Cu Copper PVD - SPUTTERING DEPOSITION - PHYSICAL VAPOR DEPOSITION - SPUTTERING THIN FILMS METALS ALLOYS DIELECTRICS DC RF MAGNETRON SPUTTER DEPOSITION AND REACTIVE SPUTTERING Cu PVD, Copper PVD, Cu SPUTTERING DEPOSITION, Copper SPUTTERING DEPOSITION, Cu PHYSICAL VAPOR DEPOSITION, Copper PHYSICAL VAPOR DEPOSITION, Cu SPUTTERING, Copper SPUTTERING, Cu THIN FILM, Copper THIN FILM,Cu DIELECTRICS, Copper DIELECTRICS,Cu RF MAGNETRON, Copper RF MAGNETRON,Cu SPUTTER DEPOSITION, Copper SPUTTER DEPOSITION,Cu REACTIVE SPUTTERING" Copper REACTIVE SPUTTERING Cu Copper PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS MAGNETRON SPUTTER DEPOSITION, DC , RF PVD REACTIVE SPUTTERING Cu Copper PVD - SPUTTERING DEPOSITION - PHYSICAL VAPOR DEPOSITION - SPUTTERING THIN FILMS METALS ALLOYS DIELECTRICS DC RF MAGNETRON SPUTTER DEPOSITION AND REACTIVE SPUTTERING Cu PVD, Copper PVD, Cu SPUTTERING DEPOSITION, Copper SPUTTERING DEPOSITION, Cu PHYSICAL VAPOR DEPOSITION, Copper PHYSICAL VAPOR DEPOSITION, Cu SPUTTERING, Copper SPUTTERING, Cu THIN FILM, Copper THIN FILM,Cu DIELECTRICS, Copper DIELECTRICS,Cu RF MAGNETRON, Copper RF MAGNETRON,Cu SPUTTER DEPOSITION, Copper SPUTTER DEPOSITION,Cu REACTIVE SPUTTERING" Copper REACTIVE SPUTTERING Cu Copper PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS MAGNETRON SPUTTER DEPOSITION, DC , RF PVD REACTIVE SPUTTERING HTE Labs logo Cu - Copper PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS Cu - Copper MAGNETRON SPUTTER DEPOSITION, DC , RF Cu - Copper PVD REACTIVE SPUTTERING HTE Labs PROPERTIES / FEATURES APPLICATIONS Chemical composition: Cu Purity (%): 99.99 ">Density: ">Electrical conductivity: ">Thermal conductivity: ">Melting point: ">Refractive index: ">Dielectric constant: Deposition rate (@12.5W/in2): 96nm/min Sputtering yield (@600eV): 2.3 Semiconductor integrated circuit (IC) manufacturing Antireflection coatings in optoelectronic devices Hard masks for chemical etching or plasma etching Inter-metal dielectric (IMD) stacks Multilayers interconnections, Dual Damascene, ILD [inter-layer dielectrics planarization] STI [formation of shallow trench isolation (STI) structures] processes SHORT PROCESS DESCRIPTION WAFER FOUNDRY - R&D SEMICONDUCTOR PROCESS DEVELOPMENT HTE LABS is helping customers to solve R&D problems, capacity problems, lower cost as well as develop a back-up process for existing in-house operations. Any company currently involved or contemplating R&D related to semiconductor devices or thin film technologies, is encourraged to consider using HTE LABS expertise and capabilities. To contact HTE LABS and discuss an application in the strictest confidentiality, navigate to CONTACT PAGE. PROCESS ORDERING INFORMATION WAFER TYPE WAFER SIZE [mm] BATCH SIZE [wafers] TEMPERATURE [°C] THICKNESS [nm] GENERATE PROCESS NAME TIME [hours] Process parametter TIME is calculated using a deposition rate of 96nm/min as the worst case scenario. Actual deposition rate may vary. HTE Labs whenever feasible is tailoring each process to customer specification such that the end refractive index, thickness and film uniformity are within specified tolerance. STANDARD PROCESS PRICE LIST # PROCESS CODE [datasheet] WAFER TYPE SIZE [mm] BATCH [wafers] TEMP. [°C] THICKNESS [nm] TIME [h] MIN. ORDER [wafers] U/P [$] ORDER/RFQ 1 [SI][W25][PVD][CU][1000NM] Si 25 24 280 1000 0.174 24 13.404 ORDER 2 [SI][W25][PVD][CU][1500NM] Si 25 24 280 1500 0.260 24 13.856 ORDER 3 [SI][W25][PVD][CU][2000NM] Si 25 24 280 2000 0.347 24 14.308 ORDER 4 [SI][W25][PVD][CU][2500NM] Si 25 24 280 2500 0.434 24 14.761 ORDER 5 [SI][W25][PVD][CU][3000NM] Si 25 24 280 3000 0.521 24 15.213 ORDER 6 [SI][W25][PVD][CU][3500NM] Si 25 24 280 3500 0.608 24 15.665 ORDER 7 [SI][W25][PVD][CU][4000NM] Si 25 24 280 4000 0.694 24 16.117 ORDER 8 [SI][W25][PVD][CU][4500NM] Si 25 24 280 4500 0.781 24 16.569 ORDER 9 [SI][W25][PVD][CU][5000NM] Si 25 24 280 5000 0.868 24 17.021 ORDER 10 [SI][W25][PVD][CU][5500NM] Si 25 24 280 5500 0.955 24 17.473 ORDER 11 [SI][W25][PVD][CU][6000NM] Si 25 24 280 6000 1.042 24 17.925 ORDER 12 [SI][W25][PVD][CU][6500NM] Si 25 24 280 6500 1.128 24 18.377 ORDER 13 [SI][W25][PVD][CU][7000NM] Si 25 24 280 7000 1.215 24 18.830 ORDER 14 [SI][W25][PVD][CU][7500NM] Si 25 24 280 7500 1.302 24 19.282 ORDER 15 [SI][W25][PVD][CU][8000NM] Si 25 24 280 8000 1.389 24 19.734 ORDER 16 [SI][W25][PVD][CU][8500NM] Si 25 24 280 8500 1.476 24 20.186 ORDER 17 [SI][W25][PVD][CU][9000NM] Si 25 24 280 9000 1.563 24 20.638 ORDER 18 [SI][W25][PVD][CU][9500NM] Si 25 24 280 9500 1.649 24 21.090 ORDER 19 [SI][W25][PVD][CU][10000NM] Si 25 24 280 10000 1.736 24 21.542 ORDER 20 [SI][W50][PVD][CU][1000NM] Si 50 12 280 1000 0.174 12 26.808 ORDER 21 [SI][W50][PVD][CU][1500NM] Si 50 12 280 1500 0.260 12 27.713 ORDER 22 [SI][W50][PVD][CU][2000NM] Si 50 12 280 2000 0.347 12 28.617 ORDER 23 [SI][W50][PVD][CU][2500NM] Si 50 12 280 2500 0.434 12 29.521 ORDER 24 [SI][W50][PVD][CU][3000NM] Si 50 12 280 3000 0.521 12 30.425 ORDER 25 [SI][W50][PVD][CU][3500NM] Si 50 12 280 3500 0.608 12 31.330 ORDER 26 [SI][W50][PVD][CU][4000NM] Si 50 12 280 4000 0.694 12 32.234 ORDER 27 [SI][W50][PVD][CU][4500NM] Si 50 12 280 4500 0.781 12 33.138 ORDER 28 [SI][W50][PVD][CU][5000NM] Si 50 12 280 5000 0.868 12 34.042 ORDER 29 [SI][W50][PVD][CU][5500NM] Si 50 12 280 5500 0.955 12 34.946 ORDER 30 [SI][W50][PVD][CU][6000NM] Si 50 12 280 6000 1.042 12 35.851 ORDER 31 [SI][W50][PVD][CU][6500NM] Si 50 12 280 6500 1.128 12 36.755 ORDER 32 [SI][W50][PVD][CU][7000NM] Si 50 12 280 7000 1.215 12 37.659 ORDER 33 [SI][W50][PVD][CU][7500NM] Si 50 12 280 7500 1.302 12 38.563 ORDER 34 [SI][W50][PVD][CU][8000NM] Si 50 12 280 8000 1.389 12 39.468 ORDER 35 [SI][W50][PVD][CU][8500NM] Si 50 12 280 8500 1.476 12 40.372 ORDER 36 [SI][W50][PVD][CU][9000NM] Si 50 12 280 9000 1.563 12 41.276 ORDER 37 [SI][W50][PVD][CU][9500NM] Si 50 12 280 9500 1.649 12 42.180 ORDER 38 [SI][W50][PVD][CU][10000NM] Si 50 12 280 10000 1.736 12 43.084 ORDER 39 [SI][W75][PVD][CU][1000NM] Si 75 10 280 1000 0.174 10 32.170 ORDER 40 [SI][W75][PVD][CU][1500NM] Si 75 10 280 1500 0.260 10 33.255 ORDER 41 [SI][W75][PVD][CU][2000NM] Si 75 10 280 2000 0.347 10 34.340 ORDER 42 [SI][W75][PVD][CU][2500NM] Si 75 10 280 2500 0.434 10 35.425 ORDER 43 [SI][W75][PVD][CU][3000NM] Si 75 10 280 3000 0.521 10 36.510 ORDER 44 [SI][W75][PVD][CU][3500NM] Si 75 10 280 3500 0.608 10 37.595 ORDER 45 [SI][W75][PVD][CU][4000NM] Si 75 10 280 4000 0.694 10 38.681 ORDER 46 [SI][W75][PVD][CU][4500NM] Si 75 10 280 4500 0.781 10 39.766 ORDER 47 [SI][W75][PVD][CU][5000NM] Si 75 10 280 5000 0.868 10 40.851 ORDER 48 [SI][W75][PVD][CU][5500NM] Si 75 10 280 5500 0.955 10 41.936 ORDER 49 [SI][W75][PVD][CU][6000NM] Si 75 10 280 6000 1.042 10 43.021 ORDER 50 [SI][W75][PVD][CU][6500NM] Si 75 10 280 6500 1.128 10 44.106 ORDER 51 [SI][W75][PVD][CU][7000NM] Si 75 10 280 7000 1.215 10 45.191 ORDER 52 [SI][W75][PVD][CU][7500NM] Si 75 10 280 7500 1.302 10 46.276 ORDER 53 [SI][W75][PVD][CU][8000NM] Si 75 10 280 8000 1.389 10 47.361 ORDER 54 [SI][W75][PVD][CU][8500NM] Si 75 10 280 8500 1.476 10 48.446 ORDER 55 [SI][W75][PVD][CU][9000NM] Si 75 10 280 9000 1.563 10 49.531 ORDER 56 [SI][W75][PVD][CU][9500NM] Si 75 10 280 9500 1.649 10 50.616 ORDER 57 [SI][W75][PVD][CU][10000NM] Si 75 10 280 10000 1.736 10 51.701 ORDER 58 [SI][W100][PVD][CU][1000NM] Si 100 8 280 1000 0.174 8 40.213 ORDER 59 [SI][W100][PVD][CU][1500NM] Si 100 8 280 1500 0.260 8 41.569 ORDER 60 [SI][W100][PVD][CU][2000NM] Si 100 8 280 2000 0.347 8 42.925 ORDER 61 [SI][W100][PVD][CU][2500NM] Si 100 8 280 2500 0.434 8 44.282 ORDER 62 [SI][W100][PVD][CU][3000NM] Si 100 8 280 3000 0.521 8 45.638 ORDER 63 [SI][W100][PVD][CU][3500NM] Si 100 8 280 3500 0.608 8 46.994 ORDER 64 [SI][W100][PVD][CU][4000NM] Si 100 8 280 4000 0.694 8 48.351 ORDER 65 [SI][W100][PVD][CU][4500NM] Si 100 8 280 4500 0.781 8 49.707 ORDER 66 [SI][W100][PVD][CU][5000NM] Si 100 8 280 5000 0.868 8 51.063 ORDER 67 [SI][W100][PVD][CU][5500NM] Si 100 8 280 5500 0.955 8 52.420 ORDER 68 [SI][W100][PVD][CU][6000NM] Si 100 8 280 6000 1.042 8 53.776 ORDER 69 [SI][W100][PVD][CU][6500NM] Si 100 8 280 6500 1.128 8 55.132 ORDER 70 [SI][W100][PVD][CU][7000NM] Si 100 8 280 7000 1.215 8 56.489 ORDER 71 [SI][W100][PVD][CU][7500NM] Si 100 8 280 7500 1.302 8 57.845 ORDER 72 [SI][W100][PVD][CU][8000NM] Si 100 8 280 8000 1.389 8 59.201 ORDER 73 [SI][W100][PVD][CU][8500NM] Si 100 8 280 8500 1.476 8 60.558 ORDER 74 [SI][W100][PVD][CU][9000NM] Si 100 8 280 9000 1.563 8 61.914 ORDER 75 [SI][W100][PVD][CU][9500NM] Si 100 8 280 9500 1.649 8 63.270 ORDER 76 [SI][W100][PVD][CU][10000NM] Si 100 8 280 10000 1.736 8 64.627 ORDER 77 [SI][W125][PVD][CU][1000NM] Si 125 7 280 1000 0.174 7 45.957 ORDER 78 [SI][W125][PVD][CU][1500NM] Si 125 7 280 1500 0.260 7 47.507 ORDER 79 [SI][W125][PVD][CU][2000NM] Si 125 7 280 2000 0.347 7 49.058 ORDER 80 [SI][W125][PVD][CU][2500NM] Si 125 7 280 2500 0.434 7 50.608 ORDER 81 [SI][W125][PVD][CU][3000NM] Si 125 7 280 3000 0.521 7 52.158 ORDER 82 [SI][W125][PVD][CU][3500NM] Si 125 7 280 3500 0.608 7 53.708 ORDER 83 [SI][W125][PVD][CU][4000NM] Si 125 7 280 4000 0.694 7 55.258 ORDER 84 [SI][W125][PVD][CU][4500NM] Si 125 7 280 4500 0.781 7 56.808 ORDER 85 [SI][W125][PVD][CU][5000NM] Si 125 7 280 5000 0.868 7 58.358 ORDER 86 [SI][W125][PVD][CU][5500NM] Si 125 7 280 5500 0.955 7 59.908 ORDER 87 [SI][W125][PVD][CU][6000NM] Si 125 7 280 6000 1.042 7 61.458 ORDER 88 [SI][W125][PVD][CU][6500NM] Si 125 7 280 6500 1.128 7 63.008 ORDER 89 [SI][W125][PVD][CU][7000NM] Si 125 7 280 7000 1.215 7 64.559 ORDER 90 [SI][W125][PVD][CU][7500NM] Si 125 7 280 7500 1.302 7 66.109 ORDER 91 [SI][W125][PVD][CU][8000NM] Si 125 7 280 8000 1.389 7 67.659 ORDER 92 [SI][W125][PVD][CU][8500NM] Si 125 7 280 8500 1.476 7 69.209 ORDER 93 [SI][W125][PVD][CU][9000NM] Si 125 7 280 9000 1.563 7 70.759 ORDER 94 [SI][W125][PVD][CU][9500NM] Si 125 7 280 9500 1.649 7 72.309 ORDER 95 [SI][W125][PVD][CU][10000NM] Si 125 7 280 10000 1.736 7 73.859 ORDER 96 [SI][W150][PVD][CU][1000NM] Si 150 6 280 1000 0.174 6 53.617 ORDER 97 [SI][W150][PVD][CU][1500NM] Si 150 6 280 1500 0.260 6 55.425 ORDER 98 [SI][W150][PVD][CU][2000NM] Si 150 6 280 2000 0.347 6 57.234 ORDER 99 [SI][W150][PVD][CU][2500NM] Si 150 6 280 2500 0.434 6 59.042 ORDER 100 [SI][W150][PVD][CU][3000NM] Si 150 6 280 3000 0.521 6 60.851 ORDER 101 [SI][W150][PVD][CU][3500NM] Si 150 6 280 3500 0.608 6 62.659 ORDER 102 [SI][W150][PVD][CU][4000NM] Si 150 6 280 4000 0.694 6 64.468 ORDER 103 [SI][W150][PVD][CU][4500NM] Si 150 6 280 4500 0.781 6 66.276 ORDER 104 [SI][W150][PVD][CU][5000NM] Si 150 6 280 5000 0.868 6 68.084 ORDER 105 [SI][W150][PVD][CU][5500NM] Si 150 6 280 5500 0.955 6 69.893 ORDER 106 [SI][W150][PVD][CU][6000NM] Si 150 6 280 6000 1.042 6 71.701 ORDER 107 [SI][W150][PVD][CU][6500NM] Si 150 6 280 6500 1.128 6 73.510 ORDER 108 [SI][W150][PVD][CU][7000NM] Si 150 6 280 7000 1.215 6 75.318 ORDER 109 [SI][W150][PVD][CU][7500NM] Si 150 6 280 7500 1.302 6 77.127 ORDER 110 [SI][W150][PVD][CU][8000NM] Si 150 6 280 8000 1.389 6 78.935 ORDER 111 [SI][W150][PVD][CU][8500NM] Si 150 6 280 8500 1.476 6 80.744 ORDER 112 [SI][W150][PVD][CU][9000NM] Si 150 6 280 9000 1.563 6 82.552 ORDER 113 [SI][W150][PVD][CU][9500NM] Si 150 6 280 9500 1.649 6 84.361 ORDER 114 [SI][W150][PVD][CU][10000NM] Si 150 6 280 10000 1.736 6 86.169 ORDER 115 [SI][W200][PVD][CU][1000NM] Si 200 3 280 1000 0.174 3 107.234 ORDER 116 [SI][W200][PVD][CU][1500NM] Si 200 3 280 1500 0.260 3 110.851 ORDER 117 [SI][W200][PVD][CU][2000NM] Si 200 3 280 2000 0.347 3 114.468 ORDER 118 [SI][W200][PVD][CU][2500NM] Si 200 3 280 2500 0.434 3 118.084 ORDER 119 [SI][W200][PVD][CU][3000NM] Si 200 3 280 3000 0.521 3 121.701 ORDER 120 [SI][W200][PVD][CU][3500NM] Si 200 3 280 3500 0.608 3 125.318 ORDER 121 [SI][W200][PVD][CU][4000NM] Si 200 3 280 4000 0.694 3 128.935 ORDER 122 [SI][W200][PVD][CU][4500NM] Si 200 3 280 4500 0.781 3 132.552 ORDER 123 [SI][W200][PVD][CU][5000NM] Si 200 3 280 5000 0.868 3 136.169 ORDER 124 [SI][W200][PVD][CU][5500NM] Si 200 3 280 5500 0.955 3 139.786 ORDER 125 [SI][W200][PVD][CU][6000NM] Si 200 3 280 6000 1.042 3 143.403 ORDER 126 [SI][W200][PVD][CU][6500NM] Si 200 3 280 6500 1.128 3 147.020 ORDER 127 [SI][W200][PVD][CU][7000NM] Si 200 3 280 7000 1.215 3 150.637 ORDER 128 [SI][W200][PVD][CU][7500NM] Si 200 3 280 7500 1.302 3 154.253 ORDER 129 [SI][W200][PVD][CU][8000NM] Si 200 3 280 8000 1.389 3 157.870 ORDER 130 [SI][W200][PVD][CU][8500NM] Si 200 3 280 8500 1.476 3 161.487 ORDER 131 [SI][W200][PVD][CU][9000NM] Si 200 3 280 9000 1.563 3 165.104 ORDER 132 [SI][W200][PVD][CU][9500NM] Si 200 3 280 9500 1.649 3 168.721 ORDER 133 [SI][W200][PVD][CU][10000NM] Si 200 3 280 10000 1.736 3 172.338 ORDER 134 [SI][W300][PVD][CU][1000NM] Si 300 280 1000 0.174 RFQ 135 [SI][W300][PVD][CU][1500NM] Si 300 280 1500 0.260 RFQ 136 [SI][W300][PVD][CU][2000NM] Si 300 280 2000 0.347 RFQ 137 [SI][W300][PVD][CU][2500NM] Si 300 280 2500 0.434 RFQ 138 [SI][W300][PVD][CU][3000NM] Si 300 280 3000 0.521 RFQ 139 [SI][W300][PVD][CU][3500NM] Si 300 280 3500 0.608 RFQ 140 [SI][W300][PVD][CU][4000NM] Si 300 280 4000 0.694 RFQ 141 [SI][W300][PVD][CU][4500NM] Si 300 280 4500 0.781 RFQ 142 [SI][W300][PVD][CU][5000NM] Si 300 280 5000 0.868 RFQ 143 [SI][W300][PVD][CU][5500NM] Si 300 280 5500 0.955 RFQ 144 [SI][W300][PVD][CU][6000NM] Si 300 280 6000 1.042 RFQ 145 [SI][W300][PVD][CU][6500NM] Si 300 280 6500 1.128 RFQ 146 [SI][W300][PVD][CU][7000NM] Si 300 280 7000 1.215 RFQ 147 [SI][W300][PVD][CU][7500NM] Si 300 280 7500 1.302 RFQ 148 [SI][W300][PVD][CU][8000NM] Si 300 280 8000 1.389 RFQ 149 [SI][W300][PVD][CU][8500NM] Si 300 280 8500 1.476 RFQ 150 [SI][W300][PVD][CU][9000NM] Si 300 280 9000 1.563 RFQ 151 [SI][W300][PVD][CU][9500NM] Si 300 280 9500 1.649 RFQ 152 [SI][W300][PVD][CU][10000NM] Si 300 280 10000 1.736 RFQ 153 [SI][Wnnn][PVD][CU][1000NM] Si nnn 280 1000 0.174 RFQ 154 [SI][Wnnn][PVD][CU][1500NM] Si nnn 280 1500 0.260 RFQ 155 [SI][Wnnn][PVD][CU][2000NM] Si nnn 280 2000 0.347 RFQ 156 [SI][Wnnn][PVD][CU][2500NM] Si nnn 280 2500 0.434 RFQ 157 [SI][Wnnn][PVD][CU][3000NM] Si nnn 280 3000 0.521 RFQ 158 [SI][Wnnn][PVD][CU][3500NM] Si nnn 280 3500 0.608 RFQ 159 [SI][Wnnn][PVD][CU][4000NM] Si nnn 280 4000 0.694 RFQ 160 [SI][Wnnn][PVD][CU][4500NM] Si nnn 280 4500 0.781 RFQ 161 [SI][Wnnn][PVD][CU][5000NM] Si nnn 280 5000 0.868 RFQ 162 [SI][Wnnn][PVD][CU][5500NM] Si nnn 280 5500 0.955 RFQ 163 [SI][Wnnn][PVD][CU][6000NM] Si nnn 280 6000 1.042 RFQ 164 [SI][Wnnn][PVD][CU][6500NM] Si nnn 280 6500 1.128 RFQ 165 [SI][Wnnn][PVD][CU][7000NM] Si nnn 280 7000 1.215 RFQ 166 [SI][Wnnn][PVD][CU][7500NM] Si nnn 280 7500 1.302 RFQ 167 [SI][Wnnn][PVD][CU][8000NM] Si nnn 280 8000 1.389 RFQ 168 [SI][Wnnn][PVD][CU][8500NM] Si nnn 280 8500 1.476 RFQ 169 [SI][Wnnn][PVD][CU][9000NM] Si nnn 280 9000 1.563 RFQ 170 [SI][Wnnn][PVD][CU][9500NM] Si nnn 280 9500 1.649 RFQ 171 [SI][Wnnn][PVD][CU][10000NM] Si nnn 280 10000 1.736 RFQ 172 [SIC][W25][PVD][CU][1000NM] SiC 25 24 280 1000 0.174 24 13.404 ORDER 173 [SIC][W25][PVD][CU][1500NM] SiC 25 24 280 1500 0.260 24 13.856 ORDER 174 [SIC][W25][PVD][CU][2000NM] SiC 25 24 280 2000 0.347 24 14.308 ORDER 175 [SIC][W25][PVD][CU][2500NM] SiC 25 24 280 2500 0.434 24 14.761 ORDER 176 [SIC][W25][PVD][CU][3000NM] SiC 25 24 280 3000 0.521 24 15.213 ORDER 177 [SIC][W25][PVD][CU][3500NM] SiC 25 24 280 3500 0.608 24 15.665 ORDER 178 [SIC][W25][PVD][CU][4000NM] SiC 25 24 280 4000 0.694 24 16.117 ORDER 179 [SIC][W25][PVD][CU][4500NM] SiC 25 24 280 4500 0.781 24 16.569 ORDER 180 [SIC][W25][PVD][CU][5000NM] SiC 25 24 280 5000 0.868 24 17.021 ORDER 181 [SIC][W25][PVD][CU][5500NM] SiC 25 24 280 5500 0.955 24 17.473 ORDER 182 [SIC][W25][PVD][CU][6000NM] SiC 25 24 280 6000 1.042 24 17.925 ORDER 183 [SIC][W25][PVD][CU][6500NM] SiC 25 24 280 6500 1.128 24 18.377 ORDER 184 [SIC][W25][PVD][CU][7000NM] SiC 25 24 280 7000 1.215 24 18.830 ORDER 185 [SIC][W25][PVD][CU][7500NM] SiC 25 24 280 7500 1.302 24 19.282 ORDER 186 [SIC][W25][PVD][CU][8000NM] SiC 25 24 280 8000 1.389 24 19.734 ORDER 187 [SIC][W25][PVD][CU][8500NM] SiC 25 24 280 8500 1.476 24 20.186 ORDER 188 [SIC][W25][PVD][CU][9000NM] SiC 25 24 280 9000 1.563 24 20.638 ORDER 189 [SIC][W25][PVD][CU][9500NM] SiC 25 24 280 9500 1.649 24 21.090 ORDER 190 [SIC][W25][PVD][CU][10000NM] SiC 25 24 280 10000 1.736 24 21.542 ORDER 191 [SIC][W50][PVD][CU][1000NM] SiC 50 12 280 1000 0.174 12 26.808 ORDER 192 [SIC][W50][PVD][CU][1500NM] SiC 50 12 280 1500 0.260 12 27.713 ORDER 193 [SIC][W50][PVD][CU][2000NM] SiC 50 12 280 2000 0.347 12 28.617 ORDER 194 [SIC][W50][PVD][CU][2500NM] SiC 50 12 280 2500 0.434 12 29.521 ORDER 195 [SIC][W50][PVD][CU][3000NM] SiC 50 12 280 3000 0.521 12 30.425 ORDER 196 [SIC][W50][PVD][CU][3500NM] SiC 50 12 280 3500 0.608 12 31.330 ORDER 197 [SIC][W50][PVD][CU][4000NM] SiC 50 12 280 4000 0.694 12 32.234 ORDER 198 [SIC][W50][PVD][CU][4500NM] SiC 50 12 280 4500 0.781 12 33.138 ORDER 199 [SIC][W50][PVD][CU][5000NM] SiC 50 12 280 5000 0.868 12 34.042 ORDER 200 [SIC][W50][PVD][CU][5500NM] SiC 50 12 280 5500 0.955 12 34.946 ORDER 201 [SIC][W50][PVD][CU][6000NM] SiC 50 12 280 6000 1.042 12 35.851 ORDER 202 [SIC][W50][PVD][CU][6500NM] SiC 50 12 280 6500 1.128 12 36.755 ORDER 203 [SIC][W50][PVD][CU][7000NM] SiC 50 12 280 7000 1.215 12 37.659 ORDER 204 [SIC][W50][PVD][CU][7500NM] SiC 50 12 280 7500 1.302 12 38.563 ORDER 205 [SIC][W50][PVD][CU][8000NM] SiC 50 12 280 8000 1.389 12 39.468 ORDER 206 [SIC][W50][PVD][CU][8500NM] SiC 50 12 280 8500 1.476 12 40.372 ORDER 207 [SIC][W50][PVD][CU][9000NM] SiC 50 12 280 9000 1.563 12 41.276 ORDER 208 [SIC][W50][PVD][CU][9500NM] SiC 50 12 280 9500 1.649 12 42.180 ORDER 209 [SIC][W50][PVD][CU][10000NM] SiC 50 12 280 10000 1.736 12 43.084 ORDER 210 [SIC][W75][PVD][CU][1000NM] SiC 75 10 280 1000 0.174 10 32.170 ORDER 211 [SIC][W75][PVD][CU][1500NM] SiC 75 10 280 1500 0.260 10 33.255 ORDER 212 [SIC][W75][PVD][CU][2000NM] SiC 75 10 280 2000 0.347 10 34.340 ORDER 213 [SIC][W75][PVD][CU][2500NM] SiC 75 10 280 2500 0.434 10 35.425 ORDER 214 [SIC][W75][PVD][CU][3000NM] SiC 75 10 280 3000 0.521 10 36.510 ORDER 215 [SIC][W75][PVD][CU][3500NM] SiC 75 10 280 3500 0.608 10 37.595 ORDER 216 [SIC][W75][PVD][CU][4000NM] SiC 75 10 280 4000 0.694 10 38.681 ORDER 217 [SIC][W75][PVD][CU][4500NM] SiC 75 10 280 4500 0.781 10 39.766 ORDER 218 [SIC][W75][PVD][CU][5000NM] SiC 75 10 280 5000 0.868 10 40.851 ORDER 219 [SIC][W75][PVD][CU][5500NM] SiC 75 10 280 5500 0.955 10 41.936 ORDER 220 [SIC][W75][PVD][CU][6000NM] SiC 75 10 280 6000 1.042 10 43.021 ORDER 221 [SIC][W75][PVD][CU][6500NM] SiC 75 10 280 6500 1.128 10 44.106 ORDER 222 [SIC][W75][PVD][CU][7000NM] SiC 75 10 280 7000 1.215 10 45.191 ORDER 223 [SIC][W75][PVD][CU][7500NM] SiC 75 10 280 7500 1.302 10 46.276 ORDER 224 [SIC][W75][PVD][CU][8000NM] SiC 75 10 280 8000 1.389 10 47.361 ORDER 225 [SIC][W75][PVD][CU][8500NM] SiC 75 10 280 8500 1.476 10 48.446 ORDER 226 [SIC][W75][PVD][CU][9000NM] SiC 75 10 280 9000 1.563 10 49.531 ORDER 227 [SIC][W75][PVD][CU][9500NM] SiC 75 10 280 9500 1.649 10 50.616 ORDER 228 [SIC][W75][PVD][CU][10000NM] SiC 75 10 280 10000 1.736 10 51.701 ORDER 229 [SIC][W100][PVD][CU][1000NM] SiC 100 8 280 1000 0.174 8 40.213 ORDER 230 [SIC][W100][PVD][CU][1500NM] SiC 100 8 280 1500 0.260 8 41.569 ORDER 231 [SIC][W100][PVD][CU][2000NM] SiC 100 8 280 2000 0.347 8 42.925 ORDER 232 [SIC][W100][PVD][CU][2500NM] SiC 100 8 280 2500 0.434 8 44.282 ORDER 233 [SIC][W100][PVD][CU][3000NM] SiC 100 8 280 3000 0.521 8 45.638 ORDER 234 [SIC][W100][PVD][CU][3500NM] SiC 100 8 280 3500 0.608 8 46.994 ORDER 235 [SIC][W100][PVD][CU][4000NM] SiC 100 8 280 4000 0.694 8 48.351 ORDER 236 [SIC][W100][PVD][CU][4500NM] SiC 100 8 280 4500 0.781 8 49.707 ORDER 237 [SIC][W100][PVD][CU][5000NM] SiC 100 8 280 5000 0.868 8 51.063 ORDER 238 [SIC][W100][PVD][CU][5500NM] SiC 100 8 280 5500 0.955 8 52.420 ORDER 239 [SIC][W100][PVD][CU][6000NM] SiC 100 8 280 6000 1.042 8 53.776 ORDER 240 [SIC][W100][PVD][CU][6500NM] SiC 100 8 280 6500 1.128 8 55.132 ORDER 241 [SIC][W100][PVD][CU][7000NM] SiC 100 8 280 7000 1.215 8 56.489 ORDER 242 [SIC][W100][PVD][CU][7500NM] SiC 100 8 280 7500 1.302 8 57.845 ORDER 243 [SIC][W100][PVD][CU][8000NM] SiC 100 8 280 8000 1.389 8 59.201 ORDER 244 [SIC][W100][PVD][CU][8500NM] SiC 100 8 280 8500 1.476 8 60.558 ORDER 245 [SIC][W100][PVD][CU][9000NM] SiC 100 8 280 9000 1.563 8 61.914 ORDER 246 [SIC][W100][PVD][CU][9500NM] SiC 100 8 280 9500 1.649 8 63.270 ORDER 247 [SIC][W100][PVD][CU][10000NM] SiC 100 8 280 10000 1.736 8 64.627 ORDER 248 [SIC][W125][PVD][CU][1000NM] SiC 125 7 280 1000 0.174 7 45.957 ORDER 249 [SIC][W125][PVD][CU][1500NM] SiC 125 7 280 1500 0.260 7 47.507 ORDER 250 [SIC][W125][PVD][CU][2000NM] SiC 125 7 280 2000 0.347 7 49.058 ORDER 251 [SIC][W125][PVD][CU][2500NM] SiC 125 7 280 2500 0.434 7 50.608 ORDER 252 [SIC][W125][PVD][CU][3000NM] SiC 125 7 280 3000 0.521 7 52.158 ORDER 253 [SIC][W125][PVD][CU][3500NM] SiC 125 7 280 3500 0.608 7 53.708 ORDER 254 [SIC][W125][PVD][CU][4000NM] SiC 125 7 280 4000 0.694 7 55.258 ORDER 255 [SIC][W125][PVD][CU][4500NM] SiC 125 7 280 4500 0.781 7 56.808 ORDER 256 [SIC][W125][PVD][CU][5000NM] SiC 125 7 280 5000 0.868 7 58.358 ORDER 257 [SIC][W125][PVD][CU][5500NM] SiC 125 7 280 5500 0.955 7 59.908 ORDER 258 [SIC][W125][PVD][CU][6000NM] SiC 125 7 280 6000 1.042 7 61.458 ORDER 259 [SIC][W125][PVD][CU][6500NM] SiC 125 7 280 6500 1.128 7 63.008 ORDER 260 [SIC][W125][PVD][CU][7000NM] SiC 125 7 280 7000 1.215 7 64.559 ORDER 261 [SIC][W125][PVD][CU][7500NM] SiC 125 7 280 7500 1.302 7 66.109 ORDER 262 [SIC][W125][PVD][CU][8000NM] SiC 125 7 280 8000 1.389 7 67.659 ORDER 263 [SIC][W125][PVD][CU][8500NM] SiC 125 7 280 8500 1.476 7 69.209 ORDER 264 [SIC][W125][PVD][CU][9000NM] SiC 125 7 280 9000 1.563 7 70.759 ORDER 265 [SIC][W125][PVD][CU][9500NM] SiC 125 7 280 9500 1.649 7 72.309 ORDER 266 [SIC][W125][PVD][CU][10000NM] SiC 125 7 280 10000 1.736 7 73.859 ORDER 267 [SIC][W150][PVD][CU][1000NM] SiC 150 6 280 1000 0.174 6 53.617 ORDER 268 [SIC][W150][PVD][CU][1500NM] SiC 150 6 280 1500 0.260 6 55.425 ORDER 269 [SIC][W150][PVD][CU][2000NM] SiC 150 6 280 2000 0.347 6 57.234 ORDER 270 [SIC][W150][PVD][CU][2500NM] SiC 150 6 280 2500 0.434 6 59.042 ORDER 271 [SIC][W150][PVD][CU][3000NM] SiC 150 6 280 3000 0.521 6 60.851 ORDER 272 [SIC][W150][PVD][CU][3500NM] SiC 150 6 280 3500 0.608 6 62.659 ORDER 273 [SIC][W150][PVD][CU][4000NM] SiC 150 6 280 4000 0.694 6 64.468 ORDER 274 [SIC][W150][PVD][CU][4500NM] SiC 150 6 280 4500 0.781 6 66.276 ORDER 275 [SIC][W150][PVD][CU][5000NM] SiC 150 6 280 5000 0.868 6 68.084 ORDER 276 [SIC][W150][PVD][CU][5500NM] SiC 150 6 280 5500 0.955 6 69.893 ORDER 277 [SIC][W150][PVD][CU][6000NM] SiC 150 6 280 6000 1.042 6 71.701 ORDER 278 [SIC][W150][PVD][CU][6500NM] SiC 150 6 280 6500 1.128 6 73.510 ORDER 279 [SIC][W150][PVD][CU][7000NM] SiC 150 6 280 7000 1.215 6 75.318 ORDER 280 [SIC][W150][PVD][CU][7500NM] SiC 150 6 280 7500 1.302 6 77.127 ORDER 281 [SIC][W150][PVD][CU][8000NM] SiC 150 6 280 8000 1.389 6 78.935 ORDER 282 [SIC][W150][PVD][CU][8500NM] SiC 150 6 280 8500 1.476 6 80.744 ORDER 283 [SIC][W150][PVD][CU][9000NM] SiC 150 6 280 9000 1.563 6 82.552 ORDER 284 [SIC][W150][PVD][CU][9500NM] SiC 150 6 280 9500 1.649 6 84.361 ORDER 285 [SIC][W150][PVD][CU][10000NM] SiC 150 6 280 10000 1.736 6 86.169 ORDER 286 [SIC][W200][PVD][CU][1000NM] SiC 200 3 280 1000 0.174 3 107.234 ORDER 287 [SIC][W200][PVD][CU][1500NM] SiC 200 3 280 1500 0.260 3 110.851 ORDER 288 [SIC][W200][PVD][CU][2000NM] SiC 200 3 280 2000 0.347 3 114.468 ORDER 289 [SIC][W200][PVD][CU][2500NM] SiC 200 3 280 2500 0.434 3 118.084 ORDER 290 [SIC][W200][PVD][CU][3000NM] SiC 200 3 280 3000 0.521 3 121.701 ORDER 291 [SIC][W200][PVD][CU][3500NM] SiC 200 3 280 3500 0.608 3 125.318 ORDER 292 [SIC][W200][PVD][CU][4000NM] SiC 200 3 280 4000 0.694 3 128.935 ORDER 293 [SIC][W200][PVD][CU][4500NM] SiC 200 3 280 4500 0.781 3 132.552 ORDER 294 [SIC][W200][PVD][CU][5000NM] SiC 200 3 280 5000 0.868 3 136.169 ORDER 295 [SIC][W200][PVD][CU][5500NM] SiC 200 3 280 5500 0.955 3 139.786 ORDER 296 [SIC][W200][PVD][CU][6000NM] SiC 200 3 280 6000 1.042 3 143.403 ORDER 297 [SIC][W200][PVD][CU][6500NM] SiC 200 3 280 6500 1.128 3 147.020 ORDER 298 [SIC][W200][PVD][CU][7000NM] SiC 200 3 280 7000 1.215 3 150.637 ORDER 299 [SIC][W200][PVD][CU][7500NM] SiC 200 3 280 7500 1.302 3 154.253 ORDER 300 [SIC][W200][PVD][CU][8000NM] SiC 200 3 280 8000 1.389 3 157.870 ORDER 301 [SIC][W200][PVD][CU][8500NM] SiC 200 3 280 8500 1.476 3 161.487 ORDER 302 [SIC][W200][PVD][CU][9000NM] SiC 200 3 280 9000 1.563 3 165.104 ORDER 303 [SIC][W200][PVD][CU][9500NM] SiC 200 3 280 9500 1.649 3 168.721 ORDER 304 [SIC][W200][PVD][CU][10000NM] SiC 200 3 280 10000 1.736 3 172.338 ORDER 305 [SIC][W300][PVD][CU][1000NM] SiC 300 280 1000 0.174 RFQ 306 [SIC][W300][PVD][CU][1500NM] SiC 300 280 1500 0.260 RFQ 307 [SIC][W300][PVD][CU][2000NM] SiC 300 280 2000 0.347 RFQ 308 [SIC][W300][PVD][CU][2500NM] SiC 300 280 2500 0.434 RFQ 309 [SIC][W300][PVD][CU][3000NM] SiC 300 280 3000 0.521 RFQ 310 [SIC][W300][PVD][CU][3500NM] SiC 300 280 3500 0.608 RFQ 311 [SIC][W300][PVD][CU][4000NM] SiC 300 280 4000 0.694 RFQ 312 [SIC][W300][PVD][CU][4500NM] SiC 300 280 4500 0.781 RFQ 313 [SIC][W300][PVD][CU][5000NM] SiC 300 280 5000 0.868 RFQ 314 [SIC][W300][PVD][CU][5500NM] SiC 300 280 5500 0.955 RFQ 315 [SIC][W300][PVD][CU][6000NM] SiC 300 280 6000 1.042 RFQ 316 [SIC][W300][PVD][CU][6500NM] SiC 300 280 6500 1.128 RFQ 317 [SIC][W300][PVD][CU][7000NM] SiC 300 280 7000 1.215 RFQ 318 [SIC][W300][PVD][CU][7500NM] SiC 300 280 7500 1.302 RFQ 319 [SIC][W300][PVD][CU][8000NM] SiC 300 280 8000 1.389 RFQ 320 [SIC][W300][PVD][CU][8500NM] SiC 300 280 8500 1.476 RFQ 321 [SIC][W300][PVD][CU][9000NM] SiC 300 280 9000 1.563 RFQ 322 [SIC][W300][PVD][CU][9500NM] SiC 300 280 9500 1.649 RFQ 323 [SIC][W300][PVD][CU][10000NM] SiC 300 280 10000 1.736 RFQ 324 [SIC][Wnnn][PVD][CU][1000NM] SiC nnn 280 1000 0.174 RFQ 325 [SIC][Wnnn][PVD][CU][1500NM] SiC nnn 280 1500 0.260 RFQ 326 [SIC][Wnnn][PVD][CU][2000NM] SiC nnn 280 2000 0.347 RFQ 327 [SIC][Wnnn][PVD][CU][2500NM] SiC nnn 280 2500 0.434 RFQ 328 [SIC][Wnnn][PVD][CU][3000NM] SiC nnn 280 3000 0.521 RFQ 329 [SIC][Wnnn][PVD][CU][3500NM] SiC nnn 280 3500 0.608 RFQ 330 [SIC][Wnnn][PVD][CU][4000NM] SiC nnn 280 4000 0.694 RFQ 331 [SIC][Wnnn][PVD][CU][4500NM] SiC nnn 280 4500 0.781 RFQ 332 [SIC][Wnnn][PVD][CU][5000NM] SiC nnn 280 5000 0.868 RFQ 333 [SIC][Wnnn][PVD][CU][5500NM] SiC nnn 280 5500 0.955 RFQ 334 [SIC][Wnnn][PVD][CU][6000NM] SiC nnn 280 6000 1.042 RFQ 335 [SIC][Wnnn][PVD][CU][6500NM] SiC nnn 280 6500 1.128 RFQ 336 [SIC][Wnnn][PVD][CU][7000NM] SiC nnn 280 7000 1.215 RFQ 337 [SIC][Wnnn][PVD][CU][7500NM] SiC nnn 280 7500 1.302 RFQ 338 [SIC][Wnnn][PVD][CU][8000NM] SiC nnn 280 8000 1.389 RFQ 339 [SIC][Wnnn][PVD][CU][8500NM] SiC nnn 280 8500 1.476 RFQ 340 [SIC][Wnnn][PVD][CU][9000NM] SiC nnn 280 9000 1.563 RFQ 341 [SIC][Wnnn][PVD][CU][9500NM] SiC nnn 280 9500 1.649 RFQ 342 [SIC][Wnnn][PVD][CU][10000NM] SiC nnn 280 10000 1.736 RFQ 343 [SOI][W25][PVD][CU][1000NM] SOI 25 24 280 1000 0.174 24 13.404 ORDER 344 [SOI][W25][PVD][CU][1500NM] SOI 25 24 280 1500 0.260 24 13.856 ORDER 345 [SOI][W25][PVD][CU][2000NM] SOI 25 24 280 2000 0.347 24 14.308 ORDER 346 [SOI][W25][PVD][CU][2500NM] SOI 25 24 280 2500 0.434 24 14.761 ORDER 347 [SOI][W25][PVD][CU][3000NM] SOI 25 24 280 3000 0.521 24 15.213 ORDER 348 [SOI][W25][PVD][CU][3500NM] SOI 25 24 280 3500 0.608 24 15.665 ORDER 349 [SOI][W25][PVD][CU][4000NM] SOI 25 24 280 4000 0.694 24 16.117 ORDER 350 [SOI][W25][PVD][CU][4500NM] SOI 25 24 280 4500 0.781 24 16.569 ORDER 351 [SOI][W25][PVD][CU][5000NM] SOI 25 24 280 5000 0.868 24 17.021 ORDER 352 [SOI][W25][PVD][CU][5500NM] SOI 25 24 280 5500 0.955 24 17.473 ORDER 353 [SOI][W25][PVD][CU][6000NM] SOI 25 24 280 6000 1.042 24 17.925 ORDER 354 [SOI][W25][PVD][CU][6500NM] SOI 25 24 280 6500 1.128 24 18.377 ORDER 355 [SOI][W25][PVD][CU][7000NM] SOI 25 24 280 7000 1.215 24 18.830 ORDER 356 [SOI][W25][PVD][CU][7500NM] SOI 25 24 280 7500 1.302 24 19.282 ORDER 357 [SOI][W25][PVD][CU][8000NM] SOI 25 24 280 8000 1.389 24 19.734 ORDER 358 [SOI][W25][PVD][CU][8500NM] SOI 25 24 280 8500 1.476 24 20.186 ORDER 359 [SOI][W25][PVD][CU][9000NM] SOI 25 24 280 9000 1.563 24 20.638 ORDER 360 [SOI][W25][PVD][CU][9500NM] SOI 25 24 280 9500 1.649 24 21.090 ORDER 361 [SOI][W25][PVD][CU][10000NM] SOI 25 24 280 10000 1.736 24 21.542 ORDER 362 [SOI][W50][PVD][CU][1000NM] SOI 50 12 280 1000 0.174 12 26.808 ORDER 363 [SOI][W50][PVD][CU][1500NM] SOI 50 12 280 1500 0.260 12 27.713 ORDER 364 [SOI][W50][PVD][CU][2000NM] SOI 50 12 280 2000 0.347 12 28.617 ORDER 365 [SOI][W50][PVD][CU][2500NM] SOI 50 12 280 2500 0.434 12 29.521 ORDER 366 [SOI][W50][PVD][CU][3000NM] SOI 50 12 280 3000 0.521 12 30.425 ORDER 367 [SOI][W50][PVD][CU][3500NM] SOI 50 12 280 3500 0.608 12 31.330 ORDER 368 [SOI][W50][PVD][CU][4000NM] SOI 50 12 280 4000 0.694 12 32.234 ORDER 369 [SOI][W50][PVD][CU][4500NM] SOI 50 12 280 4500 0.781 12 33.138 ORDER 370 [SOI][W50][PVD][CU][5000NM] SOI 50 12 280 5000 0.868 12 34.042 ORDER 371 [SOI][W50][PVD][CU][5500NM] SOI 50 12 280 5500 0.955 12 34.946 ORDER 372 [SOI][W50][PVD][CU][6000NM] SOI 50 12 280 6000 1.042 12 35.851 ORDER 373 [SOI][W50][PVD][CU][6500NM] SOI 50 12 280 6500 1.128 12 36.755 ORDER 374 [SOI][W50][PVD][CU][7000NM] SOI 50 12 280 7000 1.215 12 37.659 ORDER 375 [SOI][W50][PVD][CU][7500NM] SOI 50 12 280 7500 1.302 12 38.563 ORDER 376 [SOI][W50][PVD][CU][8000NM] SOI 50 12 280 8000 1.389 12 39.468 ORDER 377 [SOI][W50][PVD][CU][8500NM] SOI 50 12 280 8500 1.476 12 40.372 ORDER 378 [SOI][W50][PVD][CU][9000NM] SOI 50 12 280 9000 1.563 12 41.276 ORDER 379 [SOI][W50][PVD][CU][9500NM] SOI 50 12 280 9500 1.649 12 42.180 ORDER 380 [SOI][W50][PVD][CU][10000NM] SOI 50 12 280 10000 1.736 12 43.084 ORDER 381 [SOI][W75][PVD][CU][1000NM] SOI 75 10 280 1000 0.174 10 32.170 ORDER 382 [SOI][W75][PVD][CU][1500NM] SOI 75 10 280 1500 0.260 10 33.255 ORDER 383 [SOI][W75][PVD][CU][2000NM] SOI 75 10 280 2000 0.347 10 34.340 ORDER 384 [SOI][W75][PVD][CU][2500NM] SOI 75 10 280 2500 0.434 10 35.425 ORDER 385 [SOI][W75][PVD][CU][3000NM] SOI 75 10 280 3000 0.521 10 36.510 ORDER 386 [SOI][W75][PVD][CU][3500NM] SOI 75 10 280 3500 0.608 10 37.595 ORDER 387 [SOI][W75][PVD][CU][4000NM] SOI 75 10 280 4000 0.694 10 38.681 ORDER 388 [SOI][W75][PVD][CU][4500NM] SOI 75 10 280 4500 0.781 10 39.766 ORDER 389 [SOI][W75][PVD][CU][5000NM] SOI 75 10 280 5000 0.868 10 40.851 ORDER 390 [SOI][W75][PVD][CU][5500NM] SOI 75 10 280 5500 0.955 10 41.936 ORDER 391 [SOI][W75][PVD][CU][6000NM] SOI 75 10 280 6000 1.042 10 43.021 ORDER 392 [SOI][W75][PVD][CU][6500NM] SOI 75 10 280 6500 1.128 10 44.106 ORDER 393 [SOI][W75][PVD][CU][7000NM] SOI 75 10 280 7000 1.215 10 45.191 ORDER 394 [SOI][W75][PVD][CU][7500NM] SOI 75 10 280 7500 1.302 10 46.276 ORDER 395 [SOI][W75][PVD][CU][8000NM] SOI 75 10 280 8000 1.389 10 47.361 ORDER 396 [SOI][W75][PVD][CU][8500NM] SOI 75 10 280 8500 1.476 10 48.446 ORDER 397 [SOI][W75][PVD][CU][9000NM] SOI 75 10 280 9000 1.563 10 49.531 ORDER 398 [SOI][W75][PVD][CU][9500NM] SOI 75 10 280 9500 1.649 10 50.616 ORDER 399 [SOI][W75][PVD][CU][10000NM] SOI 75 10 280 10000 1.736 10 51.701 ORDER 400 [SOI][W100][PVD][CU][1000NM] SOI 100 8 280 1000 0.174 8 40.213 ORDER 401 [SOI][W100][PVD][CU][1500NM] SOI 100 8 280 1500 0.260 8 41.569 ORDER 402 [SOI][W100][PVD][CU][2000NM] SOI 100 8 280 2000 0.347 8 42.925 ORDER 403 [SOI][W100][PVD][CU][2500NM] SOI 100 8 280 2500 0.434 8 44.282 ORDER 404 [SOI][W100][PVD][CU][3000NM] SOI 100 8 280 3000 0.521 8 45.638 ORDER 405 [SOI][W100][PVD][CU][3500NM] SOI 100 8 280 3500 0.608 8 46.994 ORDER 406 [SOI][W100][PVD][CU][4000NM] SOI 100 8 280 4000 0.694 8 48.351 ORDER 407 [SOI][W100][PVD][CU][4500NM] SOI 100 8 280 4500 0.781 8 49.707 ORDER 408 [SOI][W100][PVD][CU][5000NM] SOI 100 8 280 5000 0.868 8 51.063 ORDER 409 [SOI][W100][PVD][CU][5500NM] SOI 100 8 280 5500 0.955 8 52.420 ORDER 410 [SOI][W100][PVD][CU][6000NM] SOI 100 8 280 6000 1.042 8 53.776 ORDER 411 [SOI][W100][PVD][CU][6500NM] SOI 100 8 280 6500 1.128 8 55.132 ORDER 412 [SOI][W100][PVD][CU][7000NM] SOI 100 8 280 7000 1.215 8 56.489 ORDER 413 [SOI][W100][PVD][CU][7500NM] SOI 100 8 280 7500 1.302 8 57.845 ORDER 414 [SOI][W100][PVD][CU][8000NM] SOI 100 8 280 8000 1.389 8 59.201 ORDER 415 [SOI][W100][PVD][CU][8500NM] SOI 100 8 280 8500 1.476 8 60.558 ORDER 416 [SOI][W100][PVD][CU][9000NM] SOI 100 8 280 9000 1.563 8 61.914 ORDER 417 [SOI][W100][PVD][CU][9500NM] SOI 100 8 280 9500 1.649 8 63.270 ORDER 418 [SOI][W100][PVD][CU][10000NM] SOI 100 8 280 10000 1.736 8 64.627 ORDER 419 [SOI][W125][PVD][CU][1000NM] SOI 125 7 280 1000 0.174 7 45.957 ORDER 420 [SOI][W125][PVD][CU][1500NM] SOI 125 7 280 1500 0.260 7 47.507 ORDER 421 [SOI][W125][PVD][CU][2000NM] SOI 125 7 280 2000 0.347 7 49.058 ORDER 422 [SOI][W125][PVD][CU][2500NM] SOI 125 7 280 2500 0.434 7 50.608 ORDER 423 [SOI][W125][PVD][CU][3000NM] SOI 125 7 280 3000 0.521 7 52.158 ORDER 424 [SOI][W125][PVD][CU][3500NM] SOI 125 7 280 3500 0.608 7 53.708 ORDER 425 [SOI][W125][PVD][CU][4000NM] SOI 125 7 280 4000 0.694 7 55.258 ORDER 426 [SOI][W125][PVD][CU][4500NM] SOI 125 7 280 4500 0.781 7 56.808 ORDER 427 [SOI][W125][PVD][CU][5000NM] SOI 125 7 280 5000 0.868 7 58.358 ORDER 428 [SOI][W125][PVD][CU][5500NM] SOI 125 7 280 5500 0.955 7 59.908 ORDER 429 [SOI][W125][PVD][CU][6000NM] SOI 125 7 280 6000 1.042 7 61.458 ORDER 430 [SOI][W125][PVD][CU][6500NM] SOI 125 7 280 6500 1.128 7 63.008 ORDER 431 [SOI][W125][PVD][CU][7000NM] SOI 125 7 280 7000 1.215 7 64.559 ORDER 432 [SOI][W125][PVD][CU][7500NM] SOI 125 7 280 7500 1.302 7 66.109 ORDER 433 [SOI][W125][PVD][CU][8000NM] SOI 125 7 280 8000 1.389 7 67.659 ORDER 434 [SOI][W125][PVD][CU][8500NM] SOI 125 7 280 8500 1.476 7 69.209 ORDER 435 [SOI][W125][PVD][CU][9000NM] SOI 125 7 280 9000 1.563 7 70.759 ORDER 436 [SOI][W125][PVD][CU][9500NM] SOI 125 7 280 9500 1.649 7 72.309 ORDER 437 [SOI][W125][PVD][CU][10000NM] SOI 125 7 280 10000 1.736 7 73.859 ORDER 438 [SOI][W150][PVD][CU][1000NM] SOI 150 6 280 1000 0.174 6 53.617 ORDER 439 [SOI][W150][PVD][CU][1500NM] SOI 150 6 280 1500 0.260 6 55.425 ORDER 440 [SOI][W150][PVD][CU][2000NM] SOI 150 6 280 2000 0.347 6 57.234 ORDER 441 [SOI][W150][PVD][CU][2500NM] SOI 150 6 280 2500 0.434 6 59.042 ORDER 442 [SOI][W150][PVD][CU][3000NM] SOI 150 6 280 3000 0.521 6 60.851 ORDER 443 [SOI][W150][PVD][CU][3500NM] SOI 150 6 280 3500 0.608 6 62.659 ORDER 444 [SOI][W150][PVD][CU][4000NM] SOI 150 6 280 4000 0.694 6 64.468 ORDER 445 [SOI][W150][PVD][CU][4500NM] SOI 150 6 280 4500 0.781 6 66.276 ORDER 446 [SOI][W150][PVD][CU][5000NM] SOI 150 6 280 5000 0.868 6 68.084 ORDER 447 [SOI][W150][PVD][CU][5500NM] SOI 150 6 280 5500 0.955 6 69.893 ORDER 448 [SOI][W150][PVD][CU][6000NM] SOI 150 6 280 6000 1.042 6 71.701 ORDER 449 [SOI][W150][PVD][CU][6500NM] SOI 150 6 280 6500 1.128 6 73.510 ORDER 450 [SOI][W150][PVD][CU][7000NM] SOI 150 6 280 7000 1.215 6 75.318 ORDER 451 [SOI][W150][PVD][CU][7500NM] SOI 150 6 280 7500 1.302 6 77.127 ORDER 452 [SOI][W150][PVD][CU][8000NM] SOI 150 6 280 8000 1.389 6 78.935 ORDER 453 [SOI][W150][PVD][CU][8500NM] SOI 150 6 280 8500 1.476 6 80.744 ORDER 454 [SOI][W150][PVD][CU][9000NM] SOI 150 6 280 9000 1.563 6 82.552 ORDER 455 [SOI][W150][PVD][CU][9500NM] SOI 150 6 280 9500 1.649 6 84.361 ORDER 456 [SOI][W150][PVD][CU][10000NM] SOI 150 6 280 10000 1.736 6 86.169 ORDER 457 [SOI][W200][PVD][CU][1000NM] SOI 200 3 280 1000 0.174 3 107.234 ORDER 458 [SOI][W200][PVD][CU][1500NM] SOI 200 3 280 1500 0.260 3 110.851 ORDER 459 [SOI][W200][PVD][CU][2000NM] SOI 200 3 280 2000 0.347 3 114.468 ORDER 460 [SOI][W200][PVD][CU][2500NM] SOI 200 3 280 2500 0.434 3 118.084 ORDER 461 [SOI][W200][PVD][CU][3000NM] SOI 200 3 280 3000 0.521 3 121.701 ORDER 462 [SOI][W200][PVD][CU][3500NM] SOI 200 3 280 3500 0.608 3 125.318 ORDER 463 [SOI][W200][PVD][CU][4000NM] SOI 200 3 280 4000 0.694 3 128.935 ORDER 464 [SOI][W200][PVD][CU][4500NM] SOI 200 3 280 4500 0.781 3 132.552 ORDER 465 [SOI][W200][PVD][CU][5000NM] SOI 200 3 280 5000 0.868 3 136.169 ORDER 466 [SOI][W200][PVD][CU][5500NM] SOI 200 3 280 5500 0.955 3 139.786 ORDER 467 [SOI][W200][PVD][CU][6000NM] SOI 200 3 280 6000 1.042 3 143.403 ORDER 468 [SOI][W200][PVD][CU][6500NM] SOI 200 3 280 6500 1.128 3 147.020 ORDER 469 [SOI][W200][PVD][CU][7000NM] SOI 200 3 280 7000 1.215 3 150.637 ORDER 470 [SOI][W200][PVD][CU][7500NM] SOI 200 3 280 7500 1.302 3 154.253 ORDER 471 [SOI][W200][PVD][CU][8000NM] SOI 200 3 280 8000 1.389 3 157.870 ORDER 472 [SOI][W200][PVD][CU][8500NM] SOI 200 3 280 8500 1.476 3 161.487 ORDER 473 [SOI][W200][PVD][CU][9000NM] SOI 200 3 280 9000 1.563 3 165.104 ORDER 474 [SOI][W200][PVD][CU][9500NM] SOI 200 3 280 9500 1.649 3 168.721 ORDER 475 [SOI][W200][PVD][CU][10000NM] SOI 200 3 280 10000 1.736 3 172.338 ORDER 476 [SOI][W300][PVD][CU][1000NM] SOI 300 280 1000 0.174 RFQ 477 [SOI][W300][PVD][CU][1500NM] SOI 300 280 1500 0.260 RFQ 478 [SOI][W300][PVD][CU][2000NM] SOI 300 280 2000 0.347 RFQ 479 [SOI][W300][PVD][CU][2500NM] SOI 300 280 2500 0.434 RFQ 480 [SOI][W300][PVD][CU][3000NM] SOI 300 280 3000 0.521 RFQ 481 [SOI][W300][PVD][CU][3500NM] SOI 300 280 3500 0.608 RFQ 482 [SOI][W300][PVD][CU][4000NM] SOI 300 280 4000 0.694 RFQ 483 [SOI][W300][PVD][CU][4500NM] SOI 300 280 4500 0.781 RFQ 484 [SOI][W300][PVD][CU][5000NM] SOI 300 280 5000 0.868 RFQ 485 [SOI][W300][PVD][CU][5500NM] SOI 300 280 5500 0.955 RFQ 486 [SOI][W300][PVD][CU][6000NM] SOI 300 280 6000 1.042 RFQ 487 [SOI][W300][PVD][CU][6500NM] SOI 300 280 6500 1.128 RFQ 488 [SOI][W300][PVD][CU][7000NM] SOI 300 280 7000 1.215 RFQ 489 [SOI][W300][PVD][CU][7500NM] SOI 300 280 7500 1.302 RFQ 490 [SOI][W300][PVD][CU][8000NM] SOI 300 280 8000 1.389 RFQ 491 [SOI][W300][PVD][CU][8500NM] SOI 300 280 8500 1.476 RFQ 492 [SOI][W300][PVD][CU][9000NM] SOI 300 280 9000 1.563 RFQ 493 [SOI][W300][PVD][CU][9500NM] SOI 300 280 9500 1.649 RFQ 494 [SOI][W300][PVD][CU][10000NM] SOI 300 280 10000 1.736 RFQ 495 [SOI][Wnnn][PVD][CU][1000NM] SOI nnn 280 1000 0.174 RFQ 496 [SOI][Wnnn][PVD][CU][1500NM] SOI nnn 280 1500 0.260 RFQ 497 [SOI][Wnnn][PVD][CU][2000NM] SOI nnn 280 2000 0.347 RFQ 498 [SOI][Wnnn][PVD][CU][2500NM] SOI nnn 280 2500 0.434 RFQ 499 [SOI][Wnnn][PVD][CU][3000NM] SOI nnn 280 3000 0.521 RFQ 500 [SOI][Wnnn][PVD][CU][3500NM] SOI nnn 280 3500 0.608 RFQ 501 [SOI][Wnnn][PVD][CU][4000NM] SOI nnn 280 4000 0.694 RFQ 502 [SOI][Wnnn][PVD][CU][4500NM] SOI nnn 280 4500 0.781 RFQ 503 [SOI][Wnnn][PVD][CU][5000NM] SOI nnn 280 5000 0.868 RFQ 504 [SOI][Wnnn][PVD][CU][5500NM] SOI nnn 280 5500 0.955 RFQ 505 [SOI][Wnnn][PVD][CU][6000NM] SOI nnn 280 6000 1.042 RFQ 506 [SOI][Wnnn][PVD][CU][6500NM] SOI nnn 280 6500 1.128 RFQ 507 [SOI][Wnnn][PVD][CU][7000NM] SOI nnn 280 7000 1.215 RFQ 508 [SOI][Wnnn][PVD][CU][7500NM] SOI nnn 280 7500 1.302 RFQ 509 [SOI][Wnnn][PVD][CU][8000NM] SOI nnn 280 8000 1.389 RFQ 510 [SOI][Wnnn][PVD][CU][8500NM] SOI nnn 280 8500 1.476 RFQ 511 [SOI][Wnnn][PVD][CU][9000NM] SOI nnn 280 9000 1.563 RFQ 512 [SOI][Wnnn][PVD][CU][9500NM] SOI nnn 280 9500 1.649 RFQ 513 [SOI][Wnnn][PVD][CU][10000NM] SOI nnn 280 10000 1.736 RFQ 514 [SIGE][W25][PVD][CU][1000NM] SiGe 25 24 280 1000 0.174 24 13.404 ORDER 515 [SIGE][W25][PVD][CU][1500NM] SiGe 25 24 280 1500 0.260 24 13.856 ORDER 516 [SIGE][W25][PVD][CU][2000NM] SiGe 25 24 280 2000 0.347 24 14.308 ORDER 517 [SIGE][W25][PVD][CU][2500NM] SiGe 25 24 280 2500 0.434 24 14.761 ORDER 518 [SIGE][W25][PVD][CU][3000NM] SiGe 25 24 280 3000 0.521 24 15.213 ORDER 519 [SIGE][W25][PVD][CU][3500NM] SiGe 25 24 280 3500 0.608 24 15.665 ORDER 520 [SIGE][W25][PVD][CU][4000NM] SiGe 25 24 280 4000 0.694 24 16.117 ORDER 521 [SIGE][W25][PVD][CU][4500NM] SiGe 25 24 280 4500 0.781 24 16.569 ORDER 522 [SIGE][W25][PVD][CU][5000NM] SiGe 25 24 280 5000 0.868 24 17.021 ORDER 523 [SIGE][W25][PVD][CU][5500NM] SiGe 25 24 280 5500 0.955 24 17.473 ORDER 524 [SIGE][W25][PVD][CU][6000NM] SiGe 25 24 280 6000 1.042 24 17.925 ORDER 525 [SIGE][W25][PVD][CU][6500NM] SiGe 25 24 280 6500 1.128 24 18.377 ORDER 526 [SIGE][W25][PVD][CU][7000NM] SiGe 25 24 280 7000 1.215 24 18.830 ORDER 527 [SIGE][W25][PVD][CU][7500NM] SiGe 25 24 280 7500 1.302 24 19.282 ORDER 528 [SIGE][W25][PVD][CU][8000NM] SiGe 25 24 280 8000 1.389 24 19.734 ORDER 529 [SIGE][W25][PVD][CU][8500NM] SiGe 25 24 280 8500 1.476 24 20.186 ORDER 530 [SIGE][W25][PVD][CU][9000NM] SiGe 25 24 280 9000 1.563 24 20.638 ORDER 531 [SIGE][W25][PVD][CU][9500NM] SiGe 25 24 280 9500 1.649 24 21.090 ORDER 532 [SIGE][W25][PVD][CU][10000NM] SiGe 25 24 280 10000 1.736 24 21.542 ORDER 533 [SIGE][W50][PVD][CU][1000NM] SiGe 50 12 280 1000 0.174 12 26.808 ORDER 534 [SIGE][W50][PVD][CU][1500NM] SiGe 50 12 280 1500 0.260 12 27.713 ORDER 535 [SIGE][W50][PVD][CU][2000NM] SiGe 50 12 280 2000 0.347 12 28.617 ORDER 536 [SIGE][W50][PVD][CU][2500NM] SiGe 50 12 280 2500 0.434 12 29.521 ORDER 537 [SIGE][W50][PVD][CU][3000NM] SiGe 50 12 280 3000 0.521 12 30.425 ORDER 538 [SIGE][W50][PVD][CU][3500NM] SiGe 50 12 280 3500 0.608 12 31.330 ORDER 539 [SIGE][W50][PVD][CU][4000NM] SiGe 50 12 280 4000 0.694 12 32.234 ORDER 540 [SIGE][W50][PVD][CU][4500NM] SiGe 50 12 280 4500 0.781 12 33.138 ORDER 541 [SIGE][W50][PVD][CU][5000NM] SiGe 50 12 280 5000 0.868 12 34.042 ORDER 542 [SIGE][W50][PVD][CU][5500NM] SiGe 50 12 280 5500 0.955 12 34.946 ORDER 543 [SIGE][W50][PVD][CU][6000NM] SiGe 50 12 280 6000 1.042 12 35.851 ORDER 544 [SIGE][W50][PVD][CU][6500NM] SiGe 50 12 280 6500 1.128 12 36.755 ORDER 545 [SIGE][W50][PVD][CU][7000NM] SiGe 50 12 280 7000 1.215 12 37.659 ORDER 546 [SIGE][W50][PVD][CU][7500NM] SiGe 50 12 280 7500 1.302 12 38.563 ORDER 547 [SIGE][W50][PVD][CU][8000NM] SiGe 50 12 280 8000 1.389 12 39.468 ORDER 548 [SIGE][W50][PVD][CU][8500NM] SiGe 50 12 280 8500 1.476 12 40.372 ORDER 549 [SIGE][W50][PVD][CU][9000NM] SiGe 50 12 280 9000 1.563 12 41.276 ORDER 550 [SIGE][W50][PVD][CU][9500NM] SiGe 50 12 280 9500 1.649 12 42.180 ORDER 551 [SIGE][W50][PVD][CU][10000NM] SiGe 50 12 280 10000 1.736 12 43.084 ORDER 552 [SIGE][W75][PVD][CU][1000NM] SiGe 75 10 280 1000 0.174 10 32.170 ORDER 553 [SIGE][W75][PVD][CU][1500NM] SiGe 75 10 280 1500 0.260 10 33.255 ORDER 554 [SIGE][W75][PVD][CU][2000NM] SiGe 75 10 280 2000 0.347 10 34.340 ORDER 555 [SIGE][W75][PVD][CU][2500NM] SiGe 75 10 280 2500 0.434 10 35.425 ORDER 556 [SIGE][W75][PVD][CU][3000NM] SiGe 75 10 280 3000 0.521 10 36.510 ORDER 557 [SIGE][W75][PVD][CU][3500NM] SiGe 75 10 280 3500 0.608 10 37.595 ORDER 558 [SIGE][W75][PVD][CU][4000NM] SiGe 75 10 280 4000 0.694 10 38.681 ORDER 559 [SIGE][W75][PVD][CU][4500NM] SiGe 75 10 280 4500 0.781 10 39.766 ORDER 560 [SIGE][W75][PVD][CU][5000NM] SiGe 75 10 280 5000 0.868 10 40.851 ORDER 561 [SIGE][W75][PVD][CU][5500NM] SiGe 75 10 280 5500 0.955 10 41.936 ORDER 562 [SIGE][W75][PVD][CU][6000NM] SiGe 75 10 280 6000 1.042 10 43.021 ORDER 563 [SIGE][W75][PVD][CU][6500NM] SiGe 75 10 280 6500 1.128 10 44.106 ORDER 564 [SIGE][W75][PVD][CU][7000NM] SiGe 75 10 280 7000 1.215 10 45.191 ORDER 565 [SIGE][W75][PVD][CU][7500NM] SiGe 75 10 280 7500 1.302 10 46.276 ORDER 566 [SIGE][W75][PVD][CU][8000NM] SiGe 75 10 280 8000 1.389 10 47.361 ORDER 567 [SIGE][W75][PVD][CU][8500NM] SiGe 75 10 280 8500 1.476 10 48.446 ORDER 568 [SIGE][W75][PVD][CU][9000NM] SiGe 75 10 280 9000 1.563 10 49.531 ORDER 569 [SIGE][W75][PVD][CU][9500NM] SiGe 75 10 280 9500 1.649 10 50.616 ORDER 570 [SIGE][W75][PVD][CU][10000NM] SiGe 75 10 280 10000 1.736 10 51.701 ORDER 571 [SIGE][W100][PVD][CU][1000NM] SiGe 100 8 280 1000 0.174 8 40.213 ORDER 572 [SIGE][W100][PVD][CU][1500NM] SiGe 100 8 280 1500 0.260 8 41.569 ORDER 573 [SIGE][W100][PVD][CU][2000NM] SiGe 100 8 280 2000 0.347 8 42.925 ORDER 574 [SIGE][W100][PVD][CU][2500NM] SiGe 100 8 280 2500 0.434 8 44.282 ORDER 575 [SIGE][W100][PVD][CU][3000NM] SiGe 100 8 280 3000 0.521 8 45.638 ORDER 576 [SIGE][W100][PVD][CU][3500NM] SiGe 100 8 280 3500 0.608 8 46.994 ORDER 577 [SIGE][W100][PVD][CU][4000NM] SiGe 100 8 280 4000 0.694 8 48.351 ORDER 578 [SIGE][W100][PVD][CU][4500NM] SiGe 100 8 280 4500 0.781 8 49.707 ORDER 579 [SIGE][W100][PVD][CU][5000NM] SiGe 100 8 280 5000 0.868 8 51.063 ORDER 580 [SIGE][W100][PVD][CU][5500NM] SiGe 100 8 280 5500 0.955 8 52.420 ORDER 581 [SIGE][W100][PVD][CU][6000NM] SiGe 100 8 280 6000 1.042 8 53.776 ORDER 582 [SIGE][W100][PVD][CU][6500NM] SiGe 100 8 280 6500 1.128 8 55.132 ORDER 583 [SIGE][W100][PVD][CU][7000NM] SiGe 100 8 280 7000 1.215 8 56.489 ORDER 584 [SIGE][W100][PVD][CU][7500NM] SiGe 100 8 280 7500 1.302 8 57.845 ORDER 585 [SIGE][W100][PVD][CU][8000NM] SiGe 100 8 280 8000 1.389 8 59.201 ORDER 586 [SIGE][W100][PVD][CU][8500NM] SiGe 100 8 280 8500 1.476 8 60.558 ORDER 587 [SIGE][W100][PVD][CU][9000NM] SiGe 100 8 280 9000 1.563 8 61.914 ORDER 588 [SIGE][W100][PVD][CU][9500NM] SiGe 100 8 280 9500 1.649 8 63.270 ORDER 589 [SIGE][W100][PVD][CU][10000NM] SiGe 100 8 280 10000 1.736 8 64.627 ORDER 590 [SIGE][W125][PVD][CU][1000NM] SiGe 125 7 280 1000 0.174 7 45.957 ORDER 591 [SIGE][W125][PVD][CU][1500NM] SiGe 125 7 280 1500 0.260 7 47.507 ORDER 592 [SIGE][W125][PVD][CU][2000NM] SiGe 125 7 280 2000 0.347 7 49.058 ORDER 593 [SIGE][W125][PVD][CU][2500NM] SiGe 125 7 280 2500 0.434 7 50.608 ORDER 594 [SIGE][W125][PVD][CU][3000NM] SiGe 125 7 280 3000 0.521 7 52.158 ORDER 595 [SIGE][W125][PVD][CU][3500NM] SiGe 125 7 280 3500 0.608 7 53.708 ORDER 596 [SIGE][W125][PVD][CU][4000NM] SiGe 125 7 280 4000 0.694 7 55.258 ORDER 597 [SIGE][W125][PVD][CU][4500NM] SiGe 125 7 280 4500 0.781 7 56.808 ORDER 598 [SIGE][W125][PVD][CU][5000NM] SiGe 125 7 280 5000 0.868 7 58.358 ORDER 599 [SIGE][W125][PVD][CU][5500NM] SiGe 125 7 280 5500 0.955 7 59.908 ORDER 600 [SIGE][W125][PVD][CU][6000NM] SiGe 125 7 280 6000 1.042 7 61.458 ORDER 601 [SIGE][W125][PVD][CU][6500NM] SiGe 125 7 280 6500 1.128 7 63.008 ORDER 602 [SIGE][W125][PVD][CU][7000NM] SiGe 125 7 280 7000 1.215 7 64.559 ORDER 603 [SIGE][W125][PVD][CU][7500NM] SiGe 125 7 280 7500 1.302 7 66.109 ORDER 604 [SIGE][W125][PVD][CU][8000NM] SiGe 125 7 280 8000 1.389 7 67.659 ORDER 605 [SIGE][W125][PVD][CU][8500NM] SiGe 125 7 280 8500 1.476 7 69.209 ORDER 606 [SIGE][W125][PVD][CU][9000NM] SiGe 125 7 280 9000 1.563 7 70.759 ORDER 607 [SIGE][W125][PVD][CU][9500NM] SiGe 125 7 280 9500 1.649 7 72.309 ORDER 608 [SIGE][W125][PVD][CU][10000NM] SiGe 125 7 280 10000 1.736 7 73.859 ORDER 609 [SIGE][W150][PVD][CU][1000NM] SiGe 150 6 280 1000 0.174 6 53.617 ORDER 610 [SIGE][W150][PVD][CU][1500NM] SiGe 150 6 280 1500 0.260 6 55.425 ORDER 611 [SIGE][W150][PVD][CU][2000NM] SiGe 150 6 280 2000 0.347 6 57.234 ORDER 612 [SIGE][W150][PVD][CU][2500NM] SiGe 150 6 280 2500 0.434 6 59.042 ORDER 613 [SIGE][W150][PVD][CU][3000NM] SiGe 150 6 280 3000 0.521 6 60.851 ORDER 614 [SIGE][W150][PVD][CU][3500NM] SiGe 150 6 280 3500 0.608 6 62.659 ORDER 615 [SIGE][W150][PVD][CU][4000NM] SiGe 150 6 280 4000 0.694 6 64.468 ORDER 616 [SIGE][W150][PVD][CU][4500NM] SiGe 150 6 280 4500 0.781 6 66.276 ORDER 617 [SIGE][W150][PVD][CU][5000NM] SiGe 150 6 280 5000 0.868 6 68.084 ORDER 618 [SIGE][W150][PVD][CU][5500NM] SiGe 150 6 280 5500 0.955 6 69.893 ORDER 619 [SIGE][W150][PVD][CU][6000NM] SiGe 150 6 280 6000 1.042 6 71.701 ORDER 620 [SIGE][W150][PVD][CU][6500NM] SiGe 150 6 280 6500 1.128 6 73.510 ORDER 621 [SIGE][W150][PVD][CU][7000NM] SiGe 150 6 280 7000 1.215 6 75.318 ORDER 622 [SIGE][W150][PVD][CU][7500NM] SiGe 150 6 280 7500 1.302 6 77.127 ORDER 623 [SIGE][W150][PVD][CU][8000NM] SiGe 150 6 280 8000 1.389 6 78.935 ORDER 624 [SIGE][W150][PVD][CU][8500NM] SiGe 150 6 280 8500 1.476 6 80.744 ORDER 625 [SIGE][W150][PVD][CU][9000NM] SiGe 150 6 280 9000 1.563 6 82.552 ORDER 626 [SIGE][W150][PVD][CU][9500NM] SiGe 150 6 280 9500 1.649 6 84.361 ORDER 627 [SIGE][W150][PVD][CU][10000NM] SiGe 150 6 280 10000 1.736 6 86.169 ORDER 628 [SIGE][W200][PVD][CU][1000NM] SiGe 200 3 280 1000 0.174 3 107.234 ORDER 629 [SIGE][W200][PVD][CU][1500NM] SiGe 200 3 280 1500 0.260 3 110.851 ORDER 630 [SIGE][W200][PVD][CU][2000NM] SiGe 200 3 280 2000 0.347 3 114.468 ORDER 631 [SIGE][W200][PVD][CU][2500NM] SiGe 200 3 280 2500 0.434 3 118.084 ORDER 632 [SIGE][W200][PVD][CU][3000NM] SiGe 200 3 280 3000 0.521 3 121.701 ORDER 633 [SIGE][W200][PVD][CU][3500NM] SiGe 200 3 280 3500 0.608 3 125.318 ORDER 634 [SIGE][W200][PVD][CU][4000NM] SiGe 200 3 280 4000 0.694 3 128.935 ORDER 635 [SIGE][W200][PVD][CU][4500NM] SiGe 200 3 280 4500 0.781 3 132.552 ORDER 636 [SIGE][W200][PVD][CU][5000NM] SiGe 200 3 280 5000 0.868 3 136.169 ORDER 637 [SIGE][W200][PVD][CU][5500NM] SiGe 200 3 280 5500 0.955 3 139.786 ORDER 638 [SIGE][W200][PVD][CU][6000NM] SiGe 200 3 280 6000 1.042 3 143.403 ORDER 639 [SIGE][W200][PVD][CU][6500NM] SiGe 200 3 280 6500 1.128 3 147.020 ORDER 640 [SIGE][W200][PVD][CU][7000NM] SiGe 200 3 280 7000 1.215 3 150.637 ORDER 641 [SIGE][W200][PVD][CU][7500NM] SiGe 200 3 280 7500 1.302 3 154.253 ORDER 642 [SIGE][W200][PVD][CU][8000NM] SiGe 200 3 280 8000 1.389 3 157.870 ORDER 643 [SIGE][W200][PVD][CU][8500NM] SiGe 200 3 280 8500 1.476 3 161.487 ORDER 644 [SIGE][W200][PVD][CU][9000NM] SiGe 200 3 280 9000 1.563 3 165.104 ORDER 645 [SIGE][W200][PVD][CU][9500NM] SiGe 200 3 280 9500 1.649 3 168.721 ORDER 646 [SIGE][W200][PVD][CU][10000NM] SiGe 200 3 280 10000 1.736 3 172.338 ORDER 647 [SIGE][W300][PVD][CU][1000NM] SiGe 300 280 1000 0.174 RFQ 648 [SIGE][W300][PVD][CU][1500NM] SiGe 300 280 1500 0.260 RFQ 649 [SIGE][W300][PVD][CU][2000NM] SiGe 300 280 2000 0.347 RFQ 650 [SIGE][W300][PVD][CU][2500NM] SiGe 300 280 2500 0.434 RFQ 651 [SIGE][W300][PVD][CU][3000NM] SiGe 300 280 3000 0.521 RFQ 652 [SIGE][W300][PVD][CU][3500NM] SiGe 300 280 3500 0.608 RFQ 653 [SIGE][W300][PVD][CU][4000NM] SiGe 300 280 4000 0.694 RFQ 654 [SIGE][W300][PVD][CU][4500NM] SiGe 300 280 4500 0.781 RFQ 655 [SIGE][W300][PVD][CU][5000NM] SiGe 300 280 5000 0.868 RFQ 656 [SIGE][W300][PVD][CU][5500NM] SiGe 300 280 5500 0.955 RFQ 657 [SIGE][W300][PVD][CU][6000NM] SiGe 300 280 6000 1.042 RFQ 658 [SIGE][W300][PVD][CU][6500NM] SiGe 300 280 6500 1.128 RFQ 659 [SIGE][W300][PVD][CU][7000NM] SiGe 300 280 7000 1.215 RFQ 660 [SIGE][W300][PVD][CU][7500NM] SiGe 300 280 7500 1.302 RFQ 661 [SIGE][W300][PVD][CU][8000NM] SiGe 300 280 8000 1.389 RFQ 662 [SIGE][W300][PVD][CU][8500NM] SiGe 300 280 8500 1.476 RFQ 663 [SIGE][W300][PVD][CU][9000NM] SiGe 300 280 9000 1.563 RFQ 664 [SIGE][W300][PVD][CU][9500NM] SiGe 300 280 9500 1.649 RFQ 665 [SIGE][W300][PVD][CU][10000NM] SiGe 300 280 10000 1.736 RFQ 666 [SIGE][Wnnn][PVD][CU][1000NM] SiGe nnn 280 1000 0.174 RFQ 667 [SIGE][Wnnn][PVD][CU][1500NM] SiGe nnn 280 1500 0.260 RFQ 668 [SIGE][Wnnn][PVD][CU][2000NM] SiGe nnn 280 2000 0.347 RFQ 669 [SIGE][Wnnn][PVD][CU][2500NM] SiGe nnn 280 2500 0.434 RFQ 670 [SIGE][Wnnn][PVD][CU][3000NM] SiGe nnn 280 3000 0.521 RFQ 671 [SIGE][Wnnn][PVD][CU][3500NM] SiGe nnn 280 3500 0.608 RFQ 672 [SIGE][Wnnn][PVD][CU][4000NM] SiGe nnn 280 4000 0.694 RFQ 673 [SIGE][Wnnn][PVD][CU][4500NM] SiGe nnn 280 4500 0.781 RFQ 674 [SIGE][Wnnn][PVD][CU][5000NM] SiGe nnn 280 5000 0.868 RFQ 675 [SIGE][Wnnn][PVD][CU][5500NM] SiGe nnn 280 5500 0.955 RFQ 676 [SIGE][Wnnn][PVD][CU][6000NM] SiGe nnn 280 6000 1.042 RFQ 677 [SIGE][Wnnn][PVD][CU][6500NM] SiGe nnn 280 6500 1.128 RFQ 678 [SIGE][Wnnn][PVD][CU][7000NM] SiGe nnn 280 7000 1.215 RFQ 679 [SIGE][Wnnn][PVD][CU][7500NM] SiGe nnn 280 7500 1.302 RFQ 680 [SIGE][Wnnn][PVD][CU][8000NM] SiGe nnn 280 8000 1.389 RFQ 681 [SIGE][Wnnn][PVD][CU][8500NM] SiGe nnn 280 8500 1.476 RFQ 682 [SIGE][Wnnn][PVD][CU][9000NM] SiGe nnn 280 9000 1.563 RFQ 683 [SIGE][Wnnn][PVD][CU][9500NM] SiGe nnn 280 9500 1.649 RFQ 684 [SIGE][Wnnn][PVD][CU][10000NM] SiGe nnn 280 10000 1.736 RFQ 685 [QZ][W25][PVD][CU][1000NM] QZ 25 24 280 1000 0.174 24 13.404 ORDER 686 [QZ][W25][PVD][CU][1500NM] QZ 25 24 280 1500 0.260 24 13.856 ORDER 687 [QZ][W25][PVD][CU][2000NM] QZ 25 24 280 2000 0.347 24 14.308 ORDER 688 [QZ][W25][PVD][CU][2500NM] QZ 25 24 280 2500 0.434 24 14.761 ORDER 689 [QZ][W25][PVD][CU][3000NM] QZ 25 24 280 3000 0.521 24 15.213 ORDER 690 [QZ][W25][PVD][CU][3500NM] QZ 25 24 280 3500 0.608 24 15.665 ORDER 691 [QZ][W25][PVD][CU][4000NM] QZ 25 24 280 4000 0.694 24 16.117 ORDER 692 [QZ][W25][PVD][CU][4500NM] QZ 25 24 280 4500 0.781 24 16.569 ORDER 693 [QZ][W25][PVD][CU][5000NM] QZ 25 24 280 5000 0.868 24 17.021 ORDER 694 [QZ][W25][PVD][CU][5500NM] QZ 25 24 280 5500 0.955 24 17.473 ORDER 695 [QZ][W25][PVD][CU][6000NM] QZ 25 24 280 6000 1.042 24 17.925 ORDER 696 [QZ][W25][PVD][CU][6500NM] QZ 25 24 280 6500 1.128 24 18.377 ORDER 697 [QZ][W25][PVD][CU][7000NM] QZ 25 24 280 7000 1.215 24 18.830 ORDER 698 [QZ][W25][PVD][CU][7500NM] QZ 25 24 280 7500 1.302 24 19.282 ORDER 699 [QZ][W25][PVD][CU][8000NM] QZ 25 24 280 8000 1.389 24 19.734 ORDER 700 [QZ][W25][PVD][CU][8500NM] QZ 25 24 280 8500 1.476 24 20.186 ORDER 701 [QZ][W25][PVD][CU][9000NM] QZ 25 24 280 9000 1.563 24 20.638 ORDER 702 [QZ][W25][PVD][CU][9500NM] QZ 25 24 280 9500 1.649 24 21.090 ORDER 703 [QZ][W25][PVD][CU][10000NM] QZ 25 24 280 10000 1.736 24 21.542 ORDER 704 [QZ][W50][PVD][CU][1000NM] QZ 50 12 280 1000 0.174 12 26.808 ORDER 705 [QZ][W50][PVD][CU][1500NM] QZ 50 12 280 1500 0.260 12 27.713 ORDER 706 [QZ][W50][PVD][CU][2000NM] QZ 50 12 280 2000 0.347 12 28.617 ORDER 707 [QZ][W50][PVD][CU][2500NM] QZ 50 12 280 2500 0.434 12 29.521 ORDER 708 [QZ][W50][PVD][CU][3000NM] QZ 50 12 280 3000 0.521 12 30.425 ORDER 709 [QZ][W50][PVD][CU][3500NM] QZ 50 12 280 3500 0.608 12 31.330 ORDER 710 [QZ][W50][PVD][CU][4000NM] QZ 50 12 280 4000 0.694 12 32.234 ORDER 711 [QZ][W50][PVD][CU][4500NM] QZ 50 12 280 4500 0.781 12 33.138 ORDER 712 [QZ][W50][PVD][CU][5000NM] QZ 50 12 280 5000 0.868 12 34.042 ORDER 713 [QZ][W50][PVD][CU][5500NM] QZ 50 12 280 5500 0.955 12 34.946 ORDER 714 [QZ][W50][PVD][CU][6000NM] QZ 50 12 280 6000 1.042 12 35.851 ORDER 715 [QZ][W50][PVD][CU][6500NM] QZ 50 12 280 6500 1.128 12 36.755 ORDER 716 [QZ][W50][PVD][CU][7000NM] QZ 50 12 280 7000 1.215 12 37.659 ORDER 717 [QZ][W50][PVD][CU][7500NM] QZ 50 12 280 7500 1.302 12 38.563 ORDER 718 [QZ][W50][PVD][CU][8000NM] QZ 50 12 280 8000 1.389 12 39.468 ORDER 719 [QZ][W50][PVD][CU][8500NM] QZ 50 12 280 8500 1.476 12 40.372 ORDER 720 [QZ][W50][PVD][CU][9000NM] QZ 50 12 280 9000 1.563 12 41.276 ORDER 721 [QZ][W50][PVD][CU][9500NM] QZ 50 12 280 9500 1.649 12 42.180 ORDER 722 [QZ][W50][PVD][CU][10000NM] QZ 50 12 280 10000 1.736 12 43.084 ORDER 723 [QZ][W75][PVD][CU][1000NM] QZ 75 10 280 1000 0.174 10 32.170 ORDER 724 [QZ][W75][PVD][CU][1500NM] QZ 75 10 280 1500 0.260 10 33.255 ORDER 725 [QZ][W75][PVD][CU][2000NM] QZ 75 10 280 2000 0.347 10 34.340 ORDER 726 [QZ][W75][PVD][CU][2500NM] QZ 75 10 280 2500 0.434 10 35.425 ORDER 727 [QZ][W75][PVD][CU][3000NM] QZ 75 10 280 3000 0.521 10 36.510 ORDER 728 [QZ][W75][PVD][CU][3500NM] QZ 75 10 280 3500 0.608 10 37.595 ORDER 729 [QZ][W75][PVD][CU][4000NM] QZ 75 10 280 4000 0.694 10 38.681 ORDER 730 [QZ][W75][PVD][CU][4500NM] QZ 75 10 280 4500 0.781 10 39.766 ORDER 731 [QZ][W75][PVD][CU][5000NM] QZ 75 10 280 5000 0.868 10 40.851 ORDER 732 [QZ][W75][PVD][CU][5500NM] QZ 75 10 280 5500 0.955 10 41.936 ORDER 733 [QZ][W75][PVD][CU][6000NM] QZ 75 10 280 6000 1.042 10 43.021 ORDER 734 [QZ][W75][PVD][CU][6500NM] QZ 75 10 280 6500 1.128 10 44.106 ORDER 735 [QZ][W75][PVD][CU][7000NM] QZ 75 10 280 7000 1.215 10 45.191 ORDER 736 [QZ][W75][PVD][CU][7500NM] QZ 75 10 280 7500 1.302 10 46.276 ORDER 737 [QZ][W75][PVD][CU][8000NM] QZ 75 10 280 8000 1.389 10 47.361 ORDER 738 [QZ][W75][PVD][CU][8500NM] QZ 75 10 280 8500 1.476 10 48.446 ORDER 739 [QZ][W75][PVD][CU][9000NM] QZ 75 10 280 9000 1.563 10 49.531 ORDER 740 [QZ][W75][PVD][CU][9500NM] QZ 75 10 280 9500 1.649 10 50.616 ORDER 741 [QZ][W75][PVD][CU][10000NM] QZ 75 10 280 10000 1.736 10 51.701 ORDER 742 [QZ][W100][PVD][CU][1000NM] QZ 100 8 280 1000 0.174 8 40.213 ORDER 743 [QZ][W100][PVD][CU][1500NM] QZ 100 8 280 1500 0.260 8 41.569 ORDER 744 [QZ][W100][PVD][CU][2000NM] QZ 100 8 280 2000 0.347 8 42.925 ORDER 745 [QZ][W100][PVD][CU][2500NM] QZ 100 8 280 2500 0.434 8 44.282 ORDER 746 [QZ][W100][PVD][CU][3000NM] QZ 100 8 280 3000 0.521 8 45.638 ORDER 747 [QZ][W100][PVD][CU][3500NM] QZ 100 8 280 3500 0.608 8 46.994 ORDER 748 [QZ][W100][PVD][CU][4000NM] QZ 100 8 280 4000 0.694 8 48.351 ORDER 749 [QZ][W100][PVD][CU][4500NM] QZ 100 8 280 4500 0.781 8 49.707 ORDER 750 [QZ][W100][PVD][CU][5000NM] QZ 100 8 280 5000 0.868 8 51.063 ORDER 751 [QZ][W100][PVD][CU][5500NM] QZ 100 8 280 5500 0.955 8 52.420 ORDER 752 [QZ][W100][PVD][CU][6000NM] QZ 100 8 280 6000 1.042 8 53.776 ORDER 753 [QZ][W100][PVD][CU][6500NM] QZ 100 8 280 6500 1.128 8 55.132 ORDER 754 [QZ][W100][PVD][CU][7000NM] QZ 100 8 280 7000 1.215 8 56.489 ORDER 755 [QZ][W100][PVD][CU][7500NM] QZ 100 8 280 7500 1.302 8 57.845 ORDER 756 [QZ][W100][PVD][CU][8000NM] QZ 100 8 280 8000 1.389 8 59.201 ORDER 757 [QZ][W100][PVD][CU][8500NM] QZ 100 8 280 8500 1.476 8 60.558 ORDER 758 [QZ][W100][PVD][CU][9000NM] QZ 100 8 280 9000 1.563 8 61.914 ORDER 759 [QZ][W100][PVD][CU][9500NM] QZ 100 8 280 9500 1.649 8 63.270 ORDER 760 [QZ][W100][PVD][CU][10000NM] QZ 100 8 280 10000 1.736 8 64.627 ORDER 761 [QZ][W125][PVD][CU][1000NM] QZ 125 7 280 1000 0.174 7 45.957 ORDER 762 [QZ][W125][PVD][CU][1500NM] QZ 125 7 280 1500 0.260 7 47.507 ORDER 763 [QZ][W125][PVD][CU][2000NM] QZ 125 7 280 2000 0.347 7 49.058 ORDER 764 [QZ][W125][PVD][CU][2500NM] QZ 125 7 280 2500 0.434 7 50.608 ORDER 765 [QZ][W125][PVD][CU][3000NM] QZ 125 7 280 3000 0.521 7 52.158 ORDER 766 [QZ][W125][PVD][CU][3500NM] QZ 125 7 280 3500 0.608 7 53.708 ORDER 767 [QZ][W125][PVD][CU][4000NM] QZ 125 7 280 4000 0.694 7 55.258 ORDER 768 [QZ][W125][PVD][CU][4500NM] QZ 125 7 280 4500 0.781 7 56.808 ORDER 769 [QZ][W125][PVD][CU][5000NM] QZ 125 7 280 5000 0.868 7 58.358 ORDER 770 [QZ][W125][PVD][CU][5500NM] QZ 125 7 280 5500 0.955 7 59.908 ORDER 771 [QZ][W125][PVD][CU][6000NM] QZ 125 7 280 6000 1.042 7 61.458 ORDER 772 [QZ][W125][PVD][CU][6500NM] QZ 125 7 280 6500 1.128 7 63.008 ORDER 773 [QZ][W125][PVD][CU][7000NM] QZ 125 7 280 7000 1.215 7 64.559 ORDER 774 [QZ][W125][PVD][CU][7500NM] QZ 125 7 280 7500 1.302 7 66.109 ORDER 775 [QZ][W125][PVD][CU][8000NM] QZ 125 7 280 8000 1.389 7 67.659 ORDER 776 [QZ][W125][PVD][CU][8500NM] QZ 125 7 280 8500 1.476 7 69.209 ORDER 777 [QZ][W125][PVD][CU][9000NM] QZ 125 7 280 9000 1.563 7 70.759 ORDER 778 [QZ][W125][PVD][CU][9500NM] QZ 125 7 280 9500 1.649 7 72.309 ORDER 779 [QZ][W125][PVD][CU][10000NM] QZ 125 7 280 10000 1.736 7 73.859 ORDER 780 [QZ][W150][PVD][CU][1000NM] QZ 150 6 280 1000 0.174 6 53.617 ORDER 781 [QZ][W150][PVD][CU][1500NM] QZ 150 6 280 1500 0.260 6 55.425 ORDER 782 [QZ][W150][PVD][CU][2000NM] QZ 150 6 280 2000 0.347 6 57.234 ORDER 783 [QZ][W150][PVD][CU][2500NM] QZ 150 6 280 2500 0.434 6 59.042 ORDER 784 [QZ][W150][PVD][CU][3000NM] QZ 150 6 280 3000 0.521 6 60.851 ORDER 785 [QZ][W150][PVD][CU][3500NM] QZ 150 6 280 3500 0.608 6 62.659 ORDER 786 [QZ][W150][PVD][CU][4000NM] QZ 150 6 280 4000 0.694 6 64.468 ORDER 787 [QZ][W150][PVD][CU][4500NM] QZ 150 6 280 4500 0.781 6 66.276 ORDER 788 [QZ][W150][PVD][CU][5000NM] QZ 150 6 280 5000 0.868 6 68.084 ORDER 789 [QZ][W150][PVD][CU][5500NM] QZ 150 6 280 5500 0.955 6 69.893 ORDER 790 [QZ][W150][PVD][CU][6000NM] QZ 150 6 280 6000 1.042 6 71.701 ORDER 791 [QZ][W150][PVD][CU][6500NM] QZ 150 6 280 6500 1.128 6 73.510 ORDER 792 [QZ][W150][PVD][CU][7000NM] QZ 150 6 280 7000 1.215 6 75.318 ORDER 793 [QZ][W150][PVD][CU][7500NM] QZ 150 6 280 7500 1.302 6 77.127 ORDER 794 [QZ][W150][PVD][CU][8000NM] QZ 150 6 280 8000 1.389 6 78.935 ORDER 795 [QZ][W150][PVD][CU][8500NM] QZ 150 6 280 8500 1.476 6 80.744 ORDER 796 [QZ][W150][PVD][CU][9000NM] QZ 150 6 280 9000 1.563 6 82.552 ORDER 797 [QZ][W150][PVD][CU][9500NM] QZ 150 6 280 9500 1.649 6 84.361 ORDER 798 [QZ][W150][PVD][CU][10000NM] QZ 150 6 280 10000 1.736 6 86.169 ORDER 799 [QZ][W200][PVD][CU][1000NM] QZ 200 3 280 1000 0.174 3 107.234 ORDER 800 [QZ][W200][PVD][CU][1500NM] QZ 200 3 280 1500 0.260 3 110.851 ORDER 801 [QZ][W200][PVD][CU][2000NM] QZ 200 3 280 2000 0.347 3 114.468 ORDER 802 [QZ][W200][PVD][CU][2500NM] QZ 200 3 280 2500 0.434 3 118.084 ORDER 803 [QZ][W200][PVD][CU][3000NM] QZ 200 3 280 3000 0.521 3 121.701 ORDER 804 [QZ][W200][PVD][CU][3500NM] QZ 200 3 280 3500 0.608 3 125.318 ORDER 805 [QZ][W200][PVD][CU][4000NM] QZ 200 3 280 4000 0.694 3 128.935 ORDER 806 [QZ][W200][PVD][CU][4500NM] QZ 200 3 280 4500 0.781 3 132.552 ORDER 807 [QZ][W200][PVD][CU][5000NM] QZ 200 3 280 5000 0.868 3 136.169 ORDER 808 [QZ][W200][PVD][CU][5500NM] QZ 200 3 280 5500 0.955 3 139.786 ORDER 809 [QZ][W200][PVD][CU][6000NM] QZ 200 3 280 6000 1.042 3 143.403 ORDER 810 [QZ][W200][PVD][CU][6500NM] QZ 200 3 280 6500 1.128 3 147.020 ORDER 811 [QZ][W200][PVD][CU][7000NM] QZ 200 3 280 7000 1.215 3 150.637 ORDER 812 [QZ][W200][PVD][CU][7500NM] QZ 200 3 280 7500 1.302 3 154.253 ORDER 813 [QZ][W200][PVD][CU][8000NM] QZ 200 3 280 8000 1.389 3 157.870 ORDER 814 [QZ][W200][PVD][CU][8500NM] QZ 200 3 280 8500 1.476 3 161.487 ORDER 815 [QZ][W200][PVD][CU][9000NM] QZ 200 3 280 9000 1.563 3 165.104 ORDER 816 [QZ][W200][PVD][CU][9500NM] QZ 200 3 280 9500 1.649 3 168.721 ORDER 817 [QZ][W200][PVD][CU][10000NM] QZ 200 3 280 10000 1.736 3 172.338 ORDER 818 [QZ][W300][PVD][CU][1000NM] QZ 300 280 1000 0.174 RFQ 819 [QZ][W300][PVD][CU][1500NM] QZ 300 280 1500 0.260 RFQ 820 [QZ][W300][PVD][CU][2000NM] QZ 300 280 2000 0.347 RFQ 821 [QZ][W300][PVD][CU][2500NM] QZ 300 280 2500 0.434 RFQ 822 [QZ][W300][PVD][CU][3000NM] QZ 300 280 3000 0.521 RFQ 823 [QZ][W300][PVD][CU][3500NM] QZ 300 280 3500 0.608 RFQ 824 [QZ][W300][PVD][CU][4000NM] QZ 300 280 4000 0.694 RFQ 825 [QZ][W300][PVD][CU][4500NM] QZ 300 280 4500 0.781 RFQ 826 [QZ][W300][PVD][CU][5000NM] QZ 300 280 5000 0.868 RFQ 827 [QZ][W300][PVD][CU][5500NM] QZ 300 280 5500 0.955 RFQ 828 [QZ][W300][PVD][CU][6000NM] QZ 300 280 6000 1.042 RFQ 829 [QZ][W300][PVD][CU][6500NM] QZ 300 280 6500 1.128 RFQ 830 [QZ][W300][PVD][CU][7000NM] QZ 300 280 7000 1.215 RFQ 831 [QZ][W300][PVD][CU][7500NM] QZ 300 280 7500 1.302 RFQ 832 [QZ][W300][PVD][CU][8000NM] QZ 300 280 8000 1.389 RFQ 833 [QZ][W300][PVD][CU][8500NM] QZ 300 280 8500 1.476 RFQ 834 [QZ][W300][PVD][CU][9000NM] QZ 300 280 9000 1.563 RFQ 835 [QZ][W300][PVD][CU][9500NM] QZ 300 280 9500 1.649 RFQ 836 [QZ][W300][PVD][CU][10000NM] QZ 300 280 10000 1.736 RFQ 837 [QZ][Wnnn][PVD][CU][1000NM] QZ nnn 280 1000 0.174 RFQ 838 [QZ][Wnnn][PVD][CU][1500NM] QZ nnn 280 1500 0.260 RFQ 839 [QZ][Wnnn][PVD][CU][2000NM] QZ nnn 280 2000 0.347 RFQ 840 [QZ][Wnnn][PVD][CU][2500NM] QZ nnn 280 2500 0.434 RFQ 841 [QZ][Wnnn][PVD][CU][3000NM] QZ nnn 280 3000 0.521 RFQ 842 [QZ][Wnnn][PVD][CU][3500NM] QZ nnn 280 3500 0.608 RFQ 843 [QZ][Wnnn][PVD][CU][4000NM] QZ nnn 280 4000 0.694 RFQ 844 [QZ][Wnnn][PVD][CU][4500NM] QZ nnn 280 4500 0.781 RFQ 845 [QZ][Wnnn][PVD][CU][5000NM] QZ nnn 280 5000 0.868 RFQ 846 [QZ][Wnnn][PVD][CU][5500NM] QZ nnn 280 5500 0.955 RFQ 847 [QZ][Wnnn][PVD][CU][6000NM] QZ nnn 280 6000 1.042 RFQ 848 [QZ][Wnnn][PVD][CU][6500NM] QZ nnn 280 6500 1.128 RFQ 849 [QZ][Wnnn][PVD][CU][7000NM] QZ nnn 280 7000 1.215 RFQ 850 [QZ][Wnnn][PVD][CU][7500NM] QZ nnn 280 7500 1.302 RFQ 851 [QZ][Wnnn][PVD][CU][8000NM] QZ nnn 280 8000 1.389 RFQ 852 [QZ][Wnnn][PVD][CU][8500NM] QZ nnn 280 8500 1.476 RFQ 853 [QZ][Wnnn][PVD][CU][9000NM] QZ nnn 280 9000 1.563 RFQ 854 [QZ][Wnnn][PVD][CU][9500NM] QZ nnn 280 9500 1.649 RFQ 855 [QZ][Wnnn][PVD][CU][10000NM] QZ nnn 280 10000 1.736 RFQ 856 [SAP][W25][PVD][CU][1000NM] SAP 25 24 280 1000 0.174 24 13.404 ORDER 857 [SAP][W25][PVD][CU][1500NM] SAP 25 24 280 1500 0.260 24 13.856 ORDER 858 [SAP][W25][PVD][CU][2000NM] SAP 25 24 280 2000 0.347 24 14.308 ORDER 859 [SAP][W25][PVD][CU][2500NM] SAP 25 24 280 2500 0.434 24 14.761 ORDER 860 [SAP][W25][PVD][CU][3000NM] SAP 25 24 280 3000 0.521 24 15.213 ORDER 861 [SAP][W25][PVD][CU][3500NM] SAP 25 24 280 3500 0.608 24 15.665 ORDER 862 [SAP][W25][PVD][CU][4000NM] SAP 25 24 280 4000 0.694 24 16.117 ORDER 863 [SAP][W25][PVD][CU][4500NM] SAP 25 24 280 4500 0.781 24 16.569 ORDER 864 [SAP][W25][PVD][CU][5000NM] SAP 25 24 280 5000 0.868 24 17.021 ORDER 865 [SAP][W25][PVD][CU][5500NM] SAP 25 24 280 5500 0.955 24 17.473 ORDER 866 [SAP][W25][PVD][CU][6000NM] SAP 25 24 280 6000 1.042 24 17.925 ORDER 867 [SAP][W25][PVD][CU][6500NM] SAP 25 24 280 6500 1.128 24 18.377 ORDER 868 [SAP][W25][PVD][CU][7000NM] SAP 25 24 280 7000 1.215 24 18.830 ORDER 869 [SAP][W25][PVD][CU][7500NM] SAP 25 24 280 7500 1.302 24 19.282 ORDER 870 [SAP][W25][PVD][CU][8000NM] SAP 25 24 280 8000 1.389 24 19.734 ORDER 871 [SAP][W25][PVD][CU][8500NM] SAP 25 24 280 8500 1.476 24 20.186 ORDER 872 [SAP][W25][PVD][CU][9000NM] SAP 25 24 280 9000 1.563 24 20.638 ORDER 873 [SAP][W25][PVD][CU][9500NM] SAP 25 24 280 9500 1.649 24 21.090 ORDER 874 [SAP][W25][PVD][CU][10000NM] SAP 25 24 280 10000 1.736 24 21.542 ORDER 875 [SAP][W50][PVD][CU][1000NM] SAP 50 12 280 1000 0.174 12 26.808 ORDER 876 [SAP][W50][PVD][CU][1500NM] SAP 50 12 280 1500 0.260 12 27.713 ORDER 877 [SAP][W50][PVD][CU][2000NM] SAP 50 12 280 2000 0.347 12 28.617 ORDER 878 [SAP][W50][PVD][CU][2500NM] SAP 50 12 280 2500 0.434 12 29.521 ORDER 879 [SAP][W50][PVD][CU][3000NM] SAP 50 12 280 3000 0.521 12 30.425 ORDER 880 [SAP][W50][PVD][CU][3500NM] SAP 50 12 280 3500 0.608 12 31.330 ORDER 881 [SAP][W50][PVD][CU][4000NM] SAP 50 12 280 4000 0.694 12 32.234 ORDER 882 [SAP][W50][PVD][CU][4500NM] SAP 50 12 280 4500 0.781 12 33.138 ORDER 883 [SAP][W50][PVD][CU][5000NM] SAP 50 12 280 5000 0.868 12 34.042 ORDER 884 [SAP][W50][PVD][CU][5500NM] SAP 50 12 280 5500 0.955 12 34.946 ORDER 885 [SAP][W50][PVD][CU][6000NM] SAP 50 12 280 6000 1.042 12 35.851 ORDER 886 [SAP][W50][PVD][CU][6500NM] SAP 50 12 280 6500 1.128 12 36.755 ORDER 887 [SAP][W50][PVD][CU][7000NM] SAP 50 12 280 7000 1.215 12 37.659 ORDER 888 [SAP][W50][PVD][CU][7500NM] SAP 50 12 280 7500 1.302 12 38.563 ORDER 889 [SAP][W50][PVD][CU][8000NM] SAP 50 12 280 8000 1.389 12 39.468 ORDER 890 [SAP][W50][PVD][CU][8500NM] SAP 50 12 280 8500 1.476 12 40.372 ORDER 891 [SAP][W50][PVD][CU][9000NM] SAP 50 12 280 9000 1.563 12 41.276 ORDER 892 [SAP][W50][PVD][CU][9500NM] SAP 50 12 280 9500 1.649 12 42.180 ORDER 893 [SAP][W50][PVD][CU][10000NM] SAP 50 12 280 10000 1.736 12 43.084 ORDER 894 [SAP][W75][PVD][CU][1000NM] SAP 75 10 280 1000 0.174 10 32.170 ORDER 895 [SAP][W75][PVD][CU][1500NM] SAP 75 10 280 1500 0.260 10 33.255 ORDER 896 [SAP][W75][PVD][CU][2000NM] SAP 75 10 280 2000 0.347 10 34.340 ORDER 897 [SAP][W75][PVD][CU][2500NM] SAP 75 10 280 2500 0.434 10 35.425 ORDER 898 [SAP][W75][PVD][CU][3000NM] SAP 75 10 280 3000 0.521 10 36.510 ORDER 899 [SAP][W75][PVD][CU][3500NM] SAP 75 10 280 3500 0.608 10 37.595 ORDER 900 [SAP][W75][PVD][CU][4000NM] SAP 75 10 280 4000 0.694 10 38.681 ORDER 901 [SAP][W75][PVD][CU][4500NM] SAP 75 10 280 4500 0.781 10 39.766 ORDER 902 [SAP][W75][PVD][CU][5000NM] SAP 75 10 280 5000 0.868 10 40.851 ORDER 903 [SAP][W75][PVD][CU][5500NM] SAP 75 10 280 5500 0.955 10 41.936 ORDER 904 [SAP][W75][PVD][CU][6000NM] SAP 75 10 280 6000 1.042 10 43.021 ORDER 905 [SAP][W75][PVD][CU][6500NM] SAP 75 10 280 6500 1.128 10 44.106 ORDER 906 [SAP][W75][PVD][CU][7000NM] SAP 75 10 280 7000 1.215 10 45.191 ORDER 907 [SAP][W75][PVD][CU][7500NM] SAP 75 10 280 7500 1.302 10 46.276 ORDER 908 [SAP][W75][PVD][CU][8000NM] SAP 75 10 280 8000 1.389 10 47.361 ORDER 909 [SAP][W75][PVD][CU][8500NM] SAP 75 10 280 8500 1.476 10 48.446 ORDER 910 [SAP][W75][PVD][CU][9000NM] SAP 75 10 280 9000 1.563 10 49.531 ORDER 911 [SAP][W75][PVD][CU][9500NM] SAP 75 10 280 9500 1.649 10 50.616 ORDER 912 [SAP][W75][PVD][CU][10000NM] SAP 75 10 280 10000 1.736 10 51.701 ORDER 913 [SAP][W100][PVD][CU][1000NM] SAP 100 8 280 1000 0.174 8 40.213 ORDER 914 [SAP][W100][PVD][CU][1500NM] SAP 100 8 280 1500 0.260 8 41.569 ORDER 915 [SAP][W100][PVD][CU][2000NM] SAP 100 8 280 2000 0.347 8 42.925 ORDER 916 [SAP][W100][PVD][CU][2500NM] SAP 100 8 280 2500 0.434 8 44.282 ORDER 917 [SAP][W100][PVD][CU][3000NM] SAP 100 8 280 3000 0.521 8 45.638 ORDER 918 [SAP][W100][PVD][CU][3500NM] SAP 100 8 280 3500 0.608 8 46.994 ORDER 919 [SAP][W100][PVD][CU][4000NM] SAP 100 8 280 4000 0.694 8 48.351 ORDER 920 [SAP][W100][PVD][CU][4500NM] SAP 100 8 280 4500 0.781 8 49.707 ORDER 921 [SAP][W100][PVD][CU][5000NM] SAP 100 8 280 5000 0.868 8 51.063 ORDER 922 [SAP][W100][PVD][CU][5500NM] SAP 100 8 280 5500 0.955 8 52.420 ORDER 923 [SAP][W100][PVD][CU][6000NM] SAP 100 8 280 6000 1.042 8 53.776 ORDER 924 [SAP][W100][PVD][CU][6500NM] SAP 100 8 280 6500 1.128 8 55.132 ORDER 925 [SAP][W100][PVD][CU][7000NM] SAP 100 8 280 7000 1.215 8 56.489 ORDER 926 [SAP][W100][PVD][CU][7500NM] SAP 100 8 280 7500 1.302 8 57.845 ORDER 927 [SAP][W100][PVD][CU][8000NM] SAP 100 8 280 8000 1.389 8 59.201 ORDER 928 [SAP][W100][PVD][CU][8500NM] SAP 100 8 280 8500 1.476 8 60.558 ORDER 929 [SAP][W100][PVD][CU][9000NM] SAP 100 8 280 9000 1.563 8 61.914 ORDER 930 [SAP][W100][PVD][CU][9500NM] SAP 100 8 280 9500 1.649 8 63.270 ORDER 931 [SAP][W100][PVD][CU][10000NM] SAP 100 8 280 10000 1.736 8 64.627 ORDER 932 [SAP][W125][PVD][CU][1000NM] SAP 125 7 280 1000 0.174 7 45.957 ORDER 933 [SAP][W125][PVD][CU][1500NM] SAP 125 7 280 1500 0.260 7 47.507 ORDER 934 [SAP][W125][PVD][CU][2000NM] SAP 125 7 280 2000 0.347 7 49.058 ORDER 935 [SAP][W125][PVD][CU][2500NM] SAP 125 7 280 2500 0.434 7 50.608 ORDER 936 [SAP][W125][PVD][CU][3000NM] SAP 125 7 280 3000 0.521 7 52.158 ORDER 937 [SAP][W125][PVD][CU][3500NM] SAP 125 7 280 3500 0.608 7 53.708 ORDER 938 [SAP][W125][PVD][CU][4000NM] SAP 125 7 280 4000 0.694 7 55.258 ORDER 939 [SAP][W125][PVD][CU][4500NM] SAP 125 7 280 4500 0.781 7 56.808 ORDER 940 [SAP][W125][PVD][CU][5000NM] SAP 125 7 280 5000 0.868 7 58.358 ORDER 941 [SAP][W125][PVD][CU][5500NM] SAP 125 7 280 5500 0.955 7 59.908 ORDER 942 [SAP][W125][PVD][CU][6000NM] SAP 125 7 280 6000 1.042 7 61.458 ORDER 943 [SAP][W125][PVD][CU][6500NM] SAP 125 7 280 6500 1.128 7 63.008 ORDER 944 [SAP][W125][PVD][CU][7000NM] SAP 125 7 280 7000 1.215 7 64.559 ORDER 945 [SAP][W125][PVD][CU][7500NM] SAP 125 7 280 7500 1.302 7 66.109 ORDER 946 [SAP][W125][PVD][CU][8000NM] SAP 125 7 280 8000 1.389 7 67.659 ORDER 947 [SAP][W125][PVD][CU][8500NM] SAP 125 7 280 8500 1.476 7 69.209 ORDER 948 [SAP][W125][PVD][CU][9000NM] SAP 125 7 280 9000 1.563 7 70.759 ORDER 949 [SAP][W125][PVD][CU][9500NM] SAP 125 7 280 9500 1.649 7 72.309 ORDER 950 [SAP][W125][PVD][CU][10000NM] SAP 125 7 280 10000 1.736 7 73.859 ORDER 951 [SAP][W150][PVD][CU][1000NM] SAP 150 6 280 1000 0.174 6 53.617 ORDER 952 [SAP][W150][PVD][CU][1500NM] SAP 150 6 280 1500 0.260 6 55.425 ORDER 953 [SAP][W150][PVD][CU][2000NM] SAP 150 6 280 2000 0.347 6 57.234 ORDER 954 [SAP][W150][PVD][CU][2500NM] SAP 150 6 280 2500 0.434 6 59.042 ORDER 955 [SAP][W150][PVD][CU][3000NM] SAP 150 6 280 3000 0.521 6 60.851 ORDER 956 [SAP][W150][PVD][CU][3500NM] SAP 150 6 280 3500 0.608 6 62.659 ORDER 957 [SAP][W150][PVD][CU][4000NM] SAP 150 6 280 4000 0.694 6 64.468 ORDER 958 [SAP][W150][PVD][CU][4500NM] SAP 150 6 280 4500 0.781 6 66.276 ORDER 959 [SAP][W150][PVD][CU][5000NM] SAP 150 6 280 5000 0.868 6 68.084 ORDER 960 [SAP][W150][PVD][CU][5500NM] SAP 150 6 280 5500 0.955 6 69.893 ORDER 961 [SAP][W150][PVD][CU][6000NM] SAP 150 6 280 6000 1.042 6 71.701 ORDER 962 [SAP][W150][PVD][CU][6500NM] SAP 150 6 280 6500 1.128 6 73.510 ORDER 963 [SAP][W150][PVD][CU][7000NM] SAP 150 6 280 7000 1.215 6 75.318 ORDER 964 [SAP][W150][PVD][CU][7500NM] SAP 150 6 280 7500 1.302 6 77.127 ORDER 965 [SAP][W150][PVD][CU][8000NM] SAP 150 6 280 8000 1.389 6 78.935 ORDER 966 [SAP][W150][PVD][CU][8500NM] SAP 150 6 280 8500 1.476 6 80.744 ORDER 967 [SAP][W150][PVD][CU][9000NM] SAP 150 6 280 9000 1.563 6 82.552 ORDER 968 [SAP][W150][PVD][CU][9500NM] SAP 150 6 280 9500 1.649 6 84.361 ORDER 969 [SAP][W150][PVD][CU][10000NM] SAP 150 6 280 10000 1.736 6 86.169 ORDER 970 [SAP][W200][PVD][CU][1000NM] SAP 200 3 280 1000 0.174 3 107.234 ORDER 971 [SAP][W200][PVD][CU][1500NM] SAP 200 3 280 1500 0.260 3 110.851 ORDER 972 [SAP][W200][PVD][CU][2000NM] SAP 200 3 280 2000 0.347 3 114.468 ORDER 973 [SAP][W200][PVD][CU][2500NM] SAP 200 3 280 2500 0.434 3 118.084 ORDER 974 [SAP][W200][PVD][CU][3000NM] SAP 200 3 280 3000 0.521 3 121.701 ORDER 975 [SAP][W200][PVD][CU][3500NM] SAP 200 3 280 3500 0.608 3 125.318 ORDER 976 [SAP][W200][PVD][CU][4000NM] SAP 200 3 280 4000 0.694 3 128.935 ORDER 977 [SAP][W200][PVD][CU][4500NM] SAP 200 3 280 4500 0.781 3 132.552 ORDER 978 [SAP][W200][PVD][CU][5000NM] SAP 200 3 280 5000 0.868 3 136.169 ORDER 979 [SAP][W200][PVD][CU][5500NM] SAP 200 3 280 5500 0.955 3 139.786 ORDER 980 [SAP][W200][PVD][CU][6000NM] SAP 200 3 280 6000 1.042 3 143.403 ORDER 981 [SAP][W200][PVD][CU][6500NM] SAP 200 3 280 6500 1.128 3 147.020 ORDER 982 [SAP][W200][PVD][CU][7000NM] SAP 200 3 280 7000 1.215 3 150.637 ORDER 983 [SAP][W200][PVD][CU][7500NM] SAP 200 3 280 7500 1.302 3 154.253 ORDER 984 [SAP][W200][PVD][CU][8000NM] SAP 200 3 280 8000 1.389 3 157.870 ORDER 985 [SAP][W200][PVD][CU][8500NM] SAP 200 3 280 8500 1.476 3 161.487 ORDER 986 [SAP][W200][PVD][CU][9000NM] SAP 200 3 280 9000 1.563 3 165.104 ORDER 987 [SAP][W200][PVD][CU][9500NM] SAP 200 3 280 9500 1.649 3 168.721 ORDER 988 [SAP][W200][PVD][CU][10000NM] SAP 200 3 280 10000 1.736 3 172.338 ORDER 989 [SAP][W300][PVD][CU][1000NM] SAP 300 280 1000 0.174 RFQ 990 [SAP][W300][PVD][CU][1500NM] SAP 300 280 1500 0.260 RFQ 991 [SAP][W300][PVD][CU][2000NM] SAP 300 280 2000 0.347 RFQ 992 [SAP][W300][PVD][CU][2500NM] SAP 300 280 2500 0.434 RFQ 993 [SAP][W300][PVD][CU][3000NM] SAP 300 280 3000 0.521 RFQ 994 [SAP][W300][PVD][CU][3500NM] SAP 300 280 3500 0.608 RFQ 995 [SAP][W300][PVD][CU][4000NM] SAP 300 280 4000 0.694 RFQ 996 [SAP][W300][PVD][CU][4500NM] SAP 300 280 4500 0.781 RFQ 997 [SAP][W300][PVD][CU][5000NM] SAP 300 280 5000 0.868 RFQ 998 [SAP][W300][PVD][CU][5500NM] SAP 300 280 5500 0.955 RFQ 999 [SAP][W300][PVD][CU][6000NM] SAP 300 280 6000 1.042 RFQ 1000 [SAP][W300][PVD][CU][6500NM] SAP 300 280 6500 1.128 RFQ 1001 [SAP][W300][PVD][CU][7000NM] SAP 300 280 7000 1.215 RFQ 1002 [SAP][W300][PVD][CU][7500NM] SAP 300 280 7500 1.302 RFQ 1003 [SAP][W300][PVD][CU][8000NM] SAP 300 280 8000 1.389 RFQ 1004 [SAP][W300][PVD][CU][8500NM] SAP 300 280 8500 1.476 RFQ 1005 [SAP][W300][PVD][CU][9000NM] SAP 300 280 9000 1.563 RFQ 1006 [SAP][W300][PVD][CU][9500NM] SAP 300 280 9500 1.649 RFQ 1007 [SAP][W300][PVD][CU][10000NM] SAP 300 280 10000 1.736 RFQ 1008 [SAP][Wnnn][PVD][CU][1000NM] SAP nnn 280 1000 0.174 RFQ 1009 [SAP][Wnnn][PVD][CU][1500NM] SAP nnn 280 1500 0.260 RFQ 1010 [SAP][Wnnn][PVD][CU][2000NM] SAP nnn 280 2000 0.347 RFQ 1011 [SAP][Wnnn][PVD][CU][2500NM] SAP nnn 280 2500 0.434 RFQ 1012 [SAP][Wnnn][PVD][CU][3000NM] SAP nnn 280 3000 0.521 RFQ 1013 [SAP][Wnnn][PVD][CU][3500NM] SAP nnn 280 3500 0.608 RFQ 1014 [SAP][Wnnn][PVD][CU][4000NM] SAP nnn 280 4000 0.694 RFQ 1015 [SAP][Wnnn][PVD][CU][4500NM] SAP nnn 280 4500 0.781 RFQ 1016 [SAP][Wnnn][PVD][CU][5000NM] SAP nnn 280 5000 0.868 RFQ 1017 [SAP][Wnnn][PVD][CU][5500NM] SAP nnn 280 5500 0.955 RFQ 1018 [SAP][Wnnn][PVD][CU][6000NM] SAP nnn 280 6000 1.042 RFQ 1019 [SAP][Wnnn][PVD][CU][6500NM] SAP nnn 280 6500 1.128 RFQ 1020 [SAP][Wnnn][PVD][CU][7000NM] SAP nnn 280 7000 1.215 RFQ 1021 [SAP][Wnnn][PVD][CU][7500NM] SAP nnn 280 7500 1.302 RFQ 1022 [SAP][Wnnn][PVD][CU][8000NM] SAP nnn 280 8000 1.389 RFQ 1023 [SAP][Wnnn][PVD][CU][8500NM] SAP nnn 280 8500 1.476 RFQ 1024 [SAP][Wnnn][PVD][CU][9000NM] SAP nnn 280 9000 1.563 RFQ 1025 [SAP][Wnnn][PVD][CU][9500NM] SAP nnn 280 9500 1.649 RFQ 1026 [SAP][Wnnn][PVD][CU][10000NM] SAP nnn 280 10000 1.736 RFQ 1027 [XYZ][W25][PVD][CU][1000NM] XYZ 25 24 280 1000 0.174 24 13.404 ORDER 1028 [XYZ][W25][PVD][CU][1500NM] XYZ 25 24 280 1500 0.260 24 13.856 ORDER 1029 [XYZ][W25][PVD][CU][2000NM] XYZ 25 24 280 2000 0.347 24 14.308 ORDER 1030 [XYZ][W25][PVD][CU][2500NM] XYZ 25 24 280 2500 0.434 24 14.761 ORDER 1031 [XYZ][W25][PVD][CU][3000NM] XYZ 25 24 280 3000 0.521 24 15.213 ORDER 1032 [XYZ][W25][PVD][CU][3500NM] XYZ 25 24 280 3500 0.608 24 15.665 ORDER 1033 [XYZ][W25][PVD][CU][4000NM] XYZ 25 24 280 4000 0.694 24 16.117 ORDER 1034 [XYZ][W25][PVD][CU][4500NM] XYZ 25 24 280 4500 0.781 24 16.569 ORDER 1035 [XYZ][W25][PVD][CU][5000NM] XYZ 25 24 280 5000 0.868 24 17.021 ORDER 1036 [XYZ][W25][PVD][CU][5500NM] XYZ 25 24 280 5500 0.955 24 17.473 ORDER 1037 [XYZ][W25][PVD][CU][6000NM] XYZ 25 24 280 6000 1.042 24 17.925 ORDER 1038 [XYZ][W25][PVD][CU][6500NM] XYZ 25 24 280 6500 1.128 24 18.377 ORDER 1039 [XYZ][W25][PVD][CU][7000NM] XYZ 25 24 280 7000 1.215 24 18.830 ORDER 1040 [XYZ][W25][PVD][CU][7500NM] XYZ 25 24 280 7500 1.302 24 19.282 ORDER 1041 [XYZ][W25][PVD][CU][8000NM] XYZ 25 24 280 8000 1.389 24 19.734 ORDER 1042 [XYZ][W25][PVD][CU][8500NM] XYZ 25 24 280 8500 1.476 24 20.186 ORDER 1043 [XYZ][W25][PVD][CU][9000NM] XYZ 25 24 280 9000 1.563 24 20.638 ORDER 1044 [XYZ][W25][PVD][CU][9500NM] XYZ 25 24 280 9500 1.649 24 21.090 ORDER 1045 [XYZ][W25][PVD][CU][10000NM] XYZ 25 24 280 10000 1.736 24 21.542 ORDER 1046 [XYZ][W50][PVD][CU][1000NM] XYZ 50 12 280 1000 0.174 12 26.808 ORDER 1047 [XYZ][W50][PVD][CU][1500NM] XYZ 50 12 280 1500 0.260 12 27.713 ORDER 1048 [XYZ][W50][PVD][CU][2000NM] XYZ 50 12 280 2000 0.347 12 28.617 ORDER 1049 [XYZ][W50][PVD][CU][2500NM] XYZ 50 12 280 2500 0.434 12 29.521 ORDER 1050 [XYZ][W50][PVD][CU][3000NM] XYZ 50 12 280 3000 0.521 12 30.425 ORDER 1051 [XYZ][W50][PVD][CU][3500NM] XYZ 50 12 280 3500 0.608 12 31.330 ORDER 1052 [XYZ][W50][PVD][CU][4000NM] XYZ 50 12 280 4000 0.694 12 32.234 ORDER 1053 [XYZ][W50][PVD][CU][4500NM] XYZ 50 12 280 4500 0.781 12 33.138 ORDER 1054 [XYZ][W50][PVD][CU][5000NM] XYZ 50 12 280 5000 0.868 12 34.042 ORDER 1055 [XYZ][W50][PVD][CU][5500NM] XYZ 50 12 280 5500 0.955 12 34.946 ORDER 1056 [XYZ][W50][PVD][CU][6000NM] XYZ 50 12 280 6000 1.042 12 35.851 ORDER 1057 [XYZ][W50][PVD][CU][6500NM] XYZ 50 12 280 6500 1.128 12 36.755 ORDER 1058 [XYZ][W50][PVD][CU][7000NM] XYZ 50 12 280 7000 1.215 12 37.659 ORDER 1059 [XYZ][W50][PVD][CU][7500NM] XYZ 50 12 280 7500 1.302 12 38.563 ORDER 1060 [XYZ][W50][PVD][CU][8000NM] XYZ 50 12 280 8000 1.389 12 39.468 ORDER 1061 [XYZ][W50][PVD][CU][8500NM] XYZ 50 12 280 8500 1.476 12 40.372 ORDER 1062 [XYZ][W50][PVD][CU][9000NM] XYZ 50 12 280 9000 1.563 12 41.276 ORDER 1063 [XYZ][W50][PVD][CU][9500NM] XYZ 50 12 280 9500 1.649 12 42.180 ORDER 1064 [XYZ][W50][PVD][CU][10000NM] XYZ 50 12 280 10000 1.736 12 43.084 ORDER 1065 [XYZ][W75][PVD][CU][1000NM] XYZ 75 10 280 1000 0.174 10 32.170 ORDER 1066 [XYZ][W75][PVD][CU][1500NM] XYZ 75 10 280 1500 0.260 10 33.255 ORDER 1067 [XYZ][W75][PVD][CU][2000NM] XYZ 75 10 280 2000 0.347 10 34.340 ORDER 1068 [XYZ][W75][PVD][CU][2500NM] XYZ 75 10 280 2500 0.434 10 35.425 ORDER 1069 [XYZ][W75][PVD][CU][3000NM] XYZ 75 10 280 3000 0.521 10 36.510 ORDER 1070 [XYZ][W75][PVD][CU][3500NM] XYZ 75 10 280 3500 0.608 10 37.595 ORDER 1071 [XYZ][W75][PVD][CU][4000NM] XYZ 75 10 280 4000 0.694 10 38.681 ORDER 1072 [XYZ][W75][PVD][CU][4500NM] XYZ 75 10 280 4500 0.781 10 39.766 ORDER 1073 [XYZ][W75][PVD][CU][5000NM] XYZ 75 10 280 5000 0.868 10 40.851 ORDER 1074 [XYZ][W75][PVD][CU][5500NM] XYZ 75 10 280 5500 0.955 10 41.936 ORDER 1075 [XYZ][W75][PVD][CU][6000NM] XYZ 75 10 280 6000 1.042 10 43.021 ORDER 1076 [XYZ][W75][PVD][CU][6500NM] XYZ 75 10 280 6500 1.128 10 44.106 ORDER 1077 [XYZ][W75][PVD][CU][7000NM] XYZ 75 10 280 7000 1.215 10 45.191 ORDER 1078 [XYZ][W75][PVD][CU][7500NM] XYZ 75 10 280 7500 1.302 10 46.276 ORDER 1079 [XYZ][W75][PVD][CU][8000NM] XYZ 75 10 280 8000 1.389 10 47.361 ORDER 1080 [XYZ][W75][PVD][CU][8500NM] XYZ 75 10 280 8500 1.476 10 48.446 ORDER 1081 [XYZ][W75][PVD][CU][9000NM] XYZ 75 10 280 9000 1.563 10 49.531 ORDER 1082 [XYZ][W75][PVD][CU][9500NM] XYZ 75 10 280 9500 1.649 10 50.616 ORDER 1083 [XYZ][W75][PVD][CU][10000NM] XYZ 75 10 280 10000 1.736 10 51.701 ORDER 1084 [XYZ][W100][PVD][CU][1000NM] XYZ 100 8 280 1000 0.174 8 40.213 ORDER 1085 [XYZ][W100][PVD][CU][1500NM] XYZ 100 8 280 1500 0.260 8 41.569 ORDER 1086 [XYZ][W100][PVD][CU][2000NM] XYZ 100 8 280 2000 0.347 8 42.925 ORDER 1087 [XYZ][W100][PVD][CU][2500NM] XYZ 100 8 280 2500 0.434 8 44.282 ORDER 1088 [XYZ][W100][PVD][CU][3000NM] XYZ 100 8 280 3000 0.521 8 45.638 ORDER 1089 [XYZ][W100][PVD][CU][3500NM] XYZ 100 8 280 3500 0.608 8 46.994 ORDER 1090 [XYZ][W100][PVD][CU][4000NM] XYZ 100 8 280 4000 0.694 8 48.351 ORDER 1091 [XYZ][W100][PVD][CU][4500NM] XYZ 100 8 280 4500 0.781 8 49.707 ORDER 1092 [XYZ][W100][PVD][CU][5000NM] XYZ 100 8 280 5000 0.868 8 51.063 ORDER 1093 [XYZ][W100][PVD][CU][5500NM] XYZ 100 8 280 5500 0.955 8 52.420 ORDER 1094 [XYZ][W100][PVD][CU][6000NM] XYZ 100 8 280 6000 1.042 8 53.776 ORDER 1095 [XYZ][W100][PVD][CU][6500NM] XYZ 100 8 280 6500 1.128 8 55.132 ORDER 1096 [XYZ][W100][PVD][CU][7000NM] XYZ 100 8 280 7000 1.215 8 56.489 ORDER 1097 [XYZ][W100][PVD][CU][7500NM] XYZ 100 8 280 7500 1.302 8 57.845 ORDER 1098 [XYZ][W100][PVD][CU][8000NM] XYZ 100 8 280 8000 1.389 8 59.201 ORDER 1099 [XYZ][W100][PVD][CU][8500NM] XYZ 100 8 280 8500 1.476 8 60.558 ORDER 1100 [XYZ][W100][PVD][CU][9000NM] XYZ 100 8 280 9000 1.563 8 61.914 ORDER 1101 [XYZ][W100][PVD][CU][9500NM] XYZ 100 8 280 9500 1.649 8 63.270 ORDER 1102 [XYZ][W100][PVD][CU][10000NM] XYZ 100 8 280 10000 1.736 8 64.627 ORDER 1103 [XYZ][W125][PVD][CU][1000NM] XYZ 125 7 280 1000 0.174 7 45.957 ORDER 1104 [XYZ][W125][PVD][CU][1500NM] XYZ 125 7 280 1500 0.260 7 47.507 ORDER 1105 [XYZ][W125][PVD][CU][2000NM] XYZ 125 7 280 2000 0.347 7 49.058 ORDER 1106 [XYZ][W125][PVD][CU][2500NM] XYZ 125 7 280 2500 0.434 7 50.608 ORDER 1107 [XYZ][W125][PVD][CU][3000NM] XYZ 125 7 280 3000 0.521 7 52.158 ORDER 1108 [XYZ][W125][PVD][CU][3500NM] XYZ 125 7 280 3500 0.608 7 53.708 ORDER 1109 [XYZ][W125][PVD][CU][4000NM] XYZ 125 7 280 4000 0.694 7 55.258 ORDER 1110 [XYZ][W125][PVD][CU][4500NM] XYZ 125 7 280 4500 0.781 7 56.808 ORDER 1111 [XYZ][W125][PVD][CU][5000NM] XYZ 125 7 280 5000 0.868 7 58.358 ORDER 1112 [XYZ][W125][PVD][CU][5500NM] XYZ 125 7 280 5500 0.955 7 59.908 ORDER 1113 [XYZ][W125][PVD][CU][6000NM] XYZ 125 7 280 6000 1.042 7 61.458 ORDER 1114 [XYZ][W125][PVD][CU][6500NM] XYZ 125 7 280 6500 1.128 7 63.008 ORDER 1115 [XYZ][W125][PVD][CU][7000NM] XYZ 125 7 280 7000 1.215 7 64.559 ORDER 1116 [XYZ][W125][PVD][CU][7500NM] XYZ 125 7 280 7500 1.302 7 66.109 ORDER 1117 [XYZ][W125][PVD][CU][8000NM] XYZ 125 7 280 8000 1.389 7 67.659 ORDER 1118 [XYZ][W125][PVD][CU][8500NM] XYZ 125 7 280 8500 1.476 7 69.209 ORDER 1119 [XYZ][W125][PVD][CU][9000NM] XYZ 125 7 280 9000 1.563 7 70.759 ORDER 1120 [XYZ][W125][PVD][CU][9500NM] XYZ 125 7 280 9500 1.649 7 72.309 ORDER 1121 [XYZ][W125][PVD][CU][10000NM] XYZ 125 7 280 10000 1.736 7 73.859 ORDER 1122 [XYZ][W150][PVD][CU][1000NM] XYZ 150 6 280 1000 0.174 6 53.617 ORDER 1123 [XYZ][W150][PVD][CU][1500NM] XYZ 150 6 280 1500 0.260 6 55.425 ORDER 1124 [XYZ][W150][PVD][CU][2000NM] XYZ 150 6 280 2000 0.347 6 57.234 ORDER 1125 [XYZ][W150][PVD][CU][2500NM] XYZ 150 6 280 2500 0.434 6 59.042 ORDER 1126 [XYZ][W150][PVD][CU][3000NM] XYZ 150 6 280 3000 0.521 6 60.851 ORDER 1127 [XYZ][W150][PVD][CU][3500NM] XYZ 150 6 280 3500 0.608 6 62.659 ORDER 1128 [XYZ][W150][PVD][CU][4000NM] XYZ 150 6 280 4000 0.694 6 64.468 ORDER 1129 [XYZ][W150][PVD][CU][4500NM] XYZ 150 6 280 4500 0.781 6 66.276 ORDER 1130 [XYZ][W150][PVD][CU][5000NM] XYZ 150 6 280 5000 0.868 6 68.084 ORDER 1131 [XYZ][W150][PVD][CU][5500NM] XYZ 150 6 280 5500 0.955 6 69.893 ORDER 1132 [XYZ][W150][PVD][CU][6000NM] XYZ 150 6 280 6000 1.042 6 71.701 ORDER 1133 [XYZ][W150][PVD][CU][6500NM] XYZ 150 6 280 6500 1.128 6 73.510 ORDER 1134 [XYZ][W150][PVD][CU][7000NM] XYZ 150 6 280 7000 1.215 6 75.318 ORDER 1135 [XYZ][W150][PVD][CU][7500NM] XYZ 150 6 280 7500 1.302 6 77.127 ORDER 1136 [XYZ][W150][PVD][CU][8000NM] XYZ 150 6 280 8000 1.389 6 78.935 ORDER 1137 [XYZ][W150][PVD][CU][8500NM] XYZ 150 6 280 8500 1.476 6 80.744 ORDER 1138 [XYZ][W150][PVD][CU][9000NM] XYZ 150 6 280 9000 1.563 6 82.552 ORDER 1139 [XYZ][W150][PVD][CU][9500NM] XYZ 150 6 280 9500 1.649 6 84.361 ORDER 1140 [XYZ][W150][PVD][CU][10000NM] XYZ 150 6 280 10000 1.736 6 86.169 ORDER 1141 [XYZ][W200][PVD][CU][1000NM] XYZ 200 3 280 1000 0.174 3 107.234 ORDER 1142 [XYZ][W200][PVD][CU][1500NM] XYZ 200 3 280 1500 0.260 3 110.851 ORDER 1143 [XYZ][W200][PVD][CU][2000NM] XYZ 200 3 280 2000 0.347 3 114.468 ORDER 1144 [XYZ][W200][PVD][CU][2500NM] XYZ 200 3 280 2500 0.434 3 118.084 ORDER 1145 [XYZ][W200][PVD][CU][3000NM] XYZ 200 3 280 3000 0.521 3 121.701 ORDER 1146 [XYZ][W200][PVD][CU][3500NM] XYZ 200 3 280 3500 0.608 3 125.318 ORDER 1147 [XYZ][W200][PVD][CU][4000NM] XYZ 200 3 280 4000 0.694 3 128.935 ORDER 1148 [XYZ][W200][PVD][CU][4500NM] XYZ 200 3 280 4500 0.781 3 132.552 ORDER 1149 [XYZ][W200][PVD][CU][5000NM] XYZ 200 3 280 5000 0.868 3 136.169 ORDER 1150 [XYZ][W200][PVD][CU][5500NM] XYZ 200 3 280 5500 0.955 3 139.786 ORDER 1151 [XYZ][W200][PVD][CU][6000NM] XYZ 200 3 280 6000 1.042 3 143.403 ORDER 1152 [XYZ][W200][PVD][CU][6500NM] XYZ 200 3 280 6500 1.128 3 147.020 ORDER 1153 [XYZ][W200][PVD][CU][7000NM] XYZ 200 3 280 7000 1.215 3 150.637 ORDER 1154 [XYZ][W200][PVD][CU][7500NM] XYZ 200 3 280 7500 1.302 3 154.253 ORDER 1155 [XYZ][W200][PVD][CU][8000NM] XYZ 200 3 280 8000 1.389 3 157.870 ORDER 1156 [XYZ][W200][PVD][CU][8500NM] XYZ 200 3 280 8500 1.476 3 161.487 ORDER 1157 [XYZ][W200][PVD][CU][9000NM] XYZ 200 3 280 9000 1.563 3 165.104 ORDER 1158 [XYZ][W200][PVD][CU][9500NM] XYZ 200 3 280 9500 1.649 3 168.721 ORDER 1159 [XYZ][W200][PVD][CU][10000NM] XYZ 200 3 280 10000 1.736 3 172.338 ORDER 1160 [XYZ][W300][PVD][CU][1000NM] XYZ 300 280 1000 0.174 RFQ 1161 [XYZ][W300][PVD][CU][1500NM] XYZ 300 280 1500 0.260 RFQ 1162 [XYZ][W300][PVD][CU][2000NM] XYZ 300 280 2000 0.347 RFQ 1163 [XYZ][W300][PVD][CU][2500NM] XYZ 300 280 2500 0.434 RFQ 1164 [XYZ][W300][PVD][CU][3000NM] XYZ 300 280 3000 0.521 RFQ 1165 [XYZ][W300][PVD][CU][3500NM] XYZ 300 280 3500 0.608 RFQ 1166 [XYZ][W300][PVD][CU][4000NM] XYZ 300 280 4000 0.694 RFQ 1167 [XYZ][W300][PVD][CU][4500NM] XYZ 300 280 4500 0.781 RFQ 1168 [XYZ][W300][PVD][CU][5000NM] XYZ 300 280 5000 0.868 RFQ 1169 [XYZ][W300][PVD][CU][5500NM] XYZ 300 280 5500 0.955 RFQ 1170 [XYZ][W300][PVD][CU][6000NM] XYZ 300 280 6000 1.042 RFQ 1171 [XYZ][W300][PVD][CU][6500NM] XYZ 300 280 6500 1.128 RFQ 1172 [XYZ][W300][PVD][CU][7000NM] XYZ 300 280 7000 1.215 RFQ 1173 [XYZ][W300][PVD][CU][7500NM] XYZ 300 280 7500 1.302 RFQ 1174 [XYZ][W300][PVD][CU][8000NM] XYZ 300 280 8000 1.389 RFQ 1175 [XYZ][W300][PVD][CU][8500NM] XYZ 300 280 8500 1.476 RFQ 1176 [XYZ][W300][PVD][CU][9000NM] XYZ 300 280 9000 1.563 RFQ 1177 [XYZ][W300][PVD][CU][9500NM] XYZ 300 280 9500 1.649 RFQ 1178 [XYZ][W300][PVD][CU][10000NM] XYZ 300 280 10000 1.736 RFQ 1179 [XYZ][Wnnn][PVD][CU][1000NM] XYZ nnn 280 1000 0.174 RFQ 1180 [XYZ][Wnnn][PVD][CU][1500NM] XYZ nnn 280 1500 0.260 RFQ 1181 [XYZ][Wnnn][PVD][CU][2000NM] XYZ nnn 280 2000 0.347 RFQ 1182 [XYZ][Wnnn][PVD][CU][2500NM] XYZ nnn 280 2500 0.434 RFQ 1183 [XYZ][Wnnn][PVD][CU][3000NM] XYZ nnn 280 3000 0.521 RFQ 1184 [XYZ][Wnnn][PVD][CU][3500NM] XYZ nnn 280 3500 0.608 RFQ 1185 [XYZ][Wnnn][PVD][CU][4000NM] XYZ nnn 280 4000 0.694 RFQ 1186 [XYZ][Wnnn][PVD][CU][4500NM] XYZ nnn 280 4500 0.781 RFQ 1187 [XYZ][Wnnn][PVD][CU][5000NM] XYZ nnn 280 5000 0.868 RFQ 1188 [XYZ][Wnnn][PVD][CU][5500NM] XYZ nnn 280 5500 0.955 RFQ 1189 [XYZ][Wnnn][PVD][CU][6000NM] XYZ nnn 280 6000 1.042 RFQ 1190 [XYZ][Wnnn][PVD][CU][6500NM] XYZ nnn 280 6500 1.128 RFQ 1191 [XYZ][Wnnn][PVD][CU][7000NM] XYZ nnn 280 7000 1.215 RFQ 1192 [XYZ][Wnnn][PVD][CU][7500NM] XYZ nnn 280 7500 1.302 RFQ 1193 [XYZ][Wnnn][PVD][CU][8000NM] XYZ nnn 280 8000 1.389 RFQ 1194 [XYZ][Wnnn][PVD][CU][8500NM] XYZ nnn 280 8500 1.476 RFQ 1195 [XYZ][Wnnn][PVD][CU][9000NM] XYZ nnn 280 9000 1.563 RFQ 1196 [XYZ][Wnnn][PVD][CU][9500NM] XYZ nnn 280 9500 1.649 RFQ 1197 [XYZ][Wnnn][PVD][CU][10000NM] XYZ nnn 280 10000 1.736 RFQ Minimum batch for sputtering is 8 wafers for mm diameter. Unit price does not include SET-UP Charges, RUSH charges or cost of wafers. INSTANT QUOTE PROCESS CODE QTY EMAIL ORDERING: Registered customers can order online from within assigned BUSINESS PORTAL. A copy of the order along with an order confirmation receipt is issued instantly for all orders placed on line. On line Orders have to be verified, accepted and acknowledged by HTE LABS sales department in writing before, becoming non cancelable binding contracts. DELIVERY: Typical delivery for Standard processes is 2-4 working days ARO. For Custom processes lead time may vary. HTE Labs may supply on request substrate materials from its own inventory or from third party supplier. SHIPPING & PACKING: For certain processes, customer should ship only prime wafers, delivered in sealed containers [original manufacturer seal must be present]. All wafers shipped to HTE LABS by customers, should be packed in suitable wafer carriers or wafer containers, wrapped in reusable minim 2 layers of air buble packing material [pink anti-static bubble cushioning wrap], or air pillows and heavy wall cardboard boxes. Foam packing peanuts are not acceptable due to the nuisance caused by particles and electrostatic chage generated during shipping. SAMPLES: Due to the nature of this product line, free samples are not available, unless they are against an existing firm order, pending qualification of a process. HTE LABS guarantees continuous supply and availability of any of it's standard or custom developed processes and technologies provided minimum order quantities are met. HTE LABS has made every effort to have this information as accurate as possible. However, no responsibility is assumed by HTE LABS for its use, nor for any infringements of rights of third parties which may result from its use. HTE LABS reserves the right to revise the content or modify its product line without prior notice. HTE LABS processes and technologies are not authorized for and should not be used within support systems which are intended for surgical implants into the body, to support or sustain life, in aircraft, space equipment, submarine, or nuclear facility applications without HTE LABS specific written consent. Home>PVD REACTIVE SPUTTERING> Last updated:
 
 
Cu - Copper PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS
Cu - Copper MAGNETRON SPUTTER DEPOSITION, DC , RF
Cu - Copper PVD REACTIVE SPUTTERING
 
 

PROPERTIES / FEATURES   APPLICATIONS
Chemical composition: Cu
Purity (%): 99.99
Density: 8.94 g/cc
Electrical conductivity: 5.96E+5
Thermal conductivity: (300 K) 401 W/mK
Melting point: 1357.77 K, 1084.62 °C, 1984.32 °F
Refractive index:
Dielectric constant:
Deposition rate (@12.5W/in2): 96nm/min
Sputtering yield (@600eV): 2.3
 
Semiconductor integrated circuit (IC) manufacturing
Antireflection coatings in optoelectronic devices
Hard masks for chemical etching or plasma etching
Inter-metal dielectric (IMD) stacks
Multilayers interconnections, Dual Damascene, ILD [inter-layer dielectrics planarization]
STI [formation of shallow trench isolation (STI) structures] processes

SHORT PROCESS DESCRIPTION
Physical vapor deposition (PVD) is a widely used technique in semiconductor integrated circuit (IC) manufacturing.
Sputter deposition is a physical vapor deposition (PVD) method of depositing thin films by sputtering, that is ejecting, material from a "target," that is source, which then deposits onto a "substrate," such as a silicon wafer. Resputtering is re-emission of the deposited material during the deposition process by ion or atom bombardment.
Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV (100,000 K). The sputtered ions (typically only about 1% of the ejected particles is ionized) can ballistically fly from the target in straight lines and impact energetically on the substrates or vacuum chamber causing resputtering. At higher gas pressures, they collide with the gas atoms that act as a moderator and move diffusively, reaching the substrates or vacuum chamber wall and condensing after undergoing a random walk. The entire range from high-energy ballistic impact to low-energy thermalized motion is accessible by changing the background gas pressure. The sputtering gas is often an inert gas such as argon. For efficient momentum transfer, the atomic weight of the sputtering gas should be close to the atomic weight of the target, so for sputtering light elements neon is preferable, while for heavy elements krypton or xenon are used. Reactive gases can also be used to sputter compounds. The compound can be formed on the target surface, in-flight or on the substrate depending on the process parameters. The availability of many parameters that control sputter deposition make it a complex process, but also allow experts a large degree of control over the growth and microstructure of the film.
Sputtering is used extensively in the semiconductor industry to deposit thin films of various materials in integrated circuit processing. Thin antireflection coatings on glass for optical applications are also deposited by sputtering. Because of the low substrate temperatures used, sputtering is an ideal method to deposit contact metals for thin-film transistors. Perhaps the most familiar products of sputtering are low-emissivity coatings on glass, used in double-pane window assemblies. The coating is a multilayer containing silver and metal oxides such as zinc oxide, tin oxide, or titanium dioxide. Sputtering is also used to metalize plastics such as potato chip bags. A large industry has developed around tool bit coating using sputtered nitrides, such as titanium nitride, creating the familiar gold colored hard coat.

WAFER FOUNDRY - R&D SEMICONDUCTOR PROCESS DEVELOPMENT
HTE LABS is helping customers to solve R&D problems, capacity problems, lower cost as well as develop a back-up process for existing in-house operations. Any company currently involved or contemplating R&D related to semiconductor devices or thin film technologies, is encourraged to consider using HTE LABS expertise and capabilities. To contact HTE LABS and discuss an application in the strictest confidentiality, navigate to CONTACT PAGE.

PROCESS ORDERING INFORMATION

WAFER TYPE WAFER SIZE
[mm]
BATCH SIZE
[wafers]
TEMPERATURE
[°C]
THICKNESS
[nm]
GENERATE PROCESS NAME TIME
[hours]

Process parametter TIME is calculated using a deposition rate of 96nm/min as the worst case scenario. Actual deposition rate may vary. HTE Labs whenever feasible is tailoring each process to customer specification such that the end refractive index, thickness and film uniformity are within specified tolerance.

STANDARD PROCESS PRICE LIST

# PROCESS CODE
[datasheet]
WAFER TYPE SIZE
[mm]
BATCH
[wafers]
TEMP.
[°C]
THICKNESS
[nm]
TIME
[h]
MIN. ORDER
[wafers]
U/P
[$]
ORDER/RFQ
1 [SI][W25][PVD][CU][1000NM] Si 25 24 280 1000 0.174 24 13.404 ORDER
2 [SI][W25][PVD][CU][1500NM] Si 25 24 280 1500 0.260 24 13.856 ORDER
3 [SI][W25][PVD][CU][2000NM] Si 25 24 280 2000 0.347 24 14.308 ORDER
4 [SI][W25][PVD][CU][2500NM] Si 25 24 280 2500 0.434 24 14.761 ORDER
5 [SI][W25][PVD][CU][3000NM] Si 25 24 280 3000 0.521 24 15.213 ORDER
6 [SI][W25][PVD][CU][3500NM] Si 25 24 280 3500 0.608 24 15.665 ORDER
7 [SI][W25][PVD][CU][4000NM] Si 25 24 280 4000 0.694 24 16.117 ORDER
8 [SI][W25][PVD][CU][4500NM] Si 25 24 280 4500 0.781 24 16.569 ORDER
9 [SI][W25][PVD][CU][5000NM] Si 25 24 280 5000 0.868 24 17.021 ORDER
10 [SI][W25][PVD][CU][5500NM] Si 25 24 280 5500 0.955 24 17.473 ORDER
11 [SI][W25][PVD][CU][6000NM] Si 25 24 280 6000 1.042 24 17.925 ORDER
12 [SI][W25][PVD][CU][6500NM] Si 25 24 280 6500 1.128 24 18.377 ORDER
13 [SI][W25][PVD][CU][7000NM] Si 25 24 280 7000 1.215 24 18.830 ORDER
14 [SI][W25][PVD][CU][7500NM] Si 25 24 280 7500 1.302 24 19.282 ORDER
15 [SI][W25][PVD][CU][8000NM] Si 25 24 280 8000 1.389 24 19.734 ORDER
16 [SI][W25][PVD][CU][8500NM] Si 25 24 280 8500 1.476 24 20.186 ORDER
17 [SI][W25][PVD][CU][9000NM] Si 25 24 280 9000 1.563 24 20.638 ORDER
18 [SI][W25][PVD][CU][9500NM] Si 25 24 280 9500 1.649 24 21.090 ORDER
19 [SI][W25][PVD][CU][10000NM] Si 25 24 280 10000 1.736 24 21.542 ORDER
20 [SI][W50][PVD][CU][1000NM] Si 50 12 280 1000 0.174 12 26.808 ORDER
21 [SI][W50][PVD][CU][1500NM] Si 50 12 280 1500 0.260 12 27.713 ORDER
22 [SI][W50][PVD][CU][2000NM] Si 50 12 280 2000 0.347 12 28.617 ORDER
23 [SI][W50][PVD][CU][2500NM] Si 50 12 280 2500 0.434 12 29.521 ORDER
24 [SI][W50][PVD][CU][3000NM] Si 50 12 280 3000 0.521 12 30.425 ORDER
25 [SI][W50][PVD][CU][3500NM] Si 50 12 280 3500 0.608 12 31.330 ORDER
26 [SI][W50][PVD][CU][4000NM] Si 50 12 280 4000 0.694 12 32.234 ORDER
27 [SI][W50][PVD][CU][4500NM] Si 50 12 280 4500 0.781 12 33.138 ORDER
28 [SI][W50][PVD][CU][5000NM] Si 50 12 280 5000 0.868 12 34.042 ORDER
29 [SI][W50][PVD][CU][5500NM] Si 50 12 280 5500 0.955 12 34.946 ORDER
30 [SI][W50][PVD][CU][6000NM] Si 50 12 280 6000 1.042 12 35.851 ORDER
31 [SI][W50][PVD][CU][6500NM] Si 50 12 280 6500 1.128 12 36.755 ORDER
32 [SI][W50][PVD][CU][7000NM] Si 50 12 280 7000 1.215 12 37.659 ORDER
33 [SI][W50][PVD][CU][7500NM] Si 50 12 280 7500 1.302 12 38.563 ORDER
34 [SI][W50][PVD][CU][8000NM] Si 50 12 280 8000 1.389 12 39.468 ORDER
35 [SI][W50][PVD][CU][8500NM] Si 50 12 280 8500 1.476 12 40.372 ORDER
36 [SI][W50][PVD][CU][9000NM] Si 50 12 280 9000 1.563 12 41.276 ORDER
37 [SI][W50][PVD][CU][9500NM] Si 50 12 280 9500 1.649 12 42.180 ORDER
38 [SI][W50][PVD][CU][10000NM] Si 50 12 280 10000 1.736 12 43.084 ORDER
39 [SI][W75][PVD][CU][1000NM] Si 75 10 280 1000 0.174 10 32.170 ORDER
40 [SI][W75][PVD][CU][1500NM] Si 75 10 280 1500 0.260 10 33.255 ORDER
41 [SI][W75][PVD][CU][2000NM] Si 75 10 280 2000 0.347 10 34.340 ORDER
42 [SI][W75][PVD][CU][2500NM] Si 75 10 280 2500 0.434 10 35.425 ORDER
43 [SI][W75][PVD][CU][3000NM] Si 75 10 280 3000 0.521 10 36.510 ORDER
44 [SI][W75][PVD][CU][3500NM] Si 75 10 280 3500 0.608 10 37.595 ORDER
45 [SI][W75][PVD][CU][4000NM] Si 75 10 280 4000 0.694 10 38.681 ORDER
46 [SI][W75][PVD][CU][4500NM] Si 75 10 280 4500 0.781 10 39.766 ORDER
47 [SI][W75][PVD][CU][5000NM] Si 75 10 280 5000 0.868 10 40.851 ORDER
48 [SI][W75][PVD][CU][5500NM] Si 75 10 280 5500 0.955 10 41.936 ORDER
49 [SI][W75][PVD][CU][6000NM] Si 75 10 280 6000 1.042 10 43.021 ORDER
50 [SI][W75][PVD][CU][6500NM] Si 75 10 280 6500 1.128 10 44.106 ORDER
51 [SI][W75][PVD][CU][7000NM] Si 75 10 280 7000 1.215 10 45.191 ORDER
52 [SI][W75][PVD][CU][7500NM] Si 75 10 280 7500 1.302 10 46.276 ORDER
53 [SI][W75][PVD][CU][8000NM] Si 75 10 280 8000 1.389 10 47.361 ORDER
54 [SI][W75][PVD][CU][8500NM] Si 75 10 280 8500 1.476 10 48.446 ORDER
55 [SI][W75][PVD][CU][9000NM] Si 75 10 280 9000 1.563 10 49.531 ORDER
56 [SI][W75][PVD][CU][9500NM] Si 75 10 280 9500 1.649 10 50.616 ORDER
57 [SI][W75][PVD][CU][10000NM] Si 75 10 280 10000 1.736 10 51.701 ORDER
58 [SI][W100][PVD][CU][1000NM] Si 100 8 280 1000 0.174 8 40.213 ORDER
59 [SI][W100][PVD][CU][1500NM] Si 100 8 280 1500 0.260 8 41.569 ORDER
60 [SI][W100][PVD][CU][2000NM] Si 100 8 280 2000 0.347 8 42.925 ORDER
61 [SI][W100][PVD][CU][2500NM] Si 100 8 280 2500 0.434 8 44.282 ORDER
62 [SI][W100][PVD][CU][3000NM] Si 100 8 280 3000 0.521 8 45.638 ORDER
63 [SI][W100][PVD][CU][3500NM] Si 100 8 280 3500 0.608 8 46.994 ORDER
64 [SI][W100][PVD][CU][4000NM] Si 100 8 280 4000 0.694 8 48.351 ORDER
65 [SI][W100][PVD][CU][4500NM] Si 100 8 280 4500 0.781 8 49.707 ORDER
66 [SI][W100][PVD][CU][5000NM] Si 100 8 280 5000 0.868 8 51.063 ORDER
67 [SI][W100][PVD][CU][5500NM] Si 100 8 280 5500 0.955 8 52.420 ORDER
68 [SI][W100][PVD][CU][6000NM] Si 100 8 280 6000 1.042 8 53.776 ORDER
69 [SI][W100][PVD][CU][6500NM] Si 100 8 280 6500 1.128 8 55.132 ORDER
70 [SI][W100][PVD][CU][7000NM] Si 100 8 280 7000 1.215 8 56.489 ORDER
71 [SI][W100][PVD][CU][7500NM] Si 100 8 280 7500 1.302 8 57.845 ORDER
72 [SI][W100][PVD][CU][8000NM] Si 100 8 280 8000 1.389 8 59.201 ORDER
73 [SI][W100][PVD][CU][8500NM] Si 100 8 280 8500 1.476 8 60.558 ORDER
74 [SI][W100][PVD][CU][9000NM] Si 100 8 280 9000 1.563 8 61.914 ORDER
75 [SI][W100][PVD][CU][9500NM] Si 100 8 280 9500 1.649 8 63.270 ORDER
76 [SI][W100][PVD][CU][10000NM] Si 100 8 280 10000 1.736 8 64.627 ORDER
77 [SI][W125][PVD][CU][1000NM] Si 125 7 280 1000 0.174 7 45.957 ORDER
78 [SI][W125][PVD][CU][1500NM] Si 125 7 280 1500 0.260 7 47.507 ORDER
79 [SI][W125][PVD][CU][2000NM] Si 125 7 280 2000 0.347 7 49.058 ORDER
80 [SI][W125][PVD][CU][2500NM] Si 125 7 280 2500 0.434 7 50.608 ORDER
81 [SI][W125][PVD][CU][3000NM] Si 125 7 280 3000 0.521 7 52.158 ORDER
82 [SI][W125][PVD][CU][3500NM] Si 125 7 280 3500 0.608 7 53.708 ORDER
83 [SI][W125][PVD][CU][4000NM] Si 125 7 280 4000 0.694 7 55.258 ORDER
84 [SI][W125][PVD][CU][4500NM] Si 125 7 280 4500 0.781 7 56.808 ORDER
85 [SI][W125][PVD][CU][5000NM] Si 125 7 280 5000 0.868 7 58.358 ORDER
86 [SI][W125][PVD][CU][5500NM] Si 125 7 280 5500 0.955 7 59.908 ORDER
87 [SI][W125][PVD][CU][6000NM] Si 125 7 280 6000 1.042 7 61.458 ORDER
88 [SI][W125][PVD][CU][6500NM] Si 125 7 280 6500 1.128 7 63.008 ORDER
89 [SI][W125][PVD][CU][7000NM] Si 125 7 280 7000 1.215 7 64.559 ORDER
90 [SI][W125][PVD][CU][7500NM] Si 125 7 280 7500 1.302 7 66.109 ORDER
91 [SI][W125][PVD][CU][8000NM] Si 125 7 280 8000 1.389 7 67.659 ORDER
92 [SI][W125][PVD][CU][8500NM] Si 125 7 280 8500 1.476 7 69.209 ORDER
93 [SI][W125][PVD][CU][9000NM] Si 125 7 280 9000 1.563 7 70.759 ORDER
94 [SI][W125][PVD][CU][9500NM] Si 125 7 280 9500 1.649 7 72.309 ORDER
95 [SI][W125][PVD][CU][10000NM] Si 125 7 280 10000 1.736 7 73.859 ORDER
96 [SI][W150][PVD][CU][1000NM] Si 150 6 280 1000 0.174 6 53.617 ORDER
97 [SI][W150][PVD][CU][1500NM] Si 150 6 280 1500 0.260 6 55.425 ORDER
98 [SI][W150][PVD][CU][2000NM] Si 150 6 280 2000 0.347 6 57.234 ORDER
99 [SI][W150][PVD][CU][2500NM] Si 150 6 280 2500 0.434 6 59.042 ORDER
100 [SI][W150][PVD][CU][3000NM] Si 150 6 280 3000 0.521 6 60.851 ORDER
101 [SI][W150][PVD][CU][3500NM] Si 150 6 280 3500 0.608 6 62.659 ORDER
102 [SI][W150][PVD][CU][4000NM] Si 150 6 280 4000 0.694 6 64.468 ORDER
103 [SI][W150][PVD][CU][4500NM] Si 150 6 280 4500 0.781 6 66.276 ORDER
104 [SI][W150][PVD][CU][5000NM] Si 150 6 280 5000 0.868 6 68.084 ORDER
105 [SI][W150][PVD][CU][5500NM] Si 150 6 280 5500 0.955 6 69.893 ORDER
106 [SI][W150][PVD][CU][6000NM] Si 150 6 280 6000 1.042 6 71.701 ORDER
107 [SI][W150][PVD][CU][6500NM] Si 150 6 280 6500 1.128 6 73.510 ORDER
108 [SI][W150][PVD][CU][7000NM] Si 150 6 280 7000 1.215 6 75.318 ORDER
109 [SI][W150][PVD][CU][7500NM] Si 150 6 280 7500 1.302 6 77.127 ORDER
110 [SI][W150][PVD][CU][8000NM] Si 150 6 280 8000 1.389 6 78.935 ORDER
111 [SI][W150][PVD][CU][8500NM] Si 150 6 280 8500 1.476 6 80.744 ORDER
112 [SI][W150][PVD][CU][9000NM] Si 150 6 280 9000 1.563 6 82.552 ORDER
113 [SI][W150][PVD][CU][9500NM] Si 150 6 280 9500 1.649 6 84.361 ORDER
114 [SI][W150][PVD][CU][10000NM] Si 150 6 280 10000 1.736 6 86.169 ORDER
115 [SI][W200][PVD][CU][1000NM] Si 200 3 280 1000 0.174 3 107.234 ORDER
116 [SI][W200][PVD][CU][1500NM] Si 200 3 280 1500 0.260 3 110.851 ORDER
117 [SI][W200][PVD][CU][2000NM] Si 200 3 280 2000 0.347 3 114.468 ORDER
118 [SI][W200][PVD][CU][2500NM] Si 200 3 280 2500 0.434 3 118.084 ORDER
119 [SI][W200][PVD][CU][3000NM] Si 200 3 280 3000 0.521 3 121.701 ORDER
120 [SI][W200][PVD][CU][3500NM] Si 200 3 280 3500 0.608 3 125.318 ORDER
121 [SI][W200][PVD][CU][4000NM] Si 200 3 280 4000 0.694 3 128.935 ORDER
122 [SI][W200][PVD][CU][4500NM] Si 200 3 280 4500 0.781 3 132.552 ORDER
123 [SI][W200][PVD][CU][5000NM] Si 200 3 280 5000 0.868 3 136.169 ORDER
124 [SI][W200][PVD][CU][5500NM] Si 200 3 280 5500 0.955 3 139.786 ORDER
125 [SI][W200][PVD][CU][6000NM] Si 200 3 280 6000 1.042 3 143.403 ORDER
126 [SI][W200][PVD][CU][6500NM] Si 200 3 280 6500 1.128 3 147.020 ORDER
127 [SI][W200][PVD][CU][7000NM] Si 200 3 280 7000 1.215 3 150.637 ORDER
128 [SI][W200][PVD][CU][7500NM] Si 200 3 280 7500 1.302 3 154.253 ORDER
129 [SI][W200][PVD][CU][8000NM] Si 200 3 280 8000 1.389 3 157.870 ORDER
130 [SI][W200][PVD][CU][8500NM] Si 200 3 280 8500 1.476 3 161.487 ORDER
131 [SI][W200][PVD][CU][9000NM] Si 200 3 280 9000 1.563 3 165.104 ORDER
132 [SI][W200][PVD][CU][9500NM] Si 200 3 280 9500 1.649 3 168.721 ORDER
133 [SI][W200][PVD][CU][10000NM] Si 200 3 280 10000 1.736 3 172.338 ORDER
134 [SI][W300][PVD][CU][1000NM] Si 300 280 1000 0.174 RFQ
135 [SI][W300][PVD][CU][1500NM] Si 300 280 1500 0.260 RFQ
136 [SI][W300][PVD][CU][2000NM] Si 300 280 2000 0.347 RFQ
137 [SI][W300][PVD][CU][2500NM] Si 300 280 2500 0.434 RFQ
138 [SI][W300][PVD][CU][3000NM] Si 300 280 3000 0.521 RFQ
139 [SI][W300][PVD][CU][3500NM] Si 300 280 3500 0.608 RFQ
140 [SI][W300][PVD][CU][4000NM] Si 300 280 4000 0.694 RFQ
141 [SI][W300][PVD][CU][4500NM] Si 300 280 4500 0.781 RFQ
142 [SI][W300][PVD][CU][5000NM] Si 300 280 5000 0.868 RFQ
143 [SI][W300][PVD][CU][5500NM] Si 300 280 5500 0.955 RFQ
144 [SI][W300][PVD][CU][6000NM] Si 300 280 6000 1.042 RFQ
145 [SI][W300][PVD][CU][6500NM] Si 300 280 6500 1.128 RFQ
146 [SI][W300][PVD][CU][7000NM] Si 300 280 7000 1.215 RFQ
147 [SI][W300][PVD][CU][7500NM] Si 300 280 7500 1.302 RFQ
148 [SI][W300][PVD][CU][8000NM] Si 300 280 8000 1.389 RFQ
149 [SI][W300][PVD][CU][8500NM] Si 300 280 8500 1.476 RFQ
150 [SI][W300][PVD][CU][9000NM] Si 300 280 9000 1.563 RFQ
151 [SI][W300][PVD][CU][9500NM] Si 300 280 9500 1.649 RFQ
152 [SI][W300][PVD][CU][10000NM] Si 300 280 10000 1.736 RFQ
153 [SI][Wnnn][PVD][CU][1000NM] Si nnn 280 1000 0.174 RFQ
154 [SI][Wnnn][PVD][CU][1500NM] Si nnn 280 1500 0.260 RFQ
155 [SI][Wnnn][PVD][CU][2000NM] Si nnn 280 2000 0.347 RFQ
156 [SI][Wnnn][PVD][CU][2500NM] Si nnn 280 2500 0.434 RFQ
157 [SI][Wnnn][PVD][CU][3000NM] Si nnn 280 3000 0.521 RFQ
158 [SI][Wnnn][PVD][CU][3500NM] Si nnn 280 3500 0.608 RFQ
159 [SI][Wnnn][PVD][CU][4000NM] Si nnn 280 4000 0.694 RFQ
160 [SI][Wnnn][PVD][CU][4500NM] Si nnn 280 4500 0.781 RFQ
161 [SI][Wnnn][PVD][CU][5000NM] Si nnn 280 5000 0.868 RFQ
162 [SI][Wnnn][PVD][CU][5500NM] Si nnn 280 5500 0.955 RFQ
163 [SI][Wnnn][PVD][CU][6000NM] Si nnn 280 6000 1.042 RFQ
164 [SI][Wnnn][PVD][CU][6500NM] Si nnn 280 6500 1.128 RFQ
165 [SI][Wnnn][PVD][CU][7000NM] Si nnn 280 7000 1.215 RFQ
166 [SI][Wnnn][PVD][CU][7500NM] Si nnn 280 7500 1.302 RFQ
167 [SI][Wnnn][PVD][CU][8000NM] Si nnn 280 8000 1.389 RFQ
168 [SI][Wnnn][PVD][CU][8500NM] Si nnn 280 8500 1.476 RFQ
169 [SI][Wnnn][PVD][CU][9000NM] Si nnn 280 9000 1.563 RFQ
170 [SI][Wnnn][PVD][CU][9500NM] Si nnn 280 9500 1.649 RFQ
171 [SI][Wnnn][PVD][CU][10000NM] Si nnn 280 10000 1.736 RFQ
172 [SIC][W25][PVD][CU][1000NM] SiC 25 24 280 1000 0.174 24 13.404 ORDER
173 [SIC][W25][PVD][CU][1500NM] SiC 25 24 280 1500 0.260 24 13.856 ORDER
174 [SIC][W25][PVD][CU][2000NM] SiC 25 24 280 2000 0.347 24 14.308 ORDER
175 [SIC][W25][PVD][CU][2500NM] SiC 25 24 280 2500 0.434 24 14.761 ORDER
176 [SIC][W25][PVD][CU][3000NM] SiC 25 24 280 3000 0.521 24 15.213 ORDER
177 [SIC][W25][PVD][CU][3500NM] SiC 25 24 280 3500 0.608 24 15.665 ORDER
178 [SIC][W25][PVD][CU][4000NM] SiC 25 24 280 4000 0.694 24 16.117 ORDER
179 [SIC][W25][PVD][CU][4500NM] SiC 25 24 280 4500 0.781 24 16.569 ORDER
180 [SIC][W25][PVD][CU][5000NM] SiC 25 24 280 5000 0.868 24 17.021 ORDER
181 [SIC][W25][PVD][CU][5500NM] SiC 25 24 280 5500 0.955 24 17.473 ORDER
182 [SIC][W25][PVD][CU][6000NM] SiC 25 24 280 6000 1.042 24 17.925 ORDER
183 [SIC][W25][PVD][CU][6500NM] SiC 25 24 280 6500 1.128 24 18.377 ORDER
184 [SIC][W25][PVD][CU][7000NM] SiC 25 24 280 7000 1.215 24 18.830 ORDER
185 [SIC][W25][PVD][CU][7500NM] SiC 25 24 280 7500 1.302 24 19.282 ORDER
186 [SIC][W25][PVD][CU][8000NM] SiC 25 24 280 8000 1.389 24 19.734 ORDER
187 [SIC][W25][PVD][CU][8500NM] SiC 25 24 280 8500 1.476 24 20.186 ORDER
188 [SIC][W25][PVD][CU][9000NM] SiC 25 24 280 9000 1.563 24 20.638 ORDER
189 [SIC][W25][PVD][CU][9500NM] SiC 25 24 280 9500 1.649 24 21.090 ORDER
190 [SIC][W25][PVD][CU][10000NM] SiC 25 24 280 10000 1.736 24 21.542 ORDER
191 [SIC][W50][PVD][CU][1000NM] SiC 50 12 280 1000 0.174 12 26.808 ORDER
192 [SIC][W50][PVD][CU][1500NM] SiC 50 12 280 1500 0.260 12 27.713 ORDER
193 [SIC][W50][PVD][CU][2000NM] SiC 50 12 280 2000 0.347 12 28.617 ORDER
194 [SIC][W50][PVD][CU][2500NM] SiC 50 12 280 2500 0.434 12 29.521 ORDER
195 [SIC][W50][PVD][CU][3000NM] SiC 50 12 280 3000 0.521 12 30.425 ORDER
196 [SIC][W50][PVD][CU][3500NM] SiC 50 12 280 3500 0.608 12 31.330 ORDER
197 [SIC][W50][PVD][CU][4000NM] SiC 50 12 280 4000 0.694 12 32.234 ORDER
198 [SIC][W50][PVD][CU][4500NM] SiC 50 12 280 4500 0.781 12 33.138 ORDER
199 [SIC][W50][PVD][CU][5000NM] SiC 50 12 280 5000 0.868 12 34.042 ORDER
200 [SIC][W50][PVD][CU][5500NM] SiC 50 12 280 5500 0.955 12 34.946 ORDER
201 [SIC][W50][PVD][CU][6000NM] SiC 50 12 280 6000 1.042 12 35.851 ORDER
202 [SIC][W50][PVD][CU][6500NM] SiC 50 12 280 6500 1.128 12 36.755 ORDER
203 [SIC][W50][PVD][CU][7000NM] SiC 50 12 280 7000 1.215 12 37.659 ORDER
204 [SIC][W50][PVD][CU][7500NM] SiC 50 12 280 7500 1.302 12 38.563 ORDER
205 [SIC][W50][PVD][CU][8000NM] SiC 50 12 280 8000 1.389 12 39.468 ORDER
206 [SIC][W50][PVD][CU][8500NM] SiC 50 12 280 8500 1.476 12 40.372 ORDER
207 [SIC][W50][PVD][CU][9000NM] SiC 50 12 280 9000 1.563 12 41.276 ORDER
208 [SIC][W50][PVD][CU][9500NM] SiC 50 12 280 9500 1.649 12 42.180 ORDER
209 [SIC][W50][PVD][CU][10000NM] SiC 50 12 280 10000 1.736 12 43.084 ORDER
210 [SIC][W75][PVD][CU][1000NM] SiC 75 10 280 1000 0.174 10 32.170 ORDER
211 [SIC][W75][PVD][CU][1500NM] SiC 75 10 280 1500 0.260 10 33.255 ORDER
212 [SIC][W75][PVD][CU][2000NM] SiC 75 10 280 2000 0.347 10 34.340 ORDER
213 [SIC][W75][PVD][CU][2500NM] SiC 75 10 280 2500 0.434 10 35.425 ORDER
214 [SIC][W75][PVD][CU][3000NM] SiC 75 10 280 3000 0.521 10 36.510 ORDER
215 [SIC][W75][PVD][CU][3500NM] SiC 75 10 280 3500 0.608 10 37.595 ORDER
216 [SIC][W75][PVD][CU][4000NM] SiC 75 10 280 4000 0.694 10 38.681 ORDER
217 [SIC][W75][PVD][CU][4500NM] SiC 75 10 280 4500 0.781 10 39.766 ORDER
218 [SIC][W75][PVD][CU][5000NM] SiC 75 10 280 5000 0.868 10 40.851 ORDER
219 [SIC][W75][PVD][CU][5500NM] SiC 75 10 280 5500 0.955 10 41.936 ORDER
220 [SIC][W75][PVD][CU][6000NM] SiC 75 10 280 6000 1.042 10 43.021 ORDER
221 [SIC][W75][PVD][CU][6500NM] SiC 75 10 280 6500 1.128 10 44.106 ORDER
222 [SIC][W75][PVD][CU][7000NM] SiC 75 10 280 7000 1.215 10 45.191 ORDER
223 [SIC][W75][PVD][CU][7500NM] SiC 75 10 280 7500 1.302 10 46.276 ORDER
224 [SIC][W75][PVD][CU][8000NM] SiC 75 10 280 8000 1.389 10 47.361 ORDER
225 [SIC][W75][PVD][CU][8500NM] SiC 75 10 280 8500 1.476 10 48.446 ORDER
226 [SIC][W75][PVD][CU][9000NM] SiC 75 10 280 9000 1.563 10 49.531 ORDER
227 [SIC][W75][PVD][CU][9500NM] SiC 75 10 280 9500 1.649 10 50.616 ORDER
228 [SIC][W75][PVD][CU][10000NM] SiC 75 10 280 10000 1.736 10 51.701 ORDER
229 [SIC][W100][PVD][CU][1000NM] SiC 100 8 280 1000 0.174 8 40.213 ORDER
230 [SIC][W100][PVD][CU][1500NM] SiC 100 8 280 1500 0.260 8 41.569 ORDER
231 [SIC][W100][PVD][CU][2000NM] SiC 100 8 280 2000 0.347 8 42.925 ORDER
232 [SIC][W100][PVD][CU][2500NM] SiC 100 8 280 2500 0.434 8 44.282 ORDER
233 [SIC][W100][PVD][CU][3000NM] SiC 100 8 280 3000 0.521 8 45.638 ORDER
234 [SIC][W100][PVD][CU][3500NM] SiC 100 8 280 3500 0.608 8 46.994 ORDER
235 [SIC][W100][PVD][CU][4000NM] SiC 100 8 280 4000 0.694 8 48.351 ORDER
236 [SIC][W100][PVD][CU][4500NM] SiC 100 8 280 4500 0.781 8 49.707 ORDER
237 [SIC][W100][PVD][CU][5000NM] SiC 100 8 280 5000 0.868 8 51.063 ORDER
238 [SIC][W100][PVD][CU][5500NM] SiC 100 8 280 5500 0.955 8 52.420 ORDER
239 [SIC][W100][PVD][CU][6000NM] SiC 100 8 280 6000 1.042 8 53.776 ORDER
240 [SIC][W100][PVD][CU][6500NM] SiC 100 8 280 6500 1.128 8 55.132 ORDER
241 [SIC][W100][PVD][CU][7000NM] SiC 100 8 280 7000 1.215 8 56.489 ORDER
242 [SIC][W100][PVD][CU][7500NM] SiC 100 8 280 7500 1.302 8 57.845 ORDER
243 [SIC][W100][PVD][CU][8000NM] SiC 100 8 280 8000 1.389 8 59.201 ORDER
244 [SIC][W100][PVD][CU][8500NM] SiC 100 8 280 8500 1.476 8 60.558 ORDER
245 [SIC][W100][PVD][CU][9000NM] SiC 100 8 280 9000 1.563 8 61.914 ORDER
246 [SIC][W100][PVD][CU][9500NM] SiC 100 8 280 9500 1.649 8 63.270 ORDER
247 [SIC][W100][PVD][CU][10000NM] SiC 100 8 280 10000 1.736 8 64.627 ORDER
248 [SIC][W125][PVD][CU][1000NM] SiC 125 7 280 1000 0.174 7 45.957 ORDER
249 [SIC][W125][PVD][CU][1500NM] SiC 125 7 280 1500 0.260 7 47.507 ORDER
250 [SIC][W125][PVD][CU][2000NM] SiC 125 7 280 2000 0.347 7 49.058 ORDER
251 [SIC][W125][PVD][CU][2500NM] SiC 125 7 280 2500 0.434 7 50.608 ORDER
252 [SIC][W125][PVD][CU][3000NM] SiC 125 7 280 3000 0.521 7 52.158 ORDER
253 [SIC][W125][PVD][CU][3500NM] SiC 125 7 280 3500 0.608 7 53.708 ORDER
254 [SIC][W125][PVD][CU][4000NM] SiC 125 7 280 4000 0.694 7 55.258 ORDER
255 [SIC][W125][PVD][CU][4500NM] SiC 125 7 280 4500 0.781 7 56.808 ORDER
256 [SIC][W125][PVD][CU][5000NM] SiC 125 7 280 5000 0.868 7 58.358 ORDER
257 [SIC][W125][PVD][CU][5500NM] SiC 125 7 280 5500 0.955 7 59.908 ORDER
258 [SIC][W125][PVD][CU][6000NM] SiC 125 7 280 6000 1.042 7 61.458 ORDER
259 [SIC][W125][PVD][CU][6500NM] SiC 125 7 280 6500 1.128 7 63.008 ORDER
260 [SIC][W125][PVD][CU][7000NM] SiC 125 7 280 7000 1.215 7 64.559 ORDER
261 [SIC][W125][PVD][CU][7500NM] SiC 125 7 280 7500 1.302 7 66.109 ORDER
262 [SIC][W125][PVD][CU][8000NM] SiC 125 7 280 8000 1.389 7 67.659 ORDER
263 [SIC][W125][PVD][CU][8500NM] SiC 125 7 280 8500 1.476 7 69.209 ORDER
264 [SIC][W125][PVD][CU][9000NM] SiC 125 7 280 9000 1.563 7 70.759 ORDER
265 [SIC][W125][PVD][CU][9500NM] SiC 125 7 280 9500 1.649 7 72.309 ORDER
266 [SIC][W125][PVD][CU][10000NM] SiC 125 7 280 10000 1.736 7 73.859 ORDER
267 [SIC][W150][PVD][CU][1000NM] SiC 150 6 280 1000 0.174 6 53.617 ORDER
268 [SIC][W150][PVD][CU][1500NM] SiC 150 6 280 1500 0.260 6 55.425 ORDER
269 [SIC][W150][PVD][CU][2000NM] SiC 150 6 280 2000 0.347 6 57.234 ORDER
270 [SIC][W150][PVD][CU][2500NM] SiC 150 6 280 2500 0.434 6 59.042 ORDER
271 [SIC][W150][PVD][CU][3000NM] SiC 150 6 280 3000 0.521 6 60.851 ORDER
272 [SIC][W150][PVD][CU][3500NM] SiC 150 6 280 3500 0.608 6 62.659 ORDER
273 [SIC][W150][PVD][CU][4000NM] SiC 150 6 280 4000 0.694 6 64.468 ORDER
274 [SIC][W150][PVD][CU][4500NM] SiC 150 6 280 4500 0.781 6 66.276 ORDER
275 [SIC][W150][PVD][CU][5000NM] SiC 150 6 280 5000 0.868 6 68.084 ORDER
276 [SIC][W150][PVD][CU][5500NM] SiC 150 6 280 5500 0.955 6 69.893 ORDER
277 [SIC][W150][PVD][CU][6000NM] SiC 150 6 280 6000 1.042 6 71.701 ORDER
278 [SIC][W150][PVD][CU][6500NM] SiC 150 6 280 6500 1.128 6 73.510 ORDER
279 [SIC][W150][PVD][CU][7000NM] SiC 150 6 280 7000 1.215 6 75.318 ORDER
280 [SIC][W150][PVD][CU][7500NM] SiC 150 6 280 7500 1.302 6 77.127 ORDER
281 [SIC][W150][PVD][CU][8000NM] SiC 150 6 280 8000 1.389 6 78.935 ORDER
282 [SIC][W150][PVD][CU][8500NM] SiC 150 6 280 8500 1.476 6 80.744 ORDER
283 [SIC][W150][PVD][CU][9000NM] SiC 150 6 280 9000 1.563 6 82.552 ORDER
284 [SIC][W150][PVD][CU][9500NM] SiC 150 6 280 9500 1.649 6 84.361 ORDER
285 [SIC][W150][PVD][CU][10000NM] SiC 150 6 280 10000 1.736 6 86.169 ORDER
286 [SIC][W200][PVD][CU][1000NM] SiC 200 3 280 1000 0.174 3 107.234 ORDER
287 [SIC][W200][PVD][CU][1500NM] SiC 200 3 280 1500 0.260 3 110.851 ORDER
288 [SIC][W200][PVD][CU][2000NM] SiC 200 3 280 2000 0.347 3 114.468 ORDER
289 [SIC][W200][PVD][CU][2500NM] SiC 200 3 280 2500 0.434 3 118.084 ORDER
290 [SIC][W200][PVD][CU][3000NM] SiC 200 3 280 3000 0.521 3 121.701 ORDER
291 [SIC][W200][PVD][CU][3500NM] SiC 200 3 280 3500 0.608 3 125.318 ORDER
292 [SIC][W200][PVD][CU][4000NM] SiC 200 3 280 4000 0.694 3 128.935 ORDER
293 [SIC][W200][PVD][CU][4500NM] SiC 200 3 280 4500 0.781 3 132.552 ORDER
294 [SIC][W200][PVD][CU][5000NM] SiC 200 3 280 5000 0.868 3 136.169 ORDER
295 [SIC][W200][PVD][CU][5500NM] SiC 200 3 280 5500 0.955 3 139.786 ORDER
296 [SIC][W200][PVD][CU][6000NM] SiC 200 3 280 6000 1.042 3 143.403 ORDER
297 [SIC][W200][PVD][CU][6500NM] SiC 200 3 280 6500 1.128 3 147.020 ORDER
298 [SIC][W200][PVD][CU][7000NM] SiC 200 3 280 7000 1.215 3 150.637 ORDER
299 [SIC][W200][PVD][CU][7500NM] SiC 200 3 280 7500 1.302 3 154.253 ORDER
300 [SIC][W200][PVD][CU][8000NM] SiC 200 3 280 8000 1.389 3 157.870 ORDER
301 [SIC][W200][PVD][CU][8500NM] SiC 200 3 280 8500 1.476 3 161.487 ORDER
302 [SIC][W200][PVD][CU][9000NM] SiC 200 3 280 9000 1.563 3 165.104 ORDER
303 [SIC][W200][PVD][CU][9500NM] SiC 200 3 280 9500 1.649 3 168.721 ORDER
304 [SIC][W200][PVD][CU][10000NM] SiC 200 3 280 10000 1.736 3 172.338 ORDER
305 [SIC][W300][PVD][CU][1000NM] SiC 300 280 1000 0.174 RFQ
306 [SIC][W300][PVD][CU][1500NM] SiC 300 280 1500 0.260 RFQ
307 [SIC][W300][PVD][CU][2000NM] SiC 300 280 2000 0.347 RFQ
308 [SIC][W300][PVD][CU][2500NM] SiC 300 280 2500 0.434 RFQ
309 [SIC][W300][PVD][CU][3000NM] SiC 300 280 3000 0.521 RFQ
310 [SIC][W300][PVD][CU][3500NM] SiC 300 280 3500 0.608 RFQ
311 [SIC][W300][PVD][CU][4000NM] SiC 300 280 4000 0.694 RFQ
312 [SIC][W300][PVD][CU][4500NM] SiC 300 280 4500 0.781 RFQ
313 [SIC][W300][PVD][CU][5000NM] SiC 300 280 5000 0.868 RFQ
314 [SIC][W300][PVD][CU][5500NM] SiC 300 280 5500 0.955 RFQ
315 [SIC][W300][PVD][CU][6000NM] SiC 300 280 6000 1.042 RFQ
316 [SIC][W300][PVD][CU][6500NM] SiC 300 280 6500 1.128 RFQ
317 [SIC][W300][PVD][CU][7000NM] SiC 300 280 7000 1.215 RFQ
318 [SIC][W300][PVD][CU][7500NM] SiC 300 280 7500 1.302 RFQ
319 [SIC][W300][PVD][CU][8000NM] SiC 300 280 8000 1.389 RFQ
320 [SIC][W300][PVD][CU][8500NM] SiC 300 280 8500 1.476 RFQ
321 [SIC][W300][PVD][CU][9000NM] SiC 300 280 9000 1.563 RFQ
322 [SIC][W300][PVD][CU][9500NM] SiC 300 280 9500 1.649 RFQ
323 [SIC][W300][PVD][CU][10000NM] SiC 300 280 10000 1.736 RFQ
324 [SIC][Wnnn][PVD][CU][1000NM] SiC nnn 280 1000 0.174 RFQ
325 [SIC][Wnnn][PVD][CU][1500NM] SiC nnn 280 1500 0.260 RFQ
326 [SIC][Wnnn][PVD][CU][2000NM] SiC nnn 280 2000 0.347 RFQ
327 [SIC][Wnnn][PVD][CU][2500NM] SiC nnn 280 2500 0.434 RFQ
328 [SIC][Wnnn][PVD][CU][3000NM] SiC nnn 280 3000 0.521 RFQ
329 [SIC][Wnnn][PVD][CU][3500NM] SiC nnn 280 3500 0.608 RFQ
330 [SIC][Wnnn][PVD][CU][4000NM] SiC nnn 280 4000 0.694 RFQ
331 [SIC][Wnnn][PVD][CU][4500NM] SiC nnn 280 4500 0.781 RFQ
332 [SIC][Wnnn][PVD][CU][5000NM] SiC nnn 280 5000 0.868 RFQ
333 [SIC][Wnnn][PVD][CU][5500NM] SiC nnn 280 5500 0.955 RFQ
334 [SIC][Wnnn][PVD][CU][6000NM] SiC nnn 280 6000 1.042 RFQ
335 [SIC][Wnnn][PVD][CU][6500NM] SiC nnn 280 6500 1.128 RFQ
336 [SIC][Wnnn][PVD][CU][7000NM] SiC nnn 280 7000 1.215 RFQ
337 [SIC][Wnnn][PVD][CU][7500NM] SiC nnn 280 7500 1.302 RFQ
338 [SIC][Wnnn][PVD][CU][8000NM] SiC nnn 280 8000 1.389 RFQ
339 [SIC][Wnnn][PVD][CU][8500NM] SiC nnn 280 8500 1.476 RFQ
340 [SIC][Wnnn][PVD][CU][9000NM] SiC nnn 280 9000 1.563 RFQ
341 [SIC][Wnnn][PVD][CU][9500NM] SiC nnn 280 9500 1.649 RFQ
342 [SIC][Wnnn][PVD][CU][10000NM] SiC nnn 280 10000 1.736 RFQ
343 [SOI][W25][PVD][CU][1000NM] SOI 25 24 280 1000 0.174 24 13.404 ORDER
344 [SOI][W25][PVD][CU][1500NM] SOI 25 24 280 1500 0.260 24 13.856 ORDER
345 [SOI][W25][PVD][CU][2000NM] SOI 25 24 280 2000 0.347 24 14.308 ORDER
346 [SOI][W25][PVD][CU][2500NM] SOI 25 24 280 2500 0.434 24 14.761 ORDER
347 [SOI][W25][PVD][CU][3000NM] SOI 25 24 280 3000 0.521 24 15.213 ORDER
348 [SOI][W25][PVD][CU][3500NM] SOI 25 24 280 3500 0.608 24 15.665 ORDER
349 [SOI][W25][PVD][CU][4000NM] SOI 25 24 280 4000 0.694 24 16.117 ORDER
350 [SOI][W25][PVD][CU][4500NM] SOI 25 24 280 4500 0.781 24 16.569 ORDER
351 [SOI][W25][PVD][CU][5000NM] SOI 25 24 280 5000 0.868 24 17.021 ORDER
352 [SOI][W25][PVD][CU][5500NM] SOI 25 24 280 5500 0.955 24 17.473 ORDER
353 [SOI][W25][PVD][CU][6000NM] SOI 25 24 280 6000 1.042 24 17.925 ORDER
354 [SOI][W25][PVD][CU][6500NM] SOI 25 24 280 6500 1.128 24 18.377 ORDER
355 [SOI][W25][PVD][CU][7000NM] SOI 25 24 280 7000 1.215 24 18.830 ORDER
356 [SOI][W25][PVD][CU][7500NM] SOI 25 24 280 7500 1.302 24 19.282 ORDER
357 [SOI][W25][PVD][CU][8000NM] SOI 25 24 280 8000 1.389 24 19.734 ORDER
358 [SOI][W25][PVD][CU][8500NM] SOI 25 24 280 8500 1.476 24 20.186 ORDER
359 [SOI][W25][PVD][CU][9000NM] SOI 25 24 280 9000 1.563 24 20.638 ORDER
360 [SOI][W25][PVD][CU][9500NM] SOI 25 24 280 9500 1.649 24 21.090 ORDER
361 [SOI][W25][PVD][CU][10000NM] SOI 25 24 280 10000 1.736 24 21.542 ORDER
362 [SOI][W50][PVD][CU][1000NM] SOI 50 12 280 1000 0.174 12 26.808 ORDER
363 [SOI][W50][PVD][CU][1500NM] SOI 50 12 280 1500 0.260 12 27.713 ORDER
364 [SOI][W50][PVD][CU][2000NM] SOI 50 12 280 2000 0.347 12 28.617 ORDER
365 [SOI][W50][PVD][CU][2500NM] SOI 50 12 280 2500 0.434 12 29.521 ORDER
366 [SOI][W50][PVD][CU][3000NM] SOI 50 12 280 3000 0.521 12 30.425 ORDER
367 [SOI][W50][PVD][CU][3500NM] SOI 50 12 280 3500 0.608 12 31.330 ORDER
368 [SOI][W50][PVD][CU][4000NM] SOI 50 12 280 4000 0.694 12 32.234 ORDER
369 [SOI][W50][PVD][CU][4500NM] SOI 50 12 280 4500 0.781 12 33.138 ORDER
370 [SOI][W50][PVD][CU][5000NM] SOI 50 12 280 5000 0.868 12 34.042 ORDER
371 [SOI][W50][PVD][CU][5500NM] SOI 50 12 280 5500 0.955 12 34.946 ORDER
372 [SOI][W50][PVD][CU][6000NM] SOI 50 12 280 6000 1.042 12 35.851 ORDER
373 [SOI][W50][PVD][CU][6500NM] SOI 50 12 280 6500 1.128 12 36.755 ORDER
374 [SOI][W50][PVD][CU][7000NM] SOI 50 12 280 7000 1.215 12 37.659 ORDER
375 [SOI][W50][PVD][CU][7500NM] SOI 50 12 280 7500 1.302 12 38.563 ORDER
376 [SOI][W50][PVD][CU][8000NM] SOI 50 12 280 8000 1.389 12 39.468 ORDER
377 [SOI][W50][PVD][CU][8500NM] SOI 50 12 280 8500 1.476 12 40.372 ORDER
378 [SOI][W50][PVD][CU][9000NM] SOI 50 12 280 9000 1.563 12 41.276 ORDER
379 [SOI][W50][PVD][CU][9500NM] SOI 50 12 280 9500 1.649 12 42.180 ORDER
380 [SOI][W50][PVD][CU][10000NM] SOI 50 12 280 10000 1.736 12 43.084 ORDER
381 [SOI][W75][PVD][CU][1000NM] SOI 75 10 280 1000 0.174 10 32.170 ORDER
382 [SOI][W75][PVD][CU][1500NM] SOI 75 10 280 1500 0.260 10 33.255 ORDER
383 [SOI][W75][PVD][CU][2000NM] SOI 75 10 280 2000 0.347 10 34.340 ORDER
384 [SOI][W75][PVD][CU][2500NM] SOI 75 10 280 2500 0.434 10 35.425 ORDER
385 [SOI][W75][PVD][CU][3000NM] SOI 75 10 280 3000 0.521 10 36.510 ORDER
386 [SOI][W75][PVD][CU][3500NM] SOI 75 10 280 3500 0.608 10 37.595 ORDER
387 [SOI][W75][PVD][CU][4000NM] SOI 75 10 280 4000 0.694 10 38.681 ORDER
388 [SOI][W75][PVD][CU][4500NM] SOI 75 10 280 4500 0.781 10 39.766 ORDER
389 [SOI][W75][PVD][CU][5000NM] SOI 75 10 280 5000 0.868 10 40.851 ORDER
390 [SOI][W75][PVD][CU][5500NM] SOI 75 10 280 5500 0.955 10 41.936 ORDER
391 [SOI][W75][PVD][CU][6000NM] SOI 75 10 280 6000 1.042 10 43.021 ORDER
392 [SOI][W75][PVD][CU][6500NM] SOI 75 10 280 6500 1.128 10 44.106 ORDER
393 [SOI][W75][PVD][CU][7000NM] SOI 75 10 280 7000 1.215 10 45.191 ORDER
394 [SOI][W75][PVD][CU][7500NM] SOI 75 10 280 7500 1.302 10 46.276 ORDER
395 [SOI][W75][PVD][CU][8000NM] SOI 75 10 280 8000 1.389 10 47.361 ORDER
396 [SOI][W75][PVD][CU][8500NM] SOI 75 10 280 8500 1.476 10 48.446 ORDER
397 [SOI][W75][PVD][CU][9000NM] SOI 75 10 280 9000 1.563 10 49.531 ORDER
398 [SOI][W75][PVD][CU][9500NM] SOI 75 10 280 9500 1.649 10 50.616 ORDER
399 [SOI][W75][PVD][CU][10000NM] SOI 75 10 280 10000 1.736 10 51.701 ORDER
400 [SOI][W100][PVD][CU][1000NM] SOI 100 8 280 1000 0.174 8 40.213 ORDER
401 [SOI][W100][PVD][CU][1500NM] SOI 100 8 280 1500 0.260 8 41.569 ORDER
402 [SOI][W100][PVD][CU][2000NM] SOI 100 8 280 2000 0.347 8 42.925 ORDER
403 [SOI][W100][PVD][CU][2500NM] SOI 100 8 280 2500 0.434 8 44.282 ORDER
404 [SOI][W100][PVD][CU][3000NM] SOI 100 8 280 3000 0.521 8 45.638 ORDER
405 [SOI][W100][PVD][CU][3500NM] SOI 100 8 280 3500 0.608 8 46.994 ORDER
406 [SOI][W100][PVD][CU][4000NM] SOI 100 8 280 4000 0.694 8 48.351 ORDER
407 [SOI][W100][PVD][CU][4500NM] SOI 100 8 280 4500 0.781 8 49.707 ORDER
408 [SOI][W100][PVD][CU][5000NM] SOI 100 8 280 5000 0.868 8 51.063 ORDER
409 [SOI][W100][PVD][CU][5500NM] SOI 100 8 280 5500 0.955 8 52.420 ORDER
410 [SOI][W100][PVD][CU][6000NM] SOI 100 8 280 6000 1.042 8 53.776 ORDER
411 [SOI][W100][PVD][CU][6500NM] SOI 100 8 280 6500 1.128 8 55.132 ORDER
412 [SOI][W100][PVD][CU][7000NM] SOI 100 8 280 7000 1.215 8 56.489 ORDER
413 [SOI][W100][PVD][CU][7500NM] SOI 100 8 280 7500 1.302 8 57.845 ORDER
414 [SOI][W100][PVD][CU][8000NM] SOI 100 8 280 8000 1.389 8 59.201 ORDER
415 [SOI][W100][PVD][CU][8500NM] SOI 100 8 280 8500 1.476 8 60.558 ORDER
416 [SOI][W100][PVD][CU][9000NM] SOI 100 8 280 9000 1.563 8 61.914 ORDER
417 [SOI][W100][PVD][CU][9500NM] SOI 100 8 280 9500 1.649 8 63.270 ORDER
418 [SOI][W100][PVD][CU][10000NM] SOI 100 8 280 10000 1.736 8 64.627 ORDER
419 [SOI][W125][PVD][CU][1000NM] SOI 125 7 280 1000 0.174 7 45.957 ORDER
420 [SOI][W125][PVD][CU][1500NM] SOI 125 7 280 1500 0.260 7 47.507 ORDER
421 [SOI][W125][PVD][CU][2000NM] SOI 125 7 280 2000 0.347 7 49.058 ORDER
422 [SOI][W125][PVD][CU][2500NM] SOI 125 7 280 2500 0.434 7 50.608 ORDER
423 [SOI][W125][PVD][CU][3000NM] SOI 125 7 280 3000 0.521 7 52.158 ORDER
424 [SOI][W125][PVD][CU][3500NM] SOI 125 7 280 3500 0.608 7 53.708 ORDER
425 [SOI][W125][PVD][CU][4000NM] SOI 125 7 280 4000 0.694 7 55.258 ORDER
426 [SOI][W125][PVD][CU][4500NM] SOI 125 7 280 4500 0.781 7 56.808 ORDER
427 [SOI][W125][PVD][CU][5000NM] SOI 125 7 280 5000 0.868 7 58.358 ORDER
428 [SOI][W125][PVD][CU][5500NM] SOI 125 7 280 5500 0.955 7 59.908 ORDER
429 [SOI][W125][PVD][CU][6000NM] SOI 125 7 280 6000 1.042 7 61.458 ORDER
430 [SOI][W125][PVD][CU][6500NM] SOI 125 7 280 6500 1.128 7 63.008 ORDER
431 [SOI][W125][PVD][CU][7000NM] SOI 125 7 280 7000 1.215 7 64.559 ORDER
432 [SOI][W125][PVD][CU][7500NM] SOI 125 7 280 7500 1.302 7 66.109 ORDER
433 [SOI][W125][PVD][CU][8000NM] SOI 125 7 280 8000 1.389 7 67.659 ORDER
434 [SOI][W125][PVD][CU][8500NM] SOI 125 7 280 8500 1.476 7 69.209 ORDER
435 [SOI][W125][PVD][CU][9000NM] SOI 125 7 280 9000 1.563 7 70.759 ORDER
436 [SOI][W125][PVD][CU][9500NM] SOI 125 7 280 9500 1.649 7 72.309 ORDER
437 [SOI][W125][PVD][CU][10000NM] SOI 125 7 280 10000 1.736 7 73.859 ORDER
438 [SOI][W150][PVD][CU][1000NM] SOI 150 6 280 1000 0.174 6 53.617 ORDER
439 [SOI][W150][PVD][CU][1500NM] SOI 150 6 280 1500 0.260 6 55.425 ORDER
440 [SOI][W150][PVD][CU][2000NM] SOI 150 6 280 2000 0.347 6 57.234 ORDER
441 [SOI][W150][PVD][CU][2500NM] SOI 150 6 280 2500 0.434 6 59.042 ORDER
442 [SOI][W150][PVD][CU][3000NM] SOI 150 6 280 3000 0.521 6 60.851 ORDER
443 [SOI][W150][PVD][CU][3500NM] SOI 150 6 280 3500 0.608 6 62.659 ORDER
444 [SOI][W150][PVD][CU][4000NM] SOI 150 6 280 4000 0.694 6 64.468 ORDER
445 [SOI][W150][PVD][CU][4500NM] SOI 150 6 280 4500 0.781 6 66.276 ORDER
446 [SOI][W150][PVD][CU][5000NM] SOI 150 6 280 5000 0.868 6 68.084 ORDER
447 [SOI][W150][PVD][CU][5500NM] SOI 150 6 280 5500 0.955 6 69.893 ORDER
448 [SOI][W150][PVD][CU][6000NM] SOI 150 6 280 6000 1.042 6 71.701 ORDER
449 [SOI][W150][PVD][CU][6500NM] SOI 150 6 280 6500 1.128 6 73.510 ORDER
450 [SOI][W150][PVD][CU][7000NM] SOI 150 6 280 7000 1.215 6 75.318 ORDER
451 [SOI][W150][PVD][CU][7500NM] SOI 150 6 280 7500 1.302 6 77.127 ORDER
452 [SOI][W150][PVD][CU][8000NM] SOI 150 6 280 8000 1.389 6 78.935 ORDER
453 [SOI][W150][PVD][CU][8500NM] SOI 150 6 280 8500 1.476 6 80.744 ORDER
454 [SOI][W150][PVD][CU][9000NM] SOI 150 6 280 9000 1.563 6 82.552 ORDER
455 [SOI][W150][PVD][CU][9500NM] SOI 150 6 280 9500 1.649 6 84.361 ORDER
456 [SOI][W150][PVD][CU][10000NM] SOI 150 6 280 10000 1.736 6 86.169 ORDER
457 [SOI][W200][PVD][CU][1000NM] SOI 200 3 280 1000 0.174 3 107.234 ORDER
458 [SOI][W200][PVD][CU][1500NM] SOI 200 3 280 1500 0.260 3 110.851 ORDER
459 [SOI][W200][PVD][CU][2000NM] SOI 200 3 280 2000 0.347 3 114.468 ORDER
460 [SOI][W200][PVD][CU][2500NM] SOI 200 3 280 2500 0.434 3 118.084 ORDER
461 [SOI][W200][PVD][CU][3000NM] SOI 200 3 280 3000 0.521 3 121.701 ORDER
462 [SOI][W200][PVD][CU][3500NM] SOI 200 3 280 3500 0.608 3 125.318 ORDER
463 [SOI][W200][PVD][CU][4000NM] SOI 200 3 280 4000 0.694 3 128.935 ORDER
464 [SOI][W200][PVD][CU][4500NM] SOI 200 3 280 4500 0.781 3 132.552 ORDER
465 [SOI][W200][PVD][CU][5000NM] SOI 200 3 280 5000 0.868 3 136.169 ORDER
466 [SOI][W200][PVD][CU][5500NM] SOI 200 3 280 5500 0.955 3 139.786 ORDER
467 [SOI][W200][PVD][CU][6000NM] SOI 200 3 280 6000 1.042 3 143.403 ORDER
468 [SOI][W200][PVD][CU][6500NM] SOI 200 3 280 6500 1.128 3 147.020 ORDER
469 [SOI][W200][PVD][CU][7000NM] SOI 200 3 280 7000 1.215 3 150.637 ORDER
470 [SOI][W200][PVD][CU][7500NM] SOI 200 3 280 7500 1.302 3 154.253 ORDER
471 [SOI][W200][PVD][CU][8000NM] SOI 200 3 280 8000 1.389 3 157.870 ORDER
472 [SOI][W200][PVD][CU][8500NM] SOI 200 3 280 8500 1.476 3 161.487 ORDER
473 [SOI][W200][PVD][CU][9000NM] SOI 200 3 280 9000 1.563 3 165.104 ORDER
474 [SOI][W200][PVD][CU][9500NM] SOI 200 3 280 9500 1.649 3 168.721 ORDER
475 [SOI][W200][PVD][CU][10000NM] SOI 200 3 280 10000 1.736 3 172.338 ORDER
476 [SOI][W300][PVD][CU][1000NM] SOI 300 280 1000 0.174 RFQ
477 [SOI][W300][PVD][CU][1500NM] SOI 300 280 1500 0.260 RFQ
478 [SOI][W300][PVD][CU][2000NM] SOI 300 280 2000 0.347 RFQ
479 [SOI][W300][PVD][CU][2500NM] SOI 300 280 2500 0.434 RFQ
480 [SOI][W300][PVD][CU][3000NM] SOI 300 280 3000 0.521 RFQ
481 [SOI][W300][PVD][CU][3500NM] SOI 300 280 3500 0.608 RFQ
482 [SOI][W300][PVD][CU][4000NM] SOI 300 280 4000 0.694 RFQ
483 [SOI][W300][PVD][CU][4500NM] SOI 300 280 4500 0.781 RFQ
484 [SOI][W300][PVD][CU][5000NM] SOI 300 280 5000 0.868 RFQ
485 [SOI][W300][PVD][CU][5500NM] SOI 300 280 5500 0.955 RFQ
486 [SOI][W300][PVD][CU][6000NM] SOI 300 280 6000 1.042 RFQ
487 [SOI][W300][PVD][CU][6500NM] SOI 300 280 6500 1.128 RFQ
488 [SOI][W300][PVD][CU][7000NM] SOI 300 280 7000 1.215 RFQ
489 [SOI][W300][PVD][CU][7500NM] SOI 300 280 7500 1.302 RFQ
490 [SOI][W300][PVD][CU][8000NM] SOI 300 280 8000 1.389 RFQ
491 [SOI][W300][PVD][CU][8500NM] SOI 300 280 8500 1.476 RFQ
492 [SOI][W300][PVD][CU][9000NM] SOI 300 280 9000 1.563 RFQ
493 [SOI][W300][PVD][CU][9500NM] SOI 300 280 9500 1.649 RFQ
494 [SOI][W300][PVD][CU][10000NM] SOI 300 280 10000 1.736 RFQ
495 [SOI][Wnnn][PVD][CU][1000NM] SOI nnn 280 1000 0.174 RFQ
496 [SOI][Wnnn][PVD][CU][1500NM] SOI nnn 280 1500 0.260 RFQ
497 [SOI][Wnnn][PVD][CU][2000NM] SOI nnn 280 2000 0.347 RFQ
498 [SOI][Wnnn][PVD][CU][2500NM] SOI nnn 280 2500 0.434 RFQ
499 [SOI][Wnnn][PVD][CU][3000NM] SOI nnn 280 3000 0.521 RFQ
500 [SOI][Wnnn][PVD][CU][3500NM] SOI nnn 280 3500 0.608 RFQ
501 [SOI][Wnnn][PVD][CU][4000NM] SOI nnn 280 4000 0.694 RFQ
502 [SOI][Wnnn][PVD][CU][4500NM] SOI nnn 280 4500 0.781 RFQ
503 [SOI][Wnnn][PVD][CU][5000NM] SOI nnn 280 5000 0.868 RFQ
504 [SOI][Wnnn][PVD][CU][5500NM] SOI nnn 280 5500 0.955 RFQ
505 [SOI][Wnnn][PVD][CU][6000NM] SOI nnn 280 6000 1.042 RFQ
506 [SOI][Wnnn][PVD][CU][6500NM] SOI nnn 280 6500 1.128 RFQ
507 [SOI][Wnnn][PVD][CU][7000NM] SOI nnn 280 7000 1.215 RFQ
508 [SOI][Wnnn][PVD][CU][7500NM] SOI nnn 280 7500 1.302 RFQ
509 [SOI][Wnnn][PVD][CU][8000NM] SOI nnn 280 8000 1.389 RFQ
510 [SOI][Wnnn][PVD][CU][8500NM] SOI nnn 280 8500 1.476 RFQ
511 [SOI][Wnnn][PVD][CU][9000NM] SOI nnn 280 9000 1.563 RFQ
512 [SOI][Wnnn][PVD][CU][9500NM] SOI nnn 280 9500 1.649 RFQ
513 [SOI][Wnnn][PVD][CU][10000NM] SOI nnn 280 10000 1.736 RFQ
514 [SIGE][W25][PVD][CU][1000NM] SiGe 25 24 280 1000 0.174 24 13.404 ORDER
515 [SIGE][W25][PVD][CU][1500NM] SiGe 25 24 280 1500 0.260 24 13.856 ORDER
516 [SIGE][W25][PVD][CU][2000NM] SiGe 25 24 280 2000 0.347 24 14.308 ORDER
517 [SIGE][W25][PVD][CU][2500NM] SiGe 25 24 280 2500 0.434 24 14.761 ORDER
518 [SIGE][W25][PVD][CU][3000NM] SiGe 25 24 280 3000 0.521 24 15.213 ORDER
519 [SIGE][W25][PVD][CU][3500NM] SiGe 25 24 280 3500 0.608 24 15.665 ORDER
520 [SIGE][W25][PVD][CU][4000NM] SiGe 25 24 280 4000 0.694 24 16.117 ORDER
521 [SIGE][W25][PVD][CU][4500NM] SiGe 25 24 280 4500 0.781 24 16.569 ORDER
522 [SIGE][W25][PVD][CU][5000NM] SiGe 25 24 280 5000 0.868 24 17.021 ORDER
523 [SIGE][W25][PVD][CU][5500NM] SiGe 25 24 280 5500 0.955 24 17.473 ORDER
524 [SIGE][W25][PVD][CU][6000NM] SiGe 25 24 280 6000 1.042 24 17.925 ORDER
525 [SIGE][W25][PVD][CU][6500NM] SiGe 25 24 280 6500 1.128 24 18.377 ORDER
526 [SIGE][W25][PVD][CU][7000NM] SiGe 25 24 280 7000 1.215 24 18.830 ORDER
527 [SIGE][W25][PVD][CU][7500NM] SiGe 25 24 280 7500 1.302 24 19.282 ORDER
528 [SIGE][W25][PVD][CU][8000NM] SiGe 25 24 280 8000 1.389 24 19.734 ORDER
529 [SIGE][W25][PVD][CU][8500NM] SiGe 25 24 280 8500 1.476 24 20.186 ORDER
530 [SIGE][W25][PVD][CU][9000NM] SiGe 25 24 280 9000 1.563 24 20.638 ORDER
531 [SIGE][W25][PVD][CU][9500NM] SiGe 25 24 280 9500 1.649 24 21.090 ORDER
532 [SIGE][W25][PVD][CU][10000NM] SiGe 25 24 280 10000 1.736 24 21.542 ORDER
533 [SIGE][W50][PVD][CU][1000NM] SiGe 50 12 280 1000 0.174 12 26.808 ORDER
534 [SIGE][W50][PVD][CU][1500NM] SiGe 50 12 280 1500 0.260 12 27.713 ORDER
535 [SIGE][W50][PVD][CU][2000NM] SiGe 50 12 280 2000 0.347 12 28.617 ORDER
536 [SIGE][W50][PVD][CU][2500NM] SiGe 50 12 280 2500 0.434 12 29.521 ORDER
537 [SIGE][W50][PVD][CU][3000NM] SiGe 50 12 280 3000 0.521 12 30.425 ORDER
538 [SIGE][W50][PVD][CU][3500NM] SiGe 50 12 280 3500 0.608 12 31.330 ORDER
539 [SIGE][W50][PVD][CU][4000NM] SiGe 50 12 280 4000 0.694 12 32.234 ORDER
540 [SIGE][W50][PVD][CU][4500NM] SiGe 50 12 280 4500 0.781 12 33.138 ORDER
541 [SIGE][W50][PVD][CU][5000NM] SiGe 50 12 280 5000 0.868 12 34.042 ORDER
542 [SIGE][W50][PVD][CU][5500NM] SiGe 50 12 280 5500 0.955 12 34.946 ORDER
543 [SIGE][W50][PVD][CU][6000NM] SiGe 50 12 280 6000 1.042 12 35.851 ORDER
544 [SIGE][W50][PVD][CU][6500NM] SiGe 50 12 280 6500 1.128 12 36.755 ORDER
545 [SIGE][W50][PVD][CU][7000NM] SiGe 50 12 280 7000 1.215 12 37.659 ORDER
546 [SIGE][W50][PVD][CU][7500NM] SiGe 50 12 280 7500 1.302 12 38.563 ORDER
547 [SIGE][W50][PVD][CU][8000NM] SiGe 50 12 280 8000 1.389 12 39.468 ORDER
548 [SIGE][W50][PVD][CU][8500NM] SiGe 50 12 280 8500 1.476 12 40.372 ORDER
549 [SIGE][W50][PVD][CU][9000NM] SiGe 50 12 280 9000 1.563 12 41.276 ORDER
550 [SIGE][W50][PVD][CU][9500NM] SiGe 50 12 280 9500 1.649 12 42.180 ORDER
551 [SIGE][W50][PVD][CU][10000NM] SiGe 50 12 280 10000 1.736 12 43.084 ORDER
552 [SIGE][W75][PVD][CU][1000NM] SiGe 75 10 280 1000 0.174 10 32.170 ORDER
553 [SIGE][W75][PVD][CU][1500NM] SiGe 75 10 280 1500 0.260 10 33.255 ORDER
554 [SIGE][W75][PVD][CU][2000NM] SiGe 75 10 280 2000 0.347 10 34.340 ORDER
555 [SIGE][W75][PVD][CU][2500NM] SiGe 75 10 280 2500 0.434 10 35.425 ORDER
556 [SIGE][W75][PVD][CU][3000NM] SiGe 75 10 280 3000 0.521 10 36.510 ORDER
557 [SIGE][W75][PVD][CU][3500NM] SiGe 75 10 280 3500 0.608 10 37.595 ORDER
558 [SIGE][W75][PVD][CU][4000NM] SiGe 75 10 280 4000 0.694 10 38.681 ORDER
559 [SIGE][W75][PVD][CU][4500NM] SiGe 75 10 280 4500 0.781 10 39.766 ORDER
560 [SIGE][W75][PVD][CU][5000NM] SiGe 75 10 280 5000 0.868 10 40.851 ORDER
561 [SIGE][W75][PVD][CU][5500NM] SiGe 75 10 280 5500 0.955 10 41.936 ORDER
562 [SIGE][W75][PVD][CU][6000NM] SiGe 75 10 280 6000 1.042 10 43.021 ORDER
563 [SIGE][W75][PVD][CU][6500NM] SiGe 75 10 280 6500 1.128 10 44.106 ORDER
564 [SIGE][W75][PVD][CU][7000NM] SiGe 75 10 280 7000 1.215 10 45.191 ORDER
565 [SIGE][W75][PVD][CU][7500NM] SiGe 75 10 280 7500 1.302 10 46.276 ORDER
566 [SIGE][W75][PVD][CU][8000NM] SiGe 75 10 280 8000 1.389 10 47.361 ORDER
567 [SIGE][W75][PVD][CU][8500NM] SiGe 75 10 280 8500 1.476 10 48.446 ORDER
568 [SIGE][W75][PVD][CU][9000NM] SiGe 75 10 280 9000 1.563 10 49.531 ORDER
569 [SIGE][W75][PVD][CU][9500NM] SiGe 75 10 280 9500 1.649 10 50.616 ORDER
570 [SIGE][W75][PVD][CU][10000NM] SiGe 75 10 280 10000 1.736 10 51.701 ORDER
571 [SIGE][W100][PVD][CU][1000NM] SiGe 100 8 280 1000 0.174 8 40.213 ORDER
572 [SIGE][W100][PVD][CU][1500NM] SiGe 100 8 280 1500 0.260 8 41.569 ORDER
573 [SIGE][W100][PVD][CU][2000NM] SiGe 100 8 280 2000 0.347 8 42.925 ORDER
574 [SIGE][W100][PVD][CU][2500NM] SiGe 100 8 280 2500 0.434 8 44.282 ORDER
575 [SIGE][W100][PVD][CU][3000NM] SiGe 100 8 280 3000 0.521 8 45.638 ORDER
576 [SIGE][W100][PVD][CU][3500NM] SiGe 100 8 280 3500 0.608 8 46.994 ORDER
577 [SIGE][W100][PVD][CU][4000NM] SiGe 100 8 280 4000 0.694 8 48.351 ORDER
578 [SIGE][W100][PVD][CU][4500NM] SiGe 100 8 280 4500 0.781 8 49.707 ORDER
579 [SIGE][W100][PVD][CU][5000NM] SiGe 100 8 280 5000 0.868 8 51.063 ORDER
580 [SIGE][W100][PVD][CU][5500NM] SiGe 100 8 280 5500 0.955 8 52.420 ORDER
581 [SIGE][W100][PVD][CU][6000NM] SiGe 100 8 280 6000 1.042 8 53.776 ORDER
582 [SIGE][W100][PVD][CU][6500NM] SiGe 100 8 280 6500 1.128 8 55.132 ORDER
583 [SIGE][W100][PVD][CU][7000NM] SiGe 100 8 280 7000 1.215 8 56.489 ORDER
584 [SIGE][W100][PVD][CU][7500NM] SiGe 100 8 280 7500 1.302 8 57.845 ORDER
585 [SIGE][W100][PVD][CU][8000NM] SiGe 100 8 280 8000 1.389 8 59.201 ORDER
586 [SIGE][W100][PVD][CU][8500NM] SiGe 100 8 280 8500 1.476 8 60.558 ORDER
587 [SIGE][W100][PVD][CU][9000NM] SiGe 100 8 280 9000 1.563 8 61.914 ORDER
588 [SIGE][W100][PVD][CU][9500NM] SiGe 100 8 280 9500 1.649 8 63.270 ORDER
589 [SIGE][W100][PVD][CU][10000NM] SiGe 100 8 280 10000 1.736 8 64.627 ORDER
590 [SIGE][W125][PVD][CU][1000NM] SiGe 125 7 280 1000 0.174 7 45.957 ORDER
591 [SIGE][W125][PVD][CU][1500NM] SiGe 125 7 280 1500 0.260 7 47.507 ORDER
592 [SIGE][W125][PVD][CU][2000NM] SiGe 125 7 280 2000 0.347 7 49.058 ORDER
593 [SIGE][W125][PVD][CU][2500NM] SiGe 125 7 280 2500 0.434 7 50.608 ORDER
594 [SIGE][W125][PVD][CU][3000NM] SiGe 125 7 280 3000 0.521 7 52.158 ORDER
595 [SIGE][W125][PVD][CU][3500NM] SiGe 125 7 280 3500 0.608 7 53.708 ORDER
596 [SIGE][W125][PVD][CU][4000NM] SiGe 125 7 280 4000 0.694 7 55.258 ORDER
597 [SIGE][W125][PVD][CU][4500NM] SiGe 125 7 280 4500 0.781 7 56.808 ORDER
598 [SIGE][W125][PVD][CU][5000NM] SiGe 125 7 280 5000 0.868 7 58.358 ORDER
599 [SIGE][W125][PVD][CU][5500NM] SiGe 125 7 280 5500 0.955 7 59.908 ORDER
600 [SIGE][W125][PVD][CU][6000NM] SiGe 125 7 280 6000 1.042 7 61.458 ORDER
601 [SIGE][W125][PVD][CU][6500NM] SiGe 125 7 280 6500 1.128 7 63.008 ORDER
602 [SIGE][W125][PVD][CU][7000NM] SiGe 125 7 280 7000 1.215 7 64.559 ORDER
603 [SIGE][W125][PVD][CU][7500NM] SiGe 125 7 280 7500 1.302 7 66.109 ORDER
604 [SIGE][W125][PVD][CU][8000NM] SiGe 125 7 280 8000 1.389 7 67.659 ORDER
605 [SIGE][W125][PVD][CU][8500NM] SiGe 125 7 280 8500 1.476 7 69.209 ORDER
606 [SIGE][W125][PVD][CU][9000NM] SiGe 125 7 280 9000 1.563 7 70.759 ORDER
607 [SIGE][W125][PVD][CU][9500NM] SiGe 125 7 280 9500 1.649 7 72.309 ORDER
608 [SIGE][W125][PVD][CU][10000NM] SiGe 125 7 280 10000 1.736 7 73.859 ORDER
609 [SIGE][W150][PVD][CU][1000NM] SiGe 150 6 280 1000 0.174 6 53.617 ORDER
610 [SIGE][W150][PVD][CU][1500NM] SiGe 150 6 280 1500 0.260 6 55.425 ORDER
611 [SIGE][W150][PVD][CU][2000NM] SiGe 150 6 280 2000 0.347 6 57.234 ORDER
612 [SIGE][W150][PVD][CU][2500NM] SiGe 150 6 280 2500 0.434 6 59.042 ORDER
613 [SIGE][W150][PVD][CU][3000NM] SiGe 150 6 280 3000 0.521 6 60.851 ORDER
614 [SIGE][W150][PVD][CU][3500NM] SiGe 150 6 280 3500 0.608 6 62.659 ORDER
615 [SIGE][W150][PVD][CU][4000NM] SiGe 150 6 280 4000 0.694 6 64.468 ORDER
616 [SIGE][W150][PVD][CU][4500NM] SiGe 150 6 280 4500 0.781 6 66.276 ORDER
617 [SIGE][W150][PVD][CU][5000NM] SiGe 150 6 280 5000 0.868 6 68.084 ORDER
618 [SIGE][W150][PVD][CU][5500NM] SiGe 150 6 280 5500 0.955 6 69.893 ORDER
619 [SIGE][W150][PVD][CU][6000NM] SiGe 150 6 280 6000 1.042 6 71.701 ORDER
620 [SIGE][W150][PVD][CU][6500NM] SiGe 150 6 280 6500 1.128 6 73.510 ORDER
621 [SIGE][W150][PVD][CU][7000NM] SiGe 150 6 280 7000 1.215 6 75.318 ORDER
622 [SIGE][W150][PVD][CU][7500NM] SiGe 150 6 280 7500 1.302 6 77.127 ORDER
623 [SIGE][W150][PVD][CU][8000NM] SiGe 150 6 280 8000 1.389 6 78.935 ORDER
624 [SIGE][W150][PVD][CU][8500NM] SiGe 150 6 280 8500 1.476 6 80.744 ORDER
625 [SIGE][W150][PVD][CU][9000NM] SiGe 150 6 280 9000 1.563 6 82.552 ORDER
626 [SIGE][W150][PVD][CU][9500NM] SiGe 150 6 280 9500 1.649 6 84.361 ORDER
627 [SIGE][W150][PVD][CU][10000NM] SiGe 150 6 280 10000 1.736 6 86.169 ORDER
628 [SIGE][W200][PVD][CU][1000NM] SiGe 200 3 280 1000 0.174 3 107.234 ORDER
629 [SIGE][W200][PVD][CU][1500NM] SiGe 200 3 280 1500 0.260 3 110.851 ORDER
630 [SIGE][W200][PVD][CU][2000NM] SiGe 200 3 280 2000 0.347 3 114.468 ORDER
631 [SIGE][W200][PVD][CU][2500NM] SiGe 200 3 280 2500 0.434 3 118.084 ORDER
632 [SIGE][W200][PVD][CU][3000NM] SiGe 200 3 280 3000 0.521 3 121.701 ORDER
633 [SIGE][W200][PVD][CU][3500NM] SiGe 200 3 280 3500 0.608 3 125.318 ORDER
634 [SIGE][W200][PVD][CU][4000NM] SiGe 200 3 280 4000 0.694 3 128.935 ORDER
635 [SIGE][W200][PVD][CU][4500NM] SiGe 200 3 280 4500 0.781 3 132.552 ORDER
636 [SIGE][W200][PVD][CU][5000NM] SiGe 200 3 280 5000 0.868 3 136.169 ORDER
637 [SIGE][W200][PVD][CU][5500NM] SiGe 200 3 280 5500 0.955 3 139.786 ORDER
638 [SIGE][W200][PVD][CU][6000NM] SiGe 200 3 280 6000 1.042 3 143.403 ORDER
639 [SIGE][W200][PVD][CU][6500NM] SiGe 200 3 280 6500 1.128 3 147.020 ORDER
640 [SIGE][W200][PVD][CU][7000NM] SiGe 200 3 280 7000 1.215 3 150.637 ORDER
641 [SIGE][W200][PVD][CU][7500NM] SiGe 200 3 280 7500 1.302 3 154.253 ORDER
642 [SIGE][W200][PVD][CU][8000NM] SiGe 200 3 280 8000 1.389 3 157.870 ORDER
643 [SIGE][W200][PVD][CU][8500NM] SiGe 200 3 280 8500 1.476 3 161.487 ORDER
644 [SIGE][W200][PVD][CU][9000NM] SiGe 200 3 280 9000 1.563 3 165.104 ORDER
645 [SIGE][W200][PVD][CU][9500NM] SiGe 200 3 280 9500 1.649 3 168.721 ORDER
646 [SIGE][W200][PVD][CU][10000NM] SiGe 200 3 280 10000 1.736 3 172.338 ORDER
647 [SIGE][W300][PVD][CU][1000NM] SiGe 300 280 1000 0.174 RFQ
648 [SIGE][W300][PVD][CU][1500NM] SiGe 300 280 1500 0.260 RFQ
649 [SIGE][W300][PVD][CU][2000NM] SiGe 300 280 2000 0.347 RFQ
650 [SIGE][W300][PVD][CU][2500NM] SiGe 300 280 2500 0.434 RFQ
651 [SIGE][W300][PVD][CU][3000NM] SiGe 300 280 3000 0.521 RFQ
652 [SIGE][W300][PVD][CU][3500NM] SiGe 300 280 3500 0.608 RFQ
653 [SIGE][W300][PVD][CU][4000NM] SiGe 300 280 4000 0.694 RFQ
654 [SIGE][W300][PVD][CU][4500NM] SiGe 300 280 4500 0.781 RFQ
655 [SIGE][W300][PVD][CU][5000NM] SiGe 300 280 5000 0.868 RFQ
656 [SIGE][W300][PVD][CU][5500NM] SiGe 300 280 5500 0.955 RFQ
657 [SIGE][W300][PVD][CU][6000NM] SiGe 300 280 6000 1.042 RFQ
658 [SIGE][W300][PVD][CU][6500NM] SiGe 300 280 6500 1.128 RFQ
659 [SIGE][W300][PVD][CU][7000NM] SiGe 300 280 7000 1.215 RFQ
660 [SIGE][W300][PVD][CU][7500NM] SiGe 300 280 7500 1.302 RFQ
661 [SIGE][W300][PVD][CU][8000NM] SiGe 300 280 8000 1.389 RFQ
662 [SIGE][W300][PVD][CU][8500NM] SiGe 300 280 8500 1.476 RFQ
663 [SIGE][W300][PVD][CU][9000NM] SiGe 300 280 9000 1.563 RFQ
664 [SIGE][W300][PVD][CU][9500NM] SiGe 300 280 9500 1.649 RFQ
665 [SIGE][W300][PVD][CU][10000NM] SiGe 300 280 10000 1.736 RFQ
666 [SIGE][Wnnn][PVD][CU][1000NM] SiGe nnn 280 1000 0.174 RFQ
667 [SIGE][Wnnn][PVD][CU][1500NM] SiGe nnn 280 1500 0.260 RFQ
668 [SIGE][Wnnn][PVD][CU][2000NM] SiGe nnn 280 2000 0.347 RFQ
669 [SIGE][Wnnn][PVD][CU][2500NM] SiGe nnn 280 2500 0.434 RFQ
670 [SIGE][Wnnn][PVD][CU][3000NM] SiGe nnn 280 3000 0.521 RFQ
671 [SIGE][Wnnn][PVD][CU][3500NM] SiGe nnn 280 3500 0.608 RFQ
672 [SIGE][Wnnn][PVD][CU][4000NM] SiGe nnn 280 4000 0.694 RFQ
673 [SIGE][Wnnn][PVD][CU][4500NM] SiGe nnn 280 4500 0.781 RFQ
674 [SIGE][Wnnn][PVD][CU][5000NM] SiGe nnn 280 5000 0.868 RFQ
675 [SIGE][Wnnn][PVD][CU][5500NM] SiGe nnn 280 5500 0.955 RFQ
676 [SIGE][Wnnn][PVD][CU][6000NM] SiGe nnn 280 6000 1.042 RFQ
677 [SIGE][Wnnn][PVD][CU][6500NM] SiGe nnn 280 6500 1.128