][AG][7000NM]	SiGe	125	7	280	7000	1.023	7	61.132	ORDER
603	[SIGE][W125][PVD][AG][7500NM]	SiGe	125	7	280	7500	1.096	7	62.437	ORDER
604	[SIGE][W125][PVD][AG][8000NM]	SiGe	125	7	280	8000	1.170	7	63.743	ORDER
605	[SIGE][W125][PVD][AG][8500NM]	SiGe	125	7	280	8500	1.243	7	65.048	ORDER
606	[SIGE][W125][PVD][AG][9000NM]	SiGe	125	7	280	9000	1.316	7	66.353	ORDER
607	[SIGE][W125][PVD][AG][9500NM]	SiGe	125	7	280	9500	1.389	7	67.659	ORDER
608	[SIGE][W125][PVD][AG][10000NM]	SiGe	125	7	280	10000	1.462	7	68.964	ORDER
609	[SIGE][W150][PVD][AG][1000NM]	SiGe	150	6	280	1000	0.146	6	53.046	ORDER
610	[SIGE][W150][PVD][AG][1500NM]	SiGe	150	6	280	1500	0.219	6	54.569	ORDER
611	[SIGE][W150][PVD][AG][2000NM]	SiGe	150	6	280	2000	0.292	6	56.092	ORDER
612	[SIGE][W150][PVD][AG][2500NM]	SiGe	150	6	280	2500	0.365	6	57.615	ORDER
613	[SIGE][W150][PVD][AG][3000NM]	SiGe	150	6	280	3000	0.439	6	59.137	ORDER
614	[SIGE][W150][PVD][AG][3500NM]	SiGe	150	6	280	3500	0.512	6	60.660	ORDER
615	[SIGE][W150][PVD][AG][4000NM]	SiGe	150	6	280	4000	0.585	6	62.183	ORDER
616	[SIGE][W150][PVD][AG][4500NM]	SiGe	150	6	280	4500	0.658	6	63.706	ORDER
617	[SIGE][W150][PVD][AG][5000NM]	SiGe	150	6	280	5000	0.731	6	65.229	ORDER
618	[SIGE][W150][PVD][AG][5500NM]	SiGe	150	6	280	5500	0.804	6	66.752	ORDER
619	[SIGE][W150][PVD][AG][6000NM]	SiGe	150	6	280	6000	0.877	6	68.275	ORDER
620	[SIGE][W150][PVD][AG][6500NM]	SiGe	150	6	280	6500	0.950	6	69.798	ORDER
621	[SIGE][W150][PVD][AG][7000NM]	SiGe	150	6	280	7000	1.023	6	71.321	ORDER
622	[SIGE][W150][PVD][AG][7500NM]	SiGe	150	6	280	7500	1.096	6	72.844	ORDER
623	[SIGE][W150][PVD][AG][8000NM]	SiGe	150	6	280	8000	1.170	6	74.366	ORDER
624	[SIGE][W150][PVD][AG][8500NM]	SiGe	150	6	280	8500	1.243	6	75.889	ORDER
625	[SIGE][W150][PVD][AG][9000NM]	SiGe	150	6	280	9000	1.316	6	77.412	ORDER
626	[SIGE][W150][PVD][AG][9500NM]	SiGe	150	6	280	9500	1.389	6	78.935	ORDER
627	[SIGE][W150][PVD][AG][10000NM]	SiGe	150	6	280	10000	1.462	6	80.458	ORDER
628	[SIGE][W200][PVD][AG][1000NM]	SiGe	200	3	280	1000	0.146	3	106.092	ORDER
629	[SIGE][W200][PVD][AG][1500NM]	SiGe	200	3	280	1500	0.219	3	109.137	ORDER
630	[SIGE][W200][PVD][AG][2000NM]	SiGe	200	3	280	2000	0.292	3	112.183	ORDER
631	[SIGE][W200][PVD][AG][2500NM]	SiGe	200	3	280	2500	0.365	3	115.229	ORDER
632	[SIGE][W200][PVD][AG][3000NM]	SiGe	200	3	280	3000	0.439	3	118.275	ORDER
633	[SIGE][W200][PVD][AG][3500NM]	SiGe	200	3	280	3500	0.512	3	121.321	ORDER
634	[SIGE][W200][PVD][AG][4000NM]	SiGe	200	3	280	4000	0.585	3	124.366	ORDER
635	[SIGE][W200][PVD][AG][4500NM]	SiGe	200	3	280	4500	0.658	3	127.412	ORDER
636	[SIGE][W200][PVD][AG][5000NM]	SiGe	200	3	280	5000	0.731	3	130.458	ORDER
637	[SIGE][W200][PVD][AG][5500NM]	SiGe	200	3	280	5500	0.804	3	133.504	ORDER
638	[SIGE][W200][PVD][AG][6000NM]	SiGe	200	3	280	6000	0.877	3	136.550	ORDER
639	[SIGE][W200][PVD][AG][6500NM]	SiGe	200	3	280	6500	0.950	3	139.596	ORDER
640	[SIGE][W200][PVD][AG][7000NM]	SiGe	200	3	280	7000	1.023	3	142.641	ORDER
641	[SIGE][W200][PVD][AG][7500NM]	SiGe	200	3	280	7500	1.096	3	145.687	ORDER
642	[SIGE][W200][PVD][AG][8000NM]	SiGe	200	3	280	8000	1.170	3	148.733	ORDER
643	[SIGE][W200][PVD][AG][8500NM]	SiGe	200	3	280	8500	1.243	3	151.779	ORDER
644	[SIGE][W200][PVD][AG][9000NM]	SiGe	200	3	280	9000	1.316	3	154.825	ORDER
645	[SIGE][W200][PVD][AG][9500NM]	SiGe	200	3	280	9500	1.389	3	157.870	ORDER
646	[SIGE][W200][PVD][AG][10000NM]	SiGe	200	3	280	10000	1.462	3	160.916	ORDER
647	[SIGE][W300][PVD][AG][1000NM]	SiGe	300		280	1000	0.146			RFQ
648	[SIGE][W300][PVD][AG][1500NM]	SiGe	300		280	1500	0.219			RFQ
649	[SIGE][W300][PVD][AG][2000NM]	SiGe	300		280	2000	0.292			RFQ
650	[SIGE][W300][PVD][AG][2500NM]	SiGe	300		280	2500	0.365			RFQ
651	[SIGE][W300][PVD][AG][3000NM]	SiGe	300		280	3000	0.439			RFQ
652	[SIGE][W300][PVD][AG][3500NM]	SiGe	300		280	3500	0.512			RFQ
653	[SIGE][W300][PVD][AG][4000NM]	SiGe	300		280	4000	0.585			RFQ
654	[SIGE][W300][PVD][AG][4500NM]	SiGe	300		280	4500	0.658			RFQ
655	[SIGE][W300][PVD][AG][5000NM]	SiGe	300		280	5000	0.731			RFQ
656	[SIGE][W300][PVD][AG][5500NM]	SiGe	300		280	5500	0.804			RFQ
657	[SIGE][W300][PVD][AG][6000NM]	SiGe	300		280	6000	0.877			RFQ
658	[SIGE][W300][PVD][AG][6500NM]	SiGe	300		280	6500	0.950			RFQ
659	[SIGE][W300][PVD][AG][7000NM]	SiGe	300		280	7000	1.023			RFQ
660	[SIGE][W300][PVD][AG][7500NM]	SiGe	300		280	7500	1.096			RFQ
661	[SIGE][W300][PVD][AG][8000NM]	SiGe	300		280	8000	1.170			RFQ
662	[SIGE][W300][PVD][AG][8500NM]	SiGe	300		280	8500	1.243			RFQ
663	[SIGE][W300][PVD][AG][9000NM]	SiGe	300		280	9000	1.316			RFQ
664	[SIGE][W300][PVD][AG][9500NM]	SiGe	300		280	9500	1.389			RFQ
665	[SIGE][W300][PVD][AG][10000NM]	SiGe	300		280	10000	1.462			RFQ
666	[SIGE][Wnnn][PVD][AG][1000NM]	SiGe	nnn		280	1000	0.146			RFQ
667	[SIGE][Wnnn][PVD][AG][1500NM]	SiGe	nnn		280	1500	0.219			RFQ
668	[SIGE][Wnnn][PVD][AG][2000NM]	SiGe	nnn		280	2000	0.292			RFQ
669	[SIGE][Wnnn][PVD][AG][2500NM]	SiGe	nnn		280	2500	0.365			RFQ
670	[SIGE][Wnnn][PVD][AG][3000NM]	SiGe	nnn		280	3000	0.439			RFQ
671	[SIGE][Wnnn][PVD][AG][3500NM]	SiGe	nnn		280	3500	0.512			RFQ
672	[SIGE][Wnnn][PVD][AG][4000NM]	SiGe	nnn		280	4000	0.585			RFQ
673	[SIGE][Wnnn][PVD][AG][4500NM]	SiGe	nnn		280	4500	0.658			RFQ
674	[SIGE][Wnnn][PVD][AG][5000NM]	SiGe	nnn		280	5000	0.731			RFQ
675	[SIGE][Wnnn][PVD][AG][5500NM]	SiGe	nnn		280	5500	0.804			RFQ
676	[SIGE][Wnnn][PVD][AG][6000NM]	SiGe	nnn		280	6000	0.877			RFQ
677	[SIGE][Wnnn][PVD][AG][6500NM]	SiGe	nnn		280	6500	0.950			RFQ
678	[SIGE][Wnnn][PVD][AG][7000NM]	SiGe	nnn		280	7000	1.023			RFQ
679	[SIGE][Wnnn][PVD][AG][7500NM]	SiGe	nnn		280	7500	1.096			RFQ
680	[SIGE][Wnnn][PVD][AG][8000NM]	SiGe	nnn		280	8000	1.170			RFQ
681	[SIGE][Wnnn][PVD][AG][8500NM]	SiGe	nnn		280	8500	1.243			RFQ
682	[SIGE][Wnnn][PVD][AG][9000NM]	SiGe	nnn		280	9000	1.316			RFQ
683	[SIGE][Wnnn][PVD][AG][9500NM]	SiGe	nnn		280	9500	1.389			RFQ
684	[SIGE][Wnnn][PVD][AG][10000NM]	SiGe	nnn		280	10000	1.462			RFQ
685	[QZ][W25][PVD][AG][1000NM]	QZ	25	24	280	1000	0.146	24	13.261	ORDER
686	[QZ][W25][PVD][AG][1500NM]	QZ	25	24	280	1500	0.219	24	13.642	ORDER
687	[QZ][W25][PVD][AG][2000NM]	QZ	25	24	280	2000	0.292	24	14.023	ORDER
688	[QZ][W25][PVD][AG][2500NM]	QZ	25	24	280	2500	0.365	24	14.404	ORDER
689	[QZ][W25][PVD][AG][3000NM]	QZ	25	24	280	3000	0.439	24	14.784	ORDER
690	[QZ][W25][PVD][AG][3500NM]	QZ	25	24	280	3500	0.512	24	15.165	ORDER
691	[QZ][W25][PVD][AG][4000NM]	QZ	25	24	280	4000	0.585	24	15.546	ORDER
692	[QZ][W25][PVD][AG][4500NM]	QZ	25	24	280	4500	0.658	24	15.927	ORDER
693	[QZ][W25][PVD][AG][5000NM]	QZ	25	24	280	5000	0.731	24	16.307	ORDER
694	[QZ][W25][PVD][AG][5500NM]	QZ	25	24	280	5500	0.804	24	16.688	ORDER
695	[QZ][W25][PVD][AG][6000NM]	QZ	25	24	280	6000	0.877	24	17.069	ORDER
696	[QZ][W25][PVD][AG][6500NM]	QZ	25	24	280	6500	0.950	24	17.449	ORDER
697	[QZ][W25][PVD][AG][7000NM]	QZ	25	24	280	7000	1.023	24	17.830	ORDER
698	[QZ][W25][PVD][AG][7500NM]	QZ	25	24	280	7500	1.096	24	18.211	ORDER
699	[QZ][W25][PVD][AG][8000NM]	QZ	25	24	280	8000	1.170	24	18.592	ORDER
700	[QZ][W25][PVD][AG][8500NM]	QZ	25	24	280	8500	1.243	24	18.972	ORDER
701	[QZ][W25][PVD][AG][9000NM]	QZ	25	24	280	9000	1.316	24	19.353	ORDER
702	[QZ][W25][PVD][AG][9500NM]	QZ	25	24	280	9500	1.389	24	19.734	ORDER
703	[QZ][W25][PVD][AG][10000NM]	QZ	25	24	280	10000	1.462	24	20.115	ORDER
704	[QZ][W50][PVD][AG][1000NM]	QZ	50	12	280	1000	0.146	12	26.523	ORDER
705	[QZ][W50][PVD][AG][1500NM]	QZ	50	12	280	1500	0.219	12	27.284	ORDER
706	[QZ][W50][PVD][AG][2000NM]	QZ	50	12	280	2000	0.292	12	28.046	ORDER
707	[QZ][W50][PVD][AG][2500NM]	QZ	50	12	280	2500	0.365	12	28.807	ORDER
708	[QZ][W50][PVD][AG][3000NM]	QZ	50	12	280	3000	0.439	12	29.569	ORDER
709	[QZ][W50][PVD][AG][3500NM]	QZ	50	12	280	3500	0.512	12	30.330	ORDER
710	[QZ][W50][PVD][AG][4000NM]	QZ	50	12	280	4000	0.585	12	31.092	ORDER
711	[QZ][W50][PVD][AG][4500NM]	QZ	50	12	280	4500	0.658	12	31.853	ORDER
712	[QZ][W50][PVD][AG][5000NM]	QZ	50	12	280	5000	0.731	12	32.615	ORDER
713	[QZ][W50][PVD][AG][5500NM]	QZ	50	12	280	5500	0.804	12	33.376	ORDER
714	[QZ][W50][PVD][AG][6000NM]	QZ	50	12	280	6000	0.877	12	34.137	ORDER
715	[QZ][W50][PVD][AG][6500NM]	QZ	50	12	280	6500	0.950	12	34.899	ORDER
716	[QZ][W50][PVD][AG][7000NM]	QZ	50	12	280	7000	1.023	12	35.660	ORDER
717	[QZ][W50][PVD][AG][7500NM]	QZ	50	12	280	7500	1.096	12	36.422	ORDER
718	[QZ][W50][PVD][AG][8000NM]	QZ	50	12	280	8000	1.170	12	37.183	ORDER
719	[QZ][W50][PVD][AG][8500NM]	QZ	50	12	280	8500	1.243	12	37.945	ORDER
720	[QZ][W50][PVD][AG][9000NM]	QZ	50	12	280	9000	1.316	12	38.706	ORDER
721	[QZ][W50][PVD][AG][9500NM]	QZ	50	12	280	9500	1.389	12	39.468	ORDER
722	[QZ][W50][PVD][AG][10000NM]	QZ	50	12	280	10000	1.462	12	40.229	ORDER
723	[QZ][W75][PVD][AG][1000NM]	QZ	75	10	280	1000	0.146	10	31.827	ORDER
724	[QZ][W75][PVD][AG][1500NM]	QZ	75	10	280	1500	0.219	10	32.741	ORDER
725	[QZ][W75][PVD][AG][2000NM]	QZ	75	10	280	2000	0.292	10	33.655	ORDER
726	[QZ][W75][PVD][AG][2500NM]	QZ	75	10	280	2500	0.365	10	34.569	ORDER
727	[QZ][W75][PVD][AG][3000NM]	QZ	75	10	280	3000	0.439	10	35.482	ORDER
728	[QZ][W75][PVD][AG][3500NM]	QZ	75	10	280	3500	0.512	10	36.396	ORDER
729	[QZ][W75][PVD][AG][4000NM]	QZ	75	10	280	4000	0.585	10	37.310	ORDER
730	[QZ][W75][PVD][AG][4500NM]	QZ	75	10	280	4500	0.658	10	38.224	ORDER
731	[QZ][W75][PVD][AG][5000NM]	QZ	75	10	280	5000	0.731	10	39.137	ORDER
732	[QZ][W75][PVD][AG][5500NM]	QZ	75	10	280	5500	0.804	10	40.051	ORDER
733	[QZ][W75][PVD][AG][6000NM]	QZ	75	10	280	6000	0.877	10	40.965	ORDER
734	[QZ][W75][PVD][AG][6500NM]	QZ	75	10	280	6500	0.950	10	41.879	ORDER
735	[QZ][W75][PVD][AG][7000NM]	QZ	75	10	280	7000	1.023	10	42.792	ORDER
736	[QZ][W75][PVD][AG][7500NM]	QZ	75	10	280	7500	1.096	10	43.706	ORDER
737	[QZ][W75][PVD][AG][8000NM]	QZ	75	10	280	8000	1.170	10	44.620	ORDER
738	[QZ][W75][PVD][AG][8500NM]	QZ	75	10	280	8500	1.243	10	45.534	ORDER
739	[QZ][W75][PVD][AG][9000NM]	QZ	75	10	280	9000	1.316	10	46.447	ORDER
740	[QZ][W75][PVD][AG][9500NM]	QZ	75	10	280	9500	1.389	10	47.361	ORDER
741	[QZ][W75][PVD][AG][10000NM]	QZ	75	10	280	10000	1.462	10	48.275	ORDER
742	[QZ][W100][PVD][AG][1000NM]	QZ	100	8	280	1000	0.146	8	39.784	ORDER
743	[QZ][W100][PVD][AG][1500NM]	QZ	100	8	280	1500	0.219	8	40.927	ORDER
744	[QZ][W100][PVD][AG][2000NM]	QZ	100	8	280	2000	0.292	8	42.069	ORDER
745	[QZ][W100][PVD][AG][2500NM]	QZ	100	8	280	2500	0.365	8	43.211	ORDER
746	[QZ][W100][PVD][AG][3000NM]	QZ	100	8	280	3000	0.439	8	44.353	ORDER
747	[QZ][W100][PVD][AG][3500NM]	QZ	100	8	280	3500	0.512	8	45.495	ORDER
748	[QZ][W100][PVD][AG][4000NM]	QZ	100	8	280	4000	0.585	8	46.637	ORDER
749	[QZ][W100][PVD][AG][4500NM]	QZ	100	8	280	4500	0.658	8	47.780	ORDER
750	[QZ][W100][PVD][AG][5000NM]	QZ	100	8	280	5000	0.731	8	48.922	ORDER
751	[QZ][W100][PVD][AG][5500NM]	QZ	100	8	280	5500	0.804	8	50.064	ORDER
752	[QZ][W100][PVD][AG][6000NM]	QZ	100	8	280	6000	0.877	8	51.206	ORDER
753	[QZ][W100][PVD][AG][6500NM]	QZ	100	8	280	6500	0.950	8	52.348	ORDER
754	[QZ][W100][PVD][AG][7000NM]	QZ	100	8	280	7000	1.023	8	53.490	ORDER
755	[QZ][W100][PVD][AG][7500NM]	QZ	100	8	280	7500	1.096	8	54.633	ORDER
756	[QZ][W100][PVD][AG][8000NM]	QZ	100	8	280	8000	1.170	8	55.775	ORDER
757	[QZ][W100][PVD][AG][8500NM]	QZ	100	8	280	8500	1.243	8	56.917	ORDER
758	[QZ][W100][PVD][AG][9000NM]	QZ	100	8	280	9000	1.316	8	58.059	ORDER
759	[QZ][W100][PVD][AG][9500NM]	QZ	100	8	280	9500	1.389	8	59.201	ORDER
760	[QZ][W100][PVD][AG][10000NM]	QZ	100	8	280	10000	1.462	8	60.344	ORDER
761	[QZ][W125][PVD][AG][1000NM]	QZ	125	7	280	1000	0.146	7	45.468	ORDER
762	[QZ][W125][PVD][AG][1500NM]	QZ	125	7	280	1500	0.219	7	46.773	ORDER
763	[QZ][W125][PVD][AG][2000NM]	QZ	125	7	280	2000	0.292	7	48.079	ORDER
764	[QZ][W125][PVD][AG][2500NM]	QZ	125	7	280	2500	0.365	7	49.384	ORDER
765	[QZ][W125][PVD][AG][3000NM]	QZ	125	7	280	3000	0.439	7	50.689	ORDER
766	[QZ][W125][PVD][AG][3500NM]	QZ	125	7	280	3500	0.512	7	51.995	ORDER
767	[QZ][W125][PVD][AG][4000NM]	QZ	125	7	280	4000	0.585	7	53.300	ORDER
768	[QZ][W125][PVD][AG][4500NM]	QZ	125	7	280	4500	0.658	7	54.605	ORDER
769	[QZ][W125][PVD][AG][5000NM]	QZ	125	7	280	5000	0.731	7	55.911	ORDER
770	[QZ][W125][PVD][AG][5500NM]	QZ	125	7	280	5500	0.804	7	57.216	ORDER
771	[QZ][W125][PVD][AG][6000NM]	QZ	125	7	280	6000	0.877	7	58.521	ORDER
772	[QZ][W125][PVD][AG][6500NM]	QZ	125	7	280	6500	0.950	7	59.827	ORDER
773	[QZ][W125][PVD][AG][7000NM]	QZ	125	7	280	7000	1.023	7	61.132	ORDER
774	[QZ][W125][PVD][AG][7500NM]	QZ	125	7	280	7500	1.096	7	62.437	ORDER
775	[QZ][W125][PVD][AG][8000NM]	QZ	125	7	280	8000	1.170	7	63.743	ORDER
776	[QZ][W125][PVD][AG][8500NM]	QZ	125	7	280	8500	1.243	7	65.048	ORDER
777	[QZ][W125][PVD][AG][9000NM]	QZ	125	7	280	9000	1.316	7	66.353	ORDER
778	[QZ][W125][PVD][AG][9500NM]	QZ	125	7	280	9500	1.389	7	67.659	ORDER
779	[QZ][W125][PVD][AG][10000NM]	QZ	125	7	280	10000	1.462	7	68.964	ORDER
780	[QZ][W150][PVD][AG][1000NM]	QZ	150	6	280	1000	0.146	6	53.046	ORDER
781	[QZ][W150][PVD][AG][1500NM]	QZ	150	6	280	1500	0.219	6	54.569	ORDER
782	[QZ][W150][PVD][AG][2000NM]	QZ	150	6	280	2000	0.292	6	56.092	ORDER
783	[QZ][W150][PVD][AG][2500NM]	QZ	150	6	280	2500	0.365	6	57.615	ORDER
784	[QZ][W150][PVD][AG][3000NM]	QZ	150	6	280	3000	0.439	6	59.137	ORDER
785	[QZ][W150][PVD][AG][3500NM]	QZ	150	6	280	3500	0.512	6	60.660	ORDER
786	[QZ][W150][PVD][AG][4000NM]	QZ	150	6	280	4000	0.585	6	62.183	ORDER
787	[QZ][W150][PVD][AG][4500NM]	QZ	150	6	280	4500	0.658	6	63.706	ORDER
788	[QZ][W150][PVD][AG][5000NM]	QZ	150	6	280	5000	0.731	6	65.229	ORDER
789	[QZ][W150][PVD][AG][5500NM]	QZ	150	6	280	5500	0.804	6	66.752	ORDER
790	[QZ][W150][PVD][AG][6000NM]	QZ	150	6	280	6000	0.877	6	68.275	ORDER
791	[QZ][W150][PVD][AG][6500NM]	QZ	150	6	280	6500	0.950	6	69.798	ORDER
792	[QZ][W150][PVD][AG][7000NM]	QZ	150	6	280	7000	1.023	6	71.321	ORDER
793	[QZ][W150][PVD][AG][7500NM]	QZ	150	6	280	7500	1.096	6	72.844	ORDER
794	[QZ][W150][PVD][AG][8000NM]	QZ	150	6	280	8000	1.170	6	74.366	ORDER
795	[QZ][W150][PVD][AG][8500NM]	QZ	150	6	280	8500	1.243	6	75.889	ORDER
796	[QZ][W150][PVD][AG][9000NM]	QZ	150	6	280	9000	1.316	6	77.412	ORDER
797	[QZ][W150][PVD][AG][9500NM]	QZ	150	6	280	9500	1.389	6	78.935	ORDER
798	[QZ][W150][PVD][AG][10000NM]	QZ	150	6	280	10000	1.462	6	80.458	ORDER
799	[QZ][W200][PVD][AG][1000NM]	QZ	200	3	280	1000	0.146	3	106.092	ORDER
800	[QZ][W200][PVD][AG][1500NM]	QZ	200	3	280	1500	0.219	3	109.137	ORDER
801	[QZ][W200][PVD][AG][2000NM]	QZ	200	3	280	2000	0.292	3	112.183	ORDER
802	[QZ][W200][PVD][AG][2500NM]	QZ	200	3	280	2500	0.365	3	115.229	ORDER
803	[QZ][W200][PVD][AG][3000NM]	QZ	200	3	280	3000	0.439	3	118.275	ORDER
804	[QZ][W200][PVD][AG][3500NM]	QZ	200	3	280	3500	0.512	3	121.321	ORDER
805	[QZ][W200][PVD][AG][4000NM]	QZ	200	3	280	4000	0.585	3	124.366	ORDER
806	[QZ][W200][PVD][AG][4500NM]	QZ	200	3	280	4500	0.658	3	127.412	ORDER
807	[QZ][W200][PVD][AG][5000NM]	QZ	200	3	280	5000	0.731	3	130.458	ORDER
808	[QZ][W200][PVD][AG][5500NM]	QZ	200	3	280	5500	0.804	3	133.504	ORDER
809	[QZ][W200][PVD][AG][6000NM]	QZ	200	3	280	6000	0.877	3	136.550	ORDER
810	[QZ][W200][PVD][AG][6500NM]	QZ	200	3	280	6500	0.950	3	139.596	ORDER
811	[QZ][W200][PVD][AG][7000NM]	QZ	200	3	280	7000	1.023	3	142.641	ORDER
812	[QZ][W200][PVD][AG][7500NM]	QZ	200	3	280	7500	1.096	3	145.687	ORDER
813	[QZ][W200][PVD][AG][8000NM]	QZ	200	3	280	8000	1.170	3	148.733	ORDER
814	[QZ][W200][PVD][AG][8500NM]	QZ	200	3	280	8500	1.243	3	151.779	ORDER
815	[QZ][W200][PVD][AG][9000NM]	QZ	200	3	280	9000	1.316	3	154.825	ORDER
816	[QZ][W200][PVD][AG][9500NM]	QZ	200	3	280	9500	1.389	3	157.870	ORDER
817	[QZ][W200][PVD][AG][10000NM]	QZ	200	3	280	10000	1.462	3	160.916	ORDER
818	[QZ][W300][PVD][AG][1000NM]	QZ	300		280	1000	0.146			RFQ
819	[QZ][W300][PVD][AG][1500NM]	QZ	300		280	1500	0.219			RFQ
820	[QZ][W300][PVD][AG][2000NM]	QZ	300		280	2000	0.292			RFQ
821	[QZ][W300][PVD][AG][2500NM]	QZ	300		280	2500	0.365			RFQ
822	[QZ][W300][PVD][AG][3000NM]	QZ	300		280	3000	0.439			RFQ
823	[QZ][W300][PVD][AG][3500NM]	QZ	300		280	3500	0.512			RFQ
824	[QZ][W300][PVD][AG][4000NM]	QZ	300		280	4000	0.585			RFQ
825	[QZ][W300][PVD][AG][4500NM]	QZ	300		280	4500	0.658			RFQ
826	[QZ][W300][PVD][AG][5000NM]	QZ	300		280	5000	0.731			RFQ
827	[QZ][W300][PVD][AG][5500NM]	QZ	300		280	5500	0.804			RFQ
828	[QZ][W300][PVD][AG][6000NM]	QZ	300		280	6000	0.877			RFQ
829	[QZ][W300][PVD][AG][6500NM]	QZ	300		280	6500	0.950			RFQ
830	[QZ][W300][PVD][AG][7000NM]	QZ	300		280	7000	1.023			RFQ
831	[QZ][W300][PVD][AG][7500NM]	QZ	300		280	7500	1.096			RFQ
832	[QZ][W300][PVD][AG][8000NM]	QZ	300		280	8000	1.170			RFQ
833	[QZ][W300][PVD][AG][8500NM]	QZ	300		280	8500	1.243			RFQ
834	[QZ][W300][PVD][AG][9000NM]	QZ	300		280	9000	1.316			RFQ
835	[QZ][W300][PVD][AG][9500NM]	QZ	300		280	9500	1.389			RFQ
836	[QZ][W300][PVD][AG][10000NM]	QZ	300		280	10000	1.462			RFQ
837	[QZ][Wnnn][PVD][AG][1000NM]	QZ	nnn		280	1000	0.146			RFQ
838	[QZ][Wnnn][PVD][AG][1500NM]	QZ	nnn		280	1500	0.219			RFQ
839	[QZ][Wnnn][PVD][AG][2000NM]	QZ	nnn		280	2000	0.292			RFQ
840	[QZ][Wnnn][PVD][AG][2500NM]	QZ	nnn		280	2500	0.365			RFQ
841	[QZ][Wnnn][PVD][AG][3000NM]	QZ	nnn		280	3000	0.439			RFQ
842	[QZ][Wnnn][PVD][AG][3500NM]	QZ	nnn		280	3500	0.512			RFQ
843	[QZ][Wnnn][PVD][AG][4000NM]	QZ	nnn		280	4000	0.585			RFQ
844	[QZ][Wnnn][PVD][AG][4500NM]	QZ	nnn		280	4500	0.658			RFQ
845	[QZ][Wnnn][PVD][AG][5000NM]	QZ	nnn		280	5000	0.731			RFQ
846	[QZ][Wnnn][PVD][AG][5500NM]	QZ	nnn		280	5500	0.804			RFQ
847	[QZ][Wnnn][PVD][AG][6000NM]	QZ	nnn		280	6000	0.877			RFQ
848	[QZ][Wnnn][PVD][AG][6500NM]	QZ	nnn		280	6500	0.950			RFQ
849	[QZ][Wnnn][PVD][AG][7000NM]	QZ	nnn		280	7000	1.023			RFQ
850	[QZ][Wnnn][PVD][AG][7500NM]	QZ	nnn		280	7500	1.096			RFQ
851	[QZ][Wnnn][PVD][AG][8000NM]	QZ	nnn		280	8000	1.170			RFQ
852	[QZ][Wnnn][PVD][AG][8500NM]	QZ	nnn		280	8500	1.243			RFQ
853	[QZ][Wnnn][PVD][AG][9000NM]	QZ	nnn		280	9000	1.316			RFQ
854	[QZ][Wnnn][PVD][AG][9500NM]	QZ	nnn		280	9500	1.389			RFQ
855	[QZ][Wnnn][PVD][AG][10000NM]	QZ	nnn		280	10000	1.462			RFQ
856	[SAP][W25][PVD][AG][1000NM]	SAP	25	24	280	1000	0.146	24	13.261	ORDER
857	[SAP][W25][PVD][AG][1500NM]	SAP	25	24	280	1500	0.219	24	13.642	ORDER
858	[SAP][W25][PVD][AG][2000NM]	SAP	25	24	280	2000	0.292	24	14.023	ORDER
859	[SAP][W25][PVD][AG][2500NM]	SAP	25	24	280	2500	0.365	24	14.404	ORDER
860	[SAP][W25][PVD][AG][3000NM]	SAP	25	24	280	3000	0.439	24	14.784	ORDER
861	[SAP][W25][PVD][AG][3500NM]	SAP	25	24	280	3500	0.512	24	15.165	ORDER
862	[SAP][W25][PVD][AG][4000NM]	SAP	25	24	280	4000	0.585	24	15.546	ORDER
863	[SAP][W25][PVD][AG][4500NM]	SAP	25	24	280	4500	0.658	24	15.927	ORDER
864	[SAP][W25][PVD][AG][5000NM]	SAP	25	24	280	5000	0.731	24	16.307	ORDER
865	[SAP][W25][PVD][AG][5500NM]	SAP	25	24	280	5500	0.804	24	16.688	ORDER
866	[SAP][W25][PVD][AG][6000NM]	SAP	25	24	280	6000	0.877	24	17.069	ORDER
867	[SAP][W25][PVD][AG][6500NM]	SAP	25	24	280	6500	0.950	24	17.449	ORDER
868	[SAP][W25][PVD][AG][7000NM]	SAP	25	24	280	7000	1.023	24	17.830	ORDER
869	[SAP][W25][PVD][AG][7500NM]	SAP	25	24	280	7500	1.096	24	18.211	ORDER
870	[SAP][W25][PVD][AG][8000NM]	SAP	25	24	280	8000	1.170	24	18.592	ORDER
871	[SAP][W25][PVD][AG][8500NM]	SAP	25	24	280	8500	1.243	24	18.972	ORDER
872	[SAP][W25][PVD][AG][9000NM]	SAP	25	24	280	9000	1.316	24	19.353	ORDER
873	[SAP][W25][PVD][AG][9500NM]	SAP	25	24	280	9500	1.389	24	19.734	ORDER
874	[SAP][W25][PVD][AG][10000NM]	SAP	25	24	280	10000	1.462	24	20.115	ORDER
875	[SAP][W50][PVD][AG][1000NM]	SAP	50	12	280	1000	0.146	12	26.523	ORDER
876	[SAP][W50][PVD][AG][1500NM]	SAP	50	12	280	1500	0.219	12	27.284	ORDER
877	[SAP][W50][PVD][AG][2000NM]	SAP	50	12	280	2000	0.292	12	28.046	ORDER
878	[SAP][W50][PVD][AG][2500NM]	SAP	50	12	280	2500	0.365	12	28.807	ORDER
879	[SAP][W50][PVD][AG][3000NM]	SAP	50	12	280	3000	0.439	12	29.569	ORDER
880	[SAP][W50][PVD][AG][3500NM]	SAP	50	12	280	3500	0.512	12	30.330	ORDER
881	[SAP][W50][PVD][AG][4000NM]	SAP	50	12	280	4000	0.585	12	31.092	ORDER
882	[SAP][W50][PVD][AG][4500NM]	SAP	50	12	280	4500	0.658	12	31.853	ORDER
883	[SAP][W50][PVD][AG][5000NM]	SAP	50	12	280	5000	0.731	12	32.615	ORDER
884	[SAP][W50][PVD][AG][5500NM]	SAP	50	12	280	5500	0.804	12	33.376	ORDER
885	[SAP][W50][PVD][AG][6000NM]	SAP	50	12	280	6000	0.877	12	34.137	ORDER
886	[SAP][W50][PVD][AG][6500NM]	SAP	50	12	280	6500	0.950	12	34.899	ORDER
887	[SAP][W50][PVD][AG][7000NM]	SAP	50	12	280	7000	1.023	12	35.660	ORDER
888	[SAP][W50][PVD][AG][7500NM]	SAP	50	12	280	7500	1.096	12	36.422	ORDER
889	[SAP][W50][PVD][AG][8000NM]	SAP	50	12	280	8000	1.170	12	37.183	ORDER
890	[SAP][W50][PVD][AG][8500NM]	SAP	50	12	280	8500	1.243	12	37.945	ORDER
891	[SAP][W50][PVD][AG][9000NM]	SAP	50	12	280	9000	1.316	12	38.706	ORDER
892	[SAP][W50][PVD][AG][9500NM]	SAP	50	12	280	9500	1.389	12	39.468	ORDER
893	[SAP][W50][PVD][AG][10000NM]	SAP	50	12	280	10000	1.462	12	40.229	ORDER
894	[SAP][W75][PVD][AG][1000NM]	SAP	75	10	280	1000	0.146	10	31.827	ORDER
895	[SAP][W75][PVD][AG][1500NM]	SAP	75	10	280	1500	0.219	10	32.741	ORDER
896	[SAP][W75][PVD][AG][2000NM]	SAP	75	10	280	2000	0.292	10	33.655	ORDER
897	[SAP][W75][PVD][AG][2500NM]	SAP	75	10	280	2500	0.365	10	34.569	ORDER
898	[SAP][W75][PVD][AG][3000NM]	SAP	75	10	280	3000	0.439	10	35.482	ORDER
899	[SAP][W75][PVD][AG][3500NM]	SAP	75	10	280	3500	0.512	10	36.396	ORDER
900	[SAP][W75][PVD][AG][4000NM]	SAP	75	10	280	4000	0.585	10	37.310	ORDER
901	[SAP][W75][PVD][AG][4500NM]	SAP	75	10	280	4500	0.658	10	38.224	ORDER
902	[SAP][W75][PVD][AG][5000NM]	SAP	75	10	280	5000	0.731	10	39.137	ORDER
903	[SAP][W75][PVD][AG][5500NM]	SAP	75	10	280	5500	0.804	10	40.051	ORDER
904	[SAP][W75][PVD][AG][6000NM]	SAP	75	10	280	6000	0.877	10	40.965	ORDER
905	[SAP][W75][PVD][AG][6500NM]	SAP	75	10	280	6500	0.950	10	41.879	ORDER
906	[SAP][W75][PVD][AG][7000NM]	SAP	75	10	280	7000	1.023	10	42.792	ORDER
907	[SAP][W75][PVD][AG][7500NM]	SAP	75	10	280	7500	1.096	10	43.706	ORDER
908	[SAP][W75][PVD][AG][8000NM]	SAP	75	10	280	8000	1.170	10	44.620	ORDER
909	[SAP][W75][PVD][AG][8500NM]	SAP	75	10	280	8500	1.243	10	45.534	ORDER
910	[SAP][W75][PVD][AG][9000NM]	SAP	75	10	280	9000	1.316	10	46.447	ORDER
911	[SAP][W75][PVD][AG][9500NM]	SAP	75	10	280	9500	1.389	10	47.361	ORDER
912	[SAP][W75][PVD][AG][10000NM]	SAP	75	10	280	10000	1.462	10	48.275	ORDER
913	[SAP][W100][PVD][AG][1000NM]	SAP	100	8	280	1000	0.146	8	39.784	ORDER
914	[SAP][W100][PVD][AG][1500NM]	SAP	100	8	280	1500	0.219	8	40.927	ORDER
915	[SAP][W100][PVD][AG][2000NM]	SAP	100	8	280	2000	0.292	8	42.069	ORDER
916	[SAP][W100][PVD][AG][2500NM]	SAP	100	8	280	2500	0.365	8	43.211	ORDER
917	[SAP][W100][PVD][AG][3000NM]	SAP	100	8	280	3000	0.439	8	44.353	ORDER
918	[SAP][W100][PVD][AG][3500NM]	SAP	100	8	280	3500	0.512	8	45.495	ORDER
919	[SAP][W100][PVD][AG][4000NM]	SAP	100	8	280	4000	0.585	8	46.637	ORDER
920	[SAP][W100][PVD][AG][4500NM]	SAP	100	8	280	4500	0.658	8	47.780	ORDER
921	[SAP][W100][PVD][AG][5000NM]	SAP	100	8	280	5000	0.731	8	48.922	ORDER
922	[SAP][W100][PVD][AG][5500NM]	SAP	100	8	280	5500	0.804	8	50.064	ORDER
923	[SAP][W100][PVD][AG][6000NM]	SAP	100	8	280	6000	0.877	8	51.206	ORDER
924	[SAP][W100][PVD][AG][6500NM]	SAP	100	8	280	6500	0.950	8	52.348	ORDER
925	[SAP][W100][PVD][AG][7000NM]	SAP	100	8	280	7000	1.023	8	53.490	ORDER
926	[SAP][W100][PVD][AG][7500NM]	SAP	100	8	280	7500	1.096	8	54.633	ORDER
927	[SAP][W100][PVD][AG][8000NM]	SAP	100	8	280	8000	1.170	8	55.775	ORDER
928	[SAP][W100][PVD][AG][8500NM]	SAP	100	8	280	8500	1.243	8	56.917	ORDER
929	[SAP][W100][PVD][AG][9000NM]	SAP	100	8	280	9000	1.316	8	58.059	ORDER
930	[SAP][W100][PVD][AG][9500NM]	SAP	100	8	280	9500	1.389	8	59.201	ORDER
931	[SAP][W100][PVD][AG][10000NM]	SAP	100	8	280	10000	1.462	8	60.344	ORDER
932	[SAP][W125][PVD][AG][1000NM]	SAP	125	7	280	1000	0.146	7	45.468	ORDER
933	[SAP][W125][PVD][AG][1500NM]	SAP	125	7	280	1500	0.219	7	46.773	ORDER
934	[SAP][W125][PVD][AG][2000NM]	SAP	125	7	280	2000	0.292	7	48.079	ORDER
935	[SAP][W125][PVD][AG][2500NM]	SAP	125	7	280	2500	0.365	7	49.384	ORDER
936	[SAP][W125][PVD][AG][3000NM]	SAP	125	7	280	3000	0.439	7	50.689	ORDER
937	[SAP][W125][PVD][AG][3500NM]	SAP	125	7	280	3500	0.512	7	51.995	ORDER
938	[SAP][W125][PVD][AG][4000NM]	SAP	125	7	280	4000	0.585	7	53.300	ORDER
939	[SAP][W125][PVD][AG][4500NM]	SAP	125	7	280	4500	0.658	7	54.605	ORDER
940	[SAP][W125][PVD][AG][5000NM]	SAP	125	7	280	5000	0.731	7	55.911	ORDER
941	[SAP][W125][PVD][AG][5500NM]	SAP	125	7	280	5500	0.804	7	57.216	ORDER
942	[SAP][W125][PVD][AG][6000NM]	SAP	125	7	280	6000	0.877	7	58.521	ORDER
943	[SAP][W125][PVD][AG][6500NM]	SAP	125	7	280	6500	0.950	7	59.827	ORDER
944	[SAP][W125][PVD][AG][7000NM]	SAP	125	7	280	7000	1.023	7	61.132	ORDER
945	[SAP][W125][PVD][AG][7500NM]	SAP	125	7	280	7500	1.096	7	62.437	ORDER
946	[SAP][W125][PVD][AG][8000NM]	SAP	125	7	280	8000	1.170	7	63.743	ORDER
947	[SAP][W125][PVD][AG][8500NM]	SAP	125	7	280	8500	1.243	7	65.048	ORDER
948	[SAP][W125][PVD][AG][9000NM]	SAP	125	7	280	9000	1.316	7	66.353	ORDER
949	[SAP][W125][PVD][AG][9500NM]	SAP	125	7	280	9500	1.389	7	67.659	ORDER
950	[SAP][W125][PVD][AG][10000NM]	SAP	125	7	280	10000	1.462	7	68.964	ORDER
951	[SAP][W150][PVD][AG][1000NM]	SAP	150	6	280	1000	0.146	6	53.046	ORDER
952	[SAP][W150][PVD][AG][1500NM]	SAP	150	6	280	1500	0.219	6	54.569	ORDER
953	[SAP][W150][PVD][AG][2000NM]	SAP	150	6	280	2000	0.292	6	56.092	ORDER
954	[SAP][W150][PVD][AG][2500NM]	SAP	150	6	280	2500	0.365	6	57.615	ORDER
955	[SAP][W150][PVD][AG][3000NM]	SAP	150	6	280	3000	0.439	6	59.137	ORDER
956	[SAP][W150][PVD][AG][3500NM]	SAP	150	6	280	3500	0.512	6	60.660	ORDER
957	[SAP][W150][PVD][AG][4000NM]	SAP	150	6	280	4000	0.585	6	62.183	ORDER
958	[SAP][W150][PVD][AG][4500NM]	SAP	150	6	280	4500	0.658	6	63.706	ORDER
959	[SAP][W150][PVD][AG][5000NM]	SAP	150	6	280	5000	0.731	6	65.229	ORDER
960	[SAP][W150][PVD][AG][5500NM]	SAP	150	6	280	5500	0.804	6	66.752	ORDER
961	[SAP][W150][PVD][AG][6000NM]	SAP	150	6	280	6000	0.877	6	68.275	ORDER
962	[SAP][W150][PVD][AG][6500NM]	SAP	150	6	280	6500	0.950	6	69.798	ORDER
963	[SAP][W150][PVD][AG][7000NM]	SAP	150	6	280	7000	1.023	6	71.321	ORDER
964	[SAP][W150][PVD][AG][7500NM]	SAP	150	6	280	7500	1.096	6	72.844	ORDER
965	[SAP][W150][PVD][AG][8000NM]	SAP	150	6	280	8000	1.170	6	74.366	ORDER
966	[SAP][W150][PVD][AG][8500NM]	SAP	150	6	280	8500	1.243	6	75.889	ORDER
967	[SAP][W150][PVD][AG][9000NM]	SAP	150	6	280	9000	1.316	6	77.412	ORDER
968	[SAP][W150][PVD][AG][9500NM]	SAP	150	6	280	9500	1.389	6	78.935	ORDER
969	[SAP][W150][PVD][AG][10000NM]	SAP	150	6	280	10000	1.462	6	80.458	ORDER
970	[SAP][W200][PVD][AG][1000NM]	SAP	200	3	280	1000	0.146	3	106.092	ORDER
971	[SAP][W200][PVD][AG][1500NM]	SAP	200	3	280	1500	0.219	3	109.137	ORDER
972	[SAP][W200][PVD][AG][2000NM]	SAP	200	3	280	2000	0.292	3	112.183	ORDER
973	[SAP][W200][PVD][AG][2500NM]	SAP	200	3	280	2500	0.365	3	115.229	ORDER
974	[SAP][W200][PVD][AG][3000NM]	SAP	200	3	280	3000	0.439	3	118.275	ORDER
975	[SAP][W200][PVD][AG][3500NM]	SAP	200	3	280	3500	0.512	3	121.321	ORDER
976	[SAP][W200][PVD][AG][4000NM]	SAP	200	3	280	4000	0.585	3	124.366	ORDER
977	[SAP][W200][PVD][AG][4500NM]	SAP	200	3	280	4500	0.658	3	127.412	ORDER
978	[SAP][W200][PVD][AG][5000NM]	SAP	200	3	280	5000	0.731	3	130.458	ORDER
979	[SAP][W200][PVD][AG][5500NM]	SAP	200	3	280	5500	0.804	3	133.504	ORDER
980	[SAP][W200][PVD][AG][6000NM]	SAP	200	3	280	6000	0.877	3	136.550	ORDER
981	[SAP][W200][PVD][AG][6500NM]	SAP	200	3	280	6500	0.950	3	139.596	ORDER
982	[SAP][W200][PVD][AG][7000NM]	SAP	200	3	280	7000	1.023	3	142.641	ORDER
983	[SAP][W200][PVD][AG][7500NM]	SAP	200	3	280	7500	1.096	3	145.687	ORDER
984	[SAP][W200][PVD][AG][8000NM]	SAP	200	3	280	8000	1.170	3	148.733	ORDER
985	[SAP][W200][PVD][AG][8500NM]	SAP	200	3	280	8500	1.243	3	151.779	ORDER
986	[SAP][W200][PVD][AG][9000NM]	SAP	200	3	280	9000	1.316	3	154.825	ORDER
987	[SAP][W200][PVD][AG][9500NM]	SAP	200	3	280	9500	1.389	3	157.870	ORDER
988	[SAP][W200][PVD][AG][10000NM]	SAP	200	3	280	10000	1.462	3	160.916	ORDER
989	[SAP][W300][PVD][AG][1000NM]	SAP	300		280	1000	0.146			RFQ
990	[SAP][W300][PVD][AG][1500NM]	SAP	300		280	1500	0.219			RFQ
991	[SAP][W300][PVD][AG][2000NM]	SAP	300		280	2000	0.292			RFQ
992	[SAP][W300][PVD][AG][2500NM]	SAP	300		280	2500	0.365			RFQ
993	[SAP][W300][PVD][AG][3000NM]	SAP	300		280	3000	0.439			RFQ
994	[SAP][W300][PVD][AG][3500NM]	SAP	300		280	3500	0.512			RFQ
995	[SAP][W300][PVD][AG][4000NM]	SAP	300		280	4000	0.585			RFQ
996	[SAP][W300][PVD][AG][4500NM]	SAP	300		280	4500	0.658			RFQ
997	[SAP][W300][PVD][AG][5000NM]	SAP	300		280	5000	0.731			RFQ
998	[SAP][W300][PVD][AG][5500NM]	SAP	300		280	5500	0.804			RFQ
999	[SAP][W300][PVD][AG][6000NM]	SAP	300		280	6000	0.877			RFQ
1000	[SAP][W300][PVD][AG][6500NM]	SAP	300		280	6500	0.950			RFQ
1001	[SAP][W300][PVD][AG][7000NM]	SAP	300		280	7000	1.023			RFQ
1002	[SAP][W300][PVD][AG][7500NM]	SAP	300		280	7500	1.096			RFQ
1003	[SAP][W300][PVD][AG][8000NM]	SAP	300		280	8000	1.170			RFQ
1004	[SAP][W300][PVD][AG][8500NM]	SAP	300		280	8500	1.243			RFQ
1005	[SAP][W300][PVD][AG][9000NM]	SAP	300		280	9000	1.316			RFQ
1006	[SAP][W300][PVD][AG][9500NM]	SAP	300		280	9500	1.389			RFQ
1007	[SAP][W300][PVD][AG][10000NM]	SAP	300		280	10000	1.462			RFQ
1008	[SAP][Wnnn][PVD][AG][1000NM]	SAP	nnn		280	1000	0.146			RFQ
1009	[SAP][Wnnn][PVD][AG][1500NM]	SAP	nnn		280	1500	0.219			RFQ
1010	[SAP][Wnnn][PVD][AG][2000NM]	SAP	nnn		280	2000	0.292			RFQ
1011	[SAP][Wnnn][PVD][AG][2500NM]	SAP	nnn		280	2500	0.365			RFQ
1012	[SAP][Wnnn][PVD][AG][3000NM]	SAP	nnn		280	3000	0.439			RFQ
1013	[SAP][Wnnn][PVD][AG][3500NM]	SAP	nnn		280	3500	0.512			RFQ
1014	[SAP][Wnnn][PVD][AG][4000NM]	SAP	nnn		280	4000	0.585			RFQ
1015	[SAP][Wnnn][PVD][AG][4500NM]	SAP	nnn		280	4500	0.658			RFQ
1016	[SAP][Wnnn][PVD][AG][5000NM]	SAP	nnn		280	5000	0.731			RFQ
1017	[SAP][Wnnn][PVD][AG][5500NM]	SAP	nnn		280	5500	0.804			RFQ
1018	[SAP][Wnnn][PVD][AG][6000NM]	SAP	nnn		280	6000	0.877			RFQ
1019	[SAP][Wnnn][PVD][AG][6500NM]	SAP	nnn		280	6500	0.950			RFQ
1020	[SAP][Wnnn][PVD][AG][7000NM]	SAP	nnn		280	7000	1.023			RFQ
1021	[SAP][Wnnn][PVD][AG][7500NM]	SAP	nnn		280	7500	1.096			RFQ
1022	[SAP][Wnnn][PVD][AG][8000NM]	SAP	nnn		280	8000	1.170			RFQ
1023	[SAP][Wnnn][PVD][AG][8500NM]	SAP	nnn		280	8500	1.243			RFQ
1024	[SAP][Wnnn][PVD][AG][9000NM]	SAP	nnn		280	9000	1.316			RFQ
1025	[SAP][Wnnn][PVD][AG][9500NM]	SAP	nnn		280	9500	1.389			RFQ
1026	[SAP][Wnnn][PVD][AG][10000NM]	SAP	nnn		280	10000	1.462			RFQ
1027	[XYZ][W25][PVD][AG][1000NM]	XYZ	25	24	280	1000	0.146	24	13.261	ORDER
1028	[XYZ][W25][PVD][AG][1500NM]	XYZ	25	24	280	1500	0.219	24	13.642	ORDER
1029	[XYZ][W25][PVD][AG][2000NM]	XYZ	25	24	280	2000	0.292	24	14.023	ORDER
1030	[XYZ][W25][PVD][AG][2500NM]	XYZ	25	24	280	2500	0.365	24	14.404	ORDER
1031	[XYZ][W25][PVD][AG][3000NM]	XYZ	25	24	280	3000	0.439	24	14.784	ORDER
1032	[XYZ][W25][PVD][AG][3500NM]	XYZ	25	24	280	3500	0.512	24	15.165	ORDER
1033	[XYZ][W25][PVD][AG][4000NM]	XYZ	25	24	280	4000	0.585	24	15.546	ORDER
1034	[XYZ][W25][PVD][AG][4500NM]	XYZ	25	24	280	4500	0.658	24	15.927	ORDER
1035	[XYZ][W25][PVD][AG][5000NM]	XYZ	25	24	280	5000	0.731	24	16.307	ORDER
1036	[XYZ][W25][PVD][AG][5500NM]	XYZ	25	24	280	5500	0.804	24	16.688	ORDER
1037	[XYZ][W25][PVD][AG][6000NM]	XYZ	25	24	280	6000	0.877	24	17.069	ORDER
1038	[XYZ][W25][PVD][AG][6500NM]	XYZ	25	24	280	6500	0.950	24	17.449	ORDER
1039	[XYZ][W25][PVD][AG][7000NM]	XYZ	25	24	280	7000	1.023	24	17.830	ORDER
1040	[XYZ][W25][PVD][AG][7500NM]	XYZ	25	24	280	7500	1.096	24	18.211	ORDER
1041	[XYZ][W25][PVD][AG][8000NM]	XYZ	25	24	280	8000	1.170	24	18.592	ORDER
1042	[XYZ][W25][PVD][AG][8500NM]	XYZ	25	24	280	8500	1.243	24	18.972	ORDER
1043	[XYZ][W25][PVD][AG][9000NM]	XYZ	25	24	280	9000	1.316	24	19.353	ORDER
1044	[XYZ][W25][PVD][AG][9500NM]	XYZ	25	24	280	9500	1.389	24	19.734	ORDER
1045	[XYZ][W25][PVD][AG][10000NM]	XYZ	25	24	280	10000	1.462	24	20.115	ORDER
1046	[XYZ][W50][PVD][AG][1000NM]	XYZ	50	12	280	1000	0.146	12	26.523	ORDER
1047	[XYZ][W50][PVD][AG][1500NM]	XYZ	50	12	280	1500	0.219	12	27.284	ORDER
1048	[XYZ][W50][PVD][AG][2000NM]	XYZ	50	12	280	2000	0.292	12	28.046	ORDER
1049	[XYZ][W50][PVD][AG][2500NM]	XYZ	50	12	280	2500	0.365	12	28.807	ORDER
1050	[XYZ][W50][PVD][AG][3000NM]	XYZ	50	12	280	3000	0.439	12	29.569	ORDER
1051	[XYZ][W50][PVD][AG][3500NM]	XYZ	50	12	280	3500	0.512	12	30.330	ORDER
1052	[XYZ][W50][PVD][AG][4000NM]	XYZ	50	12	280	4000	0.585	12	31.092	ORDER
1053	[XYZ][W50][PVD][AG][4500NM]	XYZ	50	12	280	4500	0.658	12	31.853	ORDER
1054	[XYZ][W50][PVD][AG][5000NM]	XYZ	50	12	280	5000	0.731	12	32.615	ORDER
1055	[XYZ][W50][PVD][AG][5500NM]	XYZ	50	12	280	5500	0.804	12	33.376	ORDER
1056	[XYZ][W50][PVD][AG][6000NM]	XYZ	50	12	280	6000	0.877	12	34.137	ORDER
1057	[XYZ][W50][PVD][AG][6500NM]	XYZ	50	12	280	6500	0.950	12	34.899	ORDER
1058	[XYZ][W50][PVD][AG][7000NM]	XYZ	50	12	280	7000	1.023	12	35.660	ORDER
1059	[XYZ][W50][PVD][AG][7500NM]	XYZ	50	12	280	7500	1.096	12	36.422	ORDER
1060	[XYZ][W50][PVD][AG][8000NM]	XYZ	50	12	280	8000	1.170	12	37.183	ORDER
1061	[XYZ][W50][PVD][AG][8500NM]	XYZ	50	12	280	8500	1.243	12	37.945	ORDER
1062	[XYZ][W50][PVD][AG][9000NM]	XYZ	50	12	280	9000	1.316	12	38.706	ORDER
1063	[XYZ][W50][PVD][AG][9500NM]	XYZ	50	12	280	9500	1.389	12	39.468	ORDER
1064	[XYZ][W50][PVD][AG][10000NM]	XYZ	50	12	280	10000	1.462	12	40.229	ORDER
1065	[XYZ][W75][PVD][AG][1000NM]	XYZ	75	10	280	1000	0.146	10	31.827	ORDER
1066	[XYZ][W75][PVD][AG][1500NM]	XYZ	75	10	280	1500	0.219	10	32.741	ORDER
1067	[XYZ][W75][PVD][AG][2000NM]	XYZ	75	10	280	2000	0.292	10	33.655	ORDER
1068	[XYZ][W75][PVD][AG][2500NM]	XYZ	75	10	280	2500	0.365	10	34.569	ORDER
1069	[XYZ][W75][PVD][AG][3000NM]	XYZ	75	10	280	3000	0.439	10	35.482	ORDER
1070	[XYZ][W75][PVD][AG][3500NM]	XYZ	75	10	280	3500	0.512	10	36.396	ORDER
1071	[XYZ][W75][PVD][AG][4000NM]	XYZ	75	10	280	4000	0.585	10	37.310	ORDER
1072	[XYZ][W75][PVD][AG][4500NM]	XYZ	75	10	280	4500	0.658	10	38.224	ORDER
1073	[XYZ][W75][PVD][AG][5000NM]	XYZ	75	10	280	5000	0.731	10	39.137	ORDER
1074	[XYZ][W75][PVD][AG][5500NM]	XYZ	75	10	280	5500	0.804	10	40.051	ORDER
1075	[XYZ][W75][PVD][AG][6000NM]	XYZ	75	10	280	6000	0.877	10	40.965	ORDER
1076	[XYZ][W75][PVD][AG][6500NM]	XYZ	75	10	280	6500	0.950	10	41.879	ORDER
1077	[XYZ][W75][PVD][AG][7000NM]	XYZ	75	10	280	7000	1.023	10	42.792	ORDER
1078	[XYZ][W75][PVD][AG][7500NM]	XYZ	75	10	280	7500	1.096	10	43.706	ORDER
1079	[XYZ][W75][PVD][AG][8000NM]	XYZ	75	10	280	8000	1.170	10	44.620	ORDER
1080	[XYZ][W75][PVD][AG][8500NM]	XYZ	75	10	280	8500	1.243	10	45.534	ORDER
1081	[XYZ][W75][PVD][AG][9000NM]	XYZ	75	10	280	9000	1.316	10	46.447	ORDER
1082	[XYZ][W75][PVD][AG][9500NM]	XYZ	75	10	280	9500	1.389	10	47.361	ORDER
1083	[XYZ][W75][PVD][AG][10000NM]	XYZ	75	10	280	10000	1.462	10	48.275	ORDER
1084	[XYZ][W100][PVD][AG][1000NM]	XYZ	100	8	280	1000	0.146	8	39.784	ORDER
1085	[XYZ][W100][PVD][AG][1500NM]	XYZ	100	8	280	1500	0.219	8	40.927	ORDER
1086	[XYZ][W100][PVD][AG][2000NM]	XYZ	100	8	280	2000	0.292	8	42.069	ORDER
1087	[XYZ][W100][PVD][AG][2500NM]	XYZ	100	8	280	2500	0.365	8	43.211	ORDER
1088	[XYZ][W100][PVD][AG][3000NM]	XYZ	100	8	280	3000	0.439	8	44.353	ORDER
1089	[XYZ][W100][PVD][AG][3500NM]	XYZ	100	8	280	3500	0.512	8	45.495	ORDER
1090	[XYZ][W100][PVD][AG][4000NM]	XYZ	100	8	280	4000	0.585	8	46.637	ORDER
1091	[XYZ][W100][PVD][AG][4500NM]	XYZ	100	8	280	4500	0.658	8	47.780	ORDER
1092	[XYZ][W100][PVD][AG][5000NM]	XYZ	100	8	280	5000	0.731	8	48.922	ORDER
1093	[XYZ][W100][PVD][AG][5500NM]	XYZ	100	8	280	5500	0.804	8	50.064	ORDER
1094	[XYZ][W100][PVD][AG][6000NM]	XYZ	100	8	280	6000	0.877	8	51.206	ORDER
1095	[XYZ][W100][PVD][AG][6500NM]	XYZ	100	8	280	6500	0.950	8	52.348	ORDER
1096	[XYZ][W100][PVD][AG][7000NM]	XYZ	100	8	280	7000	1.023	8	53.490	ORDER
1097	[XYZ][W100][PVD][AG][7500NM]	XYZ	100	8	280	7500	1.096	8	54.633	ORDER
1098	[XYZ][W100][PVD][AG][8000NM]	XYZ	100	8	280	8000	1.170	8	55.775	ORDER
1099	[XYZ][W100][PVD][AG][8500NM]	XYZ	100	8	280	8500	1.243	8	56.917	ORDER
1100	[XYZ][W100][PVD][AG][9000NM]	XYZ	100	8	280	9000	1.316	8	58.059	ORDER
1101	[XYZ][W100][PVD][AG][9500NM]	XYZ	100	8	280	9500	1.389	8	59.201	ORDER
1102	[XYZ][W100][PVD][AG][10000NM]	XYZ	100	8	280	10000	1.462	8	60.344	ORDER
1103	[XYZ][W125][PVD][AG][1000NM]	XYZ	125	7	280	1000	0.146	7	45.468	ORDER
1104	[XYZ][W125][PVD][AG][1500NM]	XYZ	125	7	280	1500	0.219	7	46.773	ORDER
1105	[XYZ][W125][PVD][AG][2000NM]	XYZ	125	7	280	2000	0.292	7	48.079	ORDER
1106	[XYZ][W125][PVD][AG][2500NM]	XYZ	125	7	280	2500	0.365	7	49.384	ORDER
1107	[XYZ][W125][PVD][AG][3000NM]	XYZ	125	7	280	3000	0.439	7	50.689	ORDER
1108	[XYZ][W125][PVD][AG][3500NM]	XYZ	125	7	280	3500	0.512	7	51.995	ORDER
1109	[XYZ][W125][PVD][AG][4000NM]	XYZ	125	7	280	4000	0.585	7	53.300	ORDER
1110	[XYZ][W125][PVD][AG][4500NM]	XYZ	125	7	280	4500	0.658	7	54.605	ORDER
1111	[XYZ][W125][PVD][AG][5000NM]	XYZ	125	7	280	5000	0.731	7	55.911	ORDER
1112	[XYZ][W125][PVD][AG][5500NM]	XYZ	125	7	280	5500	0.804	7	57.216	ORDER
1113	[XYZ][W125][PVD][AG][6000NM]	XYZ	125	7	280	6000	0.877	7	58.521	ORDER
1114	[XYZ][W125][PVD][AG][6500NM]	XYZ	125	7	280	6500	0.950	7	59.827	ORDER
1115	[XYZ][W125][PVD][AG][7000NM]	XYZ	125	7	280	7000	1.023	7	61.132	ORDER
1116	[XYZ][W125][PVD][AG][7500NM]	XYZ	125	7	280	7500	1.096	7	62.437	ORDER
1117	[XYZ][W125][PVD][AG][8000NM]	XYZ	125	7	280	8000	1.170	7	63.743	ORDER
1118	[XYZ][W125][PVD][AG][8500NM]	XYZ	125	7	280	8500	1.243	7	65.048	ORDER
1119	[XYZ][W125][PVD][AG][9000NM]	XYZ	125	7	280	9000	1.316	7	66.353	ORDER
1120	[XYZ][W125][PVD][AG][9500NM]	XYZ	125	7	280	9500	1.389	7	67.659	ORDER
1121	[XYZ][W125][PVD][AG][10000NM]	XYZ	125	7	280	10000	1.462	7	68.964	ORDER
1122	[XYZ][W150][PVD][AG][1000NM]	XYZ	150	6	280	1000	0.146	6	53.046	ORDER
1123	[XYZ][W150][PVD][AG][1500NM]	XYZ	150	6	280	1500	0.219	6	54.569	ORDER
1124	[XYZ][W150][PVD][AG][2000NM]	XYZ	150	6	280	2000	0.292	6	56.092	ORDER
1125	[XYZ][W150][PVD][AG][2500NM]	XYZ	150	6	280	2500	0.365	6	57.615	ORDER
1126	[XYZ][W150][PVD][AG][3000NM]	XYZ	150	6	280	3000	0.439	6	59.137	ORDER
1127	[XYZ][W150][PVD][AG][3500NM]	XYZ	150	6	280	3500	0.512	6	60.660	ORDER
1128	[XYZ][W150][PVD][AG][4000NM]	XYZ	150	6	280	4000	0.585	6	62.183	ORDER
1129	[XYZ][W150][PVD][AG][4500NM]	XYZ	150	6	280	4500	0.658	6	63.706	ORDER
1130	[XYZ][W150][PVD][AG][5000NM]	XYZ	150	6	280	5000	0.731	6	65.229	ORDER
1131	[XYZ][W150][PVD][AG][5500NM]	XYZ	150	6	280	5500	0.804	6	66.752	ORDER
1132	[XYZ][W150][PVD][AG][6000NM]	XYZ	150	6	280	6000	0.877	6	68.275	ORDER
1133	[XYZ][W150][PVD][AG][6500NM]	XYZ	150	6	280	6500	0.950	6	69.798	ORDER
1134	[XYZ][W150][PVD][AG][7000NM]	XYZ	150	6	280	7000	1.023	6	71.321	ORDER
1135	[XYZ][W150][PVD][AG][7500NM]	XYZ	150	6	280	7500	1.096	6	72.844	ORDER
1136	[XYZ][W150][PVD][AG][8000NM]	XYZ	150	6	280	8000	1.170	6	74.366	ORDER
1137	[XYZ][W150][PVD][AG][8500NM]	XYZ	150	6	280	8500	1.243	6	75.889	ORDER
1138	[XYZ][W150][PVD][AG][9000NM]	XYZ	150	6	280	9000	1.316	6	77.412	ORDER
1139	[XYZ][W150][PVD][AG][9500NM]	XYZ	150	6	280	9500	1.389	6	78.935	ORDER
1140	[XYZ][W150][PVD][AG][10000NM]	XYZ	150	6	280	10000	1.462	6	80.458	ORDER
1141	[XYZ][W200][PVD][AG][1000NM]	XYZ	200	3	280	1000	0.146	3	106.092	ORDER
1142	[XYZ][W200][PVD][AG][1500NM]	XYZ	200	3	280	1500	0.219	3	109.137	ORDER
1143	[XYZ][W200][PVD][AG][2000NM]	XYZ	200	3	280	2000	0.292	3	112.183	ORDER
1144	[XYZ][W200][PVD][AG][2500NM]	XYZ	200	3	280	2500	0.365	3	115.229	ORDER
1145	[XYZ][W200][PVD][AG][3000NM]	XYZ	200	3	280	3000	0.439	3	118.275	ORDER
1146	[XYZ][W200][PVD][AG][3500NM]	XYZ	200	3	280	3500	0.512	3	121.321	ORDER
1147	[XYZ][W200][PVD][AG][4000NM]	XYZ	200	3	280	4000	0.585	3	124.366	ORDER
1148	[XYZ][W200][PVD][AG][4500NM]	XYZ	200	3	280	4500	0.658	3	127.412	ORDER
1149	[XYZ][W200][PVD][AG][5000NM]	XYZ	200	3	280	5000	0.731	3	130.458	ORDER
1150	[XYZ][W200][PVD][AG][5500NM]	XYZ	200	3	280	5500	0.804	3	133.504	ORDER
1151	[XYZ][W200][PVD][AG][6000NM]	XYZ	200	3	280	6000	0.877	3	136.550	ORDER
1152	[XYZ][W200][PVD][AG][6500NM]	XYZ	200	3	280	6500	0.950	3	139.596	ORDER
1153	[XYZ][W200][PVD][AG][7000NM]	XYZ	200	3	280	7000	1.023	3	142.641	ORDER
1154	[XYZ][W200][PVD][AG][7500NM]	XYZ	200	3	280	7500	1.096	3	145.687	ORDER
1155	[XYZ][W200][PVD][AG][8000NM]	XYZ	200	3	280	8000	1.170	3	148.733	ORDER
1156	[XYZ][W200][PVD][AG][8500NM]	XYZ	200	3	280	8500	1.243	3	151.779	ORDER
1157	[XYZ][W200][PVD][AG][9000NM]	XYZ	200	3	280	9000	1.316	3	154.825	ORDER
1158	[XYZ][W200][PVD][AG][9500NM]	XYZ	200	3	280	9500	1.389	3	157.870	ORDER
1159	[XYZ][W200][PVD][AG][10000NM]	XYZ	200	3	280	10000	1.462	3	160.916	ORDER
1160	[XYZ][W300][PVD][AG][1000NM]	XYZ	300		280	1000	0.146			RFQ
1161	[XYZ][W300][PVD][AG][1500NM]	XYZ	300		280	1500	0.219			RFQ
1162	[XYZ][W300][PVD][AG][2000NM]	XYZ	300		280	2000	0.292			RFQ
1163	[XYZ][W300][PVD][AG][2500NM]	XYZ	300		280	2500	0.365			RFQ
1164	[XYZ][W300][PVD][AG][3000NM]	XYZ	300		280	3000	0.439			RFQ
1165	[XYZ][W300][PVD][AG][3500NM]	XYZ	300		280	3500	0.512			RFQ
1166	[XYZ][W300][PVD][AG][4000NM]	XYZ	300		280	4000	0.585			RFQ
1167	[XYZ][W300][PVD][AG][4500NM]	XYZ	300		280	4500	0.658			RFQ
1168	[XYZ][W300][PVD][AG][5000NM]	XYZ	300		280	5000	0.731			RFQ
1169	[XYZ][W300][PVD][AG][5500NM]	XYZ	300		280	5500	0.804			RFQ
1170	[XYZ][W300][PVD][AG][6000NM]	XYZ	300		280	6000	0.877			RFQ
1171	[XYZ][W300][PVD][AG][6500NM]	XYZ	300		280	6500	0.950			RFQ
1172	[XYZ][W300][PVD][AG][7000NM]	XYZ	300		280	7000	1.023			RFQ
1173	[XYZ][W300][PVD][AG][7500NM]	XYZ	300		280	7500	1.096			RFQ
1174	[XYZ][W300][PVD][AG][8000NM]	XYZ	300		280	8000	1.170			RFQ
1175	[XYZ][W300][PVD][AG][8500NM]	XYZ	300		280	8500	1.243			RFQ
1176	[XYZ][W300][PVD][AG][9000NM]	XYZ	300		280	9000	1.316			RFQ
1177	[XYZ][W300][PVD][AG][9500NM]	XYZ	300		280	9500	1.389			RFQ
1178	[XYZ][W300][PVD][AG][10000NM]	XYZ	300		280	10000	1.462			RFQ
1179	[XYZ][Wnnn][PVD][AG][1000NM]	XYZ	nnn		280	1000	0.146			RFQ
1180	[XYZ][Wnnn][PVD][AG][1500NM]	XYZ	nnn		280	1500	0.219			RFQ
1181	[XYZ][Wnnn][PVD][AG][2000NM]	XYZ	nnn		280	2000	0.292			RFQ
1182	[XYZ][Wnnn][PVD][AG][2500NM]	XYZ	nnn		280	2500	0.365			RFQ
1183	[XYZ][Wnnn][PVD][AG][3000NM]	XYZ	nnn		280	3000	0.439			RFQ
1184	[XYZ][Wnnn][PVD][AG][3500NM]	XYZ	nnn		280	3500	0.512			RFQ
1185	[XYZ][Wnnn][PVD][AG][4000NM]	XYZ	nnn		280	4000	0.585			RFQ
1186	[XYZ][Wnnn][PVD][AG][4500NM]	XYZ	nnn		280	4500	0.658			RFQ
1187	[XYZ][Wnnn][PVD][AG][5000NM]	XYZ	nnn		280	5000	0.731			RFQ
1188	[XYZ][Wnnn][PVD][AG][5500NM]	XYZ	nnn		280	5500	0.804			RFQ
1189	[XYZ][Wnnn][PVD][AG][6000NM]	XYZ	nnn		280	6000	0.877			RFQ
1190	[XYZ][Wnnn][PVD][AG][6500NM]	XYZ	nnn		280	6500	0.950			RFQ
1191	[XYZ][Wnnn][PVD][AG][7000NM]	XYZ	nnn		280	7000	1.023			RFQ
1192	[XYZ][Wnnn][PVD][AG][7500NM]	XYZ	nnn		280	7500	1.096			RFQ
1193	[XYZ][Wnnn][PVD][AG][8000NM]	XYZ	nnn		280	8000	1.170			RFQ
1194	[XYZ][Wnnn][PVD][AG][8500NM]	XYZ	nnn		280	8500	1.243			RFQ
1195	[XYZ][Wnnn][PVD][AG][9000NM]	XYZ	nnn		280	9000	1.316			RFQ
1196	[XYZ][Wnnn][PVD][AG][9500NM]	XYZ	nnn		280	9500	1.389			RFQ
1197	[XYZ][Wnnn][PVD][AG][10000NM]	XYZ	nnn		280	10000	1.462			RFQ
Minimum batch for sputtering is 8 wafers for mm diameter. Unit price does not include SET-UP Charges, RUSH charges or cost of wafers.

INSTANT QUOTE
PROCESS CODE	QTY	EMAIL

ORDERING: Registered customers can order online from within assigned BUSINESS PORTAL. A copy of the order along with an order confirmation receipt is issued instantly for all orders placed on line. On line Orders have to be verified, accepted and acknowledged by HTE LABS sales department in writing before, becoming non cancelable binding contracts.

DELIVERY: Typical delivery for Standard processes is 2-4 working days ARO. For Custom processes lead time may vary. HTE Labs may supply on request substrate materials from its own inventory or from third party supplier.

SHIPPING & PACKING: For certain processes, customer should ship only prime wafers, delivered in sealed containers [original manufacturer seal must be present]. All wafers shipped to HTE LABS by customers, should be packed in suitable wafer carriers or wafer containers, wrapped in reusable minim 2 layers of air buble packing material [pink anti-static bubble cushioning wrap], or air pillows and heavy wall cardboard boxes. Foam packing peanuts are not acceptable due to the nuisance caused by particles and electrostatic chage generated during shipping.

SAMPLES: Due to the nature of this product line, free samples are not available, unless they are against an existing firm order, pending qualification of a process.

HTE LABS guarantees continuous supply and availability of any of it's standard or custom developed processes and technologies provided minimum order quantities are met.

HTE LABS has made every effort to have this information as accurate as possible. However, no responsibility is assumed by HTE LABS for its use, nor for any infringements of rights of third parties which may result from its use. HTE LABS reserves the right to revise the content or modify its product line without prior notice. HTE LABS processes and technologies are not authorized for and should not be used within support systems which are intended for surgical implants into the body, to support or sustain life, in aircraft, space equipment, submarine, or nuclear facility applications without HTE LABS specific written consent.

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Last updated: September 04, 2009

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