Rh Rhodium PVD - SPUTTERING DEPOSITION - PHYSICAL VAPOR DEPOSITION - SPUTTERING THIN FILMS METALS ALLOYS DIELECTRICS DC RF MAGNETRON SPUTTER DEPOSITION AND REACTIVE SPUTTERING Rh PVD, Rhodium PVD, Rh SPUTTERING DEPOSITION, Rhodium SPUTTERING DEPOSITION, Rh PHYSICAL VAPOR DEPOSITION, Rhodium PHYSICAL VAPOR DEPOSITION, Rh SPUTTERING, Rhodium SPUTTERING, Rh THIN FILM, Rhodium THIN FILM,Rh DIELECTRICS, Rhodium DIELECTRICS,Rh RF MAGNETRON, Rhodium RF MAGNETRON,Rh SPUTTER DEPOSITION, Rhodium SPUTTER DEPOSITION,Rh REACTIVE SPUTTERING" Rhodium REACTIVE SPUTTERING Rh Rhodium PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS MAGNETRON SPUTTER DEPOSITION, DC , RF PVD REACTIVE SPUTTERING Rh Rhodium PVD - SPUTTERING DEPOSITION - PHYSICAL VAPOR DEPOSITION - SPUTTERING THIN FILMS METALS ALLOYS DIELECTRICS DC RF MAGNETRON SPUTTER DEPOSITION AND REACTIVE SPUTTERING Rh PVD, Rhodium PVD, Rh SPUTTERING DEPOSITION, Rhodium SPUTTERING DEPOSITION, Rh PHYSICAL VAPOR DEPOSITION, Rhodium PHYSICAL VAPOR DEPOSITION, Rh SPUTTERING, Rhodium SPUTTERING, Rh THIN FILM, Rhodium THIN FILM,Rh DIELECTRICS, Rhodium DIELECTRICS,Rh RF MAGNETRON, Rhodium RF MAGNETRON,Rh SPUTTER DEPOSITION, Rhodium SPUTTER DEPOSITION,Rh REACTIVE SPUTTERING" Rhodium REACTIVE SPUTTERING Rh Rhodium PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS MAGNETRON SPUTTER DEPOSITION, DC , RF PVD REACTIVE SPUTTERING HTE Labs logo Rh - Rhodium PHYSICAL VAPOR DEPOSITION - METALS, ALLOYS, DIELECTRICS Rh - Rhodium MAGNETRON SPUTTER DEPOSITION, DC , RF Rh - Rhodium PVD REACTIVE SPUTTERING HTE Labs PROPERTIES / FEATURES APPLICATIONS Chemical composition: Rh Purity (%): 99.8 ">Density: ">Electrical conductivity: ">Thermal conductivity: ">Melting point: ">Refractive index: ">Dielectric constant: Deposition rate (@12.5W/in2): 57nm/min Sputtering yield (@600eV): 1.5 Semiconductor integrated circuit (IC) manufacturing Antireflection coatings in optoelectronic devices Hard masks for chemical etching or plasma etching Inter-metal dielectric (IMD) stacks Multilayers interconnections, Dual Damascene, ILD [inter-layer dielectrics planarization] STI [formation of shallow trench isolation (STI) structures] processes SHORT PROCESS DESCRIPTION WAFER FOUNDRY - R&D SEMICONDUCTOR PROCESS DEVELOPMENT HTE LABS is helping customers to solve R&D problems, capacity problems, lower cost as well as develop a back-up process for existing in-house operations. Any company currently involved or contemplating R&D related to semiconductor devices or thin film technologies, is encourraged to consider using HTE LABS expertise and capabilities. To contact HTE LABS and discuss an application in the strictest confidentiality, navigate to CONTACT PAGE. PROCESS ORDERING INFORMATION WAFER TYPE WAFER SIZE [mm] BATCH SIZE [wafers] TEMPERATURE [°C] THICKNESS [nm] GENERATE PROCESS NAME TIME [hours] Process parametter TIME is calculated using a deposition rate of 57nm/min as the worst case scenario. Actual deposition rate may vary. HTE Labs whenever feasible is tailoring each process to customer specification such that the end refractive index, thickness and film uniformity are within specified tolerance. STANDARD PROCESS PRICE LIST # PROCESS CODE [datasheet] WAFER TYPE SIZE [mm] BATCH [wafers] TEMP. [°C] THICKNESS [nm] TIME [h] MIN. ORDER [wafers] U/P [$] ORDER/RFQ 1 [SI][W25][PVD][RH][1000NM] Si 25 24 280 1000 0.292 24 14.023 ORDER 2 [SI][W25][PVD][RH][1500NM] Si 25 24 280 1500 0.439 24 14.784 ORDER 3 [SI][W25][PVD][RH][2000NM] Si 25 24 280 2000 0.585 24 15.546 ORDER 4 [SI][W25][PVD][RH][2500NM] Si 25 24 280 2500 0.731 24 16.307 ORDER 5 [SI][W25][PVD][RH][3000NM] Si 25 24 280 3000 0.877 24 17.069 ORDER 6 [SI][W25][PVD][RH][3500NM] Si 25 24 280 3500 1.023 24 17.830 ORDER 7 [SI][W25][PVD][RH][4000NM] Si 25 24 280 4000 1.170 24 18.592 ORDER 8 [SI][W25][PVD][RH][4500NM] Si 25 24 280 4500 1.316 24 19.353 ORDER 9 [SI][W25][PVD][RH][5000NM] Si 25 24 280 5000 1.462 24 20.115 ORDER 10 [SI][W25][PVD][RH][5500NM] Si 25 24 280 5500 1.608 24 20.876 ORDER 11 [SI][W25][PVD][RH][6000NM] Si 25 24 280 6000 1.754 24 21.637 ORDER 12 [SI][W25][PVD][RH][6500NM] Si 25 24 280 6500 1.901 24 22.399 ORDER 13 [SI][W25][PVD][RH][7000NM] Si 25 24 280 7000 2.047 24 23.160 ORDER 14 [SI][W25][PVD][RH][7500NM] Si 25 24 280 7500 2.193 24 23.922 ORDER 15 [SI][W25][PVD][RH][8000NM] Si 25 24 280 8000 2.339 24 24.683 ORDER 16 [SI][W25][PVD][RH][8500NM] Si 25 24 280 8500 2.485 24 25.445 ORDER 17 [SI][W25][PVD][RH][9000NM] Si 25 24 280 9000 2.632 24 26.206 ORDER 18 [SI][W25][PVD][RH][9500NM] Si 25 24 280 9500 2.778 24 26.968 ORDER 19 [SI][W25][PVD][RH][10000NM] Si 25 24 280 10000 2.924 24 27.729 ORDER 20 [SI][W50][PVD][RH][1000NM] Si 50 12 280 1000 0.292 12 28.046 ORDER 21 [SI][W50][PVD][RH][1500NM] Si 50 12 280 1500 0.439 12 29.569 ORDER 22 [SI][W50][PVD][RH][2000NM] Si 50 12 280 2000 0.585 12 31.092 ORDER 23 [SI][W50][PVD][RH][2500NM] Si 50 12 280 2500 0.731 12 32.615 ORDER 24 [SI][W50][PVD][RH][3000NM] Si 50 12 280 3000 0.877 12 34.137 ORDER 25 [SI][W50][PVD][RH][3500NM] Si 50 12 280 3500 1.023 12 35.660 ORDER 26 [SI][W50][PVD][RH][4000NM] Si 50 12 280 4000 1.170 12 37.183 ORDER 27 [SI][W50][PVD][RH][4500NM] Si 50 12 280 4500 1.316 12 38.706 ORDER 28 [SI][W50][PVD][RH][5000NM] Si 50 12 280 5000 1.462 12 40.229 ORDER 29 [SI][W50][PVD][RH][5500NM] Si 50 12 280 5500 1.608 12 41.752 ORDER 30 [SI][W50][PVD][RH][6000NM] Si 50 12 280 6000 1.754 12 43.275 ORDER 31 [SI][W50][PVD][RH][6500NM] Si 50 12 280 6500 1.901 12 44.798 ORDER 32 [SI][W50][PVD][RH][7000NM] Si 50 12 280 7000 2.047 12 46.321 ORDER 33 [SI][W50][PVD][RH][7500NM] Si 50 12 280 7500 2.193 12 47.844 ORDER 34 [SI][W50][PVD][RH][8000NM] Si 50 12 280 8000 2.339 12 49.366 ORDER 35 [SI][W50][PVD][RH][8500NM] Si 50 12 280 8500 2.485 12 50.889 ORDER 36 [SI][W50][PVD][RH][9000NM] Si 50 12 280 9000 2.632 12 52.412 ORDER 37 [SI][W50][PVD][RH][9500NM] Si 50 12 280 9500 2.778 12 53.935 ORDER 38 [SI][W50][PVD][RH][10000NM] Si 50 12 280 10000 2.924 12 55.458 ORDER 39 [SI][W75][PVD][RH][1000NM] Si 75 10 280 1000 0.292 10 33.655 ORDER 40 [SI][W75][PVD][RH][1500NM] Si 75 10 280 1500 0.439 10 35.482 ORDER 41 [SI][W75][PVD][RH][2000NM] Si 75 10 280 2000 0.585 10 37.310 ORDER 42 [SI][W75][PVD][RH][2500NM] Si 75 10 280 2500 0.731 10 39.137 ORDER 43 [SI][W75][PVD][RH][3000NM] Si 75 10 280 3000 0.877 10 40.965 ORDER 44 [SI][W75][PVD][RH][3500NM] Si 75 10 280 3500 1.023 10 42.792 ORDER 45 [SI][W75][PVD][RH][4000NM] Si 75 10 280 4000 1.170 10 44.620 ORDER 46 [SI][W75][PVD][RH][4500NM] Si 75 10 280 4500 1.316 10 46.447 ORDER 47 [SI][W75][PVD][RH][5000NM] Si 75 10 280 5000 1.462 10 48.275 ORDER 48 [SI][W75][PVD][RH][5500NM] Si 75 10 280 5500 1.608 10 50.102 ORDER 49 [SI][W75][PVD][RH][6000NM] Si 75 10 280 6000 1.754 10 51.930 ORDER 50 [SI][W75][PVD][RH][6500NM] Si 75 10 280 6500 1.901 10 53.757 ORDER 51 [SI][W75][PVD][RH][7000NM] Si 75 10 280 7000 2.047 10 55.585 ORDER 52 [SI][W75][PVD][RH][7500NM] Si 75 10 280 7500 2.193 10 57.412 ORDER 53 [SI][W75][PVD][RH][8000NM] Si 75 10 280 8000 2.339 10 59.240 ORDER 54 [SI][W75][PVD][RH][8500NM] Si 75 10 280 8500 2.485 10 61.067 ORDER 55 [SI][W75][PVD][RH][9000NM] Si 75 10 280 9000 2.632 10 62.895 ORDER 56 [SI][W75][PVD][RH][9500NM] Si 75 10 280 9500 2.778 10 64.722 ORDER 57 [SI][W75][PVD][RH][10000NM] Si 75 10 280 10000 2.924 10 66.550 ORDER 58 [SI][W100][PVD][RH][1000NM] Si 100 8 280 1000 0.292 8 42.069 ORDER 59 [SI][W100][PVD][RH][1500NM] Si 100 8 280 1500 0.439 8 44.353 ORDER 60 [SI][W100][PVD][RH][2000NM] Si 100 8 280 2000 0.585 8 46.637 ORDER 61 [SI][W100][PVD][RH][2500NM] Si 100 8 280 2500 0.731 8 48.922 ORDER 62 [SI][W100][PVD][RH][3000NM] Si 100 8 280 3000 0.877 8 51.206 ORDER 63 [SI][W100][PVD][RH][3500NM] Si 100 8 280 3500 1.023 8 53.490 ORDER 64 [SI][W100][PVD][RH][4000NM] Si 100 8 280 4000 1.170 8 55.775 ORDER 65 [SI][W100][PVD][RH][4500NM] Si 100 8 280 4500 1.316 8 58.059 ORDER 66 [SI][W100][PVD][RH][5000NM] Si 100 8 280 5000 1.462 8 60.344 ORDER 67 [SI][W100][PVD][RH][5500NM] Si 100 8 280 5500 1.608 8 62.628 ORDER 68 [SI][W100][PVD][RH][6000NM] Si 100 8 280 6000 1.754 8 64.912 ORDER 69 [SI][W100][PVD][RH][6500NM] Si 100 8 280 6500 1.901 8 67.197 ORDER 70 [SI][W100][PVD][RH][7000NM] Si 100 8 280 7000 2.047 8 69.481 ORDER 71 [SI][W100][PVD][RH][7500NM] Si 100 8 280 7500 2.193 8 71.765 ORDER 72 [SI][W100][PVD][RH][8000NM] Si 100 8 280 8000 2.339 8 74.050 ORDER 73 [SI][W100][PVD][RH][8500NM] Si 100 8 280 8500 2.485 8 76.334 ORDER 74 [SI][W100][PVD][RH][9000NM] Si 100 8 280 9000 2.632 8 78.618 ORDER 75 [SI][W100][PVD][RH][9500NM] Si 100 8 280 9500 2.778 8 80.903 ORDER 76 [SI][W100][PVD][RH][10000NM] Si 100 8 280 10000 2.924 8 83.187 ORDER 77 [SI][W125][PVD][RH][1000NM] Si 125 7 280 1000 0.292 7 48.079 ORDER 78 [SI][W125][PVD][RH][1500NM] Si 125 7 280 1500 0.439 7 50.689 ORDER 79 [SI][W125][PVD][RH][2000NM] Si 125 7 280 2000 0.585 7 53.300 ORDER 80 [SI][W125][PVD][RH][2500NM] Si 125 7 280 2500 0.731 7 55.911 ORDER 81 [SI][W125][PVD][RH][3000NM] Si 125 7 280 3000 0.877 7 58.521 ORDER 82 [SI][W125][PVD][RH][3500NM] Si 125 7 280 3500 1.023 7 61.132 ORDER 83 [SI][W125][PVD][RH][4000NM] Si 125 7 280 4000 1.170 7 63.743 ORDER 84 [SI][W125][PVD][RH][4500NM] Si 125 7 280 4500 1.316 7 66.353 ORDER 85 [SI][W125][PVD][RH][5000NM] Si 125 7 280 5000 1.462 7 68.964 ORDER 86 [SI][W125][PVD][RH][5500NM] Si 125 7 280 5500 1.608 7 71.575 ORDER 87 [SI][W125][PVD][RH][6000NM] Si 125 7 280 6000 1.754 7 74.185 ORDER 88 [SI][W125][PVD][RH][6500NM] Si 125 7 280 6500 1.901 7 76.796 ORDER 89 [SI][W125][PVD][RH][7000NM] Si 125 7 280 7000 2.047 7 79.407 ORDER 90 [SI][W125][PVD][RH][7500NM] Si 125 7 280 7500 2.193 7 82.018 ORDER 91 [SI][W125][PVD][RH][8000NM] Si 125 7 280 8000 2.339 7 84.628 ORDER 92 [SI][W125][PVD][RH][8500NM] Si 125 7 280 8500 2.485 7 87.239 ORDER 93 [SI][W125][PVD][RH][9000NM] Si 125 7 280 9000 2.632 7 89.850 ORDER 94 [SI][W125][PVD][RH][9500NM] Si 125 7 280 9500 2.778 7 92.460 ORDER 95 [SI][W125][PVD][RH][10000NM] Si 125 7 280 10000 2.924 7 95.071 ORDER 96 [SI][W150][PVD][RH][1000NM] Si 150 6 280 1000 0.292 6 56.092 ORDER 97 [SI][W150][PVD][RH][1500NM] Si 150 6 280 1500 0.439 6 59.137 ORDER 98 [SI][W150][PVD][RH][2000NM] Si 150 6 280 2000 0.585 6 62.183 ORDER 99 [SI][W150][PVD][RH][2500NM] Si 150 6 280 2500 0.731 6 65.229 ORDER 100 [SI][W150][PVD][RH][3000NM] Si 150 6 280 3000 0.877 6 68.275 ORDER 101 [SI][W150][PVD][RH][3500NM] Si 150 6 280 3500 1.023 6 71.321 ORDER 102 [SI][W150][PVD][RH][4000NM] Si 150 6 280 4000 1.170 6 74.366 ORDER 103 [SI][W150][PVD][RH][4500NM] Si 150 6 280 4500 1.316 6 77.412 ORDER 104 [SI][W150][PVD][RH][5000NM] Si 150 6 280 5000 1.462 6 80.458 ORDER 105 [SI][W150][PVD][RH][5500NM] Si 150 6 280 5500 1.608 6 83.504 ORDER 106 [SI][W150][PVD][RH][6000NM] Si 150 6 280 6000 1.754 6 86.550 ORDER 107 [SI][W150][PVD][RH][6500NM] Si 150 6 280 6500 1.901 6 89.596 ORDER 108 [SI][W150][PVD][RH][7000NM] Si 150 6 280 7000 2.047 6 92.641 ORDER 109 [SI][W150][PVD][RH][7500NM] Si 150 6 280 7500 2.193 6 95.687 ORDER 110 [SI][W150][PVD][RH][8000NM] Si 150 6 280 8000 2.339 6 98.733 ORDER 111 [SI][W150][PVD][RH][8500NM] Si 150 6 280 8500 2.485 6 101.779 ORDER 112 [SI][W150][PVD][RH][9000NM] Si 150 6 280 9000 2.632 6 104.825 ORDER 113 [SI][W150][PVD][RH][9500NM] Si 150 6 280 9500 2.778 6 107.870 ORDER 114 [SI][W150][PVD][RH][10000NM] Si 150 6 280 10000 2.924 6 110.916 ORDER 115 [SI][W200][PVD][RH][1000NM] Si 200 3 280 1000 0.292 3 112.183 ORDER 116 [SI][W200][PVD][RH][1500NM] Si 200 3 280 1500 0.439 3 118.275 ORDER 117 [SI][W200][PVD][RH][2000NM] Si 200 3 280 2000 0.585 3 124.366 ORDER 118 [SI][W200][PVD][RH][2500NM] Si 200 3 280 2500 0.731 3 130.458 ORDER 119 [SI][W200][PVD][RH][3000NM] Si 200 3 280 3000 0.877 3 136.550 ORDER 120 [SI][W200][PVD][RH][3500NM] Si 200 3 280 3500 1.023 3 142.641 ORDER 121 [SI][W200][PVD][RH][4000NM] Si 200 3 280 4000 1.170 3 148.733 ORDER 122 [SI][W200][PVD][RH][4500NM] Si 200 3 280 4500 1.316 3 154.825 ORDER 123 [SI][W200][PVD][RH][5000NM] Si 200 3 280 5000 1.462 3 160.916 ORDER 124 [SI][W200][PVD][RH][5500NM] Si 200 3 280 5500 1.608 3 167.008 ORDER 125 [SI][W200][PVD][RH][6000NM] Si 200 3 280 6000 1.754 3 173.099 ORDER 126 [SI][W200][PVD][RH][6500NM] Si 200 3 280 6500 1.901 3 179.191 ORDER 127 [SI][W200][PVD][RH][7000NM] Si 200 3 280 7000 2.047 3 185.283 ORDER 128 [SI][W200][PVD][RH][7500NM] Si 200 3 280 7500 2.193 3 191.374 ORDER 129 [SI][W200][PVD][RH][8000NM] Si 200 3 280 8000 2.339 3 197.466 ORDER 130 [SI][W200][PVD][RH][8500NM] Si 200 3 280 8500 2.485 3 203.558 ORDER 131 [SI][W200][PVD][RH][9000NM] Si 200 3 280 9000 2.632 3 209.649 ORDER 132 [SI][W200][PVD][RH][9500NM] Si 200 3 280 9500 2.778 3 215.741 ORDER 133 [SI][W200][PVD][RH][10000NM] Si 200 3 280 10000 2.924 3 221.832 ORDER 134 [SI][W300][PVD][RH][1000NM] Si 300 280 1000 0.292 RFQ 135 [SI][W300][PVD][RH][1500NM] Si 300 280 1500 0.439 RFQ 136 [SI][W300][PVD][RH][2000NM] Si 300 280 2000 0.585 RFQ 137 [SI][W300][PVD][RH][2500NM] Si 300 280 2500 0.731 RFQ 138 [SI][W300][PVD][RH][3000NM] Si 300 280 3000 0.877 RFQ 139 [SI][W300][PVD][RH][3500NM] Si 300 280 3500 1.023 RFQ 140 [SI][W300][PVD][RH][4000NM] Si 300 280 4000 1.170 RFQ 141 [SI][W300][PVD][RH][4500NM] Si 300 280 4500 1.316 RFQ 142 [SI][W300][PVD][RH][5000NM] Si 300 280 5000 1.462 RFQ 143 [SI][W300][PVD][RH][5500NM] Si 300 280 5500 1.608 RFQ 144 [SI][W300][PVD][RH][6000NM] Si 300 280 6000 1.754 RFQ 145 [SI][W300][PVD][RH][6500NM] Si 300 280 6500 1.901 RFQ 146 [SI][W300][PVD][RH][7000NM] Si 300 280 7000 2.047 RFQ 147 [SI][W300][PVD][RH][7500NM] Si 300 280 7500 2.193 RFQ 148 [SI][W300][PVD][RH][8000NM] Si 300 280 8000 2.339 RFQ 149 [SI][W300][PVD][RH][8500NM] Si 300 280 8500 2.485 RFQ 150 [SI][W300][PVD][RH][9000NM] Si 300 280 9000 2.632 RFQ 151 [SI][W300][PVD][RH][9500NM] Si 300 280 9500 2.778 RFQ 152 [SI][W300][PVD][RH][10000NM] Si 300 280 10000 2.924 RFQ 153 [SI][Wnnn][PVD][RH][1000NM] Si nnn 280 1000 0.292 RFQ 154 [SI][Wnnn][PVD][RH][1500NM] Si nnn 280 1500 0.439 RFQ 155 [SI][Wnnn][PVD][RH][2000NM] Si nnn 280 2000 0.585 RFQ 156 [SI][Wnnn][PVD][RH][2500NM] Si nnn 280 2500 0.731 RFQ 157 [SI][Wnnn][PVD][RH][3000NM] Si nnn 280 3000 0.877 RFQ 158 [SI][Wnnn][PVD][RH][3500NM] Si nnn 280 3500 1.023 RFQ 159 [SI][Wnnn][PVD][RH][4000NM] Si nnn 280 4000 1.170 RFQ 160 [SI][Wnnn][PVD][RH][4500NM] Si nnn 280 4500 1.316 RFQ 161 [SI][Wnnn][PVD][RH][5000NM] Si nnn 280 5000 1.462 RFQ 162 [SI][Wnnn][PVD][RH][5500NM] Si nnn 280 5500 1.608 RFQ 163 [SI][Wnnn][PVD][RH][6000NM] Si nnn 280 6000 1.754 RFQ 164 [SI][Wnnn][PVD][RH][6500NM] Si nnn 280 6500 1.901 RFQ 165 [SI][Wnnn][PVD][RH][7000NM] Si nnn 280 7000 2.047 RFQ 166 [SI][Wnnn][PVD][RH][7500NM] Si nnn 280 7500 2.193 RFQ 167 [SI][Wnnn][PVD][RH][8000NM] Si nnn 280 8000 2.339 RFQ 168 [SI][Wnnn][PVD][RH][8500NM] Si nnn 280 8500 2.485 RFQ 169 [SI][Wnnn][PVD][RH][9000NM] Si nnn 280 9000 2.632 RFQ 170 [SI][Wnnn][PVD][RH][9500NM] Si nnn 280 9500 2.778 RFQ 171 [SI][Wnnn][PVD][RH][10000NM] Si nnn 280 10000 2.924 RFQ 172 [SIC][W25][PVD][RH][1000NM] SiC 25 24 280 1000 0.292 24 14.023 ORDER 173 [SIC][W25][PVD][RH][1500NM] SiC 25 24 280 1500 0.439 24 14.784 ORDER 174 [SIC][W25][PVD][RH][2000NM] SiC 25 24 280 2000 0.585 24 15.546 ORDER 175 [SIC][W25][PVD][RH][2500NM] SiC 25 24 280 2500 0.731 24 16.307 ORDER 176 [SIC][W25][PVD][RH][3000NM] SiC 25 24 280 3000 0.877 24 17.069 ORDER 177 [SIC][W25][PVD][RH][3500NM] SiC 25 24 280 3500 1.023 24 17.830 ORDER 178 [SIC][W25][PVD][RH][4000NM] SiC 25 24 280 4000 1.170 24 18.592 ORDER 179 [SIC][W25][PVD][RH][4500NM] SiC 25 24 280 4500 1.316 24 19.353 ORDER 180 [SIC][W25][PVD][RH][5000NM] SiC 25 24 280 5000 1.462 24 20.115 ORDER 181 [SIC][W25][PVD][RH][5500NM] SiC 25 24 280 5500 1.608 24 20.876 ORDER 182 [SIC][W25][PVD][RH][6000NM] SiC 25 24 280 6000 1.754 24 21.637 ORDER 183 [SIC][W25][PVD][RH][6500NM] SiC 25 24 280 6500 1.901 24 22.399 ORDER 184 [SIC][W25][PVD][RH][7000NM] SiC 25 24 280 7000 2.047 24 23.160 ORDER 185 [SIC][W25][PVD][RH][7500NM] SiC 25 24 280 7500 2.193 24 23.922 ORDER 186 [SIC][W25][PVD][RH][8000NM] SiC 25 24 280 8000 2.339 24 24.683 ORDER 187 [SIC][W25][PVD][RH][8500NM] SiC 25 24 280 8500 2.485 24 25.445 ORDER 188 [SIC][W25][PVD][RH][9000NM] SiC 25 24 280 9000 2.632 24 26.206 ORDER 189 [SIC][W25][PVD][RH][9500NM] SiC 25 24 280 9500 2.778 24 26.968 ORDER 190 [SIC][W25][PVD][RH][10000NM] SiC 25 24 280 10000 2.924 24 27.729 ORDER 191 [SIC][W50][PVD][RH][1000NM] SiC 50 12 280 1000 0.292 12 28.046 ORDER 192 [SIC][W50][PVD][RH][1500NM] SiC 50 12 280 1500 0.439 12 29.569 ORDER 193 [SIC][W50][PVD][RH][2000NM] SiC 50 12 280 2000 0.585 12 31.092 ORDER 194 [SIC][W50][PVD][RH][2500NM] SiC 50 12 280 2500 0.731 12 32.615 ORDER 195 [SIC][W50][PVD][RH][3000NM] SiC 50 12 280 3000 0.877 12 34.137 ORDER 196 [SIC][W50][PVD][RH][3500NM] SiC 50 12 280 3500 1.023 12 35.660 ORDER 197 [SIC][W50][PVD][RH][4000NM] SiC 50 12 280 4000 1.170 12 37.183 ORDER 198 [SIC][W50][PVD][RH][4500NM] SiC 50 12 280 4500 1.316 12 38.706 ORDER 199 [SIC][W50][PVD][RH][5000NM] SiC 50 12 280 5000 1.462 12 40.229 ORDER 200 [SIC][W50][PVD][RH][5500NM] SiC 50 12 280 5500 1.608 12 41.752 ORDER 201 [SIC][W50][PVD][RH][6000NM] SiC 50 12 280 6000 1.754 12 43.275 ORDER 202 [SIC][W50][PVD][RH][6500NM] SiC 50 12 280 6500 1.901 12 44.798 ORDER 203 [SIC][W50][PVD][RH][7000NM] SiC 50 12 280 7000 2.047 12 46.321 ORDER 204 [SIC][W50][PVD][RH][7500NM] SiC 50 12 280 7500 2.193 12 47.844 ORDER 205 [SIC][W50][PVD][RH][8000NM] SiC 50 12 280 8000 2.339 12 49.366 ORDER 206 [SIC][W50][PVD][RH][8500NM] SiC 50 12 280 8500 2.485 12 50.889 ORDER 207 [SIC][W50][PVD][RH][9000NM] SiC 50 12 280 9000 2.632 12 52.412 ORDER 208 [SIC][W50][PVD][RH][9500NM] SiC 50 12 280 9500 2.778 12 53.935 ORDER 209 [SIC][W50][PVD][RH][10000NM] SiC 50 12 280 10000 2.924 12 55.458 ORDER 210 [SIC][W75][PVD][RH][1000NM] SiC 75 10 280 1000 0.292 10 33.655 ORDER 211 [SIC][W75][PVD][RH][1500NM] SiC 75 10 280 1500 0.439 10 35.482 ORDER 212 [SIC][W75][PVD][RH][2000NM] SiC 75 10 280 2000 0.585 10 37.310 ORDER 213 [SIC][W75][PVD][RH][2500NM] SiC 75 10 280 2500 0.731 10 39.137 ORDER 214 [SIC][W75][PVD][RH][3000NM] SiC 75 10 280 3000 0.877 10 40.965 ORDER 215 [SIC][W75][PVD][RH][3500NM] SiC 75 10 280 3500 1.023 10 42.792 ORDER 216 [SIC][W75][PVD][RH][4000NM] SiC 75 10 280 4000 1.170 10 44.620 ORDER 217 [SIC][W75][PVD][RH][4500NM] SiC 75 10 280 4500 1.316 10 46.447 ORDER 218 [SIC][W75][PVD][RH][5000NM] SiC 75 10 280 5000 1.462 10 48.275 ORDER 219 [SIC][W75][PVD][RH][5500NM] SiC 75 10 280 5500 1.608 10 50.102 ORDER 220 [SIC][W75][PVD][RH][6000NM] SiC 75 10 280 6000 1.754 10 51.930 ORDER 221 [SIC][W75][PVD][RH][6500NM] SiC 75 10 280 6500 1.901 10 53.757 ORDER 222 [SIC][W75][PVD][RH][7000NM] SiC 75 10 280 7000 2.047 10 55.585 ORDER 223 [SIC][W75][PVD][RH][7500NM] SiC 75 10 280 7500 2.193 10 57.412 ORDER 224 [SIC][W75][PVD][RH][8000NM] SiC 75 10 280 8000 2.339 10 59.240 ORDER 225 [SIC][W75][PVD][RH][8500NM] SiC 75 10 280 8500 2.485 10 61.067 ORDER 226 [SIC][W75][PVD][RH][9000NM] SiC 75 10 280 9000 2.632 10 62.895 ORDER 227 [SIC][W75][PVD][RH][9500NM] SiC 75 10 280 9500 2.778 10 64.722 ORDER 228 [SIC][W75][PVD][RH][10000NM] SiC 75 10 280 10000 2.924 10 66.550 ORDER 229 [SIC][W100][PVD][RH][1000NM] SiC 100 8 280 1000 0.292 8 42.069 ORDER 230 [SIC][W100][PVD][RH][1500NM] SiC 100 8 280 1500 0.439 8 44.353 ORDER 231 [SIC][W100][PVD][RH][2000NM] SiC 100 8 280 2000 0.585 8 46.637 ORDER 232 [SIC][W100][PVD][RH][2500NM] SiC 100 8 280 2500 0.731 8 48.922 ORDER 233 [SIC][W100][PVD][RH][3000NM] SiC 100 8 280 3000 0.877 8 51.206 ORDER 234 [SIC][W100][PVD][RH][3500NM] SiC 100 8 280 3500 1.023 8 53.490 ORDER 235 [SIC][W100][PVD][RH][4000NM] SiC 100 8 280 4000 1.170 8 55.775 ORDER 236 [SIC][W100][PVD][RH][4500NM] SiC 100 8 280 4500 1.316 8 58.059 ORDER 237 [SIC][W100][PVD][RH][5000NM] SiC 100 8 280 5000 1.462 8 60.344 ORDER 238 [SIC][W100][PVD][RH][5500NM] SiC 100 8 280 5500 1.608 8 62.628 ORDER 239 [SIC][W100][PVD][RH][6000NM] SiC 100 8 280 6000 1.754 8 64.912 ORDER 240 [SIC][W100][PVD][RH][6500NM] SiC 100 8 280 6500 1.901 8 67.197 ORDER 241 [SIC][W100][PVD][RH][7000NM] SiC 100 8 280 7000 2.047 8 69.481 ORDER 242 [SIC][W100][PVD][RH][7500NM] SiC 100 8 280 7500 2.193 8 71.765 ORDER 243 [SIC][W100][PVD][RH][8000NM] SiC 100 8 280 8000 2.339 8 74.050 ORDER 244 [SIC][W100][PVD][RH][8500NM] SiC 100 8 280 8500 2.485 8 76.334 ORDER 245 [SIC][W100][PVD][RH][9000NM] SiC 100 8 280 9000 2.632 8 78.618 ORDER 246 [SIC][W100][PVD][RH][9500NM] SiC 100 8 280 9500 2.778 8 80.903 ORDER 247 [SIC][W100][PVD][RH][10000NM] SiC 100 8 280 10000 2.924 8 83.187 ORDER 248 [SIC][W125][PVD][RH][1000NM] SiC 125 7 280 1000 0.292 7 48.079 ORDER 249 [SIC][W125][PVD][RH][1500NM] SiC 125 7 280 1500 0.439 7 50.689 ORDER 250 [SIC][W125][PVD][RH][2000NM] SiC 125 7 280 2000 0.585 7 53.300 ORDER 251 [SIC][W125][PVD][RH][2500NM] SiC 125 7 280 2500 0.731 7 55.911 ORDER 252 [SIC][W125][PVD][RH][3000NM] SiC 125 7 280 3000 0.877 7 58.521 ORDER 253 [SIC][W125][PVD][RH][3500NM] SiC 125 7 280 3500 1.023 7 61.132 ORDER 254 [SIC][W125][PVD][RH][4000NM] SiC 125 7 280 4000 1.170 7 63.743 ORDER 255 [SIC][W125][PVD][RH][4500NM] SiC 125 7 280 4500 1.316 7 66.353 ORDER 256 [SIC][W125][PVD][RH][5000NM] SiC 125 7 280 5000 1.462 7 68.964 ORDER 257 [SIC][W125][PVD][RH][5500NM] SiC 125 7 280 5500 1.608 7 71.575 ORDER 258 [SIC][W125][PVD][RH][6000NM] SiC 125 7 280 6000 1.754 7 74.185 ORDER 259 [SIC][W125][PVD][RH][6500NM] SiC 125 7 280 6500 1.901 7 76.796 ORDER 260 [SIC][W125][PVD][RH][7000NM] SiC 125 7 280 7000 2.047 7 79.407 ORDER 261 [SIC][W125][PVD][RH][7500NM] SiC 125 7 280 7500 2.193 7 82.018 ORDER 262 [SIC][W125][PVD][RH][8000NM] SiC 125 7 280 8000 2.339 7 84.628 ORDER 263 [SIC][W125][PVD][RH][8500NM] SiC 125 7 280 8500 2.485 7 87.239 ORDER 264 [SIC][W125][PVD][RH][9000NM] SiC 125 7 280 9000 2.632 7 89.850 ORDER 265 [SIC][W125][PVD][RH][9500NM] SiC 125 7 280 9500 2.778 7 92.460 ORDER 266 [SIC][W125][PVD][RH][10000NM] SiC 125 7 280 10000 2.924 7 95.071 ORDER 267 [SIC][W150][PVD][RH][1000NM] SiC 150 6 280 1000 0.292 6 56.092 ORDER 268 [SIC][W150][PVD][RH][1500NM] SiC 150 6 280 1500 0.439 6 59.137 ORDER 269 [SIC][W150][PVD][RH][2000NM] SiC 150 6 280 2000 0.585 6 62.183 ORDER 270 [SIC][W150][PVD][RH][2500NM] SiC 150 6 280 2500 0.731 6 65.229 ORDER 271 [SIC][W150][PVD][RH][3000NM] SiC 150 6 280 3000 0.877 6 68.275 ORDER 272 [SIC][W150][PVD][RH][3500NM] SiC 150 6 280 3500 1.023 6 71.321 ORDER 273 [SIC][W150][PVD][RH][4000NM] SiC 150 6 280 4000 1.170 6 74.366 ORDER 274 [SIC][W150][PVD][RH][4500NM] SiC 150 6 280 4500 1.316 6 77.412 ORDER 275 [SIC][W150][PVD][RH][5000NM] SiC 150 6 280 5000 1.462 6 80.458 ORDER 276 [SIC][W150][PVD][RH][5500NM] SiC 150 6 280 5500 1.608 6 83.504 ORDER 277 [SIC][W150][PVD][RH][6000NM] SiC 150 6 280 6000 1.754 6 86.550 ORDER 278 [SIC][W150][PVD][RH][6500NM] SiC 150 6 280 6500 1.901 6 89.596 ORDER 279 [SIC][W150][PVD][RH][7000NM] SiC 150 6 280 7000 2.047 6 92.641 ORDER 280 [SIC][W150][PVD][RH][7500NM] SiC 150 6 280 7500 2.193 6 95.687 ORDER 281 [SIC][W150][PVD][RH][8000NM] SiC 150 6 280 8000 2.339 6 98.733 ORDER 282 [SIC][W150][PVD][RH][8500NM] SiC 150 6 280 8500 2.485 6 101.779 ORDER 283 [SIC][W150][PVD][RH][9000NM] SiC 150 6 280 9000 2.632 6 104.825 ORDER 284 [SIC][W150][PVD][RH][9500NM] SiC 150 6 280 9500 2.778 6 107.870 ORDER 285 [SIC][W150][PVD][RH][10000NM] SiC 150 6 280 10000 2.924 6 110.916 ORDER 286 [SIC][W200][PVD][RH][1000NM] SiC 200 3 280 1000 0.292 3 112.183 ORDER 287 [SIC][W200][PVD][RH][1500NM] SiC 200 3 280 1500 0.439 3 118.275 ORDER 288 [SIC][W200][PVD][RH][2000NM] SiC 200 3 280 2000 0.585 3 124.366 ORDER 289 [SIC][W200][PVD][RH][2500NM] SiC 200 3 280 2500 0.731 3 130.458 ORDER 290 [SIC][W200][PVD][RH][3000NM] SiC 200 3 280 3000 0.877 3 136.550 ORDER 291 [SIC][W200][PVD][RH][3500NM] SiC 200 3 280 3500 1.023 3 142.641 ORDER 292 [SIC][W200][PVD][RH][4000NM] SiC 200 3 280 4000 1.170 3 148.733 ORDER 293 [SIC][W200][PVD][RH][4500NM] SiC 200 3 280 4500 1.316 3 154.825 ORDER 294 [SIC][W200][PVD][RH][5000NM] SiC 200 3 280 5000 1.462 3 160.916 ORDER 295 [SIC][W200][PVD][RH][5500NM] SiC 200 3 280 5500 1.608 3 167.008 ORDER 296 [SIC][W200][PVD][RH][6000NM] SiC 200 3 280 6000 1.754 3 173.099 ORDER 297 [SIC][W200][PVD][RH][6500NM] SiC 200 3 280 6500 1.901 3 179.191 ORDER 298 [SIC][W200][PVD][RH][7000NM] SiC 200 3 280 7000 2.047 3 185.283 ORDER 299 [SIC][W200][PVD][RH][7500NM] SiC 200 3 280 7500 2.193 3 191.374 ORDER 300 [SIC][W200][PVD][RH][8000NM] SiC 200 3 280 8000 2.339 3 197.466 ORDER 301 [SIC][W200][PVD][RH][8500NM] SiC 200 3 280 8500 2.485 3 203.558 ORDER 302 [SIC][W200][PVD][RH][9000NM] SiC 200 3 280 9000 2.632 3 209.649 ORDER 303 [SIC][W200][PVD][RH][9500NM] SiC 200 3 280 9500 2.778 3 215.741 ORDER 304 [SIC][W200][PVD][RH][10000NM] SiC 200 3 280 10000 2.924 3 221.832 ORDER 305 [SIC][W300][PVD][RH][1000NM] SiC 300 280 1000 0.292 RFQ 306 [SIC][W300][PVD][RH][1500NM] SiC 300 280 1500 0.439 RFQ 307 [SIC][W300][PVD][RH][2000NM] SiC 300 280 2000 0.585 RFQ 308 [SIC][W300][PVD][RH][2500NM] SiC 300 280 2500 0.731 RFQ 309 [SIC][W300][PVD][RH][3000NM] SiC 300 280 3000 0.877 RFQ 310 [SIC][W300][PVD][RH][3500NM] SiC 300 280 3500 1.023 RFQ 311 [SIC][W300][PVD][RH][4000NM] SiC 300 280 4000 1.170 RFQ 312 [SIC][W300][PVD][RH][4500NM] SiC 300 280 4500 1.316 RFQ 313 [SIC][W300][PVD][RH][5000NM] SiC 300 280 5000 1.462 RFQ 314 [SIC][W300][PVD][RH][5500NM] SiC 300 280 5500 1.608 RFQ 315 [SIC][W300][PVD][RH][6000NM] SiC 300 280 6000 1.754 RFQ 316 [SIC][W300][PVD][RH][6500NM] SiC 300 280 6500 1.901 RFQ 317 [SIC][W300][PVD][RH][7000NM] SiC 300 280 7000 2.047 RFQ 318 [SIC][W300][PVD][RH][7500NM] SiC 300 280 7500 2.193 RFQ 319 [SIC][W300][PVD][RH][8000NM] SiC 300 280 8000 2.339 RFQ 320 [SIC][W300][PVD][RH][8500NM] SiC 300 280 8500 2.485 RFQ 321 [SIC][W300][PVD][RH][9000NM] SiC 300 280 9000 2.632 RFQ 322 [SIC][W300][PVD][RH][9500NM] SiC 300 280 9500 2.778 RFQ 323 [SIC][W300][PVD][RH][10000NM] SiC 300 280 10000 2.924 RFQ 324 [SIC][Wnnn][PVD][RH][1000NM] SiC nnn 280 1000 0.292 RFQ 325 [SIC][Wnnn][PVD][RH][1500NM] SiC nnn 280 1500 0.439 RFQ 326 [SIC][Wnnn][PVD][RH][2000NM] SiC nnn 280 2000 0.585 RFQ 327 [SIC][Wnnn][PVD][RH][2500NM] SiC nnn 280 2500 0.731 RFQ 328 [SIC][Wnnn][PVD][RH][3000NM] SiC nnn 280 3000 0.877 RFQ 329 [SIC][Wnnn][PVD][RH][3500NM] SiC nnn 280 3500 1.023 RFQ 330 [SIC][Wnnn][PVD][RH][4000NM] SiC nnn 280 4000 1.170 RFQ 331 [SIC][Wnnn][PVD][RH][4500NM] SiC nnn 280 4500 1.316 RFQ 332 [SIC][Wnnn][PVD][RH][5000NM] SiC nnn 280 5000 1.462 RFQ 333 [SIC][Wnnn][PVD][RH][5500NM] SiC nnn 280 5500 1.608 RFQ 334 [SIC][Wnnn][PVD][RH][6000NM] SiC nnn 280 6000 1.754 RFQ 335 [SIC][Wnnn][PVD][RH][6500NM] SiC nnn 280 6500 1.901 RFQ 336 [SIC][Wnnn][PVD][RH][7000NM] SiC nnn 280 7000 2.047 RFQ 337 [SIC][Wnnn][PVD][RH][7500NM] SiC nnn 280 7500 2.193 RFQ 338 [SIC][Wnnn][PVD][RH][8000NM] SiC nnn 280 8000 2.339 RFQ 339 [SIC][Wnnn][PVD][RH][8500NM] SiC nnn 280 8500 2.485 RFQ 340 [SIC][Wnnn][PVD][RH][9000NM] SiC nnn 280 9000 2.632 RFQ 341 [SIC][Wnnn][PVD][RH][9500NM] SiC nnn 280 9500 2.778 RFQ 342 [SIC][Wnnn][PVD][RH][10000NM] SiC nnn 280 10000 2.924 RFQ 343 [SOI][W25][PVD][RH][1000NM] SOI 25 24 280 1000 0.292 24 14.023 ORDER 344 [SOI][W25][PVD][RH][1500NM] SOI 25 24 280 1500 0.439 24 14.784 ORDER 345 [SOI][W25][PVD][RH][2000NM] SOI 25 24 280 2000 0.585 24 15.546 ORDER 346 [SOI][W25][PVD][RH][2500NM] SOI 25 24 280 2500 0.731 24 16.307 ORDER 347 [SOI][W25][PVD][RH][3000NM] SOI 25 24 280 3000 0.877 24 17.069 ORDER 348 [SOI][W25][PVD][RH][3500NM] SOI 25 24 280 3500 1.023 24 17.830 ORDER 349 [SOI][W25][PVD][RH][4000NM] SOI 25 24 280 4000 1.170 24 18.592 ORDER 350 [SOI][W25][PVD][RH][4500NM] SOI 25 24 280 4500 1.316 24 19.353 ORDER 351 [SOI][W25][PVD][RH][5000NM] SOI 25 24 280 5000 1.462 24 20.115 ORDER 352 [SOI][W25][PVD][RH][5500NM] SOI 25 24 280 5500 1.608 24 20.876 ORDER 353 [SOI][W25][PVD][RH][6000NM] SOI 25 24 280 6000 1.754 24 21.637 ORDER 354 [SOI][W25][PVD][RH][6500NM] SOI 25 24 280 6500 1.901 24 22.399 ORDER 355 [SOI][W25][PVD][RH][7000NM] SOI 25 24 280 7000 2.047 24 23.160 ORDER 356 [SOI][W25][PVD][RH][7500NM] SOI 25 24 280 7500 2.193 24 23.922 ORDER 357 [SOI][W25][PVD][RH][8000NM] SOI 25 24 280 8000 2.339 24 24.683 ORDER 358 [SOI][W25][PVD][RH][8500NM] SOI 25 24 280 8500 2.485 24 25.445 ORDER 359 [SOI][W25][PVD][RH][9000NM] SOI 25 24 280 9000 2.632 24 26.206 ORDER 360 [SOI][W25][PVD][RH][9500NM] SOI 25 24 280 9500 2.778 24 26.968 ORDER 361 [SOI][W25][PVD][RH][10000NM] SOI 25 24 280 10000 2.924 24 27.729 ORDER 362 [SOI][W50][PVD][RH][1000NM] SOI 50 12 280 1000 0.292 12 28.046 ORDER 363 [SOI][W50][PVD][RH][1500NM] SOI 50 12 280 1500 0.439 12 29.569 ORDER 364 [SOI][W50][PVD][RH][2000NM] SOI 50 12 280 2000 0.585 12 31.092 ORDER 365 [SOI][W50][PVD][RH][2500NM] SOI 50 12 280 2500 0.731 12 32.615 ORDER 366 [SOI][W50][PVD][RH][3000NM] SOI 50 12 280 3000 0.877 12 34.137 ORDER 367 [SOI][W50][PVD][RH][3500NM] SOI 50 12 280 3500 1.023 12 35.660 ORDER 368 [SOI][W50][PVD][RH][4000NM] SOI 50 12 280 4000 1.170 12 37.183 ORDER 369 [SOI][W50][PVD][RH][4500NM] SOI 50 12 280 4500 1.316 12 38.706 ORDER 370 [SOI][W50][PVD][RH][5000NM] SOI 50 12 280 5000 1.462 12 40.229 ORDER 371 [SOI][W50][PVD][RH][5500NM] SOI 50 12 280 5500 1.608 12 41.752 ORDER 372 [SOI][W50][PVD][RH][6000NM] SOI 50 12 280 6000 1.754 12 43.275 ORDER 373 [SOI][W50][PVD][RH][6500NM] SOI 50 12 280 6500 1.901 12 44.798 ORDER 374 [SOI][W50][PVD][RH][7000NM] SOI 50 12 280 7000 2.047 12 46.321 ORDER 375 [SOI][W50][PVD][RH][7500NM] SOI 50 12 280 7500 2.193 12 47.844 ORDER 376 [SOI][W50][PVD][RH][8000NM] SOI 50 12 280 8000 2.339 12 49.366 ORDER 377 [SOI][W50][PVD][RH][8500NM] SOI 50 12 280 8500 2.485 12 50.889 ORDER 378 [SOI][W50][PVD][RH][9000NM] SOI 50 12 280 9000 2.632 12 52.412 ORDER 379 [SOI][W50][PVD][RH][9500NM] SOI 50 12 280 9500 2.778 12 53.935 ORDER 380 [SOI][W50][PVD][RH][10000NM] SOI 50 12 280 10000 2.924 12 55.458 ORDER 381 [SOI][W75][PVD][RH][1000NM] SOI 75 10 280 1000 0.292 10 33.655 ORDER 382 [SOI][W75][PVD][RH][1500NM] SOI 75 10 280 1500 0.439 10 35.482 ORDER 383 [SOI][W75][PVD][RH][2000NM] SOI 75 10 280 2000 0.585 10 37.310 ORDER 384 [SOI][W75][PVD][RH][2500NM] SOI 75 10 280 2500 0.731 10 39.137 ORDER 385 [SOI][W75][PVD][RH][3000NM] SOI 75 10 280 3000 0.877 10 40.965 ORDER 386 [SOI][W75][PVD][RH][3500NM] SOI 75 10 280 3500 1.023 10 42.792 ORDER 387 [SOI][W75][PVD][RH][4000NM] SOI 75 10 280 4000 1.170 10 44.620 ORDER 388 [SOI][W75][PVD][RH][4500NM] SOI 75 10 280 4500 1.316 10 46.447 ORDER 389 [SOI][W75][PVD][RH][5000NM] SOI 75 10 280 5000 1.462 10 48.275 ORDER 390 [SOI][W75][PVD][RH][5500NM] SOI 75 10 280 5500 1.608 10 50.102 ORDER 391 [SOI][W75][PVD][RH][6000NM] SOI 75 10 280 6000 1.754 10 51.930 ORDER 392 [SOI][W75][PVD][RH][6500NM] SOI 75 10 280 6500 1.901 10 53.757 ORDER 393 [SOI][W75][PVD][RH][7000NM] SOI 75 10 280 7000 2.047 10 55.585 ORDER 394 [SOI][W75][PVD][RH][7500NM] SOI 75 10 280 7500 2.193 10 57.412 ORDER 395 [SOI][W75][PVD][RH][8000NM] SOI 75 10 280 8000 2.339 10 59.240 ORDER 396 [SOI][W75][PVD][RH][8500NM] SOI 75 10 280 8500 2.485 10 61.067 ORDER 397 [SOI][W75][PVD][RH][9000NM] SOI 75 10 280 9000 2.632 10 62.895 ORDER 398 [SOI][W75][PVD][RH][9500NM] SOI 75 10 280 9500 2.778 10 64.722 ORDER 399 [SOI][W75][PVD][RH][10000NM] SOI 75 10 280 10000 2.924 10 66.550 ORDER 400 [SOI][W100][PVD][RH][1000NM] SOI 100 8 280 1000 0.292 8 42.069 ORDER 401 [SOI][W100][PVD][RH][1500NM] SOI 100 8 280 1500 0.439 8 44.353 ORDER 402 [SOI][W100][PVD][RH][2000NM] SOI 100 8 280 2000 0.585 8 46.637 ORDER 403 [SOI][W100][PVD][RH][2500NM] SOI 100 8 280 2500 0.731 8 48.922 ORDER 404 [SOI][W100][PVD][RH][3000NM] SOI 100 8 280 3000 0.877 8 51.206 ORDER 405 [SOI][W100][PVD][RH][3500NM] SOI 100 8 280 3500 1.023 8 53.490 ORDER 406 [SOI][W100][PVD][RH][4000NM] SOI 100 8 280 4000 1.170 8 55.775 ORDER 407 [SOI][W100][PVD][RH][4500NM] SOI 100 8 280 4500 1.316 8 58.059 ORDER 408 [SOI][W100][PVD][RH][5000NM] SOI 100 8 280 5000 1.462 8 60.344 ORDER 409 [SOI][W100][PVD][RH][5500NM] SOI 100 8 280 5500 1.608 8 62.628 ORDER 410 [SOI][W100][PVD][RH][6000NM] SOI 100 8 280 6000 1.754 8 64.912 ORDER 411 [SOI][W100][PVD][RH][6500NM] SOI 100 8 280 6500 1.901 8 67.197 ORDER 412 [SOI][W100][PVD][RH][7000NM] SOI 100 8 280 7000 2.047 8 69.481 ORDER 413 [SOI][W100][PVD][RH][7500NM] SOI 100 8 280 7500 2.193 8 71.765 ORDER 414 [SOI][W100][PVD][RH][8000NM] SOI 100 8 280 8000 2.339 8 74.050 ORDER 415 [SOI][W100][PVD][RH][8500NM] SOI 100 8 280 8500 2.485 8 76.334 ORDER 416 [SOI][W100][PVD][RH][9000NM] SOI 100 8 280 9000 2.632 8 78.618 ORDER 417 [SOI][W100][PVD][RH][9500NM] SOI 100 8 280 9500 2.778 8 80.903 ORDER 418 [SOI][W100][PVD][RH][10000NM] SOI 100 8 280 10000 2.924 8 83.187 ORDER 419 [SOI][W125][PVD][RH][1000NM] SOI 125 7 280 1000 0.292 7 48.079 ORDER 420 [SOI][W125][PVD][RH][1500NM] SOI 125 7 280 1500 0.439 7 50.689 ORDER 421 [SOI][W125][PVD][RH][2000NM] SOI 125 7 280 2000 0.585 7 53.300 ORDER 422 [SOI][W125][PVD][RH][2500NM] SOI 125 7 280 2500 0.731 7 55.911 ORDER 423 [SOI][W125][PVD][RH][3000NM] SOI 125 7 280 3000 0.877 7 58.521 ORDER 424 [SOI][W125][PVD][RH][3500NM] SOI 125 7 280 3500 1.023 7 61.132 ORDER 425 [SOI][W125][PVD][RH][4000NM] SOI 125 7 280 4000 1.170 7 63.743 ORDER 426 [SOI][W125][PVD][RH][4500NM] SOI 125 7 280 4500 1.316 7 66.353 ORDER 427 [SOI][W125][PVD][RH][5000NM] SOI 125 7 280 5000 1.462 7 68.964 ORDER 428 [SOI][W125][PVD][RH][5500NM] SOI 125 7 280 5500 1.608 7 71.575 ORDER 429 [SOI][W125][PVD][RH][6000NM] SOI 125 7 280 6000 1.754 7 74.185 ORDER 430 [SOI][W125][PVD][RH][6500NM] SOI 125 7 280 6500 1.901 7 76.796 ORDER 431 [SOI][W125][PVD][RH][7000NM] SOI 125 7 280 7000 2.047 7 79.407 ORDER 432 [SOI][W125][PVD][RH][7500NM] SOI 125 7 280 7500 2.193 7 82.018 ORDER 433 [SOI][W125][PVD][RH][8000NM] SOI 125 7 280 8000 2.339 7 84.628 ORDER 434 [SOI][W125][PVD][RH][8500NM] SOI 125 7 280 8500 2.485 7 87.239 ORDER 435 [SOI][W125][PVD][RH][9000NM] SOI 125 7 280 9000 2.632 7 89.850 ORDER 436 [SOI][W125][PVD][RH][9500NM] SOI 125 7 280 9500 2.778 7 92.460 ORDER 437 [SOI][W125][PVD][RH][10000NM] SOI 125 7 280 10000 2.924 7 95.071 ORDER 438 [SOI][W150][PVD][RH][1000NM] SOI 150 6 280 1000 0.292 6 56.092 ORDER 439 [SOI][W150][PVD][RH][1500NM] SOI 150 6 280 1500 0.439 6 59.137 ORDER 440 [SOI][W150][PVD][RH][2000NM] SOI 150 6 280 2000 0.585 6 62.183 ORDER 441 [SOI][W150][PVD][RH][2500NM] SOI 150 6 280 2500 0.731 6 65.229 ORDER 442 [SOI][W150][PVD][RH][3000NM] SOI 150 6 280 3000 0.877 6 68.275 ORDER 443 [SOI][W150][PVD][RH][3500NM] SOI 150 6 280 3500 1.023 6 71.321 ORDER 444 [SOI][W150][PVD][RH][4000NM] SOI 150 6 280 4000 1.170 6 74.366 ORDER 445 [SOI][W150][PVD][RH][4500NM] SOI 150 6 280 4500 1.316 6 77.412 ORDER 446 [SOI][W150][PVD][RH][5000NM] SOI 150 6 280 5000 1.462 6 80.458 ORDER 447 [SOI][W150][PVD][RH][5500NM] SOI 150 6 280 5500 1.608 6 83.504 ORDER 448 [SOI][W150][PVD][RH][6000NM] SOI 150 6 280 6000 1.754 6 86.550 ORDER 449 [SOI][W150][PVD][RH][6500NM] SOI 150 6 280 6500 1.901 6 89.596 ORDER 450 [SOI][W150][PVD][RH][7000NM] SOI 150 6 280 7000 2.047 6 92.641 ORDER 451 [SOI][W150][PVD][RH][7500NM] SOI 150 6 280 7500 2.193 6 95.687 ORDER 452 [SOI][W150][PVD][RH][8000NM] SOI 150 6 280 8000 2.339 6 98.733 ORDER 453 [SOI][W150][PVD][RH][8500NM] SOI 150 6 280 8500 2.485 6 101.779 ORDER 454 [SOI][W150][PVD][RH][9000NM] SOI 150 6 280 9000 2.632 6 104.825 ORDER 455 [SOI][W150][PVD][RH][9500NM] SOI 150 6 280 9500 2.778 6 107.870 ORDER 456 [SOI][W150][PVD][RH][10000NM] SOI 150 6 280 10000 2.924 6 110.916 ORDER 457 [SOI][W200][PVD][RH][1000NM] SOI 200 3 280 1000 0.292 3 112.183 ORDER 458 [SOI][W200][PVD][RH][1500NM] SOI 200 3 280 1500 0.439 3 118.275 ORDER 459 [SOI][W200][PVD][RH][2000NM] SOI 200 3 280 2000 0.585 3 124.366 ORDER 460 [SOI][W200][PVD][RH][2500NM] SOI 200 3 280 2500 0.731 3 130.458 ORDER 461 [SOI][W200][PVD][RH][3000NM] SOI 200 3 280 3000 0.877 3 136.550 ORDER 462 [SOI][W200][PVD][RH][3500NM] SOI 200 3 280 3500 1.023 3 142.641 ORDER 463 [SOI][W200][PVD][RH][4000NM] SOI 200 3 280 4000 1.170 3 148.733 ORDER 464 [SOI][W200][PVD][RH][4500NM] SOI 200 3 280 4500 1.316 3 154.825 ORDER 465 [SOI][W200][PVD][RH][5000NM] SOI 200 3 280 5000 1.462 3 160.916 ORDER 466 [SOI][W200][PVD][RH][5500NM] SOI 200 3 280 5500 1.608 3 167.008 ORDER 467 [SOI][W200][PVD][RH][6000NM] SOI 200 3 280 6000 1.754 3 173.099 ORDER 468 [SOI][W200][PVD][RH][6500NM] SOI 200 3 280 6500 1.901 3 179.191 ORDER 469 [SOI][W200][PVD][RH][7000NM] SOI 200 3 280 7000 2.047 3 185.283 ORDER 470 [SOI][W200][PVD][RH][7500NM] SOI 200 3 280 7500 2.193 3 191.374 ORDER 471 [SOI][W200][PVD][RH][8000NM] SOI 200 3 280 8000 2.339 3 197.466 ORDER 472 [SOI][W200][PVD][RH][8500NM] SOI 200 3 280 8500 2.485 3 203.558 ORDER 473 [SOI][W200][PVD][RH][9000NM] SOI 200 3 280 9000 2.632 3 209.649 ORDER 474 [SOI][W200][PVD][RH][9500NM] SOI 200 3 280 9500 2.778 3 215.741 ORDER 475 [SOI][W200][PVD][RH][10000NM] SOI 200 3 280 10000 2.924 3 221.832 ORDER 476 [SOI][W300][PVD][RH][1000NM] SOI 300 280 1000 0.292 RFQ 477 [SOI][W300][PVD][RH][1500NM] SOI 300 280 1500 0.439 RFQ 478 [SOI][W300][PVD][RH][2000NM] SOI 300 280 2000 0.585 RFQ 479 [SOI][W300][PVD][RH][2500NM] SOI 300 280 2500 0.731 RFQ 480 [SOI][W300][PVD][RH][3000NM] SOI 300 280 3000 0.877 RFQ 481 [SOI][W300][PVD][RH][3500NM] SOI 300 280 3500 1.023 RFQ 482 [SOI][W300][PVD][RH][4000NM] SOI 300 280 4000 1.170 RFQ 483 [SOI][W300][PVD][RH][4500NM] SOI 300 280 4500 1.316 RFQ 484 [SOI][W300][PVD][RH][5000NM] SOI 300 280 5000 1.462 RFQ 485 [SOI][W300][PVD][RH][5500NM] SOI 300 280 5500 1.608 RFQ 486 [SOI][W300][PVD][RH][6000NM] SOI 300 280 6000 1.754 RFQ 487 [SOI][W300][PVD][RH][6500NM] SOI 300 280 6500 1.901 RFQ 488 [SOI][W300][PVD][RH][7000NM] SOI 300 280 7000 2.047 RFQ 489 [SOI][W300][PVD][RH][7500NM] SOI 300 280 7500 2.193 RFQ 490 [SOI][W300][PVD][RH][8000NM] SOI 300 280 8000 2.339 RFQ 491 [SOI][W300][PVD][RH][8500NM] SOI 300 280 8500 2.485 RFQ 492 [SOI][W300][PVD][RH][9000NM] SOI 300 280 9000 2.632 RFQ 493 [SOI][W300][PVD][RH][9500NM] SOI 300 280 9500 2.778 RFQ 494 [SOI][W300][PVD][RH][10000NM] SOI 300 280 10000 2.924 RFQ 495 [SOI][Wnnn][PVD][RH][1000NM] SOI nnn 280 1000 0.292 RFQ 496 [SOI][Wnnn][PVD][RH][1500NM] SOI nnn 280 1500 0.439 RFQ 497 [SOI][Wnnn][PVD][RH][2000NM] SOI nnn 280 2000 0.585 RFQ 498 [SOI][Wnnn][PVD][RH][2500NM] SOI nnn 280 2500 0.731 RFQ 499 [SOI][Wnnn][PVD][RH][3000NM] SOI nnn 280 3000 0.877 RFQ 500 [SOI][Wnnn][PVD][RH][3500NM] SOI nnn 280 3500 1.023 RFQ 501 [SOI][Wnnn][PVD][RH][4000NM] SOI nnn 280 4000 1.170 RFQ 502 [SOI][Wnnn][PVD][RH][4500NM] SOI nnn 280 4500 1.316 RFQ 503 [SOI][Wnnn][PVD][RH][5000NM] SOI nnn 280 5000 1.462 RFQ 504 [SOI][Wnnn][PVD][RH][5500NM] SOI nnn 280 5500 1.608 RFQ 505 [SOI][Wnnn][PVD][RH][6000NM] SOI nnn 280 6000 1.754 RFQ 506 [SOI][Wnnn][PVD][RH][6500NM] SOI nnn 280 6500 1.901 RFQ 507 [SOI][Wnnn][PVD][RH][7000NM] SOI nnn 280 7000 2.047 RFQ 508 [SOI][Wnnn][PVD][RH][7500NM] SOI nnn 280 7500 2.193 RFQ 509 [SOI][Wnnn][PVD][RH][8000NM] SOI nnn 280 8000 2.339 RFQ 510 [SOI][Wnnn][PVD][RH][8500NM] SOI nnn 280 8500 2.485 RFQ 511 [SOI][Wnnn][PVD][RH][9000NM] SOI nnn 280 9000 2.632 RFQ 512 [SOI][Wnnn][PVD][RH][9500NM] SOI nnn 280 9500 2.778 RFQ 513 [SOI][Wnnn][PVD][RH][10000NM] SOI nnn 280 10000 2.924 RFQ 514 [SIGE][W25][PVD][RH][1000NM] SiGe 25 24 280 1000 0.292 24 14.023 ORDER 515 [SIGE][W25][PVD][RH][1500NM] SiGe 25 24 280 1500 0.439 24 14.784 ORDER 516 [SIGE][W25][PVD][RH][2000NM] SiGe 25 24 280 2000 0.585 24 15.546 ORDER 517 [SIGE][W25][PVD][RH][2500NM] SiGe 25 24 280 2500 0.731 24 16.307 ORDER 518 [SIGE][W25][PVD][RH][3000NM] SiGe 25 24 280 3000 0.877 24 17.069 ORDER 519 [SIGE][W25][PVD][RH][3500NM] SiGe 25 24 280 3500 1.023 24 17.830 ORDER 520 [SIGE][W25][PVD][RH][4000NM] SiGe 25 24 280 4000 1.170 24 18.592 ORDER 521 [SIGE][W25][PVD][RH][4500NM] SiGe 25 24 280 4500 1.316 24 19.353 ORDER 522 [SIGE][W25][PVD][RH][5000NM] SiGe 25 24 280 5000 1.462 24 20.115 ORDER 523 [SIGE][W25][PVD][RH][5500NM] SiGe 25 24 280 5500 1.608 24 20.876 ORDER 524 [SIGE][W25][PVD][RH][6000NM] SiGe 25 24 280 6000 1.754 24 21.637 ORDER 525 [SIGE][W25][PVD][RH][6500NM] SiGe 25 24 280 6500 1.901 24 22.399 ORDER 526 [SIGE][W25][PVD][RH][7000NM] SiGe 25 24 280 7000 2.047 24 23.160 ORDER 527 [SIGE][W25][PVD][RH][7500NM] SiGe 25 24 280 7500 2.193 24 23.922 ORDER 528 [SIGE][W25][PVD][RH][8000NM] SiGe 25 24 280 8000 2.339 24 24.683 ORDER 529 [SIGE][W25][PVD][RH][8500NM] SiGe 25 24 280 8500 2.485 24 25.445 ORDER 530 [SIGE][W25][PVD][RH][9000NM] SiGe 25 24 280 9000 2.632 24 26.206 ORDER 531 [SIGE][W25][PVD][RH][9500NM] SiGe 25 24 280 9500 2.778 24 26.968 ORDER 532 [SIGE][W25][PVD][RH][10000NM] SiGe 25 24 280 10000 2.924 24 27.729 ORDER 533 [SIGE][W50][PVD][RH][1000NM] SiGe 50 12 280 1000 0.292 12 28.046 ORDER 534 [SIGE][W50][PVD][RH][1500NM] SiGe 50 12 280 1500 0.439 12 29.569 ORDER 535 [SIGE][W50][PVD][RH][2000NM] SiGe 50 12 280 2000 0.585 12 31.092 ORDER 536 [SIGE][W50][PVD][RH][2500NM] SiGe 50 12 280 2500 0.731 12 32.615 ORDER 537 [SIGE][W50][PVD][RH][3000NM] SiGe 50 12 280 3000 0.877 12 34.137 ORDER 538 [SIGE][W50][PVD][RH][3500NM] SiGe 50 12 280 3500 1.023 12 35.660 ORDER 539 [SIGE][W50][PVD][RH][4000NM] SiGe 50 12 280 4000 1.170 12 37.183 ORDER 540 [SIGE][W50][PVD][RH][4500NM] SiGe 50 12 280 4500 1.316 12 38.706 ORDER 541 [SIGE][W50][PVD][RH][5000NM] SiGe 50 12 280 5000 1.462 12 40.229 ORDER 542 [SIGE][W50][PVD][RH][5500NM] SiGe 50 12 280 5500 1.608 12 41.752 ORDER 543 [SIGE][W50][PVD][RH][6000NM] SiGe 50 12 280 6000 1.754 12 43.275 ORDER 544 [SIGE][W50][PVD][RH][6500NM] SiGe 50 12 280 6500 1.901 12 44.798 ORDER 545 [SIGE][W50][PVD][RH][7000NM] SiGe 50 12 280 7000 2.047 12 46.321 ORDER 546 [SIGE][W50][PVD][RH][7500NM] SiGe 50 12 280 7500 2.193 12 47.844 ORDER 547 [SIGE][W50][PVD][RH][8000NM] SiGe 50 12 280 8000 2.339 12 49.366 ORDER 548 [SIGE][W50][PVD][RH][8500NM] SiGe 50 12 280 8500 2.485 12 50.889 ORDER 549 [SIGE][W50][PVD][RH][9000NM] SiGe 50 12 280 9000 2.632 12 52.412 ORDER 550 [SIGE][W50][PVD][RH][9500NM] SiGe 50 12 280 9500 2.778 12 53.935 ORDER 551 [SIGE][W50][PVD][RH][10000NM] SiGe 50 12 280 10000 2.924 12 55.458 ORDER 552 [SIGE][W75][PVD][RH][1000NM] SiGe 75 10 280 1000 0.292 10 33.655 ORDER 553 [SIGE][W75][PVD][RH][1500NM] SiGe 75 10 280 1500 0.439 10 35.482 ORDER 554 [SIGE][W75][PVD][RH][2000NM] SiGe 75 10 280 2000 0.585 10 37.310 ORDER 555 [SIGE][W75][PVD][RH][2500NM] SiGe 75 10 280 2500 0.731 10 39.137 ORDER 556 [SIGE][W75][PVD][RH][3000NM] SiGe 75 10 280 3000 0.877 10 40.965 ORDER 557 [SIGE][W75][PVD][RH][3500NM] SiGe 75 10 280 3500 1.023 10 42.792 ORDER 558 [SIGE][W75][PVD][RH][4000NM] SiGe 75 10 280 4000 1.170 10 44.620 ORDER 559 [SIGE][W75][PVD][RH][4500NM] SiGe 75 10 280 4500 1.316 10 46.447 ORDER 560 [SIGE][W75][PVD][RH][5000NM] SiGe 75 10 280 5000 1.462 10 48.275 ORDER 561 [SIGE][W75][PVD][RH][5500NM] SiGe 75 10 280 5500 1.608 10 50.102 ORDER 562 [SIGE][W75][PVD][RH][6000NM] SiGe 75 10 280 6000 1.754 10 51.930 ORDER 563 [SIGE][W75][PVD][RH][6500NM] SiGe 75 10 280 6500 1.901 10 53.757 ORDER 564 [SIGE][W75][PVD][RH][7000NM] SiGe 75 10 280 7000 2.047 10 55.585 ORDER 565 [SIGE][W75][PVD][RH][7500NM] SiGe 75 10 280 7500 2.193 10 57.412 ORDER 566 [SIGE][W75][PVD][RH][8000NM] SiGe 75 10 280 8000 2.339 10 59.240 ORDER 567 [SIGE][W75][PVD][RH][8500NM] SiGe 75 10 280 8500 2.485 10 61.067 ORDER 568 [SIGE][W75][PVD][RH][9000NM] SiGe 75 10 280 9000 2.632 10 62.895 ORDER 569 [SIGE][W75][PVD][RH][9500NM] SiGe 75 10 280 9500 2.778 10 64.722 ORDER 570 [SIGE][W75][PVD][RH][10000NM] SiGe 75 10 280 10000 2.924 10 66.550 ORDER 571 [SIGE][W100][PVD][RH][1000NM] SiGe 100 8 280 1000 0.292 8 42.069 ORDER 572 [SIGE][W100][PVD][RH][1500NM] SiGe 100 8 280 1500 0.439 8 44.353 ORDER 573 [SIGE][W100][PVD][RH][2000NM] SiGe 100 8 280 2000 0.585 8 46.637 ORDER 574 [SIGE][W100][PVD][RH][2500NM] SiGe 100 8 280 2500 0.731 8 48.922 ORDER 575 [SIGE][W100][PVD][RH][3000NM] SiGe 100 8 280 3000 0.877 8 51.206 ORDER 576 [SIGE][W100][PVD][RH][3500NM] SiGe 100 8 280 3500 1.023 8 53.490 ORDER 577 [SIGE][W100][PVD][RH][4000NM] SiGe 100 8 280 4000 1.170 8 55.775 ORDER 578 [SIGE][W100][PVD][RH][4500NM] SiGe 100 8 280 4500 1.316 8 58.059 ORDER 579 [SIGE][W100][PVD][RH][5000NM] SiGe 100 8 280 5000 1.462 8 60.344 ORDER 580 [SIGE][W100][PVD][RH][5500NM] SiGe 100 8 280 5500 1.608 8 62.628 ORDER 581 [SIGE][W100][PVD][RH][6000NM] SiGe 100 8 280 6000 1.754 8 64.912 ORDER 582 [SIGE][W100][PVD][RH][6500NM] SiGe 100 8 280 6500 1.901 8 67.197 ORDER 583 [SIGE][W100][PVD][RH][7000NM] SiGe 100 8 280 7000 2.047 8 69.481 ORDER 584 [SIGE][W100][PVD][RH][7500NM] SiGe 100 8 280 7500 2.193 8 71.765 ORDER 585 [SIGE][W100][PVD][RH][8000NM] SiGe 100 8 280 8000 2.339 8 74.050 ORDER 586 [SIGE][W100][PVD][RH][8500NM] SiGe 100 8 280 8500 2.485 8 76.334 ORDER 587 [SIGE][W100][PVD][RH][9000NM] SiGe 100 8 280 9000 2.632 8 78.618 ORDER 588 [SIGE][W100][PVD][RH][9500NM] SiGe 100 8 280 9500 2.778 8 80.903 ORDER 589 [SIGE][W100][PVD][RH][10000NM] SiGe 100 8 280 10000 2.924 8 83.187 ORDER 590 [SIGE][W125][PVD][RH][1000NM] SiGe 125 7 280 1000 0.292 7 48.079 ORDER 591 [SIGE][W125][PVD][RH][1500NM] SiGe 125 7 280 1500 0.439 7 50.689 ORDER 592 [SIGE][W125][PVD][RH][2000NM] SiGe 125 7 280 2000 0.585 7 53.300 ORDER 593 [SIGE][W125][PVD][RH][2500NM] SiGe 125 7 280 2500 0.731 7 55.911 ORDER 594 [SIGE][W125][PVD][RH][3000NM] SiGe 125 7 280 3000 0.877 7 58.521 ORDER 595 [SIGE][W125][PVD][RH][3500NM] SiGe 125 7 280 3500 1.023 7 61.132 ORDER 596 [SIGE][W125][PVD][RH][4000NM] SiGe 125 7 280 4000 1.170 7 63.743 ORDER 597 [SIGE][W125][PVD][RH][4500NM] SiGe 125 7 280 4500 1.316 7 66.353 ORDER 598 [SIGE][W125][PVD][RH][5000NM] SiGe 125 7 280 5000 1.462 7 68.964 ORDER 599 [SIGE][W125][PVD][RH][5500NM] SiGe 125 7 280 5500 1.608 7 71.575 ORDER 600 [SIGE][W125][PVD][RH][6000NM] SiGe 125 7 280 6000 1.754 7 74.185 ORDER 601 [SIGE][W125][PVD][RH][6500NM] SiGe 125 7 280 6500 1.901 7 76.796 ORDER 602 [SIGE][W125][PVD][RH][7000NM] SiGe 125 7 280 7000 2.047 7 79.407 ORDER 603 [SIGE][W125][PVD][RH][7500NM] SiGe 125 7 280 7500 2.193 7 82.018 ORDER 604 [SIGE][W125][PVD][RH][8000NM] SiGe 125 7 280 8000 2.339 7 84.628 ORDER 605 [SIGE][W125][PVD][RH][8500NM] SiGe 125 7 280 8500 2.485 7 87.239 ORDER 606 [SIGE][W125][PVD][RH][9000NM] SiGe 125 7 280 9000 2.632 7 89.850 ORDER 607 [SIGE][W125][PVD][RH][9500NM] SiGe 125 7 280 9500 2.778 7 92.460 ORDER 608 [SIGE][W125][PVD][RH][10000NM] SiGe 125 7 280 10000 2.924 7 95.071 ORDER 609 [SIGE][W150][PVD][RH][1000NM] SiGe 150 6 280 1000 0.292 6 56.092 ORDER 610 [SIGE][W150][PVD][RH][1500NM] SiGe 150 6 280 1500 0.439 6 59.137 ORDER 611 [SIGE][W150][PVD][RH][2000NM] SiGe 150 6 280 2000 0.585 6 62.183 ORDER 612 [SIGE][W150][PVD][RH][2500NM] SiGe 150 6 280 2500 0.731 6 65.229 ORDER 613 [SIGE][W150][PVD][RH][3000NM] SiGe 150 6 280 3000 0.877 6 68.275 ORDER 614 [SIGE][W150][PVD][RH][3500NM] SiGe 150 6 280 3500 1.023 6 71.321 ORDER 615 [SIGE][W150][PVD][RH][4000NM] SiGe 150 6 280 4000 1.170 6 74.366 ORDER 616 [SIGE][W150][PVD][RH][4500NM] SiGe 150 6 280 4500 1.316 6 77.412 ORDER 617 [SIGE][W150][PVD][RH][5000NM] SiGe 150 6 280 5000 1.462 6 80.458 ORDER 618 [SIGE][W150][PVD][RH][5500NM] SiGe 150 6 280 5500 1.608 6 83.504 ORDER 619 [SIGE][W150][PVD][RH][6000NM] SiGe 150 6 280 6000 1.754 6 86.550 ORDER 620 [SIGE][W150][PVD][RH][6500NM] SiGe 150 6 280 6500 1.901 6 89.596 ORDER 621 [SIGE][W150][PVD][RH][7000NM] SiGe 150 6 280 7000 2.047 6 92.641 ORDER 622 [SIGE][W150][PVD][RH][7500NM] SiGe 150 6 280 7500 2.193 6 95.687 ORDER 623 [SIGE][W150][PVD][RH][8000NM] SiGe 150 6 280 8000 2.339 6 98.733 ORDER 624 [SIGE][W150][PVD][RH][8500NM] SiGe 150 6 280 8500 2.485 6 101.779 ORDER 625 [SIGE][W150][PVD][RH][9000NM] SiGe 150 6 280 9000 2.632 6 104.825 ORDER 626 [SIGE][W150][PVD][RH][9500NM] SiGe 150 6 280 9500 2.778 6 107.870 ORDER 627 [SIGE][W150][PVD][RH][10000NM] SiGe 150 6 280 10000 2.924 6 110.916 ORDER 628 [SIGE][W200][PVD][RH][1000NM] SiGe 200 3 280 1000 0.292 3 112.183 ORDER 629 [SIGE][W200][PVD][RH][1500NM] SiGe 200 3 280 1500 0.439 3 118.275 ORDER 630 [SIGE][W200][PVD][RH][2000NM] SiGe 200 3 280 2000 0.585 3 124.366 ORDER 631 [SIGE][W200][PVD][RH][2500NM] SiGe 200 3 280 2500 0.731 3 130.458 ORDER 632 [SIGE][W200][PVD][RH][3000NM] SiGe 200 3 280 3000 0.877 3 136.550 ORDER 633 [SIGE][W200][PVD][RH][3500NM] SiGe 200 3 280 3500 1.023 3 142.641 ORDER 634 [SIGE][W200][PVD][RH][4000NM] SiGe 200 3 280 4000 1.170 3 148.733 ORDER 635 [SIGE][W200][PVD][RH][4500NM] SiGe 200 3 280 4500 1.316 3 154.825 ORDER 636 [SIGE][W200][PVD][RH][5000NM] SiGe 200 3 280 5000 1.462 3 160.916 ORDER 637 [SIGE][W200][PVD][RH][5500NM] SiGe 200 3 280 5500 1.608 3 167.008 ORDER 638 [SIGE][W200][PVD][RH][6000NM] SiGe 200 3 280 6000 1.754 3 173.099 ORDER 639 [SIGE][W200][PVD][RH][6500NM] SiGe 200 3 280 6500 1.901 3 179.191 ORDER 640 [SIGE][W200][PVD][RH][7000NM] SiGe 200 3 280 7000 2.047 3 185.283 ORDER 641 [SIGE][W200][PVD][RH][7500NM] SiGe 200 3 280 7500 2.193 3 191.374 ORDER 642 [SIGE][W200][PVD][RH][8000NM] SiGe 200 3 280 8000 2.339 3 197.466 ORDER 643 [SIGE][W200][PVD][RH][8500NM] SiGe 200 3 280 8500 2.485 3 203.558 ORDER 644 [SIGE][W200][PVD][RH][9000NM] SiGe 200 3 280 9000 2.632 3 209.649 ORDER 645 [SIGE][W200][PVD][RH][9500NM] SiGe 200 3 280 9500 2.778 3 215.741 ORDER 646 [SIGE][W200][PVD][RH][10000NM] SiGe 200 3 280 10000 2.924 3 221.832 ORDER 647 [SIGE][W300][PVD][RH][1000NM] SiGe 300 280 1000 0.292 RFQ 648 [SIGE][W300][PVD][RH][1500NM] SiGe 300 280 1500 0.439 RFQ 649 [SIGE][W300][PVD][RH][2000NM] SiGe 300 280 2000 0.585 RFQ 650 [SIGE][W300][PVD][RH][2500NM] SiGe 300 280 2500 0.731 RFQ 651 [SIGE][W300][PVD][RH][3000NM] SiGe 300 280 3000 0.877 RFQ 652 [SIGE][W300][PVD][RH][3500NM] SiGe 300 280 3500 1.023 RFQ 653 [SIGE][W300][PVD][RH][4000NM] SiGe 300 280 4000 1.170 RFQ 654 [SIGE][W300][PVD][RH][4500NM] SiGe 300 280 4500 1.316 RFQ 655 [SIGE][W300][PVD][RH][5000NM] SiGe 300 280 5000 1.462 RFQ 656 [SIGE][W300][PVD][RH][5500NM] SiGe 300 280 5500 1.608 RFQ 657 [SIGE][W300][PVD][RH][6000NM] SiGe 300 280 6000 1.754 RFQ 658 [SIGE][W300][PVD][RH][6500NM] SiGe 300 280 6500 1.901 RFQ 659 [SIGE][W300][PVD][RH][7000NM] SiGe 300 280 7000 2.047 RFQ 660 [SIGE][W300][PVD][RH][7500NM] SiGe 300 280 7500 2.193 RFQ 661 [SIGE][W300][PVD][RH][8000NM] SiGe 300 280 8000 2.339 RFQ 662 [SIGE][W300][PVD][RH][8500NM] SiGe 300 280 8500 2.485 RFQ 663 [SIGE][W300][PVD][RH][9000NM] SiGe 300 280 9000 2.632 RFQ 664 [SIGE][W300][PVD][RH][9500NM] SiGe 300 280 9500 2.778 RFQ 665 [SIGE][W300][PVD][RH][10000NM] SiGe 300 280 10000 2.924 RFQ 666 [SIGE][Wnnn][PVD][RH][1000NM] SiGe nnn 280 1000 0.292 RFQ 667 [SIGE][Wnnn][PVD][RH][1500NM] SiGe nnn 280 1500 0.439 RFQ 668 [SIGE][Wnnn][PVD][RH][2000NM] SiGe nnn 280 2000 0.585 RFQ 669 [SIGE][Wnnn][PVD][RH][2500NM] SiGe nnn 280 2500 0.731 RFQ 670 [SIGE][Wnnn][PVD][RH][3000NM] SiGe nnn 280 3000 0.877 RFQ 671 [SIGE][Wnnn][PVD][RH][3500NM] SiGe nnn 280 3500 1.023 RFQ 672 [SIGE][Wnnn][PVD][RH][4000NM] SiGe nnn 280 4000 1.170 RFQ 673 [SIGE][Wnnn][PVD][RH][4500NM] SiGe nnn 280 4500 1.316 RFQ 674 [SIGE][Wnnn][PVD][RH][5000NM] SiGe nnn 280 5000 1.462 RFQ 675 [SIGE][Wnnn][PVD][RH][5500NM] SiGe nnn 280 5500 1.608 RFQ 676 [SIGE][Wnnn][PVD][RH][6000NM] SiGe nnn 280 6000 1.754 RFQ 677 [SIGE][Wnnn][PVD][RH][6500NM] SiGe nnn 280 6500 1.901 RFQ 678 [SIGE][Wnnn][PVD][RH][7000NM] SiGe nnn 280 7000 2.047 RFQ 679 [SIGE][Wnnn][PVD][RH][7500NM] SiGe nnn 280 7500 2.193 RFQ 680 [SIGE][Wnnn][PVD][RH][8000NM] SiGe nnn 280 8000 2.339 RFQ 681 [SIGE][Wnnn][PVD][RH][8500NM] SiGe nnn 280 8500 2.485 RFQ 682 [SIGE][Wnnn][PVD][RH][9000NM] SiGe nnn 280 9000 2.632 RFQ 683 [SIGE][Wnnn][PVD][RH][9500NM] SiGe nnn 280 9500 2.778 RFQ 684 [SIGE][Wnnn][PVD][RH][10000NM] SiGe nnn 280 10000 2.924 RFQ 685 [QZ][W25][PVD][RH][1000NM] QZ 25 24 280 1000 0.292 24 14.023 ORDER 686 [QZ][W25][PVD][RH][1500NM] QZ 25 24 280 1500 0.439 24 14.784 ORDER 687 [QZ][W25][PVD][RH][2000NM] QZ 25 24 280 2000 0.585 24 15.546 ORDER 688 [QZ][W25][PVD][RH][2500NM] QZ 25 24 280 2500 0.731 24 16.307 ORDER 689 [QZ][W25][PVD][RH][3000NM] QZ 25 24 280 3000 0.877 24 17.069 ORDER 690 [QZ][W25][PVD][RH][3500NM] QZ 25 24 280 3500 1.023 24 17.830 ORDER 691 [QZ][W25][PVD][RH][4000NM] QZ 25 24 280 4000 1.170 24 18.592 ORDER 692 [QZ][W25][PVD][RH][4500NM] QZ 25 24 280 4500 1.316 24 19.353 ORDER 693 [QZ][W25][PVD][RH][5000NM] QZ 25 24 280 5000 1.462 24 20.115 ORDER 694 [QZ][W25][PVD][RH][5500NM] QZ 25 24 280 5500 1.608 24 20.876 ORDER 695 [QZ][W25][PVD][RH][6000NM] QZ 25 24 280 6000 1.754 24 21.637 ORDER 696 [QZ][W25][PVD][RH][6500NM] QZ 25 24 280 6500 1.901 24 22.399 ORDER 697 [QZ][W25][PVD][RH][7000NM] QZ 25 24 280 7000 2.047 24 23.160 ORDER 698 [QZ][W25][PVD][RH][7500NM] QZ 25 24 280 7500 2.193 24 23.922 ORDER 699 [QZ][W25][PVD][RH][8000NM] QZ 25 24 280 8000 2.339 24 24.683 ORDER 700 [QZ][W25][PVD][RH][8500NM] QZ 25 24 280 8500 2.485 24 25.445 ORDER 701 [QZ][W25][PVD][RH][9000NM] QZ 25 24 280 9000 2.632 24 26.206 ORDER 702 [QZ][W25][PVD][RH][9500NM] QZ 25 24 280 9500 2.778 24 26.968 ORDER 703 [QZ][W25][PVD][RH][10000NM] QZ 25 24 280 10000 2.924 24 27.729 ORDER 704 [QZ][W50][PVD][RH][1000NM] QZ 50 12 280 1000 0.292 12 28.046 ORDER 705 [QZ][W50][PVD][RH][1500NM] QZ 50 12 280 1500 0.439 12 29.569 ORDER 706 [QZ][W50][PVD][RH][2000NM] QZ 50 12 280 2000 0.585 12 31.092 ORDER 707 [QZ][W50][PVD][RH][2500NM] QZ 50 12 280 2500 0.731 12 32.615 ORDER 708 [QZ][W50][PVD][RH][3000NM] QZ 50 12 280 3000 0.877 12 34.137 ORDER 709 [QZ][W50][PVD][RH][3500NM] QZ 50 12 280 3500 1.023 12 35.660 ORDER 710 [QZ][W50][PVD][RH][4000NM] QZ 50 12 280 4000 1.170 12 37.183 ORDER 711 [QZ][W50][PVD][RH][4500NM] QZ 50 12 280 4500 1.316 12 38.706 ORDER 712 [QZ][W50][PVD][RH][5000NM] QZ 50 12 280 5000 1.462 12 40.229 ORDER 713 [QZ][W50][PVD][RH][5500NM] QZ 50 12 280 5500 1.608 12 41.752 ORDER 714 [QZ][W50][PVD][RH][6000NM] QZ 50 12 280 6000 1.754 12 43.275 ORDER 715 [QZ][W50][PVD][RH][6500NM] QZ 50 12 280 6500 1.901 12 44.798 ORDER 716 [QZ][W50][PVD][RH][7000NM] QZ 50 12 280 7000 2.047 12 46.321 ORDER 717 [QZ][W50][PVD][RH][7500NM] QZ 50 12 280 7500 2.193 12 47.844 ORDER 718 [QZ][W50][PVD][RH][8000NM] QZ 50 12 280 8000 2.339 12 49.366 ORDER 719 [QZ][W50][PVD][RH][8500NM] QZ 50 12 280 8500 2.485 12 50.889 ORDER 720 [QZ][W50][PVD][RH][9000NM] QZ 50 12 280 9000 2.632 12 52.412 ORDER 721 [QZ][W50][PVD][RH][9500NM] QZ 50 12 280 9500 2.778 12 53.935 ORDER 722 [QZ][W50][PVD][RH][10000NM] QZ 50 12 280 10000 2.924 12 55.458 ORDER 723 [QZ][W75][PVD][RH][1000NM] QZ 75 10 280 1000 0.292 10 33.655 ORDER 724 [QZ][W75][PVD][RH][1500NM] QZ 75 10 280 1500 0.439 10 35.482 ORDER 725 [QZ][W75][PVD][RH][2000NM] QZ 75 10 280 2000 0.585 10 37.310 ORDER 726 [QZ][W75][PVD][RH][2500NM] QZ 75 10 280 2500 0.731 10 39.137 ORDER 727 [QZ][W75][PVD][RH][3000NM] QZ 75 10 280 3000 0.877 10 40.965 ORDER 728 [QZ][W75][PVD][RH][3500NM] QZ 75 10 280 3500 1.023 10 42.792 ORDER 729 [QZ][W75][PVD][RH][4000NM] QZ 75 10 280 4000 1.170 10 44.620 ORDER 730 [QZ][W75][PVD][RH][4500NM] QZ 75 10 280 4500 1.316 10 46.447 ORDER 731 [QZ][W75][PVD][RH][5000NM] QZ 75 10 280 5000 1.462 10 48.275 ORDER 732 [QZ][W75][PVD][RH][5500NM] QZ 75 10 280 5500 1.608 10 50.102 ORDER 733 [QZ][W75][PVD][RH][6000NM] QZ 75 10 280 6000 1.754 10 51.930 ORDER 734 [QZ][W75][PVD][RH][6500NM] QZ 75 10 280 6500 1.901 10 53.757 ORDER 735 [QZ][W75][PVD][RH][7000NM] QZ 75 10 280 7000 2.047 10 55.585 ORDER 736 [QZ][W75][PVD][RH][7500NM] QZ 75 10 280 7500 2.193 10 57.412 ORDER 737 [QZ][W75][PVD][RH][8000NM] QZ 75 10 280 8000 2.339 10 59.240 ORDER 738 [QZ][W75][PVD][RH][8500NM] QZ 75 10 280 8500 2.485 10 61.067 ORDER 739 [QZ][W75][PVD][RH][9000NM] QZ 75 10 280 9000 2.632 10 62.895 ORDER 740 [QZ][W75][PVD][RH][9500NM] QZ 75 10 280 9500 2.778 10 64.722 ORDER 741 [QZ][W75][PVD][RH][10000NM] QZ 75 10 280 10000 2.924 10 66.550 ORDER 742 [QZ][W100][PVD][RH][1000NM] QZ 100 8 280 1000 0.292 8 42.069 ORDER 743 [QZ][W100][PVD][RH][1500NM] QZ 100 8 280 1500 0.439 8 44.353 ORDER 744 [QZ][W100][PVD][RH][2000NM] QZ 100 8 280 2000 0.585 8 46.637 ORDER 745 [QZ][W100][PVD][RH][2500NM] QZ 100 8 280 2500 0.731 8 48.922 ORDER 746 [QZ][W100][PVD][RH][3000NM] QZ 100 8 280 3000 0.877 8 51.206 ORDER 747 [QZ][W100][PVD][RH][3500NM] QZ 100 8 280 3500 1.023 8 53.490 ORDER 748 [QZ][W100][PVD][RH][4000NM] QZ 100 8 280 4000 1.170 8 55.775 ORDER 749 [QZ][W100][PVD][RH][4500NM] QZ 100 8 280 4500 1.316 8 58.059 ORDER 750 [QZ][W100][PVD][RH][5000NM] QZ 100 8 280 5000 1.462 8 60.344 ORDER 751 [QZ][W100][PVD][RH][5500NM] QZ 100 8 280 5500 1.608 8 62.628 ORDER 752 [QZ][W100][PVD][RH][6000NM] QZ 100 8 280 6000 1.754 8 64.912 ORDER 753 [QZ][W100][PVD][RH][6500NM] QZ 100 8 280 6500 1.901 8 67.197 ORDER 754 [QZ][W100][PVD][RH][7000NM] QZ 100 8 280 7000 2.047 8 69.481 ORDER 755 [QZ][W100][PVD][RH][7500NM] QZ 100 8 280 7500 2.193 8 71.765 ORDER 756 [QZ][W100][PVD][RH][8000NM] QZ 100 8 280 8000 2.339 8 74.050 ORDER 757 [QZ][W100][PVD][RH][8500NM] QZ 100 8 280 8500 2.485 8 76.334 ORDER 758 [QZ][W100][PVD][RH][9000NM] QZ 100 8 280 9000 2.632 8 78.618 ORDER 759 [QZ][W100][PVD][RH][9500NM] QZ 100 8 280 9500 2.778 8 80.903 ORDER 760 [QZ][W100][PVD][RH][10000NM] QZ 100 8 280 10000 2.924 8 83.187 ORDER 761 [QZ][W125][PVD][RH][1000NM] QZ 125 7 280 1000 0.292 7 48.079 ORDER 762 [QZ][W125][PVD][RH][1500NM] QZ 125 7 280 1500 0.439 7 50.689 ORDER 763 [QZ][W125][PVD][RH][2000NM] QZ 125 7 280 2000 0.585 7 53.300 ORDER 764 [QZ][W125][PVD][RH][2500NM] QZ 125 7 280 2500 0.731 7 55.911 ORDER 765 [QZ][W125][PVD][RH][3000NM] QZ 125 7 280 3000 0.877 7 58.521 ORDER 766 [QZ][W125][PVD][RH][3500NM] QZ 125 7 280 3500 1.023 7 61.132 ORDER 767 [QZ][W125][PVD][RH][4000NM] QZ 125 7 280 4000 1.170 7 63.743 ORDER 768 [QZ][W125][PVD][RH][4500NM] QZ 125 7 280 4500 1.316 7 66.353 ORDER 769 [QZ][W125][PVD][RH][5000NM] QZ 125 7 280 5000 1.462 7 68.964 ORDER 770 [QZ][W125][PVD][RH][5500NM] QZ 125 7 280 5500 1.608 7 71.575 ORDER 771 [QZ][W125][PVD][RH][6000NM] QZ 125 7 280 6000 1.754 7 74.185 ORDER 772 [QZ][W125][PVD][RH][6500NM] QZ 125 7 280 6500 1.901 7 76.796 ORDER 773 [QZ][W125][PVD][RH][7000NM] QZ 125 7 280 7000 2.047 7 79.407 ORDER 774 [QZ][W125][PVD][RH][7500NM] QZ 125 7 280 7500 2.193 7 82.018 ORDER 775 [QZ][W125][PVD][RH][8000NM] QZ 125 7 280 8000 2.339 7 84.628 ORDER 776 [QZ][W125][PVD][RH][8500NM] QZ 125 7 280 8500 2.485 7 87.239 ORDER 777 [QZ][W125][PVD][RH][9000NM] QZ 125 7 280 9000 2.632 7 89.850 ORDER 778 [QZ][W125][PVD][RH][9500NM] QZ 125 7 280 9500 2.778 7 92.460 ORDER 779 [QZ][W125][PVD][RH][10000NM] QZ 125 7 280 10000 2.924 7 95.071 ORDER 780 [QZ][W150][PVD][RH][1000NM] QZ 150 6 280 1000 0.292 6 56.092 ORDER 781 [QZ][W150][PVD][RH][1500NM] QZ 150 6 280 1500 0.439 6 59.137 ORDER 782 [QZ][W150][PVD][RH][2000NM] QZ 150 6 280 2000 0.585 6 62.183 ORDER 783 [QZ][W150][PVD][RH][2500NM] QZ 150 6 280 2500 0.731 6 65.229 ORDER 784 [QZ][W150][PVD][RH][3000NM] QZ 150 6 280 3000 0.877 6 68.275 ORDER 785 [QZ][W150][PVD][RH][3500NM] QZ 150 6 280 3500 1.023 6 71.321 ORDER 786 [QZ][W150][PVD][RH][4000NM] QZ 150 6 280 4000 1.170 6 74.366 ORDER 787 [QZ][W150][PVD][RH][4500NM] QZ 150 6 280 4500 1.316 6 77.412 ORDER 788 [QZ][W150][PVD][RH][5000NM] QZ 150 6 280 5000 1.462 6 80.458 ORDER 789 [QZ][W150][PVD][RH][5500NM] QZ 150 6 280 5500 1.608 6 83.504 ORDER 790 [QZ][W150][PVD][RH][6000NM] QZ 150 6 280 6000 1.754 6 86.550 ORDER 791 [QZ][W150][PVD][RH][6500NM] QZ 150 6 280 6500 1.901 6 89.596 ORDER 792 [QZ][W150][PVD][RH][7000NM] QZ 150 6 280 7000 2.047 6 92.641 ORDER 793 [QZ][W150][PVD][RH][7500NM] QZ 150 6 280 7500 2.193 6 95.687 ORDER 794 [QZ][W150][PVD][RH][8000NM] QZ 150 6 280 8000 2.339 6 98.733 ORDER 795 [QZ][W150][PVD][RH][8500NM] QZ 150 6 280 8500 2.485 6 101.779 ORDER 796 [QZ][W150][PVD][RH][9000NM] QZ 150 6 280 9000 2.632 6 104.825 ORDER 797 [QZ][W150][PVD][RH][9500NM] QZ 150 6 280 9500 2.778 6 107.870 ORDER 798 [QZ][W150][PVD][RH][10000NM] QZ 150 6 280 10000 2.924 6 110.916 ORDER 799 [QZ][W200][PVD][RH][1000NM] QZ 200 3 280 1000 0.292 3 112.183 ORDER 800 [QZ][W200][PVD][RH][1500NM] QZ 200 3 280 1500 0.439 3 118.275 ORDER 801 [QZ][W200][PVD][RH][2000NM] QZ 200 3 280 2000 0.585 3 124.366 ORDER 802 [QZ][W200][PVD][RH][2500NM] QZ 200 3 280 2500 0.731 3 130.458 ORDER 803 [QZ][W200][PVD][RH][3000NM] QZ 200 3 280 3000 0.877 3 136.550 ORDER 804 [QZ][W200][PVD][RH][3500NM] QZ 200 3 280 3500 1.023 3 142.641 ORDER 805 [QZ][W200][PVD][RH][4000NM] QZ 200 3 280 4000 1.170 3 148.733 ORDER 806 [QZ][W200][PVD][RH][4500NM] QZ 200 3 280 4500 1.316 3 154.825 ORDER 807 [QZ][W200][PVD][RH][5000NM] QZ 200 3 280 5000 1.462 3 160.916 ORDER 808 [QZ][W200][PVD][RH][5500NM] QZ 200 3 280 5500 1.608 3 167.008 ORDER 809 [QZ][W200][PVD][RH][6000NM] QZ 200 3 280 6000 1.754 3 173.099 ORDER 810 [QZ][W200][PVD][RH][6500NM] QZ 200 3 280 6500 1.901 3 179.191 ORDER 811 [QZ][W200][PVD][RH][7000NM] QZ 200 3 280 7000 2.047 3 185.283 ORDER 812 [QZ][W200][PVD][RH][7500NM] QZ 200 3 280 7500 2.193 3 191.374 ORDER 813 [QZ][W200][PVD][RH][8000NM] QZ 200 3 280 8000 2.339 3 197.466 ORDER 814 [QZ][W200][PVD][RH][8500NM] QZ 200 3 280 8500 2.485 3 203.558 ORDER 815 [QZ][W200][PVD][RH][9000NM] QZ 200 3 280 9000 2.632 3 209.649 ORDER 816 [QZ][W200][PVD][RH][9500NM] QZ 200 3 280 9500 2.778 3 215.741 ORDER 817 [QZ][W200][PVD][RH][10000NM] QZ 200 3 280 10000 2.924 3 221.832 ORDER 818 [QZ][W300][PVD][RH][1000NM] QZ 300 280 1000 0.292 RFQ 819 [QZ][W300][PVD][RH][1500NM] QZ 300 280 1500 0.439 RFQ 820 [QZ][W300][PVD][RH][2000NM] QZ 300 280 2000 0.585 RFQ 821 [QZ][W300][PVD][RH][2500NM] QZ 300 280 2500 0.731 RFQ 822 [QZ][W300][PVD][RH][3000NM] QZ 300 280 3000 0.877 RFQ 823 [QZ][W300][PVD][RH][3500NM] QZ 300 280 3500 1.023 RFQ 824 [QZ][W300][PVD][RH][4000NM] QZ 300 280 4000 1.170 RFQ 825 [QZ][W300][PVD][RH][4500NM] QZ 300 280 4500 1.316 RFQ 826 [QZ][W300][PVD][RH][5000NM] QZ 300 280 5000 1.462 RFQ 827 [QZ][W300][PVD][RH][5500NM] QZ 300 280 5500 1.608 RFQ 828 [QZ][W300][PVD][RH][6000NM] QZ 300 280 6000 1.754 RFQ 829 [QZ][W300][PVD][RH][6500NM] QZ 300 280 6500 1.901 RFQ 830 [QZ][W300][PVD][RH][7000NM] QZ 300 280 7000 2.047 RFQ 831 [QZ][W300][PVD][RH][7500NM] QZ 300 280 7500 2.193 RFQ 832 [QZ][W300][PVD][RH][8000NM] QZ 300 280 8000 2.339 RFQ 833 [QZ][W300][PVD][RH][8500NM] QZ 300 280 8500 2.485 RFQ 834 [QZ][W300][PVD][RH][9000NM] QZ 300 280 9000 2.632 RFQ 835 [QZ][W300][PVD][RH][9500NM] QZ 300 280 9500 2.778 RFQ 836 [QZ][W300][PVD][RH][10000NM] QZ 300 280 10000 2.924 RFQ 837 [QZ][Wnnn][PVD][RH][1000NM] QZ nnn 280 1000 0.292 RFQ 838 [QZ][Wnnn][PVD][RH][1500NM] QZ nnn 280 1500 0.439 RFQ 839 [QZ][Wnnn][PVD][RH][2000NM] QZ nnn 280 2000 0.585 RFQ 840 [QZ][Wnnn][PVD][RH][2500NM] QZ nnn 280 2500 0.731 RFQ 841 [QZ][Wnnn][PVD][RH][3000NM] QZ nnn 280 3000 0.877 RFQ 842 [QZ][Wnnn][PVD][RH][3500NM] QZ nnn 280 3500 1.023 RFQ 843 [QZ][Wnnn][PVD][RH][4000NM] QZ nnn 280 4000 1.170 RFQ 844 [QZ][Wnnn][PVD][RH][4500NM] QZ nnn 280 4500 1.316 RFQ 845 [QZ][Wnnn][PVD][RH][5000NM] QZ nnn 280 5000 1.462 RFQ 846 [QZ][Wnnn][PVD][RH][5500NM] QZ nnn 280 5500 1.608 RFQ 847 [QZ][Wnnn][PVD][RH][6000NM] QZ nnn 280 6000 1.754 RFQ 848 [QZ][Wnnn][PVD][RH][6500NM] QZ nnn 280 6500 1.901 RFQ 849 [QZ][Wnnn][PVD][RH][7000NM] QZ nnn 280 7000 2.047 RFQ 850 [QZ][Wnnn][PVD][RH][7500NM] QZ nnn 280 7500 2.193 RFQ 851 [QZ][Wnnn][PVD][RH][8000NM] QZ nnn 280 8000 2.339 RFQ 852 [QZ][Wnnn][PVD][RH][8500NM] QZ nnn 280 8500 2.485 RFQ 853 [QZ][Wnnn][PVD][RH][9000NM] QZ nnn 280 9000 2.632 RFQ 854 [QZ][Wnnn][PVD][RH][9500NM] QZ nnn 280 9500 2.778 RFQ 855 [QZ][Wnnn][PVD][RH][10000NM] QZ nnn 280 10000 2.924 RFQ 856 [SAP][W25][PVD][RH][1000NM] SAP 25 24 280 1000 0.292 24 14.023 ORDER 857 [SAP][W25][PVD][RH][1500NM] SAP 25 24 280 1500 0.439 24 14.784 ORDER 858 [SAP][W25][PVD][RH][2000NM] SAP 25 24 280 2000 0.585 24 15.546 ORDER 859 [SAP][W25][PVD][RH][2500NM] SAP 25 24 280 2500 0.731 24 16.307 ORDER 860 [SAP][W25][PVD][RH][3000NM] SAP 25 24 280 3000 0.877 24 17.069 ORDER 861 [SAP][W25][PVD][RH][3500NM] SAP 25 24 280 3500 1.023 24 17.830 ORDER 862 [SAP][W25][PVD][RH][4000NM] SAP 25 24 280 4000 1.170 24 18.592 ORDER 863 [SAP][W25][PVD][RH][4500NM] SAP 25 24 280 4500 1.316 24 19.353 ORDER 864 [SAP][W25][PVD][RH][5000NM] SAP 25 24 280 5000 1.462 24 20.115 ORDER 865 [SAP][W25][PVD][RH][5500NM] SAP 25 24 280 5500 1.608 24 20.876 ORDER 866 [SAP][W25][PVD][RH][6000NM] SAP 25 24 280 6000 1.754 24 21.637 ORDER 867 [SAP][W25][PVD][RH][6500NM] SAP 25 24 280 6500 1.901 24 22.399 ORDER 868 [SAP][W25][PVD][RH][7000NM] SAP 25 24 280 7000 2.047 24 23.160 ORDER 869 [SAP][W25][PVD][RH][7500NM] SAP 25 24 280 7500 2.193 24 23.922 ORDER 870 [SAP][W25][PVD][RH][8000NM] SAP 25 24 280 8000 2.339 24 24.683 ORDER 871 [SAP][W25][PVD][RH][8500NM] SAP 25 24 280 8500 2.485 24 25.445 ORDER 872 [SAP][W25][PVD][RH][9000NM] SAP 25 24 280 9000 2.632 24 26.206 ORDER 873 [SAP][W25][PVD][RH][9500NM] SAP 25 24 280 9500 2.778 24 26.968 ORDER 874 [SAP][W25][PVD][RH][10000NM] SAP 25 24 280 10000 2.924 24 27.729 ORDER 875 [SAP][W50][PVD][RH][1000NM] SAP 50 12 280 1000 0.292 12 28.046 ORDER 876 [SAP][W50][PVD][RH][1500NM] SAP 50 12 280 1500 0.439 12 29.569 ORDER 877 [SAP][W50][PVD][RH][2000NM] SAP 50 12 280 2000 0.585 12 31.092 ORDER 878 [SAP][W50][PVD][RH][2500NM] SAP 50 12 280 2500 0.731 12 32.615 ORDER 879 [SAP][W50][PVD][RH][3000NM] SAP 50 12 280 3000 0.877 12 34.137 ORDER 880 [SAP][W50][PVD][RH][3500NM] SAP 50 12 280 3500 1.023 12 35.660 ORDER 881 [SAP][W50][PVD][RH][4000NM] SAP 50 12 280 4000 1.170 12 37.183 ORDER 882 [SAP][W50][PVD][RH][4500NM] SAP 50 12 280 4500 1.316 12 38.706 ORDER 883 [SAP][W50][PVD][RH][5000NM] SAP 50 12 280 5000 1.462 12 40.229 ORDER 884 [SAP][W50][PVD][RH][5500NM] SAP 50 12 280 5500 1.608 12 41.752 ORDER 885 [SAP][W50][PVD][RH][6000NM] SAP 50 12 280 6000 1.754 12 43.275 ORDER 886 [SAP][W50][PVD][RH][6500NM] SAP 50 12 280 6500 1.901 12 44.798 ORDER 887 [SAP][W50][PVD][RH][7000NM] SAP 50 12 280 7000 2.047 12 46.321 ORDER 888 [SAP][W50][PVD][RH][7500NM] SAP 50 12 280 7500 2.193 12 47.844 ORDER 889 [SAP][W50][PVD][RH][8000NM] SAP 50 12 280 8000 2.339 12 49.366 ORDER 890 [SAP][W50][PVD][RH][8500NM] SAP 50 12 280 8500 2.485 12 50.889 ORDER 891 [SAP][W50][PVD][RH][9000NM] SAP 50 12 280 9000 2.632 12 52.412 ORDER 892 [SAP][W50][PVD][RH][9500NM] SAP 50 12 280 9500 2.778 12 53.935 ORDER 893 [SAP][W50][PVD][RH][10000NM] SAP 50 12 280 10000 2.924 12 55.458 ORDER 894 [SAP][W75][PVD][RH][1000NM] SAP 75 10 280 1000 0.292 10 33.655 ORDER 895 [SAP][W75][PVD][RH][1500NM] SAP 75 10 280 1500 0.439 10 35.482 ORDER 896 [SAP][W75][PVD][RH][2000NM] SAP 75 10 280 2000 0.585 10 37.310 ORDER 897 [SAP][W75][PVD][RH][2500NM] SAP 75 10 280 2500 0.731 10 39.137 ORDER 898 [SAP][W75][PVD][RH][3000NM] SAP 75 10 280 3000 0.877 10 40.965 ORDER 899 [SAP][W75][PVD][RH][3500NM] SAP 75 10 280 3500 1.023 10 42.792 ORDER 900 [SAP][W75][PVD][RH][4000NM] SAP 75 10 280 4000 1.170 10 44.620 ORDER 901 [SAP][W75][PVD][RH][4500NM] SAP 75 10 280 4500 1.316 10 46.447 ORDER 902 [SAP][W75][PVD][RH][5000NM] SAP 75 10 280 5000 1.462 10 48.275 ORDER 903 [SAP][W75][PVD][RH][5500NM] SAP 75 10 280 5500 1.608 10 50.102 ORDER 904 [SAP][W75][PVD][RH][6000NM] SAP 75 10 280 6000 1.754 10 51.930 ORDER 905 [SAP][W75][PVD][RH][6500NM] SAP 75 10 280 6500 1.901 10 53.757 ORDER 906 [SAP][W75][PVD][RH][7000NM] SAP 75 10 280 7000 2.047 10 55.585 ORDER 907 [SAP][W75][PVD][RH][7500NM] SAP 75 10 280 7500 2.193 10 57.412 ORDER 908 [SAP][W75][PVD][RH][8000NM] SAP 75 10 280 8000 2.339 10 59.240 ORDER 909 [SAP][W75][PVD][RH][8500NM] SAP 75 10 280 8500 2.485 10 61.067 ORDER 910 [SAP][W75][PVD][RH][9000NM] SAP 75 10 280 9000 2.632 10 62.895 ORDER 911 [SAP][W75][PVD][RH][9500NM] SAP 75 10 280 9500 2.778 10 64.722 ORDER 912 [SAP][W75][PVD][RH][10000NM] SAP 75 10 280 10000 2.924 10 66.550 ORDER 913 [SAP][W100][PVD][RH][1000NM] SAP 100 8 280 1000 0.292 8 42.069 ORDER 914 [SAP][W100][PVD][RH][1500NM] SAP 100 8 280 1500 0.439 8 44.353 ORDER 915 [SAP][W100][PVD][RH][2000NM] SAP 100 8 280 2000 0.585 8 46.637 ORDER 916 [SAP][W100][PVD][RH][2500NM] SAP 100 8 280 2500 0.731 8 48.922 ORDER 917 [SAP][W100][PVD][RH][3000NM] SAP 100 8 280 3000 0.877 8 51.206 ORDER 918 [SAP][W100][PVD][RH][3500NM] SAP 100 8 280 3500 1.023 8 53.490 ORDER 919 [SAP][W100][PVD][RH][4000NM] SAP 100 8 280 4000 1.170 8 55.775 ORDER 920 [SAP][W100][PVD][RH][4500NM] SAP 100 8 280 4500 1.316 8 58.059 ORDER 921 [SAP][W100][PVD][RH][5000NM] SAP 100 8 280 5000 1.462 8 60.344 ORDER 922 [SAP][W100][PVD][RH][5500NM] SAP 100 8 280 5500 1.608 8 62.628 ORDER 923 [SAP][W100][PVD][RH][6000NM] SAP 100 8 280 6000 1.754 8 64.912 ORDER 924 [SAP][W100][PVD][RH][6500NM] SAP 100 8 280 6500 1.901 8 67.197 ORDER 925 [SAP][W100][PVD][RH][7000NM] SAP 100 8 280 7000 2.047 8 69.481 ORDER 926 [SAP][W100][PVD][RH][7500NM] SAP 100 8 280 7500 2.193 8 71.765 ORDER 927 [SAP][W100][PVD][RH][8000NM] SAP 100 8 280 8000 2.339 8 74.050 ORDER 928 [SAP][W100][PVD][RH][8500NM] SAP 100 8 280 8500 2.485 8 76.334 ORDER 929 [SAP][W100][PVD][RH][9000NM] SAP 100 8 280 9000 2.632 8 78.618 ORDER 930 [SAP][W100][PVD][RH][9500NM] SAP 100 8 280 9500 2.778 8 80.903 ORDER 931 [SAP][W100][PVD][RH][10000NM] SAP 100 8 280 10000 2.924 8 83.187 ORDER 932 [SAP][W125][PVD][RH][1000NM] SAP 125 7 280 1000 0.292 7 48.079 ORDER 933 [SAP][W125][PVD][RH][1500NM] SAP 125 7 280 1500 0.439 7 50.689 ORDER 934 [SAP][W125][PVD][RH][2000NM] SAP 125 7 280 2000 0.585 7 53.300 ORDER 935 [SAP][W125][PVD][RH][2500NM] SAP 125 7 280 2500 0.731 7 55.911 ORDER 936 [SAP][W125][PVD][RH][3000NM] SAP 125 7 280 3000 0.877 7 58.521 ORDER 937 [SAP][W125][PVD][RH][3500NM] SAP 125 7 280 3500 1.023 7 61.132 ORDER 938 [SAP][W125][PVD][RH][4000NM] SAP 125 7 280 4000 1.170 7 63.743 ORDER 939 [SAP][W125][PVD][RH][4500NM] SAP 125 7 280 4500 1.316 7 66.353 ORDER 940 [SAP][W125][PVD][RH][5000NM] SAP 125 7 280 5000 1.462 7 68.964 ORDER 941 [SAP][W125][PVD][RH][5500NM] SAP 125 7 280 5500 1.608 7 71.575 ORDER 942 [SAP][W125][PVD][RH][6000NM] SAP 125 7 280 6000 1.754 7 74.185 ORDER 943 [SAP][W125][PVD][RH][6500NM] SAP 125 7 280 6500 1.901 7 76.796 ORDER 944 [SAP][W125][PVD][RH][7000NM] SAP 125 7 280 7000 2.047 7 79.407 ORDER 945 [SAP][W125][PVD][RH][7500NM] SAP 125 7 280 7500 2.193 7 82.018 ORDER 946 [SAP][W125][PVD][RH][8000NM] SAP 125 7 280 8000 2.339 7 84.628 ORDER 947 [SAP][W125][PVD][RH][8500NM] SAP 125 7 280 8500 2.485 7 87.239 ORDER 948 [SAP][W125][PVD][RH][9000NM] SAP 125 7 280 9000 2.632 7 89.850 ORDER 949 [SAP][W125][PVD][RH][9500NM] SAP 125 7 280 9500 2.778 7 92.460 ORDER 950 [SAP][W125][PVD][RH][10000NM] SAP 125 7 280 10000 2.924 7 95.071 ORDER 951 [SAP][W150][PVD][RH][1000NM] SAP 150 6 280 1000 0.292 6 56.092 ORDER 952 [SAP][W150][PVD][RH][1500NM] SAP 150 6 280 1500 0.439 6 59.137 ORDER 953 [SAP][W150][PVD][RH][2000NM] SAP 150 6 280 2000 0.585 6 62.183 ORDER 954 [SAP][W150][PVD][RH][2500NM] SAP 150 6 280 2500 0.731 6 65.229 ORDER 955 [SAP][W150][PVD][RH][3000NM] SAP 150 6 280 3000 0.877 6 68.275 ORDER 956 [SAP][W150][PVD][RH][3500NM] SAP 150 6 280 3500 1.023 6 71.321 ORDER 957 [SAP][W150][PVD][RH][4000NM] SAP 150 6 280 4000 1.170 6 74.366 ORDER 958 [SAP][W150][PVD][RH][4500NM] SAP 150 6 280 4500 1.316 6 77.412 ORDER 959 [SAP][W150][PVD][RH][5000NM] SAP 150 6 280 5000 1.462 6 80.458 ORDER 960 [SAP][W150][PVD][RH][5500NM] SAP 150 6 280 5500 1.608 6 83.504 ORDER 961 [SAP][W150][PVD][RH][6000NM] SAP 150 6 280 6000 1.754 6 86.550 ORDER 962 [SAP][W150][PVD][RH][6500NM] SAP 150 6 280 6500 1.901 6 89.596 ORDER 963 [SAP][W150][PVD][RH][7000NM] SAP 150 6 280 7000 2.047 6 92.641 ORDER 964 [SAP][W150][PVD][RH][7500NM] SAP 150 6 280 7500 2.193 6 95.687 ORDER 965 [SAP][W150][PVD][RH][8000NM] SAP 150 6 280 8000 2.339 6 98.733 ORDER 966 [SAP][W150][PVD][RH][8500NM] SAP 150 6 280 8500 2.485 6 101.779 ORDER 967 [SAP][W150][PVD][RH][9000NM] SAP 150 6 280 9000 2.632 6 104.825 ORDER 968 [SAP][W150][PVD][RH][9500NM] SAP 150 6 280 9500 2.778 6 107.870 ORDER 969 [SAP][W150][PVD][RH][10000NM] SAP 150 6 280 10000 2.924 6 110.916 ORDER 970 [SAP][W200][PVD][RH][1000NM] SAP 200 3 280 1000 0.292 3 112.183 ORDER 971 [SAP][W200][PVD][RH][1500NM] SAP 200 3 280 1500 0.439 3 118.275 ORDER 972 [SAP][W200][PVD][RH][2000NM] SAP 200 3 280 2000 0.585 3 124.366 ORDER 973 [SAP][W200][PVD][RH][2500NM] SAP 200 3 280 2500 0.731 3 130.458 ORDER 974 [SAP][W200][PVD][RH][3000NM] SAP 200 3 280 3000 0.877 3 136.550 ORDER 975 [SAP][W200][PVD][RH][3500NM] SAP 200 3 280 3500 1.023 3 142.641 ORDER 976 [SAP][W200][PVD][RH][4000NM] SAP 200 3 280 4000 1.170 3 148.733 ORDER 977 [SAP][W200][PVD][RH][4500NM] SAP 200 3 280 4500 1.316 3 154.825 ORDER 978 [SAP][W200][PVD][RH][5000NM] SAP 200 3 280 5000 1.462 3 160.916 ORDER 979 [SAP][W200][PVD][RH][5500NM] SAP 200 3 280 5500 1.608 3 167.008 ORDER 980 [SAP][W200][PVD][RH][6000NM] SAP 200 3 280 6000 1.754 3 173.099 ORDER 981 [SAP][W200][PVD][RH][6500NM] SAP 200 3 280 6500 1.901 3 179.191 ORDER 982 [SAP][W200][PVD][RH][7000NM] SAP 200 3 280 7000 2.047 3 185.283 ORDER 983 [SAP][W200][PVD][RH][7500NM] SAP 200 3 280 7500 2.193 3 191.374 ORDER 984 [SAP][W200][PVD][RH][8000NM] SAP 200 3 280 8000 2.339 3 197.466 ORDER 985 [SAP][W200][PVD][RH][8500NM] SAP 200 3 280 8500 2.485 3 203.558 ORDER 986 [SAP][W200][PVD][RH][9000NM] SAP 200 3 280 9000 2.632 3 209.649 ORDER 987 [SAP][W200][PVD][RH][9500NM] SAP 200 3 280 9500 2.778 3 215.741 ORDER 988 [SAP][W200][PVD][RH][10000NM] SAP 200 3 280 10000 2.924 3 221.832 ORDER 989 [SAP][W300][PVD][RH][1000NM] SAP 300 280 1000 0.292 RFQ 990 [SAP][W300][PVD][RH][1500NM] SAP 300 280 1500 0.439 RFQ 991 [SAP][W300][PVD][RH][2000NM] SAP 300 280 2000 0.585 RFQ 992 [SAP][W300][PVD][RH][2500NM] SAP 300 280 2500 0.731 RFQ 993 [SAP][W300][PVD][RH][3000NM] SAP 300 280 3000 0.877 RFQ 994 [SAP][W300][PVD][RH][3500NM] SAP 300 280 3500 1.023 RFQ 995 [SAP][W300][PVD][RH][4000NM] SAP 300 280 4000 1.170 RFQ 996 [SAP][W300][PVD][RH][4500NM] SAP 300 280 4500 1.316 RFQ 997 [SAP][W300][PVD][RH][5000NM] SAP 300 280 5000 1.462 RFQ 998 [SAP][W300][PVD][RH][5500NM] SAP 300 280 5500 1.608 RFQ 999 [SAP][W300][PVD][RH][6000NM] SAP 300 280 6000 1.754 RFQ 1000 [SAP][W300][PVD][RH][6500NM] SAP 300 280 6500 1.901 RFQ 1001 [SAP][W300][PVD][RH][7000NM] SAP 300 280 7000 2.047 RFQ 1002 [SAP][W300][PVD][RH][7500NM] SAP 300 280 7500 2.193 RFQ 1003 [SAP][W300][PVD][RH][8000NM] SAP 300 280 8000 2.339 RFQ 1004 [SAP][W300][PVD][RH][8500NM] SAP 300 280 8500 2.485 RFQ 1005 [SAP][W300][PVD][RH][9000NM] SAP 300 280 9000 2.632 RFQ 1006 [SAP][W300][PVD][RH][9500NM] SAP 300 280 9500 2.778 RFQ 1007 [SAP][W300][PVD][RH][10000NM] SAP 300 280 10000 2.924 RFQ 1008 [SAP][Wnnn][PVD][RH][1000NM] SAP nnn 280 1000 0.292 RFQ 1009 [SAP][Wnnn][PVD][RH][1500NM] SAP nnn 280 1500 0.439 RFQ 1010 [SAP][Wnnn][PVD][RH][2000NM] SAP nnn 280 2000 0.585 RFQ 1011 [SAP][Wnnn][PVD][RH][2500NM] SAP nnn 280 2500 0.731 RFQ 1012 [SAP][Wnnn][PVD][RH][3000NM] SAP nnn 280 3000 0.877 RFQ 1013 [SAP][Wnnn][PVD][RH][3500NM] SAP nnn 280 3500 1.023 RFQ 1014 [SAP][Wnnn][PVD][RH][4000NM] SAP nnn 280 4000 1.170 RFQ 1015 [SAP][Wnnn][PVD][RH][4500NM] SAP nnn 280 4500 1.316 RFQ 1016 [SAP][Wnnn][PVD][RH][5000NM] SAP nnn 280 5000 1.462 RFQ 1017 [SAP][Wnnn][PVD][RH][5500NM] SAP nnn 280 5500 1.608 RFQ 1018 [SAP][Wnnn][PVD][RH][6000NM] SAP nnn 280 6000 1.754 RFQ 1019 [SAP][Wnnn][PVD][RH][6500NM] SAP nnn 280 6500 1.901 RFQ 1020 [SAP][Wnnn][PVD][RH][7000NM] SAP nnn 280 7000 2.047 RFQ 1021 [SAP][Wnnn][PVD][RH][7500NM] SAP nnn 280 7500 2.193 RFQ 1022 [SAP][Wnnn][PVD][RH][8000NM] SAP nnn 280 8000 2.339 RFQ 1023 [SAP][Wnnn][PVD][RH][8500NM] SAP nnn 280 8500 2.485 RFQ 1024 [SAP][Wnnn][PVD][RH][9000NM] SAP nnn 280 9000 2.632 RFQ 1025 [SAP][Wnnn][PVD][RH][9500NM] SAP nnn 280 9500 2.778 RFQ 1026 [SAP][Wnnn][PVD][RH][10000NM] SAP nnn 280 10000 2.924 RFQ 1027 [XYZ][W25][PVD][RH][1000NM] XYZ 25 24 280 1000 0.292 24 14.023 ORDER 1028 [XYZ][W25][PVD][RH][1500NM] XYZ 25 24 280 1500 0.439 24 14.784 ORDER 1029 [XYZ][W25][PVD][RH][2000NM] XYZ 25 24 280 2000 0.585 24 15.546 ORDER 1030 [XYZ][W25][PVD][RH][2500NM] XYZ 25 24 280 2500 0.731 24 16.307 ORDER 1031 [XYZ][W25][PVD][RH][3000NM] XYZ 25 24 280 3000 0.877 24 17.069 ORDER 1032 [XYZ][W25][PVD][RH][3500NM] XYZ 25 24 280 3500 1.023 24 17.830 ORDER 1033 [XYZ][W25][PVD][RH][4000NM] XYZ 25 24 280 4000 1.170 24 18.592 ORDER 1034 [XYZ][W25][PVD][RH][4500NM] XYZ 25 24 280 4500 1.316 24 19.353 ORDER 1035 [XYZ][W25][PVD][RH][5000NM] XYZ 25 24 280 5000 1.462 24 20.115 ORDER 1036 [XYZ][W25][PVD][RH][5500NM] XYZ 25 24 280 5500 1.608 24 20.876 ORDER 1037 [XYZ][W25][PVD][RH][6000NM] XYZ 25 24 280 6000 1.754 24 21.637 ORDER 1038 [XYZ][W25][PVD][RH][6500NM] XYZ 25 24 280 6500 1.901 24 22.399 ORDER 1039 [XYZ][W25][PVD][RH][7000NM] XYZ 25 24 280 7000 2.047 24 23.160 ORDER 1040 [XYZ][W25][PVD][RH][7500NM] XYZ 25 24 280 7500 2.193 24 23.922 ORDER 1041 [XYZ][W25][PVD][RH][8000NM] XYZ 25 24 280 8000 2.339 24 24.683 ORDER 1042 [XYZ][W25][PVD][RH][8500NM] XYZ 25 24 280 8500 2.485 24 25.445 ORDER 1043 [XYZ][W25][PVD][RH][9000NM] XYZ 25 24 280 9000 2.632 24 26.206 ORDER 1044 [XYZ][W25][PVD][RH][9500NM] XYZ 25 24 280 9500 2.778 24 26.968 ORDER 1045 [XYZ][W25][PVD][RH][10000NM] XYZ 25 24 280 10000 2.924 24 27.729 ORDER 1046 [XYZ][W50][PVD][RH][1000NM] XYZ 50 12 280 1000 0.292 12 28.046 ORDER 1047 [XYZ][W50][PVD][RH][1500NM] XYZ 50 12 280 1500 0.439 12 29.569 ORDER 1048 [XYZ][W50][PVD][RH][2000NM] XYZ 50 12 280 2000 0.585 12 31.092 ORDER 1049 [XYZ][W50][PVD][RH][2500NM] XYZ 50 12 280 2500 0.731 12 32.615 ORDER 1050 [XYZ][W50][PVD][RH][3000NM] XYZ 50 12 280 3000 0.877 12 34.137 ORDER 1051 [XYZ][W50][PVD][RH][3500NM] XYZ 50 12 280 3500 1.023 12 35.660 ORDER 1052 [XYZ][W50][PVD][RH][4000NM] XYZ 50 12 280 4000 1.170 12 37.183 ORDER 1053 [XYZ][W50][PVD][RH][4500NM] XYZ 50 12 280 4500 1.316 12 38.706 ORDER 1054 [XYZ][W50][PVD][RH][5000NM] XYZ 50 12 280 5000 1.462 12 40.229 ORDER 1055 [XYZ][W50][PVD][RH][5500NM] XYZ 50 12 280 5500 1.608 12 41.752 ORDER 1056 [XYZ][W50][PVD][RH][6000NM] XYZ 50 12 280 6000 1.754 12 43.275 ORDER 1057 [XYZ][W50][PVD][RH][6500NM] XYZ 50 12 280 6500 1.901 12 44.798 ORDER 1058 [XYZ][W50][PVD][RH][7000NM] XYZ 50 12 280 7000 2.047 12 46.321 ORDER 1059 [XYZ][W50][PVD][RH][7500NM] XYZ 50 12 280 7500 2.193 12 47.844 ORDER 1060 [XYZ][W50][PVD][RH][8000NM] XYZ 50 12 280 8000 2.339 12 49.366 ORDER 1061 [XYZ][W50][PVD][RH][8500NM] XYZ 50 12 280 8500 2.485 12 50.889 ORDER 1062 [XYZ][W50][PVD][RH][9000NM] XYZ 50 12 280 9000 2.632 12 52.412 ORDER 1063 [XYZ][W50][PVD][RH][9500NM] XYZ 50 12 280 9500 2.778 12 53.935 ORDER 1064 [XYZ][W50][PVD][RH][10000NM] XYZ 50 12 280 10000 2.924 12 55.458 ORDER 1065 [XYZ][W75][PVD][RH][1000NM] XYZ 75 10 280 1000 0.292 10 33.655 ORDER 1066 [XYZ][W75][PVD][RH][1500NM] XYZ 75 10 280 1500 0.439 10 35.482 ORDER 1067 [XYZ][W75][PVD][RH][2000NM] XYZ 75 10 280 2000 0.585 10 37.310 ORDER 1068 [XYZ][W75][PVD][RH][2500NM] XYZ 75 10 280 2500 0.731 10 39.137 ORDER 1069 [XYZ][W75][PVD][RH][3000NM] XYZ 75 10 280 3000 0.877 10 40.965 ORDER 1070 [XYZ][W75][PVD][RH][3500NM] XYZ 75 10 280 3500 1.023 10 42.792 ORDER 1071 [XYZ][W75][PVD][RH][4000NM] XYZ 75 10 280 4000 1.170 10 44.620 ORDER 1072 [XYZ][W75][PVD][RH][4500NM] XYZ 75 10 280 4500 1.316 10 46.447 ORDER 1073 [XYZ][W75][PVD][RH][5000NM] XYZ 75 10 280 5000 1.462 10 48.275 ORDER 1074 [XYZ][W75][PVD][RH][5500NM] XYZ 75 10 280 5500 1.608 10 50.102 ORDER 1075 [XYZ][W75][PVD][RH][6000NM] XYZ 75 10 280 6000 1.754 10 51.930 ORDER 1076 [XYZ][W75][PVD][RH][6500NM] XYZ 75 10 280 6500 1.901 10 53.757 ORDER 1077 [XYZ][W75][PVD][RH][7000NM] XYZ 75 10 280 7000 2.047 10 55.585 ORDER 1078 [XYZ][W75][PVD][RH][7500NM] XYZ 75 10 280 7500 2.193 10 57.412 ORDER 1079 [XYZ][W75][PVD][RH][8000NM] XYZ 75 10 280 8000 2.339 10 59.240 ORDER 1080 [XYZ][W75][PVD][RH][8500NM] XYZ 75 10 280 8500 2.485 10 61.067 ORDER 1081 [XYZ][W75][PVD][RH][9000NM] XYZ 75 10 280 9000 2.632 10 62.895 ORDER 1082 [XYZ][W75][PVD][RH][9500NM] XYZ 75 10 280 9500 2.778 10 64.722 ORDER 1083 [XYZ][W75][PVD][RH][10000NM] XYZ 75 10 280 10000 2.924 10 66.550 ORDER 1084 [XYZ][W100][PVD][RH][1000NM] XYZ 100 8 280 1000 0.292 8 42.069 ORDER 1085 [XYZ][W100][PVD][RH][1500NM] XYZ 100 8 280 1500 0.439 8 44.353 ORDER 1086 [XYZ][W100][PVD][RH][2000NM] XYZ 100 8 280 2000 0.585 8 46.637 ORDER 1087 [XYZ][W100][PVD][RH][2500NM] XYZ 100 8 280 2500 0.731 8 48.922 ORDER 1088 [XYZ][W100][PVD][RH][3000NM] XYZ 100 8 280 3000 0.877 8 51.206 ORDER 1089 [XYZ][W100][PVD][RH][3500NM] XYZ 100 8 280 3500 1.023 8 53.490 ORDER 1090 [XYZ][W100][PVD][RH][4000NM] XYZ 100 8 280 4000 1.170 8 55.775 ORDER 1091 [XYZ][W100][PVD][RH][4500NM] XYZ 100 8 280 4500 1.316 8 58.059 ORDER 1092 [XYZ][W100][PVD][RH][5000NM] XYZ 100 8 280 5000 1.462 8 60.344 ORDER 1093 [XYZ][W100][PVD][RH][5500NM] XYZ 100 8 280 5500 1.608 8 62.628 ORDER 1094 [XYZ][W100][PVD][RH][6000NM] XYZ 100 8 280 6000 1.754 8 64.912 ORDER 1095 [XYZ][W100][PVD][RH][6500NM] XYZ 100 8 280 6500 1.901 8 67.197 ORDER 1096 [XYZ][W100][PVD][RH][7000NM] XYZ 100 8 280 7000 2.047 8 69.481 ORDER 1097 [XYZ][W100][PVD][RH][7500NM] XYZ 100 8 280 7500 2.193 8 71.765 ORDER 1098 [XYZ][W100][PVD][RH][8000NM] XYZ 100 8 280 8000 2.339 8 74.050 ORDER 1099 [XYZ][W100][PVD][RH][8500NM] XYZ 100 8 280 8500 2.485 8 76.334 ORDER 1100 [XYZ][W100][PVD][RH][9000NM] XYZ 100 8 280 9000 2.632 8 78.618 ORDER 1101 [XYZ][W100][PVD][RH][9500NM] XYZ 100 8 280 9500 2.778 8 80.903 ORDER 1102 [XYZ][W100][PVD][RH][10000NM] XYZ 100 8 280 10000 2.924 8 83.187 ORDER 1103 [XYZ][W125][PVD][RH][1000NM] XYZ 125 7 280 1000 0.292 7 48.079 ORDER 1104 [XYZ][W125][PVD][RH][1500NM] XYZ 125 7 280 1500 0.439 7 50.689 ORDER 1105 [XYZ][W125][PVD][RH][2000NM] XYZ 125 7 280 2000 0.585 7 53.300 ORDER 1106 [XYZ][W125][PVD][RH][2500NM] XYZ 125 7 280 2500 0.731 7 55.911 ORDER 1107 [XYZ][W125][PVD][RH][3000NM] XYZ 125 7 280 3000 0.877 7 58.521 ORDER 1108 [XYZ][W125][PVD][RH][3500NM] XYZ 125 7 280 3500 1.023 7 61.132 ORDER 1109 [XYZ][W125][PVD][RH][4000NM] XYZ 125 7 280 4000 1.170 7 63.743 ORDER 1110 [XYZ][W125][PVD][RH][4500NM] XYZ 125 7 280 4500 1.316 7 66.353 ORDER 1111 [XYZ][W125][PVD][RH][5000NM] XYZ 125 7 280 5000 1.462 7 68.964 ORDER 1112 [XYZ][W125][PVD][RH][5500NM] XYZ 125 7 280 5500 1.608 7 71.575 ORDER 1113 [XYZ][W125][PVD][RH][6000NM] XYZ 125 7 280 6000 1.754 7 74.185 ORDER 1114 [XYZ][W125][PVD][RH][6500NM] XYZ 125 7 280 6500 1.901 7 76.796 ORDER 1115 [XYZ][W125][PVD][RH][7000NM] XYZ 125 7 280 7000 2.047 7 79.407 ORDER 1116 [XYZ][W125][PVD][RH][7500NM] XYZ 125 7 280 7500 2.193 7 82.018 ORDER 1117 [XYZ][W125][PVD][RH][8000NM] XYZ 125 7 280 8000 2.339 7 84.628 ORDER 1118 [XYZ][W125][PVD][RH][8500NM] XYZ 125 7 280 8500 2.485 7 87.239 ORDER 1119 [XYZ][W125][PVD][RH][9000NM] XYZ 125 7 280 9000 2.632 7 89.850 ORDER 1120 [XYZ][W125][PVD][RH][9500NM] XYZ 125 7 280 9500 2.778 7 92.460 ORDER 1121 [XYZ][W125][PVD][RH][10000NM] XYZ 125 7 280 10000 2.924 7 95.071 ORDER 1122 [XYZ][W150][PVD][RH][1000NM] XYZ 150 6 280 1000 0.292 6 56.092 ORDER 1123 [XYZ][W150][PVD][RH][1500NM] XYZ 150 6 280 1500 0.439 6 59.137 ORDER 1124 [XYZ][W150][PVD][RH][2000NM] XYZ 150 6 280 2000 0.585 6 62.183 ORDER 1125 [XYZ][W150][PVD][RH][2500NM] XYZ 150 6 280 2500 0.731 6 65.229 ORDER 1126 [XYZ][W150][PVD][RH][3000NM] XYZ 150 6 280 3000 0.877 6 68.275 ORDER 1127 [XYZ][W150][PVD][RH][3500NM] XYZ 150 6 280 3500 1.023 6 71.321 ORDER 1128 [XYZ][W150][PVD][RH][4000NM] XYZ 150 6 280 4000 1.170 6 74.366 ORDER 1129 [XYZ][W150][PVD][RH][4500NM] XYZ 150 6 280 4500 1.316 6 77.412 ORDER 1130 [XYZ][W150][PVD][RH][5000NM] XYZ 150 6 280 5000 1.462 6 80.458 ORDER 1131 [XYZ][W150][PVD][RH][5500NM] XYZ 150 6 280 5500 1.608 6 83.504 ORDER 1132 [XYZ][W150][PVD][RH][6000NM] XYZ 150 6 280 6000 1.754 6 86.550 ORDER 1133 [XYZ][W150][PVD][RH][6500NM] XYZ 150 6 280 6500 1.901 6 89.596 ORDER 1134 [XYZ][W150][PVD][RH][7000NM] XYZ 150 6 280 7000 2.047 6 92.641 ORDER 1135 [XYZ][W150][PVD][RH][7500NM] XYZ 150 6 280 7500 2.193 6 95.687 ORDER 1136 [XYZ][W150][PVD][RH][8000NM] XYZ 150 6 280 8000 2.339 6 98.733 ORDER 1137 [XYZ][W150][PVD][RH][8500NM] XYZ 150 6 280 8500 2.485 6 101.779 ORDER 1138 [XYZ][W150][PVD][RH][9000NM] XYZ 150 6 280 9000 2.632 6 104.825 ORDER 1139 [XYZ][W150][PVD][RH][9500NM] XYZ 150 6 280 9500 2.778 6 107.870 ORDER 1140 [XYZ][W150][PVD][RH][10000NM] XYZ 150 6 280 10000 2.924 6 110.916 ORDER 1141 [XYZ][W200][PVD][RH][1000NM] XYZ 200 3 280 1000 0.292 3 112.183 ORDER 1142 [XYZ][W200][PVD][RH][1500NM] XYZ 200 3 280 1500 0.439 3 118.275 ORDER 1143 [XYZ][W200][PVD][RH][2000NM] XYZ 200 3 280 2000 0.585 3 124.366 ORDER 1144 [XYZ][W200][PVD][RH][2500NM] XYZ 200 3 280 2500 0.731 3 130.458 ORDER 1145 [XYZ][W200][PVD][RH][3000NM] XYZ 200 3 280 3000 0.877 3 136.550 ORDER 1146 [XYZ][W200][PVD][RH][3500NM] XYZ 200 3 280 3500 1.023 3 142.641 ORDER 1147 [XYZ][W200][PVD][RH][4000NM] XYZ 200 3 280 4000 1.170 3 148.733 ORDER 1148 [XYZ][W200][PVD][RH][4500NM] XYZ 200 3 280 4500 1.316 3 154.825 ORDER 1149 [XYZ][W200][PVD][RH][5000NM] XYZ 200 3 280 5000 1.462 3 160.916 ORDER 1150 [XYZ][W200][PVD][RH][5500NM] XYZ 200 3 280 5500 1.608 3 167.008 ORDER 1151 [XYZ][W200][PVD][RH][6000NM] XYZ 200 3 280 6000 1.754 3 173.099 ORDER 1152 [XYZ][W200][PVD][RH][6500NM] XYZ 200 3 280 6500 1.901 3 179.191 ORDER 1153 [XYZ][W200][PVD][RH][7000NM] XYZ 200 3 280 7000 2.047 3 185.283 ORDER 1154 [XYZ][W200][PVD][RH][7500NM] XYZ 200 3 280 7500 2.193 3 191.374 ORDER 1155 [XYZ][W200][PVD][RH][8000NM] XYZ 200 3 280 8000 2.339 3 197.466 ORDER 1156 [XYZ][W200][PVD][RH][8500NM] XYZ 200 3 280 8500 2.485 3 203.558 ORDER 1157 [XYZ][W200][PVD][RH][9000NM] XYZ 200 3 280 9000 2.632 3 209.649 ORDER 1158 [XYZ][W200][PVD][RH][9500NM] XYZ 200 3 280 9500 2.778 3 215.741 ORDER 1159 [XYZ][W200][PVD][RH][10000NM] XYZ 200 3 280 10000 2.924 3 221.832 ORDER 1160 [XYZ][W300][PVD][RH][1000NM] XYZ 300 280 1000 0.292 RFQ 1161 [XYZ][W300][PVD][RH][1500NM] XYZ 300 280 1500 0.439 RFQ 1162 [XYZ][W300][PVD][RH][2000NM] XYZ 300 280 2000 0.585 RFQ 1163 [XYZ][W300][PVD][RH][2500NM] XYZ 300 280 2500 0.731 RFQ 1164 [XYZ][W300][PVD][RH][3000NM] XYZ 300 280 3000 0.877 RFQ 1165 [XYZ][W300][PVD][RH][3500NM] XYZ 300 280 3500 1.023 RFQ 1166 [XYZ][W300][PVD][RH][4000NM] XYZ 300 280 4000 1.170 RFQ 1167 [XYZ][W300][PVD][RH][4500NM] XYZ 300 280 4500 1.316 RFQ 1168 [XYZ][W300][PVD][RH][5000NM] XYZ 300 280 5000 1.462 RFQ 1169 [XYZ][W300][PVD][RH][5500NM] XYZ 300 280 5500 1.608 RFQ 1170 [XYZ][W300][PVD][RH][6000NM] XYZ 300 280 6000 1.754 RFQ 1171 [XYZ][W300][PVD][RH][6500NM] XYZ 300 280 6500 1.901 RFQ 1172 [XYZ][W300][PVD][RH][7000NM] XYZ 300 280 7000 2.047 RFQ 1173 [XYZ][W300][PVD][RH][7500NM] XYZ 300 280 7500 2.193 RFQ 1174 [XYZ][W300][PVD][RH][8000NM] XYZ 300 280 8000 2.339 RFQ 1175 [XYZ][W300][PVD][RH][8500NM] XYZ 300 280 8500 2.485 RFQ 1176 [XYZ][W300][PVD][RH][9000NM] XYZ 300 280 9000 2.632 RFQ 1177 [XYZ][W300][PVD][RH][9500NM] XYZ 300 280 9500 2.778 RFQ 1178 [XYZ][W300][PVD][RH][10000NM] XYZ 300 280 10000 2.924 RFQ 1179 [XYZ][Wnnn][PVD][RH][1000NM] XYZ nnn 280 1000 0.292 RFQ 1180 [XYZ][Wnnn][PVD][RH][1500NM] XYZ nnn 280 1500 0.439 RFQ 1181 [XYZ][Wnnn][PVD][RH][2000NM] XYZ nnn 280 2000 0.585 RFQ 1182 [XYZ][Wnnn][PVD][RH][2500NM] XYZ nnn 280 2500 0.731 RFQ 1183 [XYZ][Wnnn][PVD][RH][3000NM] XYZ nnn 280 3000 0.877 RFQ 1184 [XYZ][Wnnn][PVD][RH][3500NM] XYZ nnn 280 3500 1.023 RFQ 1185 [XYZ][Wnnn][PVD][RH][4000NM] XYZ nnn 280 4000 1.170 RFQ 1186 [XYZ][Wnnn][PVD][RH][4500NM] XYZ nnn 280 4500 1.316 RFQ 1187 [XYZ][Wnnn][PVD][RH][5000NM] XYZ nnn 280 5000 1.462 RFQ 1188 [XYZ][Wnnn][PVD][RH][5500NM] XYZ nnn 280 5500 1.608 RFQ 1189 [XYZ][Wnnn][PVD][RH][6000NM] XYZ nnn 280 6000 1.754 RFQ 1190 [XYZ][Wnnn][PVD][RH][6500NM] XYZ nnn 280 6500 1.901 RFQ 1191 [XYZ][Wnnn][PVD][RH][7000NM] XYZ nnn 280 7000 2.047 RFQ 1192 [XYZ][Wnnn][PVD][RH][7500NM] XYZ nnn 280 7500 2.193 RFQ 1193 [XYZ][Wnnn][PVD][RH][8000NM] XYZ nnn 280 8000 2.339 RFQ 1194 [XYZ][Wnnn][PVD][RH][8500NM] XYZ nnn 280 8500 2.485 RFQ 1195 [XYZ][Wnnn][PVD][RH][9000NM] XYZ nnn 280 9000 2.632 RFQ 1196 [XYZ][Wnnn][PVD][RH][9500NM] XYZ nnn 280 9500 2.778 RFQ 1197 [XYZ][Wnnn][PVD][RH][10000NM] XYZ nnn 280 10000 2.924 RFQ Minimum batch for sputtering is 8 wafers for mm diameter. Unit price does not include SET-UP Charges, RUSH charges or cost of wafers. INSTANT QUOTE PROCESS CODE QTY EMAIL ORDERING: Registered customers can order online from within assigned BUSINESS PORTAL. A copy of the order along with an order confirmation receipt is issued instantly for all orders placed on line. On line Orders have to be verified, accepted and acknowledged by HTE LABS sales department in writing before, becoming non cancelable binding contracts. DELIVERY: Typical delivery for Standard processes is 2-4 working days ARO. For Custom processes lead time may vary. HTE Labs may supply on request substrate materials from its own inventory or from third party supplier. SHIPPING & PACKING: For certain processes, customer should ship only prime wafers, delivered in sealed containers [original manufacturer seal must be present]. All wafers shipped to HTE LABS by customers, should be packed in suitable wafer carriers or wafer containers, wrapped in reusable minim 2 layers of air buble packing material [pink anti-static bubble cushioning wrap], or air pillows and heavy wall cardboard boxes. Foam packing peanuts are not acceptable due to the nuisance caused by particles and electrostatic chage generated during shipping. SAMPLES: Due to the nature of this product line, free samples are not available, unless they are against an existing firm order, pending qualification of a process. HTE LABS guarantees continuous supply and availability of any of it's standard or custom developed processes and technologies provided minimum order quantities are met. HTE LABS has made every effort to have this information as accurate as possible. However, no responsibility is assumed by HTE LABS for its use, nor for any infringements of rights of third parties which may result from its use. HTE LABS reserves the right to revise the content or modify its product line without prior notice. HTE LABS processes and technologies are not authorized for and should not be used within support systems which are intended for surgical implants into the body, to support or sustain life, in aircraft, space equipment, submarine, or nuclear facility applications without HTE LABS specific written consent. Home>PVD REACTIVE SPUTTERING> Last updated: |
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PROPERTIES / FEATURES | APPLICATIONS | |||||||||||||||||||||
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SHORT PROCESS DESCRIPTION |
Physical vapor deposition (PVD) is a widely used technique in semiconductor integrated circuit (IC) manufacturing. Sputter deposition is a physical vapor deposition (PVD) method of depositing thin films by sputtering, that is ejecting, material from a "target," that is source, which then deposits onto a "substrate," such as a silicon wafer. Resputtering is re-emission of the deposited material during the deposition process by ion or atom bombardment. Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV (100,000 K). The sputtered ions (typically only about 1% of the ejected particles is ionized) can ballistically fly from the target in straight lines and impact energetically on the substrates or vacuum chamber causing resputtering. At higher gas pressures, they collide with the gas atoms that act as a moderator and move diffusively, reaching the substrates or vacuum chamber wall and condensing after undergoing a random walk. The entire range from high-energy ballistic impact to low-energy thermalized motion is accessible by changing the background gas pressure. The sputtering gas is often an inert gas such as argon. For efficient momentum transfer, the atomic weight of the sputtering gas should be close to the atomic weight of the target, so for sputtering light elements neon is preferable, while for heavy elements krypton or xenon are used. Reactive gases can also be used to sputter compounds. The compound can be formed on the target surface, in-flight or on the substrate depending on the process parameters. The availability of many parameters that control sputter deposition make it a complex process, but also allow experts a large degree of control over the growth and microstructure of the film. Sputtering is used extensively in the semiconductor industry to deposit thin films of various materials in integrated circuit processing. Thin antireflection coatings on glass for optical applications are also deposited by sputtering. Because of the low substrate temperatures used, sputtering is an ideal method to deposit contact metals for thin-film transistors. Perhaps the most familiar products of sputtering are low-emissivity coatings on glass, used in double-pane window assemblies. The coating is a multilayer containing silver and metal oxides such as zinc oxide, tin oxide, or titanium dioxide. Sputtering is also used to metalize plastics such as potato chip bags. A large industry has developed around tool bit coating using sputtered nitrides, such as titanium nitride, creating the familiar gold colored hard coat. |
WAFER FOUNDRY - R&D SEMICONDUCTOR PROCESS DEVELOPMENT |
HTE LABS is helping customers to solve R&D problems, capacity problems, lower cost as well as develop a back-up process for existing in-house operations. Any company currently involved or contemplating R&D related to semiconductor devices or thin film technologies, is encourraged to consider using HTE LABS expertise and capabilities. To contact HTE LABS and discuss an application in the strictest confidentiality, navigate to CONTACT PAGE. |
PROCESS ORDERING INFORMATION |
Process parametter TIME is calculated using a deposition rate of 57nm/min as the worst case scenario. Actual deposition rate may vary. HTE Labs whenever feasible is tailoring each process to customer specification such that the end refractive index, thickness and film uniformity are within specified tolerance. |
STANDARD PROCESS PRICE LIST |
ORDERING: Registered customers can order online from within assigned BUSINESS PORTAL. A copy of the order along with an order confirmation receipt is issued instantly for all orders placed on line. On line Orders have to be verified, accepted and acknowledged by HTE LABS sales department in writing before, becoming non cancelable binding contracts. |
DELIVERY: Typical delivery for Standard processes is 2-4 working days ARO. For Custom processes lead time may vary. HTE Labs may supply on request substrate materials from its own inventory or from third party supplier. |
SHIPPING & PACKING: For certain processes, customer should ship only prime wafers, delivered in sealed containers [original manufacturer seal must be present]. All wafers shipped to HTE LABS by customers, should be packed in suitable wafer carriers or wafer containers, wrapped in reusable minim 2 layers of air buble packing material [pink anti-static bubble cushioning wrap], or air pillows and heavy wall cardboard boxes. Foam packing peanuts are not acceptable due to the nuisance caused by particles and electrostatic chage generated during shipping. |
SAMPLES: Due to the nature of this product line, free samples are not available, unless they are against an existing firm order, pending qualification of a process. |
HTE LABS guarantees continuous supply and availability of any of it's standard or custom developed processes and technologies provided minimum order quantities are met. |
HTE LABS has made every effort to have this information as accurate as possible. However, no responsibility is assumed by HTE LABS for its use, nor for any infringements of rights of third parties which may result from its use. HTE LABS reserves the right to revise the content or modify its product line without prior notice. HTE LABS processes and technologies are not authorized for and should not be used within support systems which are intended for surgical implants into the body, to support or sustain life, in aircraft, space equipment, submarine, or nuclear facility applications without HTE LABS specific written consent. |
Home>PVD REACTIVE SPUTTERING> | Last updated: September 04, 2009 |
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